CN202492568U - Transmission gap module and continuous sputter coating equipment applying same - Google Patents
Transmission gap module and continuous sputter coating equipment applying same Download PDFInfo
- Publication number
- CN202492568U CN202492568U CN 201220019429 CN201220019429U CN202492568U CN 202492568 U CN202492568 U CN 202492568U CN 201220019429 CN201220019429 CN 201220019429 CN 201220019429 U CN201220019429 U CN 201220019429U CN 202492568 U CN202492568 U CN 202492568U
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- transmission
- drive cavity
- central dividing
- backing plate
- chock
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Abstract
The utility model discloses a transmission gap module comprising a transmission device and a transmission cavity, wherein the transmission cavity is arranged above the transmission device, and a sealing plate used for isolating the space is arranged above the transmission cavity. The utility model further discloses continuous sputter coating equipment comprising at least two sputter coating well positions, wherein a transmission gap module is arranged between the two sputter coating well positions, the transmission gap module comprises a transmission device and a transmission cavity, the transmission cavity is arranged above the transmission device, a sealing plate is arranged above the transmission cavity, and the sealing plate isolates the two sputter coating well positions. The transmission gap module disclosed by the utility model has simple structure, convenient operation, good gas isolating effect and the capability of effectively avoiding gas drift between different well positions.
Description
Technical field
The utility model relates to a kind of transmission slit module, particularly a kind of equipment that is applied to the transmission slit module of glass continuous coating device and uses it.
Background technology
Along with the raising of expanding economy and people's living standard, society has higher requirement to the industry-by-industry of industry, and wherein for the silicate industry, the plated film standard of glass is also increasingly high thereupon.Coated glass is pressed the different qualities of product, can be divided into following several types: heat-reflecting glass, low emissivity glass, electropane etc.Heat-reflecting glass generally is at one or more layers film of forming such as metal such as chromium, titanium or stainless steel or its compound of glass surface plating; Make product be abundant colors, suitable transsmissivity is arranged, infrared rays is had higher reflectivity for visible light; Ultraviolet ray there is the higher absorption rate; Therefore, be also referred to as the sunlight feed glass, be mainly used in building and glass curtain wall; Low emissivity glass is the film of being made up of metal such as silver, copper or tin or its compound in glass surface plating; Product has high transmittance to visible light; Infrared rays there is very high reflectivity, has good thermal and insulating performance, be mainly used in the building and the vehicles such as automobile, boats and ships; Because film strength is relatively poor, generally all processes double glazing and use; Electropane is at conductive films such as glass surface coating tin indium oxides, can be used for heating, defrosting, the demist of glass and is used as liquid crystal display etc.
The working method of coated glass is a lot, mainly contains ion sputtering method, vacuum vapor deposition method, chemical Vapor deposition process and sol-gel method etc.Sputter-coated glasses utilizes sputtering technology can manufacture and design the complicated film of multilayer system, can on the glass substrate of white, plate out multiple color, and the corrosion-resistant and wear resisting property of rete is better, is to produce and use one of maximum product at present.The kind of vacuum evaporation coating film glass is compared with sputter-coated glasses with quality and is all had certain gap, is progressively replaced by sputtering method.Chemical Vapor deposition process is on floatation glass production line, to feed reactant gases to decompose at scorching hot glass surface, is deposited on glass surface equably and forms coated glass.The characteristics of this method are less equipment investment, easy-regulating, and product cost is low, chemicalstability good, can carry out hot-work, are one of at present the most rising working methods.Sol-gel method production coated glass technology is simple, stability, and weak point is that the product optical transmittance is too high, and is ornamental relatively poor.
For the ion sputtering method, normally under the effect of high pressure 1500V, residual gas molecule is formed plasma body by ionization, and positively charged ion is the bombardment metallic target under electric field quickens, and makes atoms metal be splashed to the surface of sample, forms conducting film.At present, in the vacuum vessel, a kind of coated glass normally is made up of a series of different film materials, and whole coating process one-time continuous in filming equipment is accomplished.So just require to dispose different target materials on the glass coating equipment; Different target materials are arranged in the different well locations, and the sputtering atmosphere between each well location is not quite similar, or sputter under straight argon atmosphere; Or sputter under the argon oxygen atmosphere, or sputter under the argon nitrogen atmosphere.Gas barrier device in the conventional glass filming equipment is simple relatively, and the gas drift between can not the sputtering atmosphere of the different well locations of effective prevention causes that film purity is not high, component deviation, and then influences the performance of whole coated glass.
Those skilled in the art are devoted to provide a kind of can effectively realize the isolated transmission module of process gas.
