CN202576648U - Ingot furnace for preparing low-carbon and low-oxygen silicon ingot - Google Patents

Ingot furnace for preparing low-carbon and low-oxygen silicon ingot Download PDF

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Publication number
CN202576648U
CN202576648U CN 201220263982 CN201220263982U CN202576648U CN 202576648 U CN202576648 U CN 202576648U CN 201220263982 CN201220263982 CN 201220263982 CN 201220263982 U CN201220263982 U CN 201220263982U CN 202576648 U CN202576648 U CN 202576648U
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CN
China
Prior art keywords
cover plate
quartz crucible
ingot
heater
carbon
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201220263982
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Chinese (zh)
Inventor
罗大伟
王临水
路忠林
林洪峰
张凤鸣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Baoding Tianwei Group Co Ltd
Tianwei New Energy Holdings Co Ltd
Original Assignee
Baoding Tianwei Group Co Ltd
Tianwei New Energy Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN 201220263982 priority Critical patent/CN202576648U/en
Application granted granted Critical
Publication of CN202576648U publication Critical patent/CN202576648U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses an ingot furnace for preparing a low-carbon and low-oxygen silicon ingot. The ingot furnace comprises a furnace body, a heat-insulating cage arranged in the furnace body, a heater arranged in the heat-insulating cage and a quartz crucible, wherein the upper end of the quartz crucible is provided with an opening; the heater is arranged above the quartz crucible; and a cover plate is arranged between the heater and the quartz crucible. The furnace body is connected with a graphite sleeve which passes through the furnace body, the heat-insulating cage and the cover plate; the lower end of the graphite sleeve is provided with an opening and is located between the cover plate and the quartz crucible; a central perforated hole which passes through upper and lower end faces is formed at the central part of the cover plate; the central perforated hole is matched with the graphite sleeve in size and shape; the graphite sleeve passes through the central perforated hole; and a plurality of air vents which pass through the upper and lower end faces are formed on the cover plate. With the adoption of the structure provided by the utility model, the whole structure is simple and is convenient to realize; and when the ingot furnace is applied, a vortex can be prevented form being generated above smelt silicon, so that the content of carbon and oxygen in the ingot is reduced.

