CN202614185U - Combined type full-automatic image coordinate measuring machine - Google Patents

Combined type full-automatic image coordinate measuring machine Download PDF

Info

Publication number
CN202614185U
CN202614185U CN 201220228017 CN201220228017U CN202614185U CN 202614185 U CN202614185 U CN 202614185U CN 201220228017 CN201220228017 CN 201220228017 CN 201220228017 U CN201220228017 U CN 201220228017U CN 202614185 U CN202614185 U CN 202614185U
Authority
CN
China
Prior art keywords
mobile platform
axle
drive
measuring machine
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201220228017
Other languages
Chinese (zh)
Inventor
周满意
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dongguan City De Xin Optical Instrument Co Ltd
Original Assignee
Dongguan City De Xin Optical Instrument Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dongguan City De Xin Optical Instrument Co Ltd filed Critical Dongguan City De Xin Optical Instrument Co Ltd
Priority to CN 201220228017 priority Critical patent/CN202614185U/en
Application granted granted Critical
Publication of CN202614185U publication Critical patent/CN202614185U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The utility model discloses a combined type full-automatic image coordinate measuring machine, which comprises a base, a double-layer mobile platform and a detection device, wherein the base serves as a bearing seat of the whole measuring machine and is installed on a machine platform, a supporting arm is fixedly installed on the base, a sliding rail is fixed on the top end of the supporting arm, and a Z-axis mobile platform is movably installed on the sliding rail; the double-layer mobile platform includes an X-axis mobile platform movably installed on the base and a Y-axis mobile platform movably installed on the X-axis mobile platform, and a glass plate and a lower light source are installed on the Y-axis mobile platform; the detection device includes a CCD camera installed on the Z-axis mobile platform, a probe installed beside the CCD camera, a point laser scanning probe and an upper light source located at the tail end of the CCD camera; the X-, Y- and Z-axis mobile platforms cooperate to form a three-axis control system; and a computer system is additionally installed on the machine platform. The combined type full-automatic image coordinate measuring machine disclosed by the utility model has the advantages of sensitiveness and reliability, high movement precision, accurate positioning, high measurement precision and the like.