The utility model content
The technical problem that the utility model will solve is simple relatively in order to overcome the gas barrier device that has now in the glass coating equipment; The technical problem that can not effectively stop the gas drift between the sputtering atmosphere of different well locations; A kind of transmission slit module is provided, with the gas barrier between each well location of effective realization.
The utility model solves above-mentioned technical problem through following technical proposals:
A kind of transmission slit module, its characteristics are that said transmission slit module comprises transmission mechanism and drive cavity, and said drive cavity is arranged on the transmission mechanism top, and the drive cavity top is provided with the shrouding that is used for insulating space.
Preferably, said transmission mechanism comprises pair of bearing, is arranged on many on the chock to bearing be arranged on the roller between every pair of bearing.
Preferably, said drive cavity comprises backing plate, central dividing plate and cover plate, and said central dividing plate is fixed on the chock, as the lower wall of drive cavity; Said backing plate is fixedly connected with central dividing plate, together is arranged on the said chock, and the height of backing plate is the height of drive cavity; Said cover plate is fixedly installed on the backing plate, as the upper wall of drive cavity.
Preferably, between said central dividing plate and the chock, between said backing plate and the central dividing plate and the mode of connection between cover plate and the backing plate for being spirally connected.
Preferably, said central dividing plate is an aluminium section bar.
The utility model also relates to a kind of continuous sputtering coating equipment; Comprise at least two sputter coating well locations, its characteristics are, are provided with transmission slit module between two sputter coating well locations; Said transmission slit module comprises transmission mechanism and drive cavity; Said drive cavity is arranged on the transmission mechanism top, and the drive cavity top is provided with a shrouding, and said shrouding is isolated two sputter coating well locations.
Preferably, said transmission mechanism comprises pair of bearing, is arranged on many on the chock to bearing be arranged on the roller between every pair of bearing.
Preferably, said drive cavity comprises backing plate, central dividing plate and cover plate, and said central dividing plate is fixed on the chock, as the lower wall of drive cavity; Said backing plate is fixedly connected with central dividing plate, together is arranged on the said chock, and the height of backing plate is the height of drive cavity; Said cover plate is fixedly installed on the backing plate, as the upper wall of drive cavity.
In the utility model, but above-mentioned optimum condition arbitrary combination on the basis that meets this area general knowledge promptly gets each preferred embodiment of the utility model.
The positive progressive effect of the utility model is: this transmission slit die block structure is simple, and is easy to operate, and gas barrier is effective, effectively avoided the gas drift between the different well locations.
Description of drawings
Fig. 1 is the vertical view of the transmission slit module of the utility model.
Fig. 2 is the A-A view of transmission shown in Figure 1 slit module.
Fig. 3 is the B-B view of transmission shown in Figure 1 slit module.
Fig. 4 is the C-C view of transmission shown in Figure 3 slit module.
Embodiment
The embodiment of the utility model will describe with reference to accompanying drawing.In Figure of description, element or device with similar structures or function will be used the components identical symbolic representation.Accompanying drawing for the ease of each embodiment of explanation the utility model, is not to carry out the explanation of exhaustive to the utility model just, neither limit scope of the present invention.
Fig. 1 to Fig. 4 shows the structural representation of the transmission slit module of a preferred embodiment in the utility model.In this embodiment, the left and right sides of transmission slit module all is a plated film sputter well location, places target material in the well location, and glass is carried out plated film.Two ends of transmission slit module are provided with chock 1; Chock 1 is provided with many to bearing (scheming not shown); A plurality of rollers 2 are arranged between the chock 1 by these bearings; Roller 2 can rotate with bearing, and glass to be coated like this can be transported to the right side by the roller 2 that passes on left of roller 2 module from the transmission slit.Each roller is should size consistent, when guaranteeing that glass is placed on above a plurality of rollers contact surface and stressed evenly.
Be set with central dividing plate 3 on the chock, central dividing plate 3 length run through whole slit module, ride on two chocks 1, and in one embodiment, central dividing plate 3 is connected with the chock screw.The length of backing plate 4 is shorter, is arranged on the chock 1, is fixedly connected with central dividing plate 3.Cover plate 5 length are consistent with central dividing plate 3, run through whole slit module equally, are fixedly installed on the backing plate 4 at two ends.In the present embodiment, all be connected between backing plate and the central dividing plate, cover plate and backing plate for screw.Central dividing plate is an aluminium section bar, also can be other suitable material.Like this, central dividing plate 3 is as lower wall, and backing plate 4 is as sidewall, and cover plate is as upper wall, and the three constitutes the drive cavity 41 of transmission slit module, and the height of backing plate 4 is the height of drive cavity 41.The height of central dividing plate 3 guarantees that a little less than the upper edge of roller 2 glass can pass through drive cavity smoothly by roller 2.The height of backing plate 4 should be low as much as possible under the prerequisite that assurance glass can pass through smoothly, thereby reduce the cross-sectional area of drive cavity, guarantees the gas barrier effect between the different well locations.
