CN202487555U - Quartz suction pen for loading and unloading silicon chips - Google Patents
Quartz suction pen for loading and unloading silicon chips Download PDFInfo
- Publication number
- CN202487555U CN202487555U CN2012201435524U CN201220143552U CN202487555U CN 202487555 U CN202487555 U CN 202487555U CN 2012201435524 U CN2012201435524 U CN 2012201435524U CN 201220143552 U CN201220143552 U CN 201220143552U CN 202487555 U CN202487555 U CN 202487555U
- Authority
- CN
- China
- Prior art keywords
- quartz
- quartzy
- sucker
- silicon chip
- loading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a quartz suction pen for loading and unloading silicon chips, comprising a quartz sucker, a quartz suction tube and a vacuumizing connection tube. A plastic cushion is arranged in the quartz sucker and a plastic sleeve is arranged at the lower part of the quartz suction tube so as to connect the quartz suction tube and the quartz sucker together. According to the utility model, the fragment rate and the defect rate of the manual operation are reduced and the quartz suction pen is simple to operate.
Description
Technical field
The utility model relates to a kind of anchor clamps that are used to load and unload silicon chip, particularly a kind of quartz suction pen that is used to load and unload silicon chip.
Background technology
At present, manufacture of solar cells technology generally comprise cleaning and texturing, diffusion, etching, dephosphorization silex glass, plated film, print electrode, technology such as sintering and test.Wherein filming process is the critical process in the polysilicon solar cell production process, needs to use a kind of anchor clamps to be used to load and transport silicon chip, avoids staff directly to contact silicon chip, thereby guarantees the technology cleanliness factor.Mostly the used filming equipment in existing polysilicon solar cell field is tubular film plating equipment, uses graphite boat to load silicon chip, need in the graphite boat draw-in groove, insert silicon chip during operation, so that simultaneously accomplish the SiNx plated film at silicon chip.Therefore, design of Clamping Apparatus not only will guarantee the technology cleanliness factor, also need be convenient to employee's operation, reduces artificial fragment rate and fraction defective.
Summary of the invention
The utility model technical problem to be solved provides a kind of quartz suction pen that is used to load and unload silicon chip, has reduced the fragment rate and the fraction defective of manual operation, and is simple to operate.
The technical scheme that the utility model technical solution problem adopts is: a kind of quartz suction pen that is used to load and unload silicon chip; Comprise quartzy sucker, quartzy suction pipe, vacuumize adapter; In said quartzy sucker, be provided with the plastic cement cushion; Said quartzy suction pipe bottom is provided with garment bag, and quartzy suction pipe and quartzy sucker are linked together.
During the utility model operation, will vacuumize adapter and be connected with vacuum device, startup vacuumizes gas circuit; Hold a slice silicon chip through quartzy sucker, the quartzy suction pipe of holding with a firm grip then, hand griping position is for being provided with the garment bag place; Then silicon chip is moved in the graphite boat draw-in groove, disconnection vacuumizes gas circuit then, and silicon chip promptly is stuck in the graphite boat draw-in groove; At last the utility model is shifted out, accomplish the shipment of a silicon chip.
The beneficial effect of the utility model is: in quartzy sucker, establish the plastic cement cushion, promptly when quartzy sucker holds silicon chip, guarantee not touch to hinder silicon chip; Be provided with the garment bag that connects quartzy sucker in quartzy suction pipe bottom, during operation, hold on garment bag and directly do not contact quartzy suction pipe, can reduce fragment rate artificial in the shipment and fraction defective.
Description of drawings
Fig. 1 is the structural representation of the utility model embodiment.
Below in conjunction with accompanying drawing the utility model is further specified.
Embodiment
As shown in Figure 1; A kind of quartz that is used to load and unload silicon chip is inhaled pen, comprises quartzy sucker 1, quartzy suction pipe 3, vacuumizes and take over 4, in quartzy sucker 1, is provided with plastic cement cushion 2; Be provided with garment bag 5 in quartzy suction pipe 3 bottoms, garment bag 5 links together quartzy suction pipe 3 with quartzy sucker 1.
Claims (1)
1. a quartz that is used to load and unload silicon chip is inhaled pen; Comprise quartzy sucker (1), quartzy suction pipe (3), vacuumize adapter (4); It is characterized in that: in said quartzy sucker (1), be provided with plastic cement cushion (2); Said quartzy suction pipe (3) bottom is provided with garment bag (5), and quartzy suction pipe (3) and quartzy sucker (1) are linked together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201435524U CN202487555U (en) | 2012-04-09 | 2012-04-09 | Quartz suction pen for loading and unloading silicon chips |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201435524U CN202487555U (en) | 2012-04-09 | 2012-04-09 | Quartz suction pen for loading and unloading silicon chips |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202487555U true CN202487555U (en) | 2012-10-10 |
Family
ID=46961956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201435524U Expired - Lifetime CN202487555U (en) | 2012-04-09 | 2012-04-09 | Quartz suction pen for loading and unloading silicon chips |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202487555U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103346112A (en) * | 2013-06-15 | 2013-10-09 | 成都聚合科技有限公司 | Vacuum pipette of photovoltaic cell silicon wafer |
| CN115533740A (en) * | 2022-11-25 | 2022-12-30 | 唐山国芯晶源电子有限公司 | Quartz wafer take-up device and method |
-
2012
- 2012-04-09 CN CN2012201435524U patent/CN202487555U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103346112A (en) * | 2013-06-15 | 2013-10-09 | 成都聚合科技有限公司 | Vacuum pipette of photovoltaic cell silicon wafer |
| CN115533740A (en) * | 2022-11-25 | 2022-12-30 | 唐山国芯晶源电子有限公司 | Quartz wafer take-up device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121010 |
|
| CX01 | Expiry of patent term |