CN204792750U

CN204792750U - Piece ware is got to wafer

Info

Publication number: CN204792750U
Application number: CN201520535108.0U
Authority: CN
Inventors: 刘宗超
Original assignee: Chengdu Gastone Technology Co Ltd
Current assignee: Chengdu Hiwafer Technology Co Ltd
Priority date: 2015-07-22
Filing date: 2015-07-22
Publication date: 2015-11-18
Anticipated expiration: 2025-07-22

Abstract

The utility model provides a piece ware is got to wafer. Piece ware is got to wafer includes: the handle, the handle is hollow structure, is equipped with the relief valve on the handle, and the relief valve is used for carrying out the pressure release to handle inside, vacuum generator, vacuum generator connects the tail end of handle, two fork supports, two fork supports include linking arm, first yoke and second yoke, and the front end at the handle is fixed to the linking arm, and the both ends at the linking arm are fixed respectively to first yoke and second yoke, sucking disc, sucking disc pass through the front end that the handle is connected to the elasticity trachea, and the sucking disc is located between first yoke and the second yoke, and the adsorption plane of sucking disc is a little more than the upper surface of first yoke and second yoke. In this way, the utility model discloses can make things convenient for, get safely puts the wafer.

Description

Wafer picture-taking device

Technical field

The utility model relates to ic manufacturing technology field, particularly relates to a kind of wafer picture-taking device.

Background technology

In IC manufacturing, automaticity is very high, but still have process portion to need manual hand manipulation, such as need in the middle of brilliant boat (cassette), to pick and place wafer manually, when particularly picking out specific wafer from brilliant boat, more need manual operation.

Because people knows from experience secretion grease and sweat, so human body skin has grease and salinity, the salinity existed on operating personnel's skin or grease make semiconductor device be affected, and usually use the tweezers of clamping wafer specific part to clamp wafer or use vacuum WAND to draw wafer.But, tweezers are used to be very easy to the edge of damage wafers, and then cause semiconductor device failure, affect the yield of product, and use vacuum WAND can prevent wafer from damaging, but when wafer out-of-flatness or surface exist attachment, just there will be absorption situation loosely, cause wafer to come off from vacuum WAND, danger is very large.

Utility model content

The technical problem that the utility model mainly solves is to provide a kind of wafer picture-taking device, can pick and place wafer easily and safely.

For solving the problems of the technologies described above, the technical scheme that the utility model adopts is: provide a kind of wafer picture-taking device, comprising: handle, described handle is hollow structure, and described handle is provided with relief valve, and described relief valve is used for carrying out pressure release to handle inner; Vacuum generator, described vacuum generator connects the tail end of described handle; Two fork support, described pair of fork support comprises linking arm, the first yoke and the second yoke, and described linking arm is fixed on the front end of described handle, and described first yoke and described second yoke are separately fixed at the two ends of described linking arm; Sucker, described sucker connects the front end of described handle by elasticity tracheae, and described sucker is between described first yoke and described second yoke, and the adsorption plane of described sucker is a little more than the upper surface of described first yoke and described second yoke.

Preferably, described vacuum generator is soft capsule.

Preferably, the tail end of described soft capsule and described handle removably connects.

Preferably, the upper surface of described first yoke and described second yoke is provided with rubber washer or rubber strip.

Preferably, described first yoke and described second yoke are arc away from one end of described linking arm.

Preferably, the material of described first yoke and described second yoke is stainless steel or aluminium alloy.

Be different from the situation of prior art, the beneficial effects of the utility model are: utilize sucker suction wafer and adopt two fork stent support wafer, even if when vacuum leak, also can supporting wafer well, ensure that wafer can not drop, thus wafer can be picked and placeed easily and safely, can be applicable to multiple occasion.

Accompanying drawing explanation

Fig. 1 is the structural representation of the utility model embodiment wafer picture-taking device.

Schematic diagram when Fig. 2 is the utility model embodiment wafer picture-taking device absorption wafer.

Embodiment

Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only a part of embodiment of the present utility model, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.

See Fig. 1, it is the structural representation of the utility model embodiment wafer picture-taking device.The wafer picture-taking device of the present embodiment comprises handle 1, vacuum generator 2, two fork support 3 and sucker 4.

