CN202502055U - Surface defect and contamination detection equipment for solar polycrystalline silicon cell - Google Patents
Surface defect and contamination detection equipment for solar polycrystalline silicon cell Download PDFInfo
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- CN202502055U CN202502055U CN2012201605953U CN201220160595U CN202502055U CN 202502055 U CN202502055 U CN 202502055U CN 2012201605953 U CN2012201605953 U CN 2012201605953U CN 201220160595 U CN201220160595 U CN 201220160595U CN 202502055 U CN202502055 U CN 202502055U
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- illuminating chamber
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Abstract
The utility model discloses surface defect and contamination detection equipment for a solar polycrystalline silicon cell. An illuminating chamber is fixed on a frame; a light source is arranged in the illuminating chamber; a coating made of a diffuse reflection material is arranged on an inner wall of the illuminating chamber; a product to be detected can be transmitted to an uniform illumination area formed by the light source in the illuminating chamber through a transmission mechanism; the top wall above the illuminating chamber is provided with a light through hole which is aligned with the position of the product to be detected; an imaging device is positioned on a frame above the light through hole; and the picture information can be transmitted to a processor through the imaging device. The light rays of the light source are subjected to diffuse reflection through the illuminating chamber, so that the brightness uniformity and angle uniformity of light spots projected on the solar polycrystalline silicon cell are high, the grain noise interference is eliminated, and the surface detection precision of the solar polycrystalline silicon cell is improved.
Description
Technical field
The utility model relates to a kind of solar silicon wafers detection system, particularly a kind of polysilicon chip surface defects detection equipment.
Background technology
Along with solar electrical energy generation gets into civil area, the speed development of photovoltaic industry to advance by leaps and bounds.Quality testing to solar silicon wafers more and more is much accounted of thus.The surface imperfection of solar silicon wafers is one of them importance.But polysilicon chip is owing to himself cause, and the intergranule light and shade changes very obvious, and this has seriously reduced the signal to noise ratio (S/N ratio) of surface imperfection, thereby has reduced the accuracy of detection of surface imperfection.In existing product, basically all be that the method for leaning on later image to handle is eliminated grain noise.This has not only prolonged the time of Flame Image Process, and can lose some trickle information.Online detection and high precision have all been caused harmful effect.
The utility model content
In order to remedy above deficiency; The utility model provides a kind of polysilicon chip surface defects detection equipment; This polysilicon chip surface defects detection device illumination system can form brightness uniformity and the very high hot spot of even angle property at detection zone, can eliminate grain noise and disturb, and accuracy of detection is high.
The utility model for the technical scheme that solves its technical matters and adopt is: a kind of solar energy polycrystal silion cell sheet surface imperfection with stain checkout equipment, comprise frame, illuminating chamber, connecting gear, imaging device and processor, be benchmark with actual service orientation; Said illuminating chamber is fixed on the frame; Be provided with light source in the illuminating chamber, the inwall of illuminating chamber is provided with the coating that one deck diffuse-reflective material is processed, and connecting gear can transmit the even light area of product to be detected to the formation of illuminating chamber inner light source; The roof of illuminating chamber top be provided with product space to be detected over against light hole; Said imaging device is positioned on the frame directly over the light hole, and imaging device can be delivered a letter pictorial information to processor, connecting gear product to be detected is transported in the even light area that light source forms and with imaging device over against the position; Be incident upon on the product to be detected after the light process illuminating chamber inwall diffuse reflection that light source sends; On product to be detected, form illuminance uniformity and the very high hot spot of even angle property, imaging device is treated the testing product imaging through the light hole of illuminating chamber roof, and image signal transmission is analysed and compared to processor; Draw testing result; Because hot spot illuminance uniformity and light angle homogeneity on the product to be detected are very high, this has just eliminated, and grain noise disturbs on the product to be detected, has improved accuracy of detection; In this patent; Illumination evenly refers in the zones of different light intensity of hot spot consistent or approaching, and light angle evenly refers at the same area, and the light intensity that incident angle is different is consistent or approaching.
Further improvement as the utility model; Said light source is a kind of in monochromatic LED, multi-colored led, Halogen lamp LED and the fluorescent light; Said light source is fixed in position, illuminating chamber inside edge, and is easy of like this illuminating chamber inwall generation diffuse reflection, is not precluded within other position on the sidewall certainly.
As the further improvement of the utility model, four sides that said light source correspondence is arranged in product to be detected form a kind of of square structure and loop configuration, and the interval of strip light source is used for ccontaining product to be detected than treating that product size to be detected is big.
As the further improvement of the utility model, the light hole of said illuminating chamber roof is a kind of in circular port, square opening and the polygonal hole.
As the further improvement of the utility model, said imaging device is a camera.
