CN202794060U - Device for detecting defects in glass substrate - Google Patents

Abstract

The utility model provides a device for detecting defects in a glass substrate. The device comprises a point light source, a glass substrate to be detected, a screen and linear light sources, wherein the glass substrate is positioned between the point light source and the screen, and the linear light sources are positioned on the two sides of the glass substrate; and the device for detecting the defects in the glass substrate further comprises a support base and position regulating devices arranged on the two sides of the support base. The linear light sources can change or reinforce the light intensity of at least one part of a light beam of the point light source and form uniform brightness distribution on the screen, so that an inspector can feel that the brightness in an inspection region of the screen is uniform, the defects can be accurately distinguished, missed detection and false detection can be avoided and the consistency in inspection results can be improved; and the improvement is obtained under the situation of not changing the optical amplification rate, the distance from the light source to the screen or the light intensity of the light source.

Description

A kind of device for detection of defective in the glass substrate

Technical field

The utility model relates to the pick-up unit of a kind of glass plate or other transparent materials, is specifically related to a kind of device for detection of defective in the glass substrate.

Background technology

In the production run of TFT glass substrate, always can be in glass baseplate surface or the various types of defectives of the inner generation of glass substrate.Defective can comprise the optical heterogeneity of surface discontinuity, line defect, striped, calculus, bubble and glass-based plate body.

In order to prevent from entering into defective glass substrate the rear end glass cold working operation of expensive operation, and the defect information of glass substrate can be fed back to timely glass hot junction operation control system, so that the hot junction operation can take adequate measures to come reduce injection defect.This shows, to seem very important of the detection of glass substrate.

Although current common use incoherence white light detects the glass substrate defective, owing to from the local space coherence of the light of longer-distance small size (point-like) light source, may observe some diffraction effects.By being of a size of R _sLight source penetrate at be separated by each glazing of spacing of glass substrate, will have 80% spatial coherence, wherein

$L_{\mathrm{coh}}=\frac{0.16\mathrm{R\λ}}{R_s}---\left(1\right)$

(referring to " optical principle " (Principles of optics) of M.Born and E.wolf, Cambridge University Press, 1999, the X chapters, 4.2 joints), wherein R is the distance from light source to glass, and λ is the average light wavelength.When surface disturbance size w satisfies

$w\≤\sqrt{\mathrm{\λL}}---\left(2\right)$

The time, spatial coherence is significant.The diffraction that is caused by spatial coherence can the diffusion defect shade acutance, or the intensity modulated in some cases can enlarging screen.

Because the distance between light source and the screen and the variation of incident angle, the brightness that is produced and projected on the screen by point source of light that the supervisory personnel experiences has its intrinsic unevenness.In order to make the check result consistance, need to change and send the light intensity distributions of light by light source, thereby the brightness in the screen test zone (being determined by local illumination) that the supervisory personnel is experienced is uniform.

The patent No. is the Chinese utility model patent of ZL201020189366.5; Priority data " 12/433,2152009.04.30US "; Granted publication number: CN201765196U, patent name " for detection of the device of the defective in the glass plate " discloses a kind of device that detects the defective in the glass plate.This device comprises the light source of launching light beam; With described light beam projection screen thereon; And be arranged on the optical element that projects the light beam on the described screen between described light source and the described screen with interception, described optical element be configured to change described light beam at least a portion light intensity and form basic uniformly Luminance Distribution at described screen.Optical element is specially the variable transmission light filter, and it has at least one aspheric surface.Although the variable transmission light filter can increase the light distribution on the screen, make and obtain a uniform Luminance Distribution on the screen, its processing use cost is too high, is unfavorable for daily maintenance and use.

Therefore, consider above-mentioned aspect, need a kind of inhomogenous device of Luminance Distribution of being produced by pointolite can strengthened of design, so that in the detection to glass substrate, can be intuitively and significantly observe the defective that exists in the glass substrate.

The utility model content

The utility model purpose is to provide a kind of device for detection of defective in the glass substrate, enters the rear end glass cold working operation of expensive operation to prevent the glass substrate with defective.

For achieving the above object, the utility model adopts following technical scheme:

A kind of device for detection of defective in the glass substrate comprises pointolite, glass substrate to be detected, and screen, linear light sorurce, described glass substrate are between pointolite and screen, and linear light sorurce is positioned at the both sides of glass substrate.

