CN103205719B - Gas passage module and apply its gas distributing device - Google Patents
Gas passage module and apply its gas distributing device Download PDFInfo
- Publication number
- CN103205719B CN103205719B CN201210013232.1A CN201210013232A CN103205719B CN 103205719 B CN103205719 B CN 103205719B CN 201210013232 A CN201210013232 A CN 201210013232A CN 103205719 B CN103205719 B CN 103205719B
- Authority
- CN
- China
- Prior art keywords
- elongated slot
- gas
- inlet port
- gas passage
- air inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 claims abstract description 22
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 238000009826 distribution Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 77
- 239000011521 glass Substances 0.000 description 28
- 238000000034 method Methods 0.000 description 14
- 238000000576 coating method Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000005344 low-emissivity glass Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001200 Ferrotitanium Inorganic materials 0.000 description 1
- 240000005979 Hordeum vulgare Species 0.000 description 1
- 235000007340 Hordeum vulgare Nutrition 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- PWKWDCOTNGQLID-UHFFFAOYSA-N [N].[Ar] Chemical compound [N].[Ar] PWKWDCOTNGQLID-UHFFFAOYSA-N 0.000 description 1
- VVTSZOCINPYFDP-UHFFFAOYSA-N [O].[Ar] Chemical compound [O].[Ar] VVTSZOCINPYFDP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- GRPQBOKWXNIQMF-UHFFFAOYSA-N indium(3+) oxygen(2-) tin(4+) Chemical class [Sn+4].[O-2].[In+3] GRPQBOKWXNIQMF-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Valve Housings (AREA)
Abstract
The invention discloses a kind of gas passage module, described gas passage module totality is a rectangular parallelepiped, and wherein, described rectangular parallelepiped horizontal direction has the first end face and the second end face, the first end face is provided with the first elongated slot, and the second end face is provided with the second elongated slot; Described rectangular parallelepiped end face is provided with a primary inlet port and multiple auxiliary air inlet port, and the corresponding primary inlet port of rectangular parallelepiped main body and auxiliary air inlet port are provided with the first internal passages and the second internal passages, and described rectangular parallelepiped bottom surface is provided with multiple main production well and multiple auxiliary production well; Described primary inlet port is communicated with the first elongated slot by the first internal passages, and described auxiliary air inlet port is communicated with the second elongated slot by the second internal passages.Gas passage module of the present invention and to apply its gas distributing device easy to operate, gas distribution effects is good, effectively prevent the gas distribution problem of non-uniform among different well location.
Description
Technical field
The present invention relates to a kind of gas passage module, be particularly a kind ofly applied to the gas passage module of glass evacuated sputtering coating equipment and apply its gas distributing device.
Background technology
Along with the raising of expanding economy and people's living standard, society has higher requirement to the industry-by-industry of industry, and wherein for silicate industry, the plated film standard of glass is also thereupon more and more higher.The different qualities of product pressed by coated glass, can be divided into following a few class: heat-reflecting glass, low emissivity glass, electropane etc.Heat-reflecting glass is generally the film plating the metals such as one or more layers such as chromium, titanium or stainless steel or its compound composition at glass surface, product is made to be abundant color, suitable transmissivity is had for visible ray, higher reflectivity is had to infrared rays, higher absorption rate is had to ultraviolet, therefore, also referred to as solar-control glazing, be mainly used in building and glass curtain wall; Low emissivity glass is the film be made up of the metals such as silver, copper or tin or its compound in glass surface plating, product has higher transmissivity to visible ray, very high reflectivity is had to infrared rays, there is good thermal and insulating performance, be mainly used in building and the vehicles such as automobile, boats and ships, because film strength is poor, generally all make double glazing and use; Electropane is at conductive films such as glass surface coating tin indium oxides, can be used for the heating of glass, defrosting, demist and is used as liquid crystal display etc.
The production method of coated glass is a lot, mainly contains ion sputtering process, vacuum vapor deposition method, chemical Vapor deposition process and sol-gel method etc.Sputter-coated glasses utilizes sputtering technology can manufacture and design the complicated film system of multilayer, and can plate out multiple color on the glass substrate of white, the corrosion-resistant and wear resisting property of rete is better, is produce and use one of maximum product at present.All there is certain gap with quality in the kind of vacuum evaporation coating film glass, progressively sputtered method replaces compared with sputter-coated glasses.Chemical Vapor deposition process on floatation glass production line, passes into reactant gases decompose at scorching hot glass surface, is deposited on glass surface equably and forms coated glass.The feature of the method is that equipment investment is few, easy-regulating, and product cost is low, chemical stability good, can carry out hot-work, is one of the most rising current production method.Sol-gel method produces coated glass technique simply, and stability, weak point is that product optical transmittance is too high, ornamental poor.