Handle 1 is hollow structure, and handle 1 is provided with relief valve 11, and relief valve 11 is for carrying out pressure release to handle 1 inside.The tail end of vacuum generator 2 connecting handle 1.Two fork support 3 comprises linking arm 30, first yoke 31 and the second yoke 32, linking arm 30 is fixed on the front end of handle 1, first yoke 31 and the second yoke 32 are separately fixed at the two ends of linking arm 30, and the first yoke 31 and the second yoke 32 extend to the direction away from handle 1.Sucker 4 is by the front end of elasticity tracheae 41 connecting handle 1, and sucker 4 is between the first yoke 31 and the second yoke 32, and the adsorption plane of sucker 4 is a little more than the upper surface of the first yoke 31 and the second yoke 32.

In the present embodiment, vacuum generator 2 is soft capsule.When adsorbing wafer, first extrude soft capsule, because the adsorption plane of sucker 4 is a little more than the upper surface of the first yoke 31 and the second yoke 32, sucker 4 can touch wafer smoothly, contact after wafer until sucker 4 and unclamp soft capsule, the inner space of handle 1 forms negative pressure thus absorption wafer.Due to connecting sucker 4 and handle 1 is elasticity tracheae 41, it has certain elasticity, so the adsorption plane of sucker 4 slightly declines under wafer Action of Gravity Field, at this moment the adsorption plane of sucker 4 is substantially identical with the upper level of the second yoke 32 with the first yoke 31, first yoke 31 and the second yoke 32 together play the effect of supporting wafer with sucker 4, as shown in Figure 2.When placing wafer, wafer is moved to assigned address, then press relief valve 11 and make handle 1 internal and external pressure balance, sucker 4 will discharge wafer.

Alternatively, the upper surface of the first yoke 31 and the second yoke 32 is provided with rubber washer or rubber strip 33, and rubber washer or rubber strip play damping and increase the effect of friction, can firm wafer.The material of the first yoke 31 and the second yoke 32 can be stainless steel or aluminium alloy, during in order to avoid absorption wafer, first yoke 31 and the second yoke 32 are damaged wafer, and in the present embodiment, the first yoke 31 and the second yoke 32 are arc away from one end of linking arm 30.The geomery of sucker 4, first yoke 31 and the second yoke 32 can be arranged according to the size of wafer, for 6 cun of wafers, the front end 75mm of the centre distance handle 1 of sucker 4, the diameter of sucker 4 is 20 ~ 50mm, and the width of the first yoke 31 and the second yoke 32 is 15 ~ 25mm.

Further, the tail end of soft capsule and handle 1 removably connects.After soft capsule is pulled down, vacuum generator 2 is replaceable is the vacuum tube of external vacuum system.

By the way, the wafer picture-taking device of the utility model embodiment utilizes sucker suction wafer and adopts two fork stent support wafer, even if when vacuum leak, also can supporting wafer well, ensure that wafer can not drop, thus wafer can be picked and placeed easily and safely, can be applicable to multiple occasion.

The foregoing is only embodiment of the present utility model; not thereby the scope of the claims of the present utility model is limited; every utilize the utility model specification and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.

Claims

1. a wafer picture-taking device, is characterized in that, comprising:

Handle, described handle is hollow structure, and described handle is provided with relief valve, and described relief valve is used for carrying out pressure release to handle inner;

Vacuum generator, described vacuum generator connects the tail end of described handle;

Two fork support, described pair of fork support comprises linking arm, the first yoke and the second yoke, and described linking arm is fixed on the front end of described handle, and described first yoke and described second yoke are separately fixed at the two ends of described linking arm;

Sucker, described sucker connects the front end of described handle by elasticity tracheae, and described sucker is between described first yoke and described second yoke, and the adsorption plane of described sucker is a little more than the upper surface of described first yoke and described second yoke.

2. wafer picture-taking device according to claim 1, is characterized in that, described vacuum generator is soft capsule.

3. wafer picture-taking device according to claim 2, is characterized in that, the tail end of described soft capsule and described handle removably connects.

4. the wafer picture-taking device according to any one of claims 1 to 3, is characterized in that, the upper surface of described first yoke and described second yoke is provided with rubber washer or rubber strip.

5. wafer picture-taking device according to claim 4, is characterized in that, described first yoke and described second yoke are arc away from one end of described linking arm.

6. wafer picture-taking device according to claim 4, is characterized in that, the material of described first yoke and described second yoke is stainless steel or aluminium alloy.