Description

Be used to prepare the ingot furnace of low-carbon (LC) hypoxemia silicon ingot
Technical field
The utility model relates to the photovoltaic field, specifically is the ingot furnace that is used to prepare low-carbon (LC) hypoxemia silicon ingot.
Background technology
People usually obtain crystalline orientation unanimity, the thick casting polycrystalline silicon of crystal grain through in ingot furnace, carrying out directional freeze; Because well heater, heat-insulation cage and the backplate of ingot furnace all mainly adopt carbon material to process in the ingot casting process; At high temperature the parts processed of these carbon materials can produce carbon monoxide and silicon monoxide with quartz crucible generation chemical reaction; Melt silicon also can produce silicon monoxide gas with the quartz crucible reaction simultaneously; Carbon monoxide and silicon monoxide gas can interact with melt silicon, and very easily by in absorption of melt silicon and the entering melt silicon, and then cause silicon ingot to contain higher carbon and oxygen impurities.Because casting ingot process has experienced from high temperature to cryogenic heat treatment process; If oxygen concn is crossed the higher position and is formed hot alms giver or oxygen precipitation easily in the melt silicon; Become the deathnium or introduce the secondary defect in deathnium; Cause minority carrier lifetime reduction in the silicon materials, directly have influence on the photoelectric transformation efficiency of solar cell.The carbon impurity formation core that can be used as oxygen precipitation produces primary oxygen precipitation in addition, and the carbon of high density forms silicon-carbide particle in melt silicon, influence the effective rate of utilization of silicon ingot.
Present ingot furnace is when producing polycrystalline silicon ingot casting; For carbon impurity or other impurity of the graphite heater that prevents to be arranged in the quartz crucible top are fallen into quartz crucible; Cause carbon foreign matter content and other foreign matter contents of the polycrystal silicon ingot for preparing higher; And prevent the erosion of liquid surface evaporation gas to well heater, so prior art generally adopts cover plate that the oral area that several backplates are spliced into is covered.In order to reduce carbon monoxide and the silicon monoxide institute body that gets in the melt silicon, the zone introducing rare gas element between above under and the melt silicon shields.Yet; Existing ingot furnace is after being provided with cover plate and introducing rare gas element; Gas is prone to produce eddy current above melt silicon; The existence of eddy current then can cause carbon monoxide and silicon monoxide to rest on quartz crucible inside for a long time, and carbon and oxygen are adsorbed or dissolve in the liquid silicon, thereby causes carbon and the oxygen level of processing silicon ingot high.
The utility model content
The purpose of the utility model is to overcome the deficiency of prior art, provides a kind of and can improve gas flow in the ingot furnace, thereby avoided melt silicon top to produce the ingot furnace that is used to prepare low-carbon (LC) hypoxemia silicon ingot of eddy current.
The purpose of the utility model mainly realizes through following technical scheme: the ingot furnace that is used to prepare low-carbon (LC) hypoxemia silicon ingot; Comprise body of heater, be arranged on the intravital heat-insulation cage of stove and be arranged on well heater and the quartz crucible in the heat-insulation cage; Said quartz crucible open upper end; Well heater is arranged on the quartz crucible top, is provided with cover plate between well heater and the quartz crucible, and body of heater is connected with the graphite sleeve that passes body of heater, heat-insulation cage and cover plate; The lower ending opening of said graphite sleeve is between cover plate and quartz crucible; The central part of said cover plate is provided with the central hole that runs through its upper and lower end face, central hole and graphite sleeve size shape coupling, and said graphite sleeve passes this central hole; Said cover plate is provided with a plurality of breather holes that run through its upper and lower end face.
Said cover plate constitutes the square shape, and the central zone of said cover plate upper surface constitutes a square zone, and the open upper end of said a plurality of breather holes is positioned at outside the square zone of cover plate upper surface, and the upper and lower opening of a plurality of breather holes all is symmetrically distributed on the cover board.Wherein, the upper and lower opening of a plurality of breather holes all is symmetrically distributed on the cover board, and promptly a plurality of breather hole uniform distribution on the cover board.The breather hole that a plurality of breather hole uniform distribution on the cover board are specially the relative both sides of cover plate is symmetrically distributed.
The square region area of said cover plate upper surface is 1/2 of a cover plate upper surface area.To keep certain distance around the utility model cover plate central hole breather hole is not set, its objective is to guarantee that shielding gas can be full of the top of whole melt silicon.
Compared with prior art; The utlity model has following beneficial effect: the cover plate of (1) the utility model is provided with a plurality of breather holes that run through its upper and lower end face; The utility model interaction energy through breather hole when using improves gas flow in the ingot furnace effectively, has avoided the formation of melt silicon top eddy current, can obnoxious flavour be discharged quartz crucible rapidly; Reduce the time that the carbon containing oxygen-containing gas contacts with silicon melt, thereby reduced the content of carbon and oxygen in the ingot casting.
(2) the utility model is through on the cover board being provided with breather hole, and the heat of being convenient to well heater is disposed in the quartz crucible, and this has just increased heating efficiency, so shortens the time of silicon material fusing, cuts down the consumption of energy.
(3) cover plate of the utility model is the improvement of carrying out on the cover plate of existing Hu ingot furnace, need not increase equipment, and the technology cost is lower, and production capacity is bigger, has extraordinary industrial prospect.
Description of drawings
Fig. 1 is the structural representation of the utility model embodiment;
Fig. 2 is the structural representation of the utility model embodiment cover plate.
The pairing name of Reference numeral is called in the accompanying drawing: 1, body of heater, 2, heat-insulation cage, 3, well heater, 4, graphite sleeve, 5, cover plate, 6, the graphite backplate, 7, quartz crucible, 8, melt silicon, 9, heat insulation bottom board, 10, pillar, 11, breather hole.
Embodiment
Below in conjunction with embodiment and accompanying drawing the utility model is done further to specify, but the embodiment of the utility model is not limited thereto.
Embodiment:
As shown in Figure 1; Be used to prepare the ingot furnace of low-carbon (LC) hypoxemia silicon ingot, comprise body of heater 1, heat-insulation cage 2, well heater 3 and quartz crucible 7, wherein; Heat-insulation cage 2 is arranged in the body of heater 1; Well heater 3 all is arranged in the heat-insulation cage 2 with quartz crucible 7, quartz crucible 7 open upper end, and well heater 3 is arranged on quartz crucible 7 tops.When the preparation silicon ingot, the melt silicon 8 that silicon raw material and fusing thereof produce is positioned at quartz crucible 7.The bottom of quartz crucible 7 is connected with heat insulation bottom board 9; Its sidewall is connected with graphite backplate 6, because quartz crucible 7 whens filling with substance, the piling height of silicon raw material can be higher than the flat oral thermometer face of quartz crucible 7; In order not influence charging technology, the height of graphite backplate 6 is higher than the height of quartz crucible 7.Quartz crucible 7 is supported by the pillar 10 that passes heat-insulation cage 2 and be connected with body of heater 1 inwall.Be provided with cover plate 5 between well heater 3 and the quartz crucible 7, the material of cover plate 5 is available single carbon-carbon composite, but also multilayer composite sheet is processed, and cover plate 5 covers the oral area of the graphite backplate 6 of splicing.
Body of heater 1 is connected with the graphite sleeve 4 that passes body of heater 1, heat-insulation cage 2 and cover plate 5, and the lower ending opening of graphite sleeve 4 is between cover plate 5 and quartz crucible 7, and the open upper end of graphite sleeve 4 is positioned at body of heater 1 outer and external rare gas element input unit.Be connected with cover plate 5 for the ease of graphite sleeve 4, the central part of cover plate 5 is provided with the central hole that runs through its upper and lower end face, central hole and graphite sleeve 4 size shape coupling, and graphite sleeve 4 passes this central hole.Cover plate 5 is provided with a plurality of breather holes 11 that run through its upper and lower end face, and breather hole 11 can adopt several big perforates or a plurality of little perforate, and as preferably, breather hole 11 adopts a plurality of little manholes in the present embodiment.Cover plate 5 constitutes the square shapes, and the central zone of cover plate 5 upper surfaces constitutes a square zone, and as preferably, the square region area of cover plate 5 upper surfaces is 1/2 of cover plate 5 upper surface areas.The open upper end of a plurality of breather holes 11 is positioned at outside the square zone of cover plate 5 upper surfaces, and the upper and lower opening of a plurality of breather holes 11 all is symmetrically distributed on the cover plate 5.
As stated, then can well realize the utility model.

