CN202548308U - Triaxial magnetic sensor - Google Patents
Triaxial magnetic sensor Download PDFInfo
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- CN202548308U CN202548308U CN2012201746167U CN201220174616U CN202548308U CN 202548308 U CN202548308 U CN 202548308U CN 2012201746167 U CN2012201746167 U CN 2012201746167U CN 201220174616 U CN201220174616 U CN 201220174616U CN 202548308 U CN202548308 U CN 202548308U
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- magnetic
- slope
- sensor
- magnetic sensor
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Abstract
The utility model relates to a triaxial magnetic sensor comprising a substrate layer. The substrate layer is respectively provided with a first slope and a second slope along directions of an X axis and a Y axis, and the first slope and the second slope are respectively provided with a first sensor unit and a second sensor unit along inclined directions of the slopes. The first sensor unit and the second sensor unit are used for respectively sensing magnetic signals in a horizontal direction and a vertical direction and outputting detection values, so that the detection on the magnetic signals in threes directions, namely the X axis, the Y axis and a Z axis is completed. The triaxial magnetic sensor disclosed by the utility model has the advantages of simple structure and lower cost.
Description
Technical field
The utility model relates to a kind of magnetic sensor, especially, and a kind of magnetic sensor simple in structure, lower-cost.
Background technology
Along with the development of Magnetic Sensor technology, it is from the uniaxial magnetic quantity sensor at initial stage, has developed twin shaft and magnetic sensor, but has made magnetic signal on its complete detection space X, Y, three directions of Z axle.Make that like this, also its range of application is more and more wider.For example, comparatively convention consumer electronics product field, automobile product field or the like arranged.
For Magnetic Sensor, its working method normally is provided with sensor unit on the direction that will survey, to survey the magnetic signal on this direction and to export result of detection.
With the magnetic sensor is example, and the structure that industry adopts at present normally is provided with sensor unit respectively on three directions, thereby accomplishes the magnetic signal detection on X, Y and three directions of Z axle, and the output result of detection.
The utility model content
The utility model technical matters to be solved provides a kind of magnetic sensor, and its structure is more simple, and can effectively accomplish the magnetic signal detection on X, Y and three directions of Z axle, and numerical value is surveyed in output.
In order to solve the problems of the technologies described above, the technical scheme that the utility model proposed is: a kind of magnetic sensor, it includes substrate layer.Wherein substrate layer (Substrate) is respectively θ along being respectively arranged with angle on X and the Y direction
1And θ
2First, second slope, the direction that slope, upper edge, first slope tilts is provided with the first sensor cell S
1, the direction that slope, upper edge, second slope tilts is provided with the second sensor unit S
2The first sensor unit and second sensor unit be the magnetic signal on sensation level direction and the vertical direction and export probe value respectively, thereby accomplishes the detection to the magnetic signal on X, Y and three directions of Z axle.The magnetic sensor unit that wherein relates to use can be AMR, GMR and TMR or the like.
Further, in different embodiments, when first sensor unit or second sensor unit are provided with when a plurality of, its code name can be to refer to label S
1, S
2Subscript 1,2 after, continued access numeral.For example, S
11, S
12, S
13, S
21, S
22, S
23Or the like.
Further, in different embodiments, θ wherein
1Angular range is 15～75 degree.
Further, in different embodiments, θ wherein
2Angular range is 15～75 degree.
Further, in different embodiments, θ wherein
1=θ
2=θ.
Further, in different embodiments, it calculates first sensor unit and the output of second sensor unit on each direction of principal axis through following formula:
S
1xout＝B
x*cosθ；S
2yout＝B
y*cosθ；S
1zout＝-B
z*sinθ；S
2zout＝-B
z*sinθ；
Wherein X, Y and Z axle three direction of principal axis magnetic fields are respectively B in the environment
x, B
y, B
z
Further, in different embodiments, it calculates the Magnetic Field Numerical that detects through following formula:
B
x＝S
1xout/cosθ；B
y＝S
2yout/cosθ；B
z＝(-S
1zout-S
2zout)/cosθ/2。
Further, in different embodiments, wherein the first sensor unit is the magnetic signal on the induction X-direction.