For ion sputtering process, normally under the effect of high pressure 1500V, residual gas molecule is ionized, and form plasma body, positively charged ion bombards metallic target under electric field acceleration, makes metal atom sputtering to the surface of sample, forms conducting film.At present, in vacuum vessel, a kind of coated glass is normally made up of a series of different film material, and whole coating process one-time continuous in filming equipment completes.So just require glass coating equipment will configure different target material, different target material is arranged in different well locations, and the sputtering atmosphere between each well location is not quite similar, or sputters under straight argon atmosphere, or sputter under argon oxygen atmosphere, or sputter under argon nitrogen atmosphere.For the consideration of coating quality, the gas between each well location should even concentration.Traditional glass coating equipment is that technique gas circuit distribution device is arranged on plated film inside cavity, normally in the bottom of cathode baffle, due to the complicacy of gas flowfield and the compressibility of gas itself, this design easily causes process gas to conceal space in glass both sides, in sputter procedure, because the gas concentration of glass edge is comparatively large, make coating effects and the intermediate formation larger difference of glass edge; Meanwhile, because technique gas circuit distribution device is fixed on inside cavity, be both unfavorable for the repair and maintenance of process gas road device, also reduce interchangeableness and the handiness of apparatus and process configuration.
Those skilled in the art are devoted to provide a kind of equipment that effectively can realize sputter gas uniformly distributing.
Summary of the invention
The technical problem to be solved in the present invention is the technical problem in order to overcome the gas maldistribution in existing glass coating equipment, provides a kind of gas passage module and is applied to its gas distributing device, distributes effectively to realize gas uniform among each well location.
The present invention solves above-mentioned technical problem by following technical proposals:
A kind of gas passage module, its feature is, described gas passage module totality is a rectangular parallelepiped, wherein,
Described rectangular parallelepiped horizontal direction has the first end face and the second end face, the first end face is provided with the first elongated slot, and the second end face is provided with the second elongated slot;
Described rectangular parallelepiped end face is provided with a primary inlet port and multiple auxiliary air inlet port, and the corresponding primary inlet port of rectangular parallelepiped main body and auxiliary air inlet port are provided with the first internal passages and the second internal passages, and described rectangular parallelepiped bottom surface is provided with multiple main production well and multiple auxiliary production well; Described primary inlet port is communicated with the first elongated slot by the first internal passages, and described auxiliary air inlet port is communicated with the second elongated slot by the second internal passages.
Preferably, described first elongated slot is communicated by main production well with gas passage module bottom, described second elongated slot is isolated into multiple independently auxiliary gas elongated slot, and described multiple auxiliary gas elongated slot is arranged in order, and each auxiliary gas elongated slot is communicated by auxiliary production well with gas passage module bottom.
Preferably, the second end face of described gas passage module is also arranged the 3rd elongated slot, described 3rd elongated slot is communicated with the auxiliary air inlet port of part by one the 3rd internal passages, and described 3rd elongated slot is communicated by the auxiliary gas elongated slot of an auxiliary tank and the part in the second elongated slot.
Preferably, described rectangular parallelepiped top is provided with top air drain, and the auxiliary air inlet port of part is connected with top air drain.
Preferably, described device comprises a gas passage module, top board, the first side plate, the second side plate, U-shaped cover plate, described gas passage module adopts the gas passage module as described in claim 3 or 4, wherein, described top plate seal gas passage module end face, described first side plate seals the first elongated slot, and described second side plate seals the second elongated slot and/or the 3rd elongated slot.
Preferably, described top board comprises gas injection joint, and described gas injection joint is corresponding with described primary inlet port and auxiliary air inlet port to be arranged.
Preferably, described U-shaped cover plate is arranged on the bottom of gas passage module, forms mixed air cavity with gas passage module bottom.
Preferably, described mixed air cavity inside is provided with shrouding, and mixed air cavity is divided into independently several sections.
Preferably, described U-shaped cover plate is provided with gas orifice.
Preferably, described gas orifice is other is also provided with flow deflector.
In the present invention, above-mentioned optimum condition can arbitrary combination on the basis meeting this area general knowledge, obtains each preferred embodiment of the present invention.