Description

Combined type full-automatic image coordinate measuring machine
Technical field:
The utility model relates to the measurement products technical field, refers in particular to a kind of accurate positioning, combined type full-automatic image coordinate measuring machine that measuring accuracy is high.
Background technology:
Image measurer has another name called accurate image-type surveying instrument, and it has overcome the deficiency of conventional projector, is that light harvesting, mechanical, electrical, computer image technology are in novel high-precision, the high-tech surveying instrument of one.By optical microscope object under test is carried out high magnification optics amplification imaging; After object image after process CCD camera system will be amplified is sent into computing machine; Can detect the profile of various complex parts and the microcosmic of surface configuration size, angle and position, particularly precision parts efficiently detects and quality control.Advantages such as image measurer possesses noncontact, enlargement ratio is high, measurement is able to programme, robotization, the application surface of image measurer is more and more wider, and the market acceptance level is increasingly high, for the product quality of enterprise has been made huge contribution.
Traditional image measurer is generally manual manipulation mode, and its location is inaccurate, measuring accuracy is low, has the risk that is eliminated at any time.
Along with the progress of society, the image measurer of robotization has appearred in science and technology development, the sniffer that this image measurer comprises a base, be movably installed in double-deck mobile platform on the base and be used to measure; Wherein double-deck mobile platform adopts cylinder to promote, thereby realizes X, Y direction motion, and the location of this move mode is not accurate enough, has reduced the measuring accuracy of image measurer.In addition, the light source on the sniffer adopts halogen light source, and its brightness is not high, has a strong impact on the measuring accuracy of image measurer.
The utility model content:
The purpose of the utility model is to overcome the deficiency of prior art, and a kind of accurate positioning, combined type full-automatic image coordinate measuring machine that measuring accuracy is high are provided.
In order to solve the problems of the technologies described above, the utility model has adopted following technical proposals: this combined type full-automatic image coordinate measuring machine, it comprises: a base, this base as the bearing seat of whole measuring machine to be installed on the board; Also be installed with a sway brace on the described base, be fixed with a slide rail, on slide rail, be movably installed with a Z axle mobile platform in the sway brace top; Pair of lamina mobile platform, this bilayer mobile platform comprise the X axle mobile platform that is movably installed on the said base and are movably installed in the y-axis shift moving platform on the X axle mobile platform; The following light source that one glass plate is installed on the described y-axis shift moving platform and is positioned at the glass plate below; One sniffer, this sniffer comprise the ccd video camera, the probe that is installed on the ccd video camera side that are installed on the Z axle mobile platform, the last light source of putting laser scanning testing head and being positioned at the ccd video camera end; Said X, Y, Z axle mobile platform cooperate the moulding three-axis control system; Described board also be equipped with one be used to control three-axis control system, video data computer system.
Furthermore, in the technique scheme, an X axle slide rail, drive unit and cover are installed on the described base are placed on the shell on the drive unit; This drive unit comprises two angular contact ball bearings that are fixedly installed on the base and is installed on two screw mandrel and CD-ROM drive motors that are used to drive screw mandrel between the angular contact ball bearing.
Furthermore, in the technique scheme, described X axle mobile platform falls on the X axle slide rail on the said base, and this X axle mobile platform side is equipped with a driving sliding block; Described screw mandrel passes this drive block and forms interference with this drive block.
Furthermore, in the technique scheme, a Y axle slide rail, drive unit and cover are installed on the described X axle mobile platform are placed on the shell on the drive unit; This drive unit comprises two angular contact ball bearings that are fixedly installed on the X axle mobile platform and is installed on two screw mandrel and CD-ROM drive motors that are used to drive screw mandrel between the angular contact ball bearing.
Furthermore, in the technique scheme, described y-axis shift moving platform falls on the Y axle slide rail of said X axle mobile platform, and this y-axis shift moving platform side is equipped with a driving sliding block; Described screw mandrel passes this drive block and forms interference with this drive block.
Furthermore, in the technique scheme, the described light source of going up comprises a plurality of led light sources that evenly are surrounded on said ccd video camera distal outer surface, and this led light source is installed down; Described light source down is made up of a plurality of equally distributed led light sources, and this led light source is installed up.
Furthermore; In the technique scheme; Also be provided with the drive unit that is used to drive Z axle mobile platform on the described slide rail; This drive unit outer cover is stamped a shell, and it comprises the angular contact ball bearing that is fixedly installed in the slide rail two ends and be installed on two screw mandrel and CD-ROM drive motors that are used to drive screw mandrel between the angular contact ball bearing, and the Z axle mobile platform and the screw mandrel that wherein are movably installed in slide rail form to interfere and move in the Z axle to drive described sniffer.
After adopting technique scheme, the utility model has following beneficial effect compared with prior art:
1, being used to drive drive unit that X, Y, Z axle mobile platform move in the utility model adopts CD-ROM drive motor, screw mandrel to fit in the contact bearing that is installed on the screw mandrel two ends is realized drive actions; Improve board rigidity and stability greatly and made X, Y, Z axle mobile platform move sensitive reliable, high, the accurate positioning of kinematic accuracy, improved the measuring accuracy of the utility model greatly.
2, the ccd video camera distal outer surface in the utility model is surrounded by a circle led light source; It cooperates the following light source that is made up of led light source to form powerful lighting system; When some special measured workpiece, different light effects capable of using with the characteristic that highlights measured workpiece to grasp size more accurately.In addition, probe points of engagement laser scanning testing head can be realized some parts that can't contact such as soft rubber are measured, and measuring accuracy is high.