Claims (3)

1. be used to prepare the ingot furnace of low-carbon (LC) hypoxemia silicon ingot; Comprise body of heater (1), be arranged on the heat-insulation cage (2) in the body of heater (1) and be arranged on well heater (3) and the quartz crucible (7) in the heat-insulation cage (2); Said quartz crucible (7) open upper end; Well heater (3) is arranged on quartz crucible (7) top, is provided with cover plate (5) between well heater (3) and the quartz crucible (7), and body of heater (1) is connected with the graphite sleeve (4) that passes body of heater (1), heat-insulation cage (2) and cover plate (5); The lower ending opening of said graphite sleeve (4) is positioned between cover plate (5) and the quartz crucible (7); It is characterized in that: the central part of said cover plate (5) is provided with the central hole that runs through its upper and lower end face, central hole and graphite sleeve (4) size shape coupling, and said graphite sleeve (4) passes this central hole; Said cover plate (5) is provided with a plurality of breather holes (11) that run through its upper and lower end face.
2. the ingot furnace that is used to prepare low-carbon (LC) hypoxemia silicon ingot according to claim 1; It is characterized in that: said cover plate (5) constitutes the square shape; The central zone of said cover plate (5) upper surface constitutes a square zone; The open upper end of said a plurality of breather hole (11) is positioned at outside the square zone of cover plate (5) upper surface, and the upper and lower opening of a plurality of breather holes (11) all is symmetrically distributed on the cover plate (5).
3. the ingot furnace that is used to prepare low-carbon (LC) hypoxemia silicon ingot according to claim 2 is characterized in that: the square region area of said cover plate (5) upper surface is 1/2 of cover plate (a 5) upper surface area.
CN 201220263982 2012-06-06 2012-06-06 Ingot furnace for preparing low-carbon and low-oxygen silicon ingot Expired - Fee Related CN202576648U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220263982 CN202576648U (en) 2012-06-06 2012-06-06 Ingot furnace for preparing low-carbon and low-oxygen silicon ingot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220263982 CN202576648U (en) 2012-06-06 2012-06-06 Ingot furnace for preparing low-carbon and low-oxygen silicon ingot

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CN202576648U true CN202576648U (en) 2012-12-05

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111377754A (en) * 2018-12-29 2020-07-07 洛阳阿特斯光伏科技有限公司 Composite carbon cover plate for ingot furnace, and preparation method and application thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111377754A (en) * 2018-12-29 2020-07-07 洛阳阿特斯光伏科技有限公司 Composite carbon cover plate for ingot furnace, and preparation method and application thereof
CN111377754B (en) * 2018-12-29 2022-05-03 洛阳阿特斯光伏科技有限公司 Composite carbon cover plate for ingot furnace, and preparation method and application thereof

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20121205

Termination date: 20170606

CF01 Termination of patent right due to non-payment of annual fee