Positive progressive effect of the present invention is: this gas passage module and to apply its gas distributing device easy to operate, and gas distribution effects is good, effectively prevent the gas distribution problem of non-uniform among different well location.
Accompanying drawing explanation
Fig. 1 is the front view of gas passage module in one embodiment of the present of invention.
Fig. 2 is the X magnified partial view of the module of gas passage shown in Fig. 1.
Fig. 3 is the A-A view of the module of gas passage shown in Fig. 1.
Fig. 4 is the B-B view of the module of gas passage shown in Fig. 1.
Fig. 5 is the C-C view of the module of gas passage shown in Fig. 1.
Fig. 6 is the D-D view of the module of gas passage shown in Fig. 1.
Fig. 7 is the E-E view of the module of gas passage shown in Fig. 1.
Fig. 8 is the vertical view of the gas passage module shown in Fig. 1.
Fig. 9 is the Y magnified partial view of the module of gas passage shown in Fig. 8.
Figure 10 is the rear view of the gas passage module shown in Fig. 1.
Figure 11 is the Z magnified partial view of the module of gas passage shown in Figure 10.
Figure 12 is the H-H view of the module of gas passage shown in Figure 11.
Figure 13 is the assembling schematic diagram of gas distributing device in one embodiment of the present of invention.
Figure 14 is the P magnified partial view of the module of gas passage shown in Figure 13.
Embodiment
Embodiments of the invention are described with reference to the accompanying drawings.In Figure of description, element or the device with similar structures or function represent with identical component symbol.Accompanying drawing just each embodiment of the present invention for convenience of explanation, is not the explanation will carrying out exhaustive to the present invention, neither limits scope of the present invention.
Fig. 1 to Figure 12 shows the structural representation of the gas passage module of a preferred embodiment in the present invention.In this embodiment, gas passage module 100 is totally similar to a long and narrow rectangular parallelepiped valve island, and this rectangular parallelepiped valve island end face is provided with 6 air inlet ports, comprises 1 primary inlet port 18 and 5 auxiliary air inlet ports 12.Deflection valve island, primary inlet port 18 position aft end face, comparatively speaking, auxiliary air inlet port 12 position arranges deflection valve island front end face.
Valve island aft end face is provided with main air inlet elongated slot 28, and the length of this main air inlet elongated slot 28 is slightly less than channel module total length.In one embodiment, main air inlet elongated slot 28 is in close valve island end natural termination; In another embodiment, main air inlet elongated slot 28 runs through whole valve island, and now elongated slot seals by two ends, valve island end cap and sealing ply, to ensure that main air inlet elongated slot 28 can be sealed.
Primary inlet port 18 is extended to inside, valve island by main internal passages 230, communicates with main air inlet elongated slot 28, and the corresponding main air inlet elongated slot 28 in bottom surface, valve island is provided with multiple main production well 32, and main air inlet elongated slot 28 is communicated with bottom surface by main production well 32.Like this, primary inlet port 18 and main production well 32 form passage, and this passage place beyond main air inlet elongated slot 28 is airtight.
Valve island front end face is provided with auxiliary air inlet elongated slot 22, and in the present embodiment, auxiliary air inlet elongated slot 22 is divided into five sections, and the corresponding auxiliary air inlet elongated slot 22 in bottom surface, valve island is provided with multiple auxiliary production well 30, and auxiliary air inlet elongated slot 22 is communicated with bottom surface by auxiliary production well 30.
Due to the limitation of size of gas injection joint, the distance between multiple auxiliary air inlet port 12 is shorter, and auxiliary air inlet elongated slot 22 length is substantially in occupation of channel module total length, therefore the same way between auxiliary air inlet port 12 and auxiliary air inlet elongated slot 22 has three kinds:
Under normal circumstances, auxiliary air inlet port 12 is communicated (as shown in Figure 3) with auxiliary air inlet elongated slot 22 by the first auxiliary internal passages 228.
For auxiliary air inlet elongated slot 22 slightly far away, auxiliary air inlet port 12 is extended to valve island end direction by the top air drain 14 being arranged on valve island end face, reach after above corresponding auxiliary air inlet elongated slot 22, communicated (as shown in Figure 2 and Figure 7) with auxiliary air inlet elongated slot 22 by the second auxiliary internal passages 226.
For auxiliary air inlet elongated slot 22 farthest, above this auxiliary air inlet elongated slot 22, auxiliary air drain 24 is set, this auxiliary air drain 24 length extends to the below of corresponding auxiliary air inlet port 12 from correspondence auxiliary air inlet elongated slot 22, auxiliary air drain 24 is communicated by auxiliary passage 224 with auxiliary air inlet port 12, and auxiliary air drain 24 connects by being connected air drain 222 with auxiliary air inlet elongated slot 22.Consider the characteristic of fluid resistance, connect between air drain 222 and auxiliary air drain 24, the junction connected between air drain 222 and auxiliary air inlet elongated slot 22 should be made into cambered surface, as far as possible to avoid larger fluid pressure loss.
Like this, auxiliary air inlet port 12 is communicated with all auxiliary air inlet elongated slots 22 by three kinds of modes, auxiliary air inlet port 12 thus form passage with auxiliary production well 30, and this passage place beyond auxiliary air drain 24, auxiliary passage 224 and auxiliary air inlet elongated slot 22 is airtight.
Figure 13 and Figure 14 illustrates the assembling schematic diagram of gas distributing device in one embodiment of the present of invention.Gas passage module 100 be placed on below top board 200, top board 200 is provided with multiple gas injection joint (scheming not shown).These gas injection joints connect with primary inlet port 18 and auxiliary air inlet port 12, and the end face of gas passage module 100 seals by sealing material by top board 200 simultaneously, ensure that sputter gas enters gas passage module without leakage.In a preferred embodiment, primary inlet port 18 and auxiliary air inlet port 12 arrange " o " RunddichtringO, to ensure sealing effectiveness.
With front side board 42, the front end face of gas passage module 100 is sealed, auxiliary air drain 24, auxiliary passage 224 and auxiliary air inlet elongated slot 22 are hedged off from the outer world, with back side panel 43, the aft end face of gas passage module 100 is sealed, main air inlet elongated slot 28 is hedged off from the outer world.In a preferred embodiment, the sealing material 422 between side plate and end face adopts highland barley paper.
U-shaped cover plate 44 is used for the bottom surface of confining gas channel module 100.As shown in figure 14, U-shaped cover plate 44 forms mixed air cavity 442 with the bottom surface of gas passage module 100, like this, converge in mixed air cavity 442 from the main production well 32 of gas passage module 100 and auxiliary production well 30 gas out, enter glass coating well location by the gas orifice 46 of U-shaped cover plate 44.
In a preferred embodiment, the outlet of gas orifice 46 is other is provided with flow deflector 45, and flow deflector 45 can be fixed on U-shaped cover plate 44 by screw 452, also can adopt other fixed forms such as bonding or welding.In a further advantageous embodiment, mixed air cavity 442 inside is provided with little shrouding (scheming not shown), and mixed air cavity can be divided into independently several sections by little shrouding.
In use, primary inlet port remains air inlet, and auxiliary air inlet port then can by the size of its whether air inlet or air input of Valve controlling.Like this, the gaseous tension of mixed air cavity just can be made consistent, thus ensure that the gas that whole gas distributing device sprays in whole length range is uniform.
Although the foregoing describe the specific embodiment of the present invention, it will be understood by those of skill in the art that these only illustrate, protection scope of the present invention is defined by the appended claims.Those skilled in the art, under the prerequisite not deviating from principle of the present invention and essence, can make various changes or modifications to these embodiments, but these change and amendment all falls into protection scope of the present invention.
Claims (8)
1. a gas passage module, is characterized in that, described gas passage module totality is a rectangular parallelepiped, wherein,
Described rectangular parallelepiped horizontal direction has the first end face and the second end face, the first end face is provided with the first elongated slot, and the second end face is provided with the second elongated slot;
Described rectangular parallelepiped end face is provided with a primary inlet port and multiple auxiliary air inlet port, and the corresponding primary inlet port of rectangular parallelepiped main body and auxiliary air inlet port are provided with the first internal passages and the second internal passages, and described rectangular parallelepiped bottom surface is provided with multiple main production well and multiple auxiliary production well;
Described primary inlet port is communicated with the first elongated slot by the first internal passages, and described auxiliary air inlet port is communicated with the second elongated slot by the second internal passages;
Described first elongated slot is communicated by main production well with gas passage module bottom, and described second elongated slot is isolated into multiple independently auxiliary gas elongated slot, and described multiple auxiliary gas elongated slot is arranged in order, and each auxiliary gas elongated slot is communicated by auxiliary production well with gas passage module bottom;
Second end face of described gas passage module is also arranged the 3rd elongated slot, described 3rd elongated slot is communicated with the auxiliary air inlet port of part by one the 3rd internal passages, and described 3rd elongated slot is communicated by the auxiliary gas elongated slot of an auxiliary tank and the part in the second elongated slot;
Auxiliary air inlet port is by the size of its whether air inlet or air input of Valve controlling.