As the further improvement of the utility model, said illuminating chamber sidewall is provided with the door that can open with closed, is convenient to real time inspection polysilicon chip and ME.
Further improvement as the utility model; Said frame downside is provided with the leg that height can be regulated; Be convenient to regulate the light source height, guarantee the depth of parallelism of light source height and product coupling to be detected and light source and product to be detected, guarantee the illuminance uniformity and the light angle homogeneity of hot spot.
As the further improvement of the utility model, the diffuse reflection coating of said illuminating chamber inwall is a kind of in high diffuse reflection coating (such as BaSO4) and the pad pasting.
As the further improvement of the utility model, a kind of in said illuminating chamber inwall 2 side's of being tubulars and the columnar cavity.
Any semifinished or finished goods the solar energy polycrystal silion cell sheet that this paper detected is meant from silicon chip to finished product battery sheet production run.
The useful technique effect of the utility model is: the utility model is through the light diffuse reflection of scattering chamber with light source; Make that the hot spot brightness uniformity and the even angle property that are incident upon on the polysilicon chip are very high; And then eliminated the grain noise interference, improved polysilicon chip surface accuracy of detection.
Description of drawings
Fig. 1 is the structural principle synoptic diagram of the utility model;
Fig. 2 is the stereographic map of the utility model.
Embodiment
Embodiment: a kind of solar energy polycrystal silion cell sheet surface imperfection and contamination checkout equipment, comprise frame 1, illuminating chamber 2, connecting gear 3, imaging device 4 and processor, be benchmark with actual service orientation; Said illuminating chamber 2 is fixed on the frame 1; Be provided with light source 5 in the illuminating chamber 2, the inwall of illuminating chamber 2 is provided with the coating that one deck diffuse-reflective material is processed, and connecting gear 3 can transmit the even light area of product to be detected to 5 formation of illuminating chamber 2 inner light sources; The roof of illuminating chamber 2 tops be provided with product space to be detected over against light hole 6; Said imaging device 4 is positioned on the frame 1 directly over the light hole 6, and imaging device 4 can be delivered a letter pictorial information to processor, connecting gear 3 product to be detected is transported in the even light area that light source 5 forms and with imaging device 4 over against the position; Be incident upon on the product to be detected after the light process illuminating chamber 2 inwall diffuse reflections that light source 5 sends; On product to be detected, form illuminance uniformity and the very high hot spot of even angle property, imaging device 4 is treated the testing product imaging through the light hole 6 of illuminating chamber 2 roofs, and image signal transmission is analysed and compared to processor; Draw testing result; Because hot spot illuminance uniformity and light angle homogeneity on the product to be detected are very high, this has just eliminated, and grain noise disturbs on the product to be detected, has improved accuracy of detection; In this patent; Illumination evenly refers in the zones of different light intensity of hot spot consistent or approaching, and light angle evenly refers at the same area, and the light intensity that incident angle is different is consistent or approaching.
Said light source 5 is a kind of in monochromatic LED, multi-colored led, Halogen lamp LED and the fluorescent light, and said light source is fixed in position, illuminating chamber inside edge, and is easy of like this illuminating chamber 2 inwall generation diffuse reflections, is not precluded within other position on the sidewall certainly.
Four sides that said light source 5 correspondences are arranged in product to be detected form a kind of of square structure and loop configuration, and the interval of strip light source 5 is used for ccontaining product to be detected than treating that product size to be detected is big.
The light hole 6 of said illuminating chamber 2 roofs is a kind of in circular port, square opening and the polygonal hole.
Said imaging device 4 is a camera.
Said illuminating chamber 2 sidewalls are provided with can be opened and closed door 10, is convenient to real time inspection polysilicon chip and ME.
Said frame 1 downside is provided with the leg 11 that height can be regulated, and is convenient to regulate light source 5 height, guarantees that light source 5 height mate with product to be detected and the depth of parallelism of light source 5 and product to be detected, guarantees the illuminance uniformity and the light angle homogeneity of hot spot.
The diffuse reflection coating of said illuminating chamber 2 inwalls is a kind of in high diffuse reflection coating (such as BaSO4) and the pad pasting.
A kind of in said illuminating chamber inwall 2 side's of being tubulars and the columnar cavity.
Any semifinished or finished goods the solar energy polycrystal silion cell sheet that this paper detected is meant from silicon chip to finished product battery sheet production run.
Claims (9)
- A solar energy polycrystal silion cell sheet surface imperfection with stain checkout equipment; It is characterized in that: comprise frame (1), illuminating chamber (2), connecting gear (3), imaging device (4) and processor; With actual service orientation is benchmark; Said illuminating chamber (2) is fixed on the frame (1), is provided with light source (5) in the illuminating chamber (2), and the inwall of illuminating chamber (2) is provided with the coating that one deck diffuse-reflective material is processed; Connecting gear (3) can transmit the even light area of product to be detected to illuminating chamber (2) inner light source (5) formation; The roof of illuminating chamber (2) top be provided with product space to be detected over against light hole (6), said imaging device (4) is positioned on the frame (1) directly over the light hole (6), imaging device (4) can be delivered a letter pictorial information to processor.
