CN202585370U - Novel system for automatically loading and unloading silicon wafers - Google Patents
Novel system for automatically loading and unloading silicon wafers Download PDFInfo
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- CN202585370U CN202585370U CN 201120558145 CN201120558145U CN202585370U CN 202585370 U CN202585370 U CN 202585370U CN 201120558145 CN201120558145 CN 201120558145 CN 201120558145 U CN201120558145 U CN 201120558145U CN 202585370 U CN202585370 U CN 202585370U
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- silicon chip
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- silicon wafers
- graphite boat
- manipulator
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Abstract
The utility model discloses a novel system for automatically loading and unloading silicon wafers, which comprises a gaily decorated basket and a graphite boat both for loading silicon wafers, a steering mechanism cart for fixing the graphite boat, a manipulator for picking up silicon wafers, a lifting mechanism for controlling the movement of the manipulator, and a PLC controller for positioning the lifting mechanism. The lifting mechanism and the manipulator are respectively connected with the PLC controller. Due to the adoption of the novel system, the graphite boat is fixed by the steering mechanism cart and is operated to perform a rotation movement in both the vertical direction and the horizontal direction. Under the control of the PLC controller, the lifting mechanism is accurately positioned, and the manipulator is driven by the lifting mechanism to pick up silicon wafers, load and unload silicon wafers in the graphite boat sequentially. The novel system is good in stability and convenient to use, which reduces the fragmentation rate and the pollution degree of the surfaces of silicon wafers. The manipulator can be started to load and unload silicon wafers upon the completion of the film coating process, without the need of cooling the silicon wafers. Thus, the novel system enables the efficient, precise and automatic loading and unloading of silicon wafers and meets the requirements of users.
Description
Technical field
The utility model relates to automation field, relates in particular to a kind of new type auto loading and unloading silicon chip system.
Background technology
PECVD (Plasma Enhanced Chemical Vapor Deposition) plasma enhanced chemical vapor phase deposition is to utilize low temperature plasma to do energy source; Silicon chip places on the negative electrode of glow discharge under the low pressure; Utilize glow discharge (or adding heater in addition) to make silicon chip be warmed up to predetermined temperature; Feed an amount of reacting gas then, gas forms solid film through a series of chemistry and plasma reaction on silicon chip.
In direct-type PECVD equipment, graphite boat is as the silicon chip carrier electrode, and silicon chip must be placed on and carry out coating process on the graphite boat.Currently, the main use of artificial or conventional automatic loading and unloading device in order to achieve silicon wafer handling, where there is often a manual handling wafers proficiency enough? Poor control and other issues, likely to cause labor costs increased fragmentation rate is higher, surface contamination is more serious, while the traditional silicon device structure is complex automatic loading and unloading, loading and unloading wafers complicated steps, high cost, low loading capacity can not meet the requirements of industrial mass production.
The utility model content
The utility model technical problem to be solved is, a kind of simple in structure, easy to use, cost is low new type auto loading and unloading silicon chip system is provided, and can realize the automatics of silicon chip effectively, reduces the fragment rate of loading and unloading, improves production capacity.
In order to solve the problems of the technologies described above; The utility model provides a kind of new type auto loading and unloading silicon chip system, comprising: but be used to load silicon chip the gaily decorated basket and graphite boat, be used for fixing said graphite boat steering mechanism's go-cart, be used to extract silicon chip manipulator, be used to control said robot movement elevating mechanism, be used to locate the PLC controller of said elevating mechanism; Said elevating mechanism links to each other respectively with said manipulator and PLC controller.
As the improvement of such scheme, but the go-cart in the vertical direction upset swing of said steering mechanism.
As the improvement of such scheme, but upset or the upset counterclockwise clockwise of said steering mechanism go-cart in the vertical direction; But the angle of said steering mechanism go-cart in the vertical direction upset is 0 ° ~ 90 °.
As the improvement of such scheme, but the go-cart of said steering mechanism is rotated in the horizontal direction.
As the improvement of such scheme, but the go-cart of said steering mechanism turns clockwise in the horizontal direction or is rotated counterclockwise; But the angle that the go-cart of said steering mechanism is rotated in the horizontal direction is 0 ° ~ 360 °.