The utility model further improves and is, described device for detection of defective in the glass substrate also comprises base for supporting, be arranged at the apparatus for adjusting position on the base for supporting, be arranged at installation frame and the baffle plate that is arranged on the installation frame on the apparatus for adjusting position; Linear light sorurce (10) is installed on the installation frame (11).

The utility model further improves and is, apparatus for adjusting position comprises adjusts handwheel, adjusting pole and guide rail; Its middle guide is arranged on the base for supporting, and adjusting pole is arranged on the guide rail, adjusts handwheel and is arranged on the adjusting pole lower end.

The utility model further improves and is, installation frame is provided with and drives linear motion device and the pneumatic means that linear light sorurce moves along the direction of normal to screen.

The utility model with respect to the beneficial effect that prior art has is: linear light sorurce can change or the light intensity of at least a portion of hard point light beam of light source and form uniform Luminance Distribution at screen, the brightness in the screen test zone that the supervisory personnel is experienced is uniform, and then can accurately tell the existence of defective, can avoid undetected, flase drop, the consistance of check result is improved; This raising is to obtain in the situation of the light intensity that does not change optical magnification, distance from light source to screen or light source.

Description of drawings

Fig. 1 is the synoptic diagram of the echo method of traditional glass base board checking device;

Fig. 2 when not having linear light sorurce, the pointolite light beam by glass substrate the brightness on the screen with respect to screen on the result's that analyzes of the numerical value ray trace of position curve map;

Fig. 3 is the side view that possesses the echo method that the glass of linear light sorurce testing fixture is arranged;

Fig. 4 is the vertical view that possesses the echo method that the glass of linear light sorurce testing fixture is arranged;

When Fig. 5 has linear light sorurce for possessing, the pointolite light beam by glass substrate the brightness on the screen with respect to screen on the result's that analyzes of the numerical value ray trace of position curve map;

Fig. 6 is the front elevation of linear light source device;

Fig. 7 is the side view of linear light source device;

Wherein, 1, pointolite; 2, glass substrate; 3, screen; 4, optical axis; 5, light; 7, linear light sorurce light; 8, base for supporting; 9, position regulator; 10, linear light sorurce; 11, installation frame; 12, handwheel is adjusted in the position; 13, adjusting pole; 14, guide rail; 16, linear motion device; 17, pneumatic means; 18, baffle plate.

Embodiment

The utility model is described in further detail below in conjunction with accompanying drawing.

Referring to shown in Figure 1, wherein pointolite 1 and screen 3 arrange along optical axis 4.Optical axis 4 is normals to screen 3 and through the straight line at light source 1 center in some cases.The straight transparent material that check in addition, (for example glass substrate) is arranged on the optical axis 4.If can think that light source 1 meets lambert's relation, then the brightness of a point on the screen 3 (namely inciding the lip-deep luminous flux of per unit area) is obtained by following formula:

$E_v=\frac{I_v{\mathrm{<figure-callout\; id="3"\; label="cos"\; filenames="HDA00001867610700013.png,HDA00001867610700021.png"\; state="\{\{state\}\}">cos</figure-callout>}}^3\mathrm{\&alpha;}}{S^2}---\left(3\right)$

I wherein _vBe light intensity, α is the angle between the direction of the light 5 that penetrates of optical axis 4 and pointolite 1, and S is 3 distance from pointolite 1 to screen.The light transmission that sees through the glass substrate that checks does not give consideration to the correlativity of incident angle in equation (3).From equation (3), maximum in central authorities' (namely at optical axis 4) brightness of screen 3, and towards the corner of screen 3 with cos ³The α decline.

Referring to shown in Figure 2, particularly, the Luminance Distribution decline of pointolite 1 on screen 3, when having defective in the glass substrate 2, the defective that can detect in the glass substrate 2 on screen 3 in the Luminance Distribution form of distortion show.But in Luminance Distribution with cos ³In the zone of α decline, the performance of the form of this distortion not very obviously.Consequently, often make the supervisory personnel can accurately not tell the existence of defective, have a large amount of undetected, flase drop problem.

Referring to shown in Figure 3, a kind of device for detection of defective in the glass substrate of the utility model comprises: pointolite 1, linear light sorurce 10, and the screen 3 that arranges along optical axis 4.Optical axis 4 is perpendicular to the straight line at screen 3 and process pointolite 1 center.The glass substrate 2 that checks arranges along optical axis 4, and perpendicular to optical axis 4.In particular, between pointolite 1 and screen 3, and between linear light sorurce 10.