- 2. solar energy polycrystal silion cell sheet surface imperfection as claimed in claim 1 with stain checkout equipment, it is characterized in that: a kind of in monochromatic LED, multi-colored led, Halogen lamp LED and the fluorescent light of said light source (5), said light source is fixed in position, illuminating chamber inside edge.
- 3. solar energy polycrystal silion cell sheet surface imperfection as claimed in claim 2 and contamination checkout equipment is characterized in that: four sides that said light source (5) correspondence is arranged in product to be detected form a kind of of square structure and loop configuration.
- 4. solar energy polycrystal silion cell sheet surface imperfection as claimed in claim 1 with stain checkout equipment, it is characterized in that: a kind of in circular port, square opening and the polygonal hole of the light hole (6) of said illuminating chamber (2) roof.
- 5. solar energy polycrystal silion cell sheet surface imperfection as claimed in claim 1 and contamination checkout equipment, it is characterized in that: said imaging device (4) is a camera.
- 6. solar energy polycrystal silion cell sheet surface imperfection as claimed in claim 1 and contamination checkout equipment, it is characterized in that: said illuminating chamber (2) sidewall is provided with the door (10) that can open with closed.
- 7. solar energy polycrystal silion cell sheet surface imperfection as claimed in claim 1 and contamination checkout equipment, it is characterized in that: said frame (1) downside is provided with the leg (11) that height can be regulated.
- 8. solar energy polycrystal silion cell sheet surface imperfection as claimed in claim 1 with stain checkout equipment, it is characterized in that: the diffuse reflection coating of said illuminating chamber (2) inwall is a kind of in high diffuse reflection coating and the pad pasting.
- 9. solar energy polycrystal silion cell sheet surface imperfection as claimed in claim 1 with stain checkout equipment, it is characterized in that: a kind of in square tubular and the columnar cavity of said illuminating chamber inwall (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201605953U CN202502055U (en) | 2012-04-16 | 2012-04-16 | Surface defect and contamination detection equipment for solar polycrystalline silicon cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201605953U CN202502055U (en) | 2012-04-16 | 2012-04-16 | Surface defect and contamination detection equipment for solar polycrystalline silicon cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202502055U true CN202502055U (en) | 2012-10-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201605953U Expired - Lifetime CN202502055U (en) | 2012-04-16 | 2012-04-16 | Surface defect and contamination detection equipment for solar polycrystalline silicon cell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202502055U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376255A (en) * | 2012-04-16 | 2013-10-30 | 苏州中导光电设备有限公司 | Surface defect and contamination detecting device for solar polycrystalline silicon battery piece |
| CN103871919A (en) * | 2012-12-13 | 2014-06-18 | 苏州中导光电设备有限公司 | Solar energy silicon chip and cell sheet defect detection system |
| CN105115430A (en) * | 2015-05-26 | 2015-12-02 | 雷艳梅 | Point-grid reflection-type chemical liquid applying uniformity detection method and device |
| CN110676155A (en) * | 2019-09-27 | 2020-01-10 | 上海申和热磁电子有限公司 | Method for detecting shallow defects on surface of polished silicon wafer |
-
2012
- 2012-04-16 CN CN2012201605953U patent/CN202502055U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376255A (en) * | 2012-04-16 | 2013-10-30 | 苏州中导光电设备有限公司 | Surface defect and contamination detecting device for solar polycrystalline silicon battery piece |
| CN103871919A (en) * | 2012-12-13 | 2014-06-18 | 苏州中导光电设备有限公司 | Solar energy silicon chip and cell sheet defect detection system |
| CN103871919B (en) * | 2012-12-13 | 2016-06-29 | 苏州中导光电设备有限公司 | Solar silicon wafers and defects of battery plate detection system |
| CN105115430A (en) * | 2015-05-26 | 2015-12-02 | 雷艳梅 | Point-grid reflection-type chemical liquid applying uniformity detection method and device |
| CN105115430B (en) * | 2015-05-26 | 2016-08-31 | 山东建筑大学 | A kind of some grid transmission-type chemical liquid smears uniformity detecting method and device |
| CN110676155A (en) * | 2019-09-27 | 2020-01-10 | 上海申和热磁电子有限公司 | Method for detecting shallow defects on surface of polished silicon wafer |
| CN110676155B (en) * | 2019-09-27 | 2021-12-10 | 上海中欣晶圆半导体科技有限公司 | Method for detecting shallow defects on surface of polished silicon wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121024 |
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| CX01 | Expiry of patent term |