As the improvement of such scheme, the said gaily decorated basket is provided with inflatable body.
As the improvement of such scheme, said PLC controller comprises: be used to control said elevating mechanism and produce the X axle positioning unit that moves in the X-axis direction; Be used to control said elevating mechanism and produce the Y axle positioning unit that moves along Y direction; Be used to control said elevating mechanism and produce the Z axle positioning unit that moves along Z-direction.
The beneficial effect of implementing the utility model is: adopt the alternative artificial loading and unloading of new type auto loading and unloading silicon chip system or traditional automatic loading and unloading silicon chip devices, reduced fragment rate and silicon chip surface dustiness.But utilize fixedly graphite boat of steering mechanism's go-cart, and graphite boat is rotatablely moved on vertical direction and horizontal direction.Elevating mechanism is realized accurately location and drive manipulator extraction silicon chip under the control of PLC controller, silicon chip is loaded and unloaded in the graphite boat in regular turn.Stable good, easy to use,, coating process need not to wait for the silicon chip cooling after accomplishing, can start manipulator loading and unloading silicon chip, realized efficient, accurate, the automatic loading and unloading of silicon chip.
Description of drawings
Fig. 1 is the structural representation of a kind of new type auto loading and unloading silicon chip of the utility model system;
Fig. 2 is another structural representation of a kind of new type auto loading and unloading silicon chip of the utility model system.
Embodiment
For the purpose, technical scheme and the advantage that make the utility model is clearer, will combine accompanying drawing that the utility model is done to describe in detail further below.
Fig. 1 is the structural representation of a kind of new type auto loading and unloading silicon chip of the utility model system, comprising:
Be used to load the gaily decorated basket 1 of silicon chip.Preferably, it is raw material that the gaily decorated basket 1 adopts Kynoar, polytetrafluoroethylene, have high temperature resistant, high rigidity, not yielding, do not pollute cleaning fluid, do not scratch the characteristics of silicon chip when loading silicon chip.
Be used to load the graphite boat 2 of silicon chip.In direct-type PECVD equipment, graphite boat 2 is as the silicon chip carrier electrode, and silicon chip must be placed on and carry out coating process on the graphite boat 2.
But be used for fixing steering mechanism's go-cart 3 of said graphite boat 2.In the course of work, but graphite boat 2 be fixed in steering mechanism's go-cart 3, but make graphite boat 2 and steering mechanism's go-cart 3 form an integral body, but graphite boat 2 produces under the control of steering mechanism's go-cart 3 and rotates the loading and unloading that make things convenient for silicon chip with the angle of adjusting graphite boat 2.
Be used to extract the manipulator 4 of silicon chip, manipulator 4 has replaced the conventional plastic sucker, has realized silicon chip in the transmission of the gaily decorated basket 1 between graphite boat 2, adopts manipulator 4 to need not to wait for that the silicon chip cooling can realize loading and unloading, has saved great amount of time.Preferably, it is that 99% aluminium oxide ceramics is processed that manipulator 4 is selected purity for use, has high temperature resistant, corrosion-resistant, wear-resistant, high voltage bearing characteristic.
Link to each other with said manipulator 4, be used to control the elevating mechanism 5 of said manipulator 4 motions.
Link to each other with said elevating mechanism 5, be used to locate the PLC controller 6 of said elevating mechanism 5.
Need to prove, utilize PLC controller 6 accurately elevating mechanism 5 to be realized the location, replaced traditional single instrction control system.In addition, owing to manipulator 4 and elevating mechanism 5, the directly action of control manipulator 4 in the elevating mechanism 5 of location makes the running of manipulator 4 quick more, accurate.
Preferably, PLC controller 6 can be controlled 6 manipulators 4 simultaneously and carry out the silicon chip loading and unloading, has increased production capacity efficient widely.
During work, but the fixing graphite boat 2 of steering mechanism's go-cart 3.Elevating mechanism 5 is realized accurately the location and drives manipulator 4 extracting silicon chips under the control of PLC controller 6, with silicon chip in regular turn by being transferred in the graphite boat 2 in the gaily decorated basket 1, or with silicon chip in regular turn by being transferred in the gaily decorated basket 1 in the graphite boat 2.