Referring to shown in Figure 6, linear light source device comprises, linear light sorurce 10, base for supporting 8, two position regulators 9 and installation frame 11, wherein two apparatus for adjusting position 9 are arranged at respectively the both sides of base for supporting 8, are equipped with installation frame 11 at two apparatus for adjusting position 9, and linear light sorurce 10 is installed on the installation frame 11; Installation frame 11 is provided with baffle plate 18, linear motion device 16, pneumatic means 17; Linear light sorurce 10 position regulators 9 comprise, adjusting pole 13, guide rail 14, handwheel 12 is adjusted in the position, and wherein, guide rail 14 is arranged on the base for supporting 8, adjusting pole 13 is arranged on the guide rail 14, adjust handwheel 12 and be arranged on adjusting pole 13 lower ends, and can drive adjusting pole 13 by regulating adjustment handwheel 12, in making adjusting pole 13 and glass substrate 2 being in the same plane vertical with optical axis.

Referring to Fig. 3-4, shown in Figure 7, when glass substrate 2 entered surveyed area, the linear light sorurce 10 of the lateral position of pointolite 1, glass substrate 2 was opened.Glass substrate 2 is between pointolite 1 and screen 3, and perpendicular to optical axis 4.Under the acting in conjunction of linear motion device 16 and pneumatic means 17,1. linear light sorurce installation frame 11 is located to move to by the position with linear light sorurce 10 and is 2. located from side direction irradiation glass substrate 2, and coplanar with glass substrate 2.At pointolite 1, under the light beam acting in conjunction of linear light sorurce 10, the supervisory personnel checks by checking 4 pairs of glass substrates 2 of screen.After the supervisory personnel finished inspection to glass substrate 2, linear light sorurce installation frame 11 and linear light sorurce 10 were located by 2. locating to turn back to 1. under the acting in conjunction of linear motion device 16 and pneumatic means 17 again.Baffle plate 18 covers or blocks the side direction light beam that linear light sorurce 10 produces fully.At this moment, glass substrate 2 shifts out the inspection area, finishes the inspection of glass substrate 2.

Before glass substrate 2 did not enter the inspection area, linear light sorurce 10 was arranged in linear light sorurce installation frame 11, and the light beam of its generation is fully covered or blocks by baffle plate 18.During inspection, baffle plate 18 and linear light sorurce 10 relative motions, the light beam irradiates glass substrate 2 that linear light sorurce 10 produces.After finishing inspection, linear light sorurce 10 is positioned at linear light sorurce installation frame 11 to be got back to reference position and 1. locates.Baffle plate 18 can will reduce the impact of light beam on the supervisory personnel to a large extent.After increasing linear light sorurce 10, the Luminance Distribution of pointolite 1 on its screen 4 as shown in Figure 5.Its result makes the supervisory personnel can the very intuitive and accurate existence of telling defective, and undetected, flase drop problem has obtained improving significantly.

Claims (4)

1. device for detection of defective in the glass substrate, it is characterized in that, comprise pointolite (1), glass substrate to be detected (2), screen (3), linear light sorurce (10), described glass substrate (2) are positioned between pointolite (1) and the screen (3), and linear light sorurce (10) is positioned at the both sides of glass substrate (2).

2. a kind of device for detection of defective in the glass substrate according to claim 1, it is characterized in that, described device for detection of defective in the glass substrate also comprises base for supporting (8), be arranged at the apparatus for adjusting position (9) on the base for supporting (8), be arranged at the installation frame (11) on the apparatus for adjusting position (9) and be arranged at baffle plate (18) on the installation frame (11); Linear light sorurce (10) is installed on the installation frame (11).

3. a kind of device for detection of defective in the glass substrate according to claim 2 is characterized in that, apparatus for adjusting position (9) comprises adjusts handwheel (12), adjusting pole (13) and guide rail (14); Its middle guide (14) is arranged on the base for supporting (8), and adjusting pole (13) is arranged on the guide rail (14), adjusts handwheel (12) and is arranged on adjusting pole (13) lower end.

4. a kind of device for detection of defective in the glass substrate according to claim 2, it is characterized in that installation frame (11) is provided with and drives linear light sorurce (10) along linear motion device (16) and the pneumatic means (17) of the direction motion of normal to screen (3).

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