Cover plate 5 upper fixed are provided with shrouding 6; Shrouding 6 is filled the xsect of whole module, and with the left and right sides spaced of drive cavity top, glass is in a plated film sputter well location after the plated film; Pass to next plated film sputter well location through narrow drive cavity and continue plated film; Thereby different gas barrier between two plated film sputter well locations like this, has improved the purity and the effect of plated film greatly about realizing.
Though more than described the embodiment of the utility model, it will be understood by those of skill in the art that these only illustrate, the protection domain of the utility model is limited appended claims.Those skilled in the art can make numerous variations or modification to these embodiments under the prerequisite of principle that does not deviate from the utility model and essence, but these changes and modification all fall into the protection domain of the utility model.
Claims (8)
1. a transmission slit module is characterized in that, said transmission slit module comprises transmission mechanism and drive cavity, and said drive cavity is arranged on the transmission mechanism top, and the drive cavity top is provided with and is used for two isolated shroudings of sputter coating well location.
2. transmission as claimed in claim 1 slit module is characterized in that, said transmission mechanism comprises pair of bearing, be arranged on many on the chock to bearing be arranged on the roller between every pair of bearing.
3. transmission as claimed in claim 2 slit module is characterized in that said drive cavity comprises backing plate, central dividing plate and cover plate, and said central dividing plate is fixed on the chock, as the lower wall of drive cavity; Said backing plate is fixedly connected with central dividing plate, together is arranged on the said chock, and the height of backing plate is the height of drive cavity; Said cover plate is fixedly installed on the backing plate, as the upper wall of drive cavity.
4. transmission as claimed in claim 3 slit module is characterized in that, between said central dividing plate and the chock, between said backing plate and the central dividing plate and the mode of connection between cover plate and the backing plate for being spirally connected.
5. like claim 3 or 4 described transmission slit modules, it is characterized in that said central dividing plate is an aluminium section bar.
6. continuous sputtering coating equipment; Comprise at least two sputter coating well locations, it is characterized in that, be provided with transmission slit module between two sputter coating well locations; Said transmission slit module comprises transmission mechanism and drive cavity; Said drive cavity is arranged on the transmission mechanism top, and the drive cavity top is provided with a shrouding, and said shrouding is isolated two sputter coating well locations.
7. continuous sputtering coating equipment as claimed in claim 6 is characterized in that, said transmission mechanism comprises pair of bearing, be arranged on many on the chock to bearing be arranged on the roller between every pair of bearing.
8. like claim 6 or 7 described continuous sputtering coating equipments, it is characterized in that said drive cavity comprises backing plate, central dividing plate and cover plate, said central dividing plate is fixed on the chock, as the lower wall of drive cavity; Said backing plate is fixedly connected with central dividing plate, together is arranged on the said chock, and the height of backing plate is the height of drive cavity; Said cover plate is fixedly installed on the backing plate, as the upper wall of drive cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220019429 CN202492568U (en) | 2012-01-17 | 2012-01-17 | Transmission gap module and continuous sputter coating equipment applying same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220019429 CN202492568U (en) | 2012-01-17 | 2012-01-17 | Transmission gap module and continuous sputter coating equipment applying same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202492568U true CN202492568U (en) | 2012-10-17 |
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ID=46998804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220019429 Withdrawn - After Issue CN202492568U (en) | 2012-01-17 | 2012-01-17 | Transmission gap module and continuous sputter coating equipment applying same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202492568U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205720A (en) * | 2012-01-17 | 2013-07-17 | 上海北玻镀膜技术工业有限公司 | Transmission gap module and continuous sputter coating equipment applying same |
-
2012
- 2012-01-17 CN CN 201220019429 patent/CN202492568U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205720A (en) * | 2012-01-17 | 2013-07-17 | 上海北玻镀膜技术工业有限公司 | Transmission gap module and continuous sputter coating equipment applying same |
| CN103205720B (en) * | 2012-01-17 | 2015-12-16 | 上海北玻镀膜技术工业有限公司 | Transmission gap module and apply its continuous sputtering coating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20121017 Effective date of abandoning: 20151216 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |