CN202440567U - Polycrystal furnace - Google Patents

Polycrystal furnace Download PDF

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Publication number
CN202440567U
CN202440567U CN2012200356864U CN201220035686U CN202440567U CN 202440567 U CN202440567 U CN 202440567U CN 2012200356864 U CN2012200356864 U CN 2012200356864U CN 201220035686 U CN201220035686 U CN 201220035686U CN 202440567 U CN202440567 U CN 202440567U
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CN
China
Prior art keywords
cover plate
heater
crucible
inwall
warming plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2012200356864U
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Chinese (zh)
Inventor
孟涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZHENJIANG RENDE NEW ENERGY TECHNOLOGY Co Ltd
Original Assignee
ZHENJIANG RENDE NEW ENERGY TECHNOLOGY Co Ltd
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Application filed by ZHENJIANG RENDE NEW ENERGY TECHNOLOGY Co Ltd filed Critical ZHENJIANG RENDE NEW ENERGY TECHNOLOGY Co Ltd
Priority to CN2012200356864U priority Critical patent/CN202440567U/en
Application granted granted Critical
Publication of CN202440567U publication Critical patent/CN202440567U/en
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Expired - Lifetime legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The utility model relates to a polycrystal furnace which comprises a heat insulation device, a heater and a graphite crucible, wherein the heater is arranged in the heat insulation device, the graphite crucible is arranged in a thermal field formed by the heater and used for protecting and bearing a quartz crucible, the graphite crucible comprises a crucible body and a cover plate arranged at an opening of the crucible body; and the cover plate is fixed on the inner wall of the heat insulation device. The polycrystal furnace overcomes the defects that the cover plate of the conventional polycrystal furnace is easily damaged and broken and is short in service life; and the polycrystal furnace provided by the utility model greatly prolongs the service life of the cover plate.