Further, in different embodiments, wherein second sensor unit is the magnetic signal on the induction Y direction.
Further, in different embodiments, wherein substrate layer is provided with two first slopes that are oppositely arranged, and is provided with the first sensor unit on each slope.Be oppositely arranged, that is to say, the angle of two slopes and X axle is respectively θ
1(180-θ
1).
Further, in different embodiments, wherein substrate layer is provided with two second slopes that are oppositely arranged, and is provided with second sensor unit on each slope.
With respect to prior art, the utlity model has following beneficial effect: the magnetic sensor that the utility model relates to, it adopts the slope that the mode of magnetic sensor unit is set; Make magnetic sensor unit get final product the magnetic signal of detection level direction; The magnetic signal of detectable vertical direction again, in the vertical direction is provided with magnetic sensor unit thereby need not again, so; Promptly simplify the structure, reduced cost again; And can also guarantee magnetic signal detection and output function on three direction of principal axis.
Description of drawings
The structural representation of the magnetic sensor that the embodiment that Fig. 1 relates to for the utility model provides, it only illustrates the cross-section structure on the X-direction.
The structural representation of the magnetic sensor that another embodiment that Fig. 2 relates to for the utility model provides, its position that only illustrates between the first sensor unit and second sensor unit is provided with relation.
The structural representation of the magnetic sensor that another embodiment that Fig. 3 relates to for the utility model provides, its position that only illustrates between the first sensor unit and second sensor unit is provided with relation.
Embodiment
Specify the embodiment of the utility model below in conjunction with accompanying drawing.
See also shown in Figure 1; An embodiment of the utility model has disclosed a kind of magnetic sensor; It includes substrate layer 10; Wherein substrate layer upper edge X-direction is provided with two first slopes 12,14 that are oppositely arranged, and such two first slopes and X axle clamp angle are respectively θ and (180-θ), and wherein the θ angular range is 15～75 degree.12,14 along being provided with first sensor unit (S on the direction of slope inclination on each first slope
11, S
12) 11,13.
In like manner; Along also being provided with two second slopes that are oppositely arranged on the Y direction (because its set-up mode is similar to the set-up mode on the X-direction; So not shown), and two second slopes also are respectively θ and (180-θ) with Y axle clamp angle, wherein the θ angular range is 15～75 to spend.Also be provided with the second sensor unit (S on the direction that each slope, upper edge, second slope tilts
21, S
22).
Along the slope sensor unit is set, can makes sensor unit get final product the magnetic signal on the detection level direction (X, Y direction), the magnetic signal on the detectable again vertical direction (Z direction).Thereby need not extra in the vertical direction again sensor unit is set.
Further,, can have multiplely, specifically can decide with the need for the set-up mode of first sensor unit and the relative position of second sensor unit on substrate layer.
For example, see also shown in Figure 2ly, it illustrates among another embodiment that a kind of the utility model relates to, and first sensor unit 21,23 and second sensor unit 22, the relative position between 24 are provided with relation.
See also shown in Figure 3ly, it also illustrates among another embodiment that a kind of the utility model relates to, and first sensor unit 31,33 and second sensor unit 32, the relative position between 34 are provided with relation.
Further, these sensor units are responded to the magnetic field of the direction along the slope, and are concrete, wherein first sensor unit (S
11, S
12) magnetic signal of induction X-direction along the slope, the magnetic signal of second sensor unit induction Y direction along the slope.