3, the ccd video camera in the utility model adopts high-resolution color CCD, can form the high definition image effect, and high-quality picture is provided, so that improves the measuring accuracy of the utility model.
In addition, but put the also various RENISHAW gauge heads of changing-over of laser scanning testing head, realize three-dimensional measurement.
Description of drawings:
Fig. 1 is the front view of the utility model;
Fig. 2 is the schematic perspective view of the utility model inner structure;
Fig. 3 is the stereographic map of double-deck mobile platform in the utility model;
Description of reference numerals:
1 base, 10 boards, 11 sway braces, 12 slide rails
2 double-deck mobile platform 20 glass plate 21X axle mobile platforms 211 driving sliding block
Light source on 22Y axle mobile platform 221 driving sliding block 3 sniffers 31
34 laser scanning testing head 41 drive units of 32CCD video camera 33 probes
411 angular contact ball bearings, 412 angular contact ball bearings, 413 screw mandrels, 414 CD-ROM drive motors
42 drive units, 421 angular contact ball bearings, 422 angular contact ball bearings, 423 screw mandrels
424 CD-ROM drive motors, 43 drive units, 431 angular contact ball bearings, 432 angular contact ball bearings
433 screw mandrels, 424 CD-ROM drive motor 5Z axle mobile platforms, 6 computer systems
Embodiment:
Below in conjunction with specific embodiment and accompanying drawing the utility model is further specified.
See shown in Fig. 1-3; Combined type full-automatic image coordinate measuring machine, it comprises: a base 1, be movably installed in double-deck mobile platform 2, the Z axle mobile platform 5 on the base 1 and the sniffer 3 and that is used to measure is used to control the computer system 6 of three-axis control system, video data.
Particularly, described base 1 as the bearing seat of whole measuring machine to be installed on the board 10; Also be installed with a sway brace 11 on the described base 1, be fixed with a slide rail 12 in sway brace 11 tops; On slide rail 12, be movably installed with Z axle mobile platform 5.
Described double-deck mobile platform 2 comprises the X axle mobile platform 21 that is movably installed on the said base 1 and is movably installed in the y-axis shift moving platform 22 on the X axle mobile platform 21; The following light source that a glass plate 20 is installed and is positioned at glass plate 20 belows on the described y-axis shift moving platform 22.
An one X axle slide rail and a drive unit 41 are installed on the described base 1 and overlap and be placed on the shell on the drive unit 41; This drive unit 41 comprises the CD-ROM drive motor 414 that is fixedly installed in two angular contact ball bearings 411,412 on the base 1 and is installed on two angular contact ball bearings 411, the screw mandrel between 412 413 and is used to drive screw mandrel 413.Described X axle mobile platform 21 falls on the X axle slide rail of said base 1, and these X axle mobile platform 21 sides are equipped with a driving sliding block 211; Described screw mandrel 413 passes this drive block 211 and forms interference with this drive block 211.
Be equipped with on the described X axle mobile platform 21 a Y axle slide rail and a drive unit 42 and the cover be placed on the shell on the drive unit 42, this drive unit 42 comprises the CD-ROM drive motor 424 that is fixedly installed in two angular contact ball bearings 421,422 on the X axle mobile platform 21 and is installed on two angular contact ball bearings 421, the screw mandrel between 422 423 and is used to drive screw mandrel 423.Described y-axis shift moving platform 22 falls on the Y axle slide rail of said X axle mobile platform 21, and these y-axis shift moving platform 22 sides are equipped with a driving sliding block 221; Described screw mandrel 423 passes this drive block 221 and forms interference with this drive block 221.
Also be provided with the drive unit 43 that is used to drive Z axle mobile platform 5 on the described slide rail 12; These drive unit 43 outer cover are stamped a shell; It comprises angular contact ball bearing 431,432 that is fixedly installed in slide rail 12 two ends and the CD-ROM drive motor 434 that is installed on two angular contact ball bearings 431, the screw mandrel between 432 433 and is used to drive screw mandrel 433, and the Z axle mobile platform 5 that wherein is movably installed in slide rail 12 forms to interfere with screw mandrel 433 and moves in the Z axle to drive described sniffer 3.
Described sniffer 3 comprises the ccd video camera 32 that is installed on the Z axle mobile platform 5, the probe 33 that is installed on ccd video camera 32 sides, some laser scanning testing head 34 and the last light source 31 that is positioned at ccd video camera 32 ends; Described ccd video camera 32 adopts high-resolution color CCD can form the high definition image effect; High-quality picture is provided, so that improves the measuring accuracy of the utility model.In addition, some laser scanning testing head 34 also can change various RENISHAW gauge heads into, realizes three-dimensional measurement.
The described light source 31 of going up comprises a plurality of led light sources that evenly are surrounded on said ccd video camera 32 distal outer surface, and this led light source is installed down; Described light source down is made up of a plurality of equally distributed led light sources, and this led light source is installed up.The described light source 31 of going up cooperates with following light source and forms powerful lighting system, when facing some special measured workpiece, different light effects capable of using with the characteristic that highlights measured workpiece to grasp size more accurately.
When the utility model uses, connect computer; Open last light source 31 that is positioned at ccd video camera 32 ends and the following light source that is positioned at glass plate 20 belows.Through accessory drive 41 and drive unit 42, drive unit 43 to realize the motion of X axle mobile platform 21, y-axis shift moving platform 22 and Z axle mobile platform 5 respectively at X, Y, Z direction; Final realization relatively moves to sniffer 3, so that measured object is realized accurately measuring.In addition, the utility model is realized three-dimensional measurement through some laser scanning testing head 34.Because the drive unit that driving X, Y, Z axle mobile platform move adopts CD-ROM drive motor, screw mandrel to fit in the contact bearing that is installed on the screw mandrel two ends is realized drive actions; Board rigidity and stability have been improved greatly; Make X, Y, Z axle mobile platform move sensitive reliable, high, the accurate positioning of kinematic accuracy, improved the measuring accuracy of the utility model greatly.
Certainly; The above is merely the specific embodiment of the utility model; Be not to limit the utility model practical range, all equivalences of doing according to the said structure of the utility model claim, characteristic and principle change or modify, and all should be included in the utility model claim.