More preferably, the swing but said steering mechanism go-cart 3 in the vertical directions overturn.
Preferably, but clockwise upset or the upset counterclockwise of said steering mechanism go-cart 3 in the vertical directions; But the angle of said steering mechanism go-cart 3 in the vertical directions upset is 0 ° ~ 90 °.
Need to prove, but graphite boat 2 be fixed in steering mechanism's go-cart 3, but when upset took place for steering mechanism's go-cart 3, graphite boat 2 also can produce consistent flip angle.
More preferably, but said steering mechanism go-cart 3 rotate in the horizontal direction.
Preferably, but said steering mechanism go-cart 3 turn clockwise in the horizontal direction or be rotated counterclockwise; But the angle that said steering mechanism go-cart 3 is rotated in the horizontal direction is 0 ° ~ 360 °.
Need to prove, but graphite boat 2 be fixed in steering mechanism's go-cart 3, but when steering mechanism's go-cart 3 rotated, graphite boat 2 also can produce the consistent anglec of rotation.
More preferably, the said gaily decorated basket 1 is provided with inflatable body.In the gaily decorated basket 1, extracting in the process of silicon chip, inflatable body blows afloat silicon chip effectively, has made things convenient for manipulator 4 to draw silicon chip widely.
In the graphite boat 2 during the dress silicon chip, but graphite boat 2 be fixed in steering mechanism's go-cart 3, but through upset steering mechanism go-cart 3, with 90 ° of the upsets downwards counterclockwise of graphite boat 2 in the vertical directions.Inflatable body blows afloat the silicon chip in the gaily decorated basket 1, and elevating mechanism 5 drive manipulator 4 under the accurate location of PLC controller 6 is drawn silicon chip, and silicon chip is from top to bottom placed in the graphite boat 2 successively exactly.After treating that lower floor's graphite boat 2 is placed completion; But rotation steering mechanism go-cart 3; With 90 ° of upsets in the graphite boat 2 in the vertical direction clockwise directions, the clockwise direction right rotation is 180 ° on the water direction, and in the vertical direction overturns 90 ° downwards counterclockwise to continue to realize putting of graphite boat 2 upper strata silicon chips.
When in graphite boat 2, extracting silicon chip, but graphite boat 2 be fixed in steering mechanism's go-cart 3, but through upset steering mechanism go-cart 3, with 90 ° of the upsets downwards counterclockwise of graphite boat 2 in the vertical directions.Elevating mechanism 5 drive manipulator 4 under the accurate location of PLC controller 6 is drawn silicon chip in graphite boat 2, and silicon chip is placed in the gaily decorated basket 1 successively exactly.After treating that lower floor's graphite boat 2 is got the sheet completion; But rotation steering mechanism go-cart 3; With 90 ° of upsets in the graphite boat 2 in the vertical direction clockwise directions, the clockwise direction right rotation is 180 ° on the water direction, in the vertical direction 90 ° of extractions that realize graphite boat 2 upper strata silicon chips with continuation of upset downwards counterclockwise.
Fig. 2 is another structural representation of a kind of new type auto loading and unloading silicon chip of the utility model system, and said PLC controller 6 comprises:
Be used to control said elevating mechanism 5 and produce the X axle positioning unit 61 that moves in the X-axis direction.
Be used to control said elevating mechanism 5 and produce the Y axle positioning unit 62 that moves along Y direction.
Be used to control said elevating mechanism 5 and produce the Z axle positioning unit 63 that moves along Z-direction.
Need to prove that said X axle positioning unit 61, Y axle positioning unit 62 and Z axle positioning unit 63 are separate, be independent of each other, the motion in different directions of independent control elevating mechanism 5.
By on can know, but utilize fixedly graphite boat 2 of steering mechanism's go-cart 3, and graphite boat 2 is rotatablely moved on vertical direction and horizontal direction, the loading and unloading that greatly facilitate manipulator 3 are moved.Elevating mechanism 5 is loaded and unloaded on silicon chip in the graphite boat 2 realizing the accurate location on X axle, Y axle and the Z axle under the control of PLC controller 6 and drive manipulator 4 to extract silicon chip in regular turn.Stable good, easy to use,, coating process need not to wait for the silicon chip cooling after accomplishing, can start manipulator 4 loading and unloading silicon chips, realized efficient, accurate, the automatic loading and unloading of silicon chip.