Further, when X-direction adds magnetic field B x, first sensor unit (S
11, S
12) output can calculate through following formula:
S
11out＝B
x*cosθ，S
12out＝B
x*cosθ。
In like manner, add magnetic field B when Y direction
yThe time, the second sensor unit (S
21, S
22) output can calculate through following formula:
S
21out＝B
y*cosθ，S
22out＝B
y*cosθ。
In like manner, when Z-direction adds magnetic field B z, first, second sensor unit (S
11, S
12, S
21, S
22) Z-direction output can calculate through following formula:
S
11out＝-B
z*sinθ，S
12out＝B
z*sinθ；
S
21out＝-B
z*sinθ，S
22out＝B
z*sinθ。
Because the output on each direction of principal axis of first, second sensor unit can be surveyed through element and draw, therefore, also just can be according to the anti-magnetic field of releasing on X, Y and the Z-direction of above-mentioned formula.Promptly record magnetic field:
B
x＝(S
11out+S
12out)/cosθ/2
B
y＝(S
22out+S
21out)/cosθ/2
B
z＝(S
12out-S
11out+S
22out-S
21out)/cosθ/4
In one embodiment, the formula that more than relates to is the process of first, second sensor unit inter-process, and its last output can directly translate into and survey the magnetic signal numerical value that obtains on all directions.
Further, for how to form the slope, can be to form, and then make sensor unit on the slope through KOH, TMAH etching mode at substrate layer.
The above is merely the preferred embodiments of the utility model; The protection domain of the utility model does not exceed with above-mentioned embodiment; As long as the equivalence that those of ordinary skills are done according to the utility model disclosure is modified or changed, all should include in the protection domain of putting down in writing in claims.
Claims (10)
1. magnetic sensor, it includes substrate layer, it is characterized in that, and wherein said substrate layer is respectively θ along being respectively arranged with angle on X and the Y direction
1And θ
2First, second slope, the direction that slope, upper edge, said first slope tilts is provided with the first sensor cell S
1, the direction that slope, upper edge, said second slope tilts is provided with the second sensor unit S
2, the said first sensor unit and second sensor unit be the magnetic signal on sensation level direction and the vertical direction and export probe value respectively, thereby accomplishes the detection to the magnetic signal on X, Y and three directions of Z axle.
2. magnetic sensor as claimed in claim 1 is characterized in that, wherein θ
1Angular range is 15～75 degree.
3. magnetic sensor as claimed in claim 1 is characterized in that, wherein θ
2Angular range is 15～75 degree.
4. magnetic sensor as claimed in claim 1 is characterized in that, wherein θ
1=θ
2=θ.
5. magnetic sensor as claimed in claim 4 is characterized in that, it calculates first sensor unit and the output of second sensor unit on each direction of principal axis through following formula:
S
1xout＝B
x*cosθ；S
2yout＝B
y*cosθ；S
1zout＝-B
z*sinθ；S
2zout＝-B
z*sinθ；
Wherein X, Y and Z axle three axial magnetic fields are respectively B in the environment
x, B
y, B
z
6. magnetic sensor as claimed in claim 5 is characterized in that, it calculates the Magnetic Field Numerical that detects through following formula:
B
x＝S
1xout/cosθ；B
y＝S
2yout/cosθ；B
z＝(-S
1zout-S
2zout)/cosθ/2。
7. magnetic sensor as claimed in claim 1 is characterized in that, wherein said first sensor unit is the magnetic signal on the induction X-direction.
8. magnetic sensor as claimed in claim 1 is characterized in that, wherein said second sensor unit is the magnetic signal on the induction Y direction.
9. magnetic sensor as claimed in claim 1 is characterized in that, wherein said substrate layer is provided with two first slopes that are oppositely arranged, and is provided with the first sensor unit on each slope.