2. gas passage module as claimed in claim 1, it is characterized in that, described rectangular parallelepiped top is provided with top air drain, and the auxiliary air inlet port of part is connected with top air drain.
3. a gas distributing device, is characterized in that, described device comprises a gas passage module, top board, the first side plate, the second side plate, U-shaped cover plate, and described gas passage module adopts gas passage module as claimed in claim 1 or 2, wherein,
Described top plate seal gas passage module end face, described first side plate seals the first elongated slot, and described second side plate seals the second elongated slot and/or the 3rd elongated slot.
4. gas distributing device as claimed in claim 3, it is characterized in that, described top board comprises gas injection joint, and described gas injection joint is corresponding with described primary inlet port and auxiliary air inlet port to be arranged.
5. gas distributing device as claimed in claim 3, it is characterized in that, described U-shaped cover plate is arranged on the bottom of gas passage module, forms mixed air cavity with gas passage module bottom.
6. gas distributing device as claimed in claim 5, it is characterized in that, described mixed air cavity inside is provided with shrouding, and mixed air cavity is divided into independently several sections.
7. the gas distributing device as described in claim 4,5 or 6, is characterized in that, described U-shaped cover plate is provided with gas orifice.
8. gas distributing device as claimed in claim 7, is characterized in that, described gas orifice is other is also provided with flow deflector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210013232.1A CN103205719B (en) | 2012-01-17 | 2012-01-17 | Gas passage module and apply its gas distributing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210013232.1A CN103205719B (en) | 2012-01-17 | 2012-01-17 | Gas passage module and apply its gas distributing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103205719A CN103205719A (en) | 2013-07-17 |
| CN103205719B true CN103205719B (en) | 2015-09-09 |
Family
ID=48753121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210013232.1A Active CN103205719B (en) | 2012-01-17 | 2012-01-17 | Gas passage module and apply its gas distributing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103205719B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103396008A (en) * | 2013-08-02 | 2013-11-20 | 蚌埠雷诺真空技术有限公司 | Uniform air inlet apparatus of magnetron sputtering vacuum chambers |
| CN104034699B (en) * | 2014-06-19 | 2016-08-17 | 同济大学 | A kind of automatic detection gathers the device of sample transmission rate |
| CN109306303A (en) * | 2017-07-28 | 2019-02-05 | 宁波乐惠国际工程装备股份有限公司 | A kind of gas distribution block, pneumatic arranges poor device and lautertuns at pneumatic system |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4425218A (en) * | 1982-03-30 | 1984-01-10 | Shatterproof Glass Corporation | Gas distribution system for sputtering cathodes |
| DE4120176C1 (en) * | 1991-06-19 | 1992-02-27 | Schott Glaswerke, 6500 Mainz, De | |
| GB2277327A (en) * | 1993-04-22 | 1994-10-26 | Balzers Hochvakuum | Gas inlet arrangement |
| CN101040061A (en) * | 2004-10-11 | 2007-09-19 | 贝卡尔特先进涂层公司 | An elongated gas ditribution system |
| CN101159228A (en) * | 2006-10-02 | 2008-04-09 | 东京毅力科创株式会社 | Processing gas supplying mechanism, supplying method and gas processing unit |
| CN101337596A (en) * | 2008-07-23 | 2009-01-07 | 安徽中烟工业公司 | Method and device of cigarette-case seal folding device on soft cigarette packaging machine |
| CN101842880A (en) * | 2008-03-27 | 2010-09-22 | 东京毅力科创株式会社 | Gas feeding device, treating device, treating method, and storage medium |
| CN202543305U (en) * | 2012-01-17 | 2012-11-21 | 上海北玻镀膜技术工业有限公司 | Gas channel module and gas distributing device applying same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6502530B1 (en) * | 2000-04-26 | 2003-01-07 | Unaxis Balzers Aktiengesellschaft | Design of gas injection for the electrode in a capacitively coupled RF plasma reactor |
-
2012
- 2012-01-17 CN CN201210013232.1A patent/CN103205719B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4425218A (en) * | 1982-03-30 | 1984-01-10 | Shatterproof Glass Corporation | Gas distribution system for sputtering cathodes |