Description

A kind of polycrystalline furnace
Technical field
The utility model relates to the polycrystalline production field.Be specially a kind of polycrystalline furnace.
Background technology
Silicon chip is widely used in a lot of fields at present, mainly is crystal silicon solar energy battery like solar cell piece, and crystal silicon cell is divided into monocrystalline silicon battery and polycrystal silicon cell, and its body material that adopts is respectively monocrystalline silicon piece and polysilicon chip.Monocrystalline silicon piece and polysilicon chip obtain through cutting monocrystalline and polysilicon crystal.Produce polysilicon crystalline equipment and be mainly polycrystalline furnace, through polycrystalline furnace polycrystalline is carried out directional freeze and obtain the polysilicon crystal.The structure of polycrystalline furnace is as shown in Figure 1, comprises top warming plate 1 and sidepiece warming plate 2, and the inwall of top warming plate 1 is provided with top heater 3, and the inwall of sidepiece warming plate 2 is provided with sidepiece well heater 4, and to produce thermal field, thermal field provides heat and thermograde.Be provided with plumbago crucible 5 in the thermal field, be used to protect and carry the quartz crucible 7 that polycrystalline silicon raw material 8 is housed.In quartz crucible, fall into impurity for the lagging material that prevents the polycrystalline furnace top and heat-generating system when the high temperature,, pollute polycrystalline silicon raw material 8, be stamped cover plate 6 at the opening part of plumbago crucible like carbon.After polycrystalline silicon raw material 8 is solidified as oriented solidified blocks 9; Cover plate 6 takes out from polycrystalline furnace with plumbago crucible 5, and the temperature during taking-up is about 400 °, at ambient temperature cool to room temperature; Taking away cover plate takes out the polycrystalline ingot in the quartz crucible; Again add polycrystal raw material afterwards, cover cover plate, plumbago crucible is put back to polycrystalline furnace carry out next round production.
At present, cover plate adopts C/C (carbon carbon is compound) cover plate more, and the C/C cover plate is in light weight and high temperature resistant.But the C/C cover plate in use; As when taking away, transporting and putting back to, its thomel possibly rupture because of mechanical external force, in addition; The temperature head of reducing to room temperature from about 400 ° high temperature produces stress to its staple fibre also makes its fracture easily; Therefore the C/C lid is lower work-ing life, because it costs an arm and a leg, causes production polysilicon crystalline cost very high again.
The utility model content
The technical problem that the utility model solves is that the cover plate that overcomes existing polycrystalline furnace damages easily, ruptures, and the shortcoming that work-ing life is short provides a kind of polycrystalline furnace that can prolong the work-ing life of cover plate greatly.
The polycrystalline furnace of the utility model; Comprise attemperator, be located at the well heater in the said attemperator and be located at the plumbago crucible that is used to protect and carry quartz crucible in the thermal field that said well heater forms; Said plumbago crucible comprises the crucible body and is positioned at the cover plate of the opening part of said crucible body that said cover plate is fixed on the inwall of said attemperator.
As preferably; Said attemperator comprises top warming plate and sidepiece warming plate; Said heating unit comprises the top heater and the sidepiece well heater that is fixed in the inwall of sidepiece warming plate of the inwall that is fixed in said top warming plate, and said cover plate is fixed in the inwall of said top warming plate and is positioned at the below of said top heater.
Preferred as further, said cover plate through screw rod or bolt on the inwall of said top warming plate.
Preferred as further, said screw rod and said top heater shortest distance in the horizontal direction are greater than 25mm.
Preferred as further, said screw rod and said top heater shortest distance in the horizontal direction are greater than 45mm.
The described polycrystalline furnace of the utility model is compared with prior art, has following beneficial effect:
The cover plate of the plumbago crucible of the polycrystalline furnace of the utility model is fixed on the inwall of attemperator.When the polycrystal ingot casting finishes, plumbago crucible is taken out from polycrystalline furnace, cover plate is still stayed in the polycrystalline furnace, need not take off like this, transport and cover cover plate again, has reduced the damage that external mechanical force causes.In addition, because cover plate is stayed in the attemperator, its temperature descends slowly, has reduced the thomel fracture that thermal stresses causes.
Description of drawings
Fig. 1 is the structural representation of the polycrystalline furnace of prior art;
Fig. 2 is the structural representation of the polycrystalline furnace of an embodiment of the utility model;
Fig. 3 is used to connect the screw rod of cover plate and the location diagram between the top heater.
1-top warming plate, 2-sidepiece warming plate, 3-top heater, 4-sidepiece well heater, 5-plumbago crucible, 6-cover plate, 7-quartz crucible, 8-polycrystalline silicon raw material, 9-oriented solidified blocks, 10-screw rod, 11-nut.
Embodiment
Fig. 2 is the structural representation of the polycrystalline furnace of an embodiment of the utility model, and Fig. 3 is used to connect the screw rod 10 of cover plate 6 and the location diagram between the top heater 3.As shown in Figures 2 and 3; The polycrystalline furnace of the utility model; Comprise attemperator, be located at the well heater in the attemperator and be located at the plumbago crucible 5 that is used to protect and carry quartz crucible 7 in the thermal field that said well heater forms; Said plumbago crucible 5 comprises the crucible body and is positioned at the cover plate 6 of the opening part of said crucible body that said cover plate 6 is fixed on the inwall of said attemperator.Be contained with polycrystalline silicon raw material 8 in the quartz crucible 7, through high temperature, the polycrystal raw material is solidified as oriented solidified blocks 9; It is the process of ingot casting; When the polycrystal ingot casting finishes, plumbago crucible 5 is taken out from polycrystalline furnace, cover plate 6 is still stayed in the polycrystalline furnace; Need not take off like this, transport and cover cover plate 6 again, reduce the damage that external mechanical force causes.In addition, because cover plate 6 is stayed in the attemperator, its temperature descends slowly, has reduced the thomel fracture that thermal stresses causes.
In the present embodiment, said attemperator comprises top warming plate 1 and sidepiece warming plate 2, and top warming plate 1 is processed by insulation and resistant to elevated temperatures material with sidepiece warming plate 2.Said heating unit comprises the top heater 3 and the sidepiece well heater 4 that is fixed in the inwall of sidepiece warming plate 2 of the inwall that is fixed in said top warming plate 1, and top heater 3 all adopts well heater commonly used at present with sidepiece well heater 4, at this, seldom gives unnecessary details.Said cover plate 6 through screw rod 10 or bolt warming plate 1 in said top inwall and be positioned at the below of said top heater 3.Be specially: the corresponding position of warming plate 1 and cover plate 6 all wears six holes at the top, after two terminations of screw rod 10 or bolt are passed corresponding hole respectively, nut 11 is installed, thereby cover plate 6 liftings are fixed on the inwall of top warming plate 1.
Be short-circuited for fear of between bolt or screw rod 10 and the top heater 3, phenomenon such as sparking, said screw rod 10 is set to greater than 25mm with the distance of said top heater 3.Preferably be set to greater than 45mm.
Above embodiment is merely the exemplary embodiment of the utility model, is not used in restriction the utility model, and the protection domain of the utility model is defined by the claims.Those skilled in the art can make various modifications or be equal to replacement the utility model in the essence and protection domain of the utility model, this modification or be equal to replacement and also should be regarded as dropping in the protection domain of the utility model.

Claims (5)

1. polycrystalline furnace; Comprise attemperator, be located at the well heater in the said attemperator and be located at the plumbago crucible that is used to protect and carry quartz crucible in the thermal field that said well heater forms; Said plumbago crucible comprises the crucible body and is positioned at the cover plate of the opening part of said crucible body that it is characterized in that: said cover plate is fixed on the inwall of said attemperator.
2. polycrystalline furnace according to claim 1; It is characterized in that: said attemperator comprises top warming plate and sidepiece warming plate; Said heating unit comprises the top heater and the sidepiece well heater that is fixed in the inwall of sidepiece warming plate of the inwall that is fixed in said top warming plate, and said cover plate is fixed in the inwall of said top warming plate and is positioned at the below of said top heater.
3. polycrystalline furnace according to claim 2 is characterized in that: said cover plate through screw rod or bolt on the inwall of said top warming plate.
4. polycrystalline furnace according to claim 3 is characterized in that: said screw rod and said top heater shortest distance in the horizontal direction are greater than 25mm.
5. polycrystalline furnace according to claim 4 is characterized in that: said screw rod and said top heater shortest distance in the horizontal direction are greater than 45mm.
CN2012200356864U 2012-02-03 2012-02-03 Polycrystal furnace Expired - Lifetime CN202440567U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012200356864U CN202440567U (en) 2012-02-03 2012-02-03 Polycrystal furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2012200356864U CN202440567U (en) 2012-02-03 2012-02-03 Polycrystal furnace

Publications (1)

Publication Number Publication Date
CN202440567U true CN202440567U (en) 2012-09-19

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CN2012200356864U Expired - Lifetime CN202440567U (en) 2012-02-03 2012-02-03 Polycrystal furnace

Country Status (1)

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CN (1) CN202440567U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103409798A (en) * 2013-08-03 2013-11-27 安徽大晟新能源设备科技有限公司 Fixing structure of lower heater of pseudo-single crystal ingot furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103409798A (en) * 2013-08-03 2013-11-27 安徽大晟新能源设备科技有限公司 Fixing structure of lower heater of pseudo-single crystal ingot furnace
CN103409798B (en) * 2013-08-03 2016-02-24 安徽大晟新能源设备科技有限公司 The lower well heater fixed sturcture of accurate single-crystal ingot casting furnace

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CX01 Expiry of patent term

Granted publication date: 20120919

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