Claims (7)

1. combined type full-automatic image coordinate measuring machine is characterized in that: comprising:
One base (1), this base (1) as the bearing seat of whole measuring machine to be installed on the board (10); Also be installed with a sway brace (11) on the described base (1), be fixed with a slide rail (12) in sway brace (11) top; On slide rail (12), be movably installed with a Z axle mobile platform (5);
Pair of lamina mobile platform (2), this bilayer mobile platform (2) comprise the X axle mobile platform (21) that is movably installed on the said base (1) and are movably installed in the y-axis shift moving platform (22) on the X axle mobile platform (21); The following light source that one glass plate (20) is installed on the described y-axis shift moving platform (22) and is positioned at glass plate (20) below;
One sniffer (3), this sniffer (3) comprise the ccd video camera (32) that is installed on the Z axle mobile platform (5), the probe (33) that is installed on ccd video camera (32) side, some laser scanning testing head (34) and are positioned at the terminal last light source (31) of ccd video camera (32);
Said X, Y, Z axle mobile platform (21,22,5) cooperate the moulding three-axis control system; Described board (10) also be equipped with one be used to control three-axis control system, video data computer system (6).
2. combined type full-automatic image coordinate measuring machine according to claim 1; It is characterized in that: an X axle slide rail, drive unit (41) and cover are installed on the described base (1) are placed on the shell on the drive unit (41), this drive unit (41) comprises two angular contact ball bearings (411,412) that are fixedly installed on the base (1) and the CD-ROM drive motor (414) that is installed on the screw mandrel (413) between two angular contact ball bearings (411,412) and is used to drive screw mandrel (413).
3. combined type full-automatic image coordinate measuring machine according to claim 2; It is characterized in that: described X axle mobile platform (21) falls on the X axle slide rail on the said base (1), and this X axle mobile platform (21) side is equipped with a driving sliding block (211); Described screw mandrel (413) passes this drive block (211) and forms interference with this drive block (211).
4. combined type full-automatic image coordinate measuring machine according to claim 3; It is characterized in that: a Y axle slide rail, drive unit (42) and cover are installed on the described X axle mobile platform (21) are placed on the shell on the drive unit (42), this drive unit (42) comprises two angular contact ball bearings (421,422) that are fixedly installed on the X axle mobile platform (21) and the CD-ROM drive motor (424) that is installed on the screw mandrel (423) between two angular contact ball bearings (421,422) and is used to drive screw mandrel (423).
5. combined type full-automatic image coordinate measuring machine according to claim 4; It is characterized in that: described y-axis shift moving platform (22) falls on the Y axle slide rail of said X axle mobile platform (21), and this y-axis shift moving platform (22) side is equipped with a driving sliding block (221); Described screw mandrel (423) passes this drive block (221) and forms interference with this drive block (221).
6. combined type full-automatic image coordinate measuring machine according to claim 5 is characterized in that: the described light source (31) of going up comprises a plurality of led light sources that evenly are surrounded on said ccd video camera (32) distal outer surface, and this led light source is installed down; Described light source down is made up of a plurality of equally distributed led light sources, and this led light source is installed up.
7. combined type full-automatic image coordinate measuring machine according to claim 6; It is characterized in that: also be provided with the drive unit (43) that is used to drive Z axle mobile platform (5) on the described slide rail (12); This drive unit (43) outer cover is stamped a shell; It comprises angular contact ball bearing (431,432) that is fixedly installed in slide rail (12) two ends and the CD-ROM drive motor (434) that is installed on the screw mandrel (433) between two angular contact ball bearings (431,432) and is used to drive screw mandrel (433), and the Z axle mobile platform (5) that wherein is movably installed in slide rail (12) forms to interfere with screw mandrel (433) and moves in the Z axle to drive described sniffer (3).
CN 201220228017 2012-05-18 2012-05-18 Combined type full-automatic image coordinate measuring machine Expired - Fee Related CN202614185U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220228017 CN202614185U (en) 2012-05-18 2012-05-18 Combined type full-automatic image coordinate measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220228017 CN202614185U (en) 2012-05-18 2012-05-18 Combined type full-automatic image coordinate measuring machine

Publications (1)

Publication Number Publication Date
CN202614185U true CN202614185U (en) 2012-12-19

Family

ID=47347875

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201220228017 Expired - Fee Related CN202614185U (en) 2012-05-18 2012-05-18 Combined type full-automatic image coordinate measuring machine

Country Status (1)

Country Link
CN (1) CN202614185U (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104296656A (en) * 2014-09-30 2015-01-21 苏州天准精密技术有限公司 Device, apparatus and method for positioning measurement reference plane of measured object
CN104315979A (en) * 2014-11-19 2015-01-28 重庆理工大学 Three-dimensional scanner and three-dimensional scanning method
CN105675622A (en) * 2016-01-19 2016-06-15 汕头大学 Industrial control glass detection system
CN106595520A (en) * 2016-12-12 2017-04-26 东莞市鸿金顺机械制造有限公司 Intelligent 3D detection equipment
CN107044831A (en) * 2017-03-08 2017-08-15 杭州电子科技大学 The variable laser feeler device of measurement direction and its application method
CN107218888A (en) * 2017-04-28 2017-09-29 宁波韵升智能技术有限公司 A kind of sheet product size automatic checkout equipment
CN107537730A (en) * 2016-06-27 2018-01-05 上海辛野模具有限公司 A kind of full-automatic glue-dropping machine
CN108413874A (en) * 2018-05-16 2018-08-17 东莞市迪泰自动化设备有限公司 A kind of big stroke duplex measurement instrument of planer-type
CN108562242A (en) * 2018-04-23 2018-09-21 东莞市迪泰自动化设备有限公司 A kind of multigroup laser composite three-dimensional optical image measuring system
WO2019100182A1 (en) * 2017-11-21 2019-05-31 太仓市何氏电路板有限公司 Multifunctional image tester for aluminum-based circuit board
CN110044255A (en) * 2018-01-15 2019-07-23 浙江雄鹰科菲帝科技股份有限公司 A kind of measuring instrument
CN113375591A (en) * 2021-06-03 2021-09-10 昆山一麦自动化科技有限公司 Imaging device based on 3D scanning and correction method thereof

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104296656B (en) * 2014-09-30 2017-04-12 苏州天准科技股份有限公司 Device, apparatus and method for positioning measurement reference plane of measured object
CN104296656A (en) * 2014-09-30 2015-01-21 苏州天准精密技术有限公司 Device, apparatus and method for positioning measurement reference plane of measured object
CN104315979A (en) * 2014-11-19 2015-01-28 重庆理工大学 Three-dimensional scanner and three-dimensional scanning method
CN104315979B (en) * 2014-11-19 2017-01-25 重庆理工大学 Three-dimensional scanner and three-dimensional scanning method
CN105675622B (en) * 2016-01-19 2019-03-19 汕头大学 A kind of industry control glass inspection systems
CN105675622A (en) * 2016-01-19 2016-06-15 汕头大学 Industrial control glass detection system
CN107537730A (en) * 2016-06-27 2018-01-05 上海辛野模具有限公司 A kind of full-automatic glue-dropping machine
CN106595520A (en) * 2016-12-12 2017-04-26 东莞市鸿金顺机械制造有限公司 Intelligent 3D detection equipment
CN107044831A (en) * 2017-03-08 2017-08-15 杭州电子科技大学 The variable laser feeler device of measurement direction and its application method
CN107044831B (en) * 2017-03-08 2018-03-23 杭州电子科技大学 The variable laser feeler device of measurement direction and its application method
CN107218888A (en) * 2017-04-28 2017-09-29 宁波韵升智能技术有限公司 A kind of sheet product size automatic checkout equipment
WO2019100182A1 (en) * 2017-11-21 2019-05-31 太仓市何氏电路板有限公司 Multifunctional image tester for aluminum-based circuit board
CN110044255A (en) * 2018-01-15 2019-07-23 浙江雄鹰科菲帝科技股份有限公司 A kind of measuring instrument
CN108562242A (en) * 2018-04-23 2018-09-21 东莞市迪泰自动化设备有限公司 A kind of multigroup laser composite three-dimensional optical image measuring system
CN108413874A (en) * 2018-05-16 2018-08-17 东莞市迪泰自动化设备有限公司 A kind of big stroke duplex measurement instrument of planer-type
CN108413874B (en) * 2018-05-16 2024-01-12 东莞市迪泰自动化设备有限公司 Gantry type large-stroke composite measuring instrument
CN113375591A (en) * 2021-06-03 2021-09-10 昆山一麦自动化科技有限公司 Imaging device based on 3D scanning and correction method thereof

Similar Documents

Publication Publication Date Title
CN202614185U (en) Combined type full-automatic image coordinate measuring machine
CN202614183U (en) Combined gantry type full-automatic image coordinate measuring machine
CN107883884B (en) A kind of optical measuring device and method
CN202648618U (en) Manual operated measuring instrument
CN105157606B (en) Contactless complicated optical surface profile high precision three-dimensional measurement method and measurement apparatus
CN105241399B (en) A kind of measuring method of precisely locating platform dynamic flatness
CN203518947U (en) Optical measurement equipment
CN202614184U (en) Ultrahigh-precision full-automatic image coordinate measuring machine
CN108871207B (en) Photogrammetry reference ruler length calibration device and use method
CN109520420A (en) A kind of space coordinate at rotation of rotary table center determines method
CN207263130U (en) A kind of one-touch 3D profile measurements equipment
CN106289086B (en) A kind of double camera measurement method for apart from Accurate Calibration between optical indicia point
TW201803706A (en) Robot correction system and method thereof
CN102602425B (en) Locomotive limiting system and calibration method thereof
CN202614186U (en) Quick and convenient full-automatic image coordinate measuring machine
CN104515487A (en) Two-in-one full-automatic three-Z-axis measuring instrument
CN107883866B (en) A kind of optical measuring device and method
CN109239087B (en) Image detection platform
CN113976471B (en) Glue amount detection marking device and method based on 3D line confocal sensor
CN103197500B (en) A kind of method measuring mirror surface shape compensation effect
CN103822580B (en) The multiple spot real-time measurement system of extra-long frame deformation and attitude and method
CN110986792B (en) High-precision detection device and detection method for one-dimensional ball or cone nest array
CN202648617U (en) Combined-type manual image coordinate measuring machine
CN106323191A (en) Device for detecting cylindrical mirror absolute surface by using conjugate difference method
CN105066897A (en) Thin substrate deformation measuring method eliminating influence of gravity

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20121219

Termination date: 20190518