The above is the preferred implementation of the utility model; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention; Can also make some improvement and retouching, these improvement and retouching also are regarded as the protection range of the utility model.
Claims (7)
1. new type auto loading and unloading silicon chip system; It is characterized in that, comprising: but be used to load silicon chip the gaily decorated basket and graphite boat, be used for fixing said graphite boat steering mechanism's go-cart, be used to extract silicon chip manipulator, be used to control said robot movement elevating mechanism, be used to locate the PLC controller of said elevating mechanism;
Said elevating mechanism links to each other respectively with said manipulator and PLC controller.
2. new type auto loading and unloading silicon chip as claimed in claim 1 system is characterized in that, but the go-cart in the vertical direction upset swing of said steering mechanism.
3. new type auto loading and unloading silicon chip as claimed in claim 2 system is characterized in that,
But said steering mechanism go-cart in the vertical direction is upset or upset counterclockwise clockwise;
But the angle of said steering mechanism go-cart in the vertical direction upset is 0 ° ~ 90 °.
4. new type auto loading and unloading silicon chip as claimed in claim 1 system it is characterized in that, but the go-cart of said steering mechanism is rotated in the horizontal direction.
5. new type auto loading and unloading silicon chip as claimed in claim 4 system is characterized in that,
But the go-cart of said steering mechanism turns clockwise in the horizontal direction or is rotated counterclockwise;
But the angle that the go-cart of said steering mechanism is rotated in the horizontal direction is 0 ° ~ 360 °.
6. new type auto loading and unloading silicon chip as claimed in claim 1 system is characterized in that the said gaily decorated basket is provided with inflatable body.
7. new type auto loading and unloading silicon chip as claimed in claim 1 system is characterized in that said PLC controller comprises:
Be used to control said elevating mechanism and produce the X axle positioning unit that moves in the X-axis direction;
Be used to control said elevating mechanism and produce the Y axle positioning unit that moves along Y direction;
Be used to control said elevating mechanism and produce the Z axle positioning unit that moves along Z-direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120558145 CN202585370U (en) | 2011-12-28 | 2011-12-28 | Novel system for automatically loading and unloading silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120558145 CN202585370U (en) | 2011-12-28 | 2011-12-28 | Novel system for automatically loading and unloading silicon wafers |
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| Publication Number | Publication Date |
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| CN202585370U true CN202585370U (en) | 2012-12-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201120558145 Expired - Lifetime CN202585370U (en) | 2011-12-28 | 2011-12-28 | Novel system for automatically loading and unloading silicon wafers |
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| CN (1) | CN202585370U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103035555A (en) * | 2012-12-27 | 2013-04-10 | 无锡先导自动化设备股份有限公司 | Silicon wafer automatic feeding and discharging device for plasma enhanced chemical vapor deposition (PECVD) device |
-
2011
- 2011-12-28 CN CN 201120558145 patent/CN202585370U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103035555A (en) * | 2012-12-27 | 2013-04-10 | 无锡先导自动化设备股份有限公司 | Silicon wafer automatic feeding and discharging device for plasma enhanced chemical vapor deposition (PECVD) device |
| CN103035555B (en) * | 2012-12-27 | 2015-07-22 | 无锡先导自动化设备股份有限公司 | Silicon wafer automatic feeding and discharging device for plasma enhanced chemical vapor deposition (PECVD) device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No. 69, C District, Sanshui Industrial Park, Sanshui, Foshan, Guangdong Patentee after: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: No. 69, C District, Sanshui Industrial Park, Sanshui, Foshan, Guangdong Patentee before: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180212 Address after: No. 69, C District, Sanshui Industrial Park, Sanshui, Foshan, Guangdong Co-patentee after: ZHEJIANG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. Patentee after: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: No. 69, C District, Sanshui Industrial Park, Sanshui, Foshan, Guangdong Patentee before: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121205 |
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| CX01 | Expiry of patent term |