10. magnetic sensor as claimed in claim 1 is characterized in that, wherein said substrate layer is provided with two second slopes that are oppositely arranged, and is provided with second sensor unit on each slope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201746167U CN202548308U (en) | 2012-04-23 | 2012-04-23 | Triaxial magnetic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201746167U CN202548308U (en) | 2012-04-23 | 2012-04-23 | Triaxial magnetic sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202548308U true CN202548308U (en) | 2012-11-21 |
Family
ID=47168924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201746167U Expired - Lifetime CN202548308U (en) | 2012-04-23 | 2012-04-23 | Triaxial magnetic sensor |
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| Country | Link |
|---|---|
| CN (1) | CN202548308U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105592A (en) * | 2013-01-29 | 2013-05-15 | 中国科学院上海微系统与信息技术研究所 | Single-chip three-shaft magnetic field sensor and production method |
| CN103376425A (en) * | 2012-04-23 | 2013-10-30 | 美新半导体（无锡）有限公司 | Triaxial magnetic sensor |
| CN104375098A (en) * | 2013-08-15 | 2015-02-25 | 上海矽睿科技有限公司 | Magnetic sensing device and manufacturing technology thereof |
| JP2016502098A (en) * | 2012-12-21 | 2016-01-21 | 上海▲し▼睿科技有限公司Ｑｓｔ Ｃｏｒｐｏｒａｔｉｏｎ | Magnetic sensing device and magnetic induction method thereof |
| JP2016517952A (en) * | 2012-12-21 | 2016-06-20 | 上海▲し▼睿科技有限公司Ｑｓｔ Ｃｏｒｐｏｒａｔｉｏｎ | Magnetic sensing device, magnetic induction method and manufacturing process thereof |
| US9891292B2 (en) | 2014-04-17 | 2018-02-13 | MultiDimension Technology Co., Ltd. | Monolithic three-axis linear magnetic sensor and manufacturing method thereof |
| US10107871B2 (en) | 2014-03-28 | 2018-10-23 | MultiDimension Technology Co., Ltd. | Monolithic three-axis magnetic field sensor and its manufacturing method |
| CN111044951A (en) * | 2019-11-27 | 2020-04-21 | 北京航空航天大学青岛研究院 | Three-axis magnetic field sensor and manufacturing method thereof |
-
2012
- 2012-04-23 CN CN2012201746167U patent/CN202548308U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376425A (en) * | 2012-04-23 | 2013-10-30 | 美新半导体（无锡）有限公司 | Triaxial magnetic sensor |
| JP2016502098A (en) * | 2012-12-21 | 2016-01-21 | 上海▲し▼睿科技有限公司Ｑｓｔ Ｃｏｒｐｏｒａｔｉｏｎ | Magnetic sensing device and magnetic induction method thereof |
| JP2016517952A (en) * | 2012-12-21 | 2016-06-20 | 上海▲し▼睿科技有限公司Ｑｓｔ Ｃｏｒｐｏｒａｔｉｏｎ | Magnetic sensing device, magnetic induction method and manufacturing process thereof |
| CN103105592A (en) * | 2013-01-29 | 2013-05-15 | 中国科学院上海微系统与信息技术研究所 | Single-chip three-shaft magnetic field sensor and production method |
| CN103105592B (en) * | 2013-01-29 | 2015-03-25 | 中国科学院上海微系统与信息技术研究所 | Single-chip three-shaft magnetic field sensor and production method |
| CN104375098A (en) * | 2013-08-15 | 2015-02-25 | 上海矽睿科技有限公司 | Magnetic sensing device and manufacturing technology thereof |
| US10107871B2 (en) | 2014-03-28 | 2018-10-23 | MultiDimension Technology Co., Ltd. | Monolithic three-axis magnetic field sensor and its manufacturing method |
| US9891292B2 (en) | 2014-04-17 | 2018-02-13 | MultiDimension Technology Co., Ltd. | Monolithic three-axis linear magnetic sensor and manufacturing method thereof |
| CN111044951A (en) * | 2019-11-27 | 2020-04-21 | 北京航空航天大学青岛研究院 | Three-axis magnetic field sensor and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121121 |