| DE4120176C1 (en) * | 1991-06-19 | 1992-02-27 | Schott Glaswerke, 6500 Mainz, De | |
| GB2277327A (en) * | 1993-04-22 | 1994-10-26 | Balzers Hochvakuum | Gas inlet arrangement |
| CN101040061A (en) * | 2004-10-11 | 2007-09-19 | 贝卡尔特先进涂层公司 | An elongated gas ditribution system |
| CN101159228A (en) * | 2006-10-02 | 2008-04-09 | 东京毅力科创株式会社 | Processing gas supplying mechanism, supplying method and gas processing unit |
| CN101842880A (en) * | 2008-03-27 | 2010-09-22 | 东京毅力科创株式会社 | Gas feeding device, treating device, treating method, and storage medium |
| CN101337596A (en) * | 2008-07-23 | 2009-01-07 | 安徽中烟工业公司 | Method and device of cigarette-case seal folding device on soft cigarette packaging machine |
| CN202543305U (en) * | 2012-01-17 | 2012-11-21 | 上海北玻镀膜技术工业有限公司 | Gas channel module and gas distributing device applying same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103205719A (en) | 2013-07-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103358619B (en) | High-transparency can the two silver low-radiation coated glass of tempering and preparation method thereof | |
| CN103205719B (en) | Gas passage module and apply its gas distributing device | |
| CN106186723B (en) | Saturating light blue bendable steel Three-silver-layer low-radiation coated glass and preparation process in one kind | |
| CN101321708A (en) | Method and device for deposition of high-quality reflection coating | |
| CN203391418U (en) | High permeable type temperable double-silver low-emissivity coated glass | |
| CN106186724B (en) | A kind of high light green color bendable steel Three-silver-layer low-radiation coated glass and preparation method | |
| CN103864315B (en) | A kind of silver-colored titanium complex functional layer Low emissivity energy-saving glass and preparation method thereof | |
| CN105130209A (en) | High-transmittance low-cost color-adjustable low-radiation energy-saving glass and preparation method thereof | |
| CN102501450A (en) | Light-transmission single-silver low radiation coated glass and manufacturing method for same | |
| CN106904842A (en) | A kind of champagne gold double-silver low-emissivity coated glass and preparation method | |
| CN107382093A (en) | A kind of Chinese red double-silver low-emissivity coated glass and preparation method | |
| CN202543305U (en) | Gas channel module and gas distributing device applying same | |
| CN205976970U (en) | Coated hollow glass behind intermediate layer | |
| CN105269893A (en) | Low-reflection high-temperature-resistance temperable and wear-resisting coated glass and production method | |
| CN205347235U (en) | Prevent blue light, anti scuffing glass | |
| CN204151409U (en) | Linear sputter source segmentation airing system | |
| CN205974275U (en) | In pass through three silver medal low -emissivity coated glass of light blue bendable steel | |
| CN103614696B (en) | A kind of preparation method of etching resistant film | |
| CN103847170B (en) | A kind of Multifunctional layered Low emissivity energy-saving glass and preparation method thereof | |
| CN201695080U (en) | Magnetic control sputtering coating machine | |
| JPH0741337A (en) | Optical coloring prevention transparent body | |
| WO2009019373A3 (en) | Front face substrate of a plasma screen, use of same and production method thereof | |
| JP2001015783A (en) | Method and device for manufacturing tin oxide film | |
| CN102514279A (en) | Four-silver coated glass with low radiation and manufacturing technique thereof | |
| CN105015107B (en) | Color-adjustable low radiation energy saving glass and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240110 Address after: Zone C, 4th Floor, Building 1, No. 328 Guanghua Road, Xiaokunshan Town, Songjiang District, Shanghai, 200000 Patentee after: Shanghai Beibo Vacuum Coating Technology Co.,Ltd. Address before: Floor 3, No. 328 Guanghua Road, Songjiang Science and Technology Park, Songjiang District, Shanghai, 2016 Patentee before: SHANGHAI NORTHGLASS COATING TECHNOLOGY INDUSTRIAL Co.,Ltd. Patentee before: SHANGHAI NORTHGLASS TECHNOLOGY INDUSTRIAL Co.,Ltd. Patentee before: LUOYANG NORTHGLASS TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |