CN202428048U - Diamond fretsaw with stranded core wire - Google Patents
Diamond fretsaw with stranded core wire Download PDFInfo
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- CN202428048U CN202428048U CN2011204533191U CN201120453319U CN202428048U CN 202428048 U CN202428048 U CN 202428048U CN 2011204533191 U CN2011204533191 U CN 2011204533191U CN 201120453319 U CN201120453319 U CN 201120453319U CN 202428048 U CN202428048 U CN 202428048U
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- stranded core
- diamond
- diamond fretsaw
- stranded
- cushion
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Abstract
The utility model provides a diamond fretsaw with a stranded core wire. The diamond fretsaw comprises the stranded core wire consisting of a plurality of strands of metal wires, a buffer layer and an abrasive layer with diamond abrasive particles. The diamond fretsaw with the stranded core wire has the advantages of high reliability, high cutting speed, low possibility of breakage, long service life, high recovery rate and the like.
Description
Technical field
The utility model designs a kind of metal or nonmetal cutter sweep, especially relates to the diamond fretsaw with stranded core that a kind of cutting hard material is used.
Background technology
The semiconductor element substrate normally forms through effective cutting processing crisp and hard materials such as silicon chip, sapphire, GaAs, carborundum.Generally can adopt the surface fixing the diamond fretsaw of diamond abrasive grain.This diamond fretsaw is compared with the free abrasive mode of traditional use suspension, and the loss that is cut material is less, and cutting efficiency is significantly improved.And the cutting cooling fluid can be made up of environmental protection more aqueous solution.
Therefore diamond fretsaw receives people's attention as cutting tool of new generation.In cutting process, make full use of in order to make the diamond abrasive layer, generally need diamond fretsaw cabling back and forth, promptly the abrasive material of diamond fretsaw is actually nonexpondable, and access times are more than hundreds of times.The shortcoming of its existence is: diamond fretsaw in use receives the certain force of strain effect; Tension force is big more, and cutting speed is fast more, and scroll saw can bend when using; Increase along with the processing number of times; Diamond fretsaw very easily ruptures because of the stress impact in flexural fatigue or when cutting, so existing diamond fretsaw breaks poor reliability when the surperficial abrasive material of being everlasting still can use.Broken string not only influences production efficiency during cutting, also can have a strong impact on the surface quality of cutting products, scraps by the gross because of the scroll saw broken string often such as the cutting silicon chip.In addition, after the diamond abrasive layer was worn, comes off, the diamond fretsaw after the wearing and tearing just became waste product, can't utilize again.
The utility model content
The utility model is intended to solve at least one of technical problem that exists in the prior art.For this reason, a purpose of the utility model is to propose a kind of diamond fretsaw with stranded core, comprising: stranded core, and said stranded core comprises at least two strands of wires, said at least two strands of wires are stranded each other; Cushion, said buffering metal closely coat said stranded core; Abrasive material, said abrasive material coats said cushion, and disperses to be inlaid with diamond abrasive grain in the said abrasive material.
In an embodiment of the utility model, said cushion is soft copper layer.Copper is a kind of common non-ferrous metal, and its ductility is good, and processing is coated on the steel wire easily, and cheap and easy to get.
In an embodiment of the utility model, the thickness of said soft copper layer is 1-50 μ m.
In an embodiment of the utility model, said abrasive material comprises nickel or nickel alloy layer, and said nickel or nickel alloy layer are formed on the said cushion through the mode of electroplating, and said diamond abrasive grain disperses to be embedded in said nickel or the nickel alloy layer.Nickel or nickel alloy in the utility model as plated material, with diamond abrasive grain regularly attached to scroll saw surface.
In an embodiment of the utility model, the thickness of said nickel or nickel alloy layer is 5-20 μ m.
In an embodiment of the utility model, the external diameter of said stranded core is 50-500 μ m.The external diameter of stranded core must not be less than 50 microns or greater than 500 microns, and too detailed rules and regulations insufficient strength easy fracture too slightly then increases the cutting material loss amount.
In an embodiment of the utility model, said wire diameter is 5-250 μ m.
In an embodiment of the utility model, said wire more than two strands or two strands is stranded each other with the stranded mode of rule.It is even relatively at diverse location that the stranded mode of rule can guarantee to have the diamond fretsaw of stranded core, thereby when cutting, can work uniformly and stably.Preferably have, stranded core belongs to skein silk by three strands or seven money paid for shares, and to set up into stranded core jointly be good.
The utility model the method that a kind of preparation has the diamond fretsaw of stranded core proposed on the other hand, it is characterized in that, may further comprise the steps: said wire more than two strands is twisted into said stranded core through wire twisting machine; Plate said cushion through electro-plating method on said stranded core surface subsequently; Outside said cushion, plate said abrasive material through electro-plating method at last.
The diamond fretsaw with stranded core according to the utility model embodiment has advantage:
1, stranded core forms by the wire more than two strands or two strands is stranded; Has better reliability; Easy fracture not in the cutting process has the part fracture even form in the strands of metal wire of stranded core, and remaining wire still can be kept whole diamond fretsaw and continue to use.
2, because the strands of metal wire lay configuration can form chip space; Sawdust is easy to taken out of the cutting interface in sawing process, and the difficult sawdust that forms stops up, and can make the long-term maintenance of diamond abrasive layer sharp on the one hand; Increase the life-span and repeated use number of times of diamond fretsaw; On the other hand because sawdust is taken out of the cutting interface, cut diamond particles at the interface and quilt and cut the probability that storeroom directly contacts and increase greatly, can obviously increase the speed of cutting.
3, the existence of cushion; The existence of especially soft cushion; Can improve the toughness of diamond fretsaw; Slow down because of diamond particles in the abrasive material and the enormous impact stress that the high speed impact of being cut storeroom produces, avoided the stranded core fracture to a great extent, improved the reliability of diamond fretsaw greatly.
4, because cushion coats stranded core, make many monometallic silks forming stranded core closely to restraint together, even in part monometallic silk pine oil or fracture are arranged; Also still be cushioned in layer is coated on, can be not at random or form burr, especially after diamond fretsaw is repeatedly used; Top layer abrasive material serious wear; If this moment, only there was abrasive material on the stranded core surface, stranded core just is easy to rupture, and the monometallic silk of fracture is prone at random and the formation burr.If stranded core is at random or form burr, the surface quality that then can severe exacerbation be cut, such as forming darker tool marks, crackle even fragment, this can form a large amount of defective products at the cutting ultra thin sheet during such as ultra thin silicon wafers.Coat stranded core through cushion, can improve this problem effectively.
5, cushion has a recycling that is beneficial to diamond fretsaw.The stranded core of diamond fretsaw is generally steel wire, and abrasive material is generally nickel metal or nickel alloy and diamond and plates altogether.After the abrasive material wearing and tearing of diamond fretsaw surface; If have acidproof cushion to exist,, then can remove remaining abrasive material through pickling such as the metallic copper cushion; Remove Ni-based abrasive material such as the hydrochloric acid cleaning and removing; But can corroding metal copper cushion, electroplate abrasive material after the pickling more again, just can obtain brand-new diamond fretsaw.If there is not cushion; When removing surperficial Ni-based abrasive material, pickling then can corrode the steel wire of the inside simultaneously; If abrasive material is directly electroplated in not pickling again, because remaining abrasive material thickness is uneven, the diamond fretsaw diameter that obtains after electroplating again also is uneven.
6, cushion can improve the bond strength of surperficial abrasive material and metal stranded core.When stranded core be steel wire, when abrasive material is nickel-base material; Bond strength between electronickelling and the steel wire is often relatively poor; And can obtain very high bond strength between electro-coppering and steel wire, electro-coppering and the nickel; Therefore adopt copper as cushion, can effectively improve the bond strength between Ni-based abrasive material and the steel wire stranded core, thus the service life of improving diamond fretsaw.
Additional aspect of the utility model and advantage part in the following description provide, and part will become obviously from the following description, or recognize through the practice of the utility model.
Description of drawings
Above-mentioned and/or additional aspect of the utility model and advantage obviously with are easily understood becoming the description of embodiment from combining figs, wherein:
Fig. 1 a and Fig. 1 b are respectively that two money paid for shares belong to cross sectional representation and the side schematic view that skein silk closes the diamond fretsaw with stranded core of formation;
Fig. 2 a and Fig. 2 b are respectively that three money paid for shares belong to cross sectional representation and the side schematic view that skein silk closes the diamond fretsaw with stranded core of formation;
Fig. 3 a and Fig. 3 b are respectively that seven money paid for shares belong to cross sectional representation and the side schematic view that skein silk closes the diamond fretsaw with stranded core of formation.
The specific embodiment
Describe the embodiment of the utility model below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the utility model, and can not be interpreted as restriction the utility model.
In the description of the utility model; Term " vertically ", " laterally ", " on ", the orientation of indications such as D score, " preceding ", " back ", " left side ", " right side ", " vertically ", " level ", " top ", " end " or position relation be for based on orientation shown in the drawings or position relation; Only be for the ease of describing the utility model rather than requiring the utility model therefore can not be interpreted as restriction with specific azimuth configuration and operation to the utility model.
With reference to following description and accompanying drawing, with these and other aspects of the embodiment that knows the utility model.In these descriptions and accompanying drawing; Some specific implementations among the embodiment of the utility model are specifically disclosed; Represent to implement some modes of principle of the embodiment of the utility model, but the scope of embodiment that should be appreciated that the utility model is not limited.On the contrary, the embodiment of the utility model comprises and falls into appended spirit that adds the right claim and all changes, modification and the equivalent in the intension scope.
In an embodiment of the utility model, the stranded core of diamond fretsaw 1 with stranded core is by mutual stranded the forming of two strands of wires, and every line diameter is 150 μ m, and the lay pitch is 1.5mm when stranded.Coat cushion subsequently; Cushion preferable alloy Cu, Cu material average thickness are 25 μ m, and outermost layer is electroplated and gone up abrasive material; The preferred Ni sill of abrasive material is also inlayed diamond particles; Wherein Ni material average thickness is 8 μ m, and the particle mean size of diamond abrasive grain is 10 μ m, and it is 10% that diamond abrasive grain accounts for the abrasive material mass percent.
Fig. 1 a is the cross sectional representation with diamond fretsaw 1 of stranded core, and Fig. 1 b is the side schematic view with diamond fretsaw 1 of stranded core.Diamond fretsaw is made up of stranded core 100, cushion 110, Ni basic unit 120 and abrasive particle 130.Wherein stranded core 100 comprises two one metal wires, and abrasive particle is a diamond.
In another embodiment of the utility model, the stranded core of diamond fretsaw 2 with stranded core is by mutual stranded the forming of three strands of steel wires, and every line diameter is 120 μ m, and the lay pitch is 1.5mm when stranded.Coat cushion subsequently; Cushion preferable alloy Cu, Cu material average thickness are 25 μ m, and outermost layer is electroplated and gone up abrasive material; The preferred Ni sill of abrasive material is also inlayed diamond particles; Wherein Ni material average thickness is 8 μ m, and the diamond abrasive grain particle mean size is 10 μ m, and it is 10% that diamond abrasive grain accounts for the abrasive material mass percent.
Fig. 2 a is the cross sectional representation with diamond fretsaw 2 of stranded core, and Fig. 2 b is the side schematic view with diamond fretsaw 2 of stranded core.Diamond fretsaw is made up of stranded core 200, cushion 210, Ni basic unit 220 and abrasive particle 230.Wherein stranded core 200 comprises three one metal wires, and abrasive particle is a diamond.
In another embodiment of the utility model, the stranded core of diamond fretsaw 3 with stranded core is by seven bursts of stranded forming of steel wire, and wherein a steel wire is as center line, and all the other six roots of sensation steel wires are twisted around this center line.Every line diameter is 80 μ m; The lay pitch of peripheral six roots of sensation steel wire is 1.5mm when stranded, and the Cu material average thickness of cushion is 25 μ m, and the Ni material average thickness of outermost layer abrasive material is 8 μ m; The diamond abrasive grain particle mean size is 10 μ m, and it is 10% that diamond abrasive grain accounts for the abrasive material mass percent.
Fig. 3 a is the cross sectional representation with diamond fretsaw 3 of stranded core, and Fig. 3 b is the side schematic view with diamond fretsaw 3 of stranded core.Diamond fretsaw is made up of stranded core 300, cushion 310, Ni basic unit 320 and abrasive particle 330.Wherein stranded core 300 comprises seven one metal wires, and abrasive particle is a diamond.
The diamond fretsaw with stranded core 1, the diamond fretsaw 2 with stranded core, the diamond fretsaw 3 with stranded core and common diamond fretsaw 0 that the foregoing description is mentioned cut test; Common diamond fretsaw is the heart yearn of single steel wire, core line diameter 335 μ m, no cushion; The surface abrasive material is inlayed diamond particles for the Ni base; Ni material average thickness is 8 μ m, and the diamond abrasive grain particle mean size is 10 μ m, and it is 10% that diamond abrasive grain accounts for the abrasive material mass percent.External diameter with diamond fretsaw 1, diamond fretsaw 2, diamond fretsaw 3 and common diamond fretsaw 0 of stranded core is about 300-350 μ m, is more or less the same, and the external diameter of wherein common diamond fretsaw 0 is the thickest, is 350 μ m.Test condition is: being cut material is polysilicon side's ingot, reciprocating type cutting, and line tension 100N, every kind of scroll saw is all added up the data of 100 cuttings.Under identical cutting condition, the outage with diamond fretsaw 1 of stranded core is 5%, and the outage of diamond fretsaw 2 is 2%, and the outage of diamond fretsaw 3 is 1%, and the outage of common diamond fretsaw 0 is 17%.Can find out that the diamond fretsaw with stranded core is compared with common single line heart yearn diamond fretsaw, outage has obvious reduction, shows that the utility model can improve the reliability of diamond fretsaw significantly.
The utility model the method that a kind of preparation has the diamond fretsaw of stranded core also proposed on the other hand, it is characterized in that, may further comprise the steps: said wire more than two strands is twisted into said stranded core through wire twisting machine; Plate said cushion through electro-plating method on said stranded core surface subsequently; Outside said cushion, plate said abrasive material through electro-plating method at last.
In an embodiment of the utility model, use twisting frame, let more than two strands or two strands steel wire reel, but just twisted go out stranded core, twists with the fingers and notices in the strand process that guarding against steel wire produces tangible twisting stress by the certain orientation rotation.
In an embodiment of the utility model, when electroplating cushion, adopt the cyanide-free copper electroplating method of environmental protection; Concrete grammar does not have the quick step copper facing of cyanogen normal temperature; Also can be through two-step method copper facing, promptly earlier carry out preplating, carry out copper facing with sulfate then with burnt microcosmic salt, citrate.
In an embodiment of the utility model, when electroplating abrasive grain layer, adopt nickel aminosulfonic bath, current density is 2-2.5A/dm
3, temperature is 55-60 ℃, and the pH value is 3.5-4, and can obtain diamond particle content is the high-quality composite deposite of 8-12%.In another embodiment of the utility model, adopt a watt type electroplate liquid, promptly adopt the electroplate liquid of sulfur acid nickel, nickel chloride, boric acid, the pH value is 4.3, can obtain diamond particle content equally and be 10% high-quality composite deposite.
In addition, according to some embodiment of the utility model, can the pickling of strand heart yearn before electroplating cushion, so that remove the oxide layer on said stranded core surface.Thus, help improving the bond strength between cushion and the stranded core.
All right strand heart yearn surface degrease before the said pickling is through containing alkaline aqueous solution or organic solvent degrease, so that remove the grease on said stranded core surface.Thus, can further improve the bond strength between cushion and the stranded core.
In addition, after electroplating abrasive material, can also clean diamond fretsaw, through the aqueous solution remove said abrasive material surperficial remaining electroplate liquid.Thus, through in time removing the electroplate liquid on prepared diamond fretsaw surface, help the transportation, use of diamond fretsaw etc.
Need to prove, prepare among the method for diamond fretsaw, concrete stranded technology, electroplating technology are not made qualification with stranded core.Therefore those skilled in the art's modification that can be equal to above-mentioned preparation method based on this thought or change to reach the purpose that preparation has the diamond fretsaw of stranded core, these all should be included within the protection of the utility model.
In the description of this specification, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means the concrete characteristic, structure, material or the characteristics that combine this embodiment or example to describe and is contained among at least one embodiment or example of the utility model.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete characteristic, structure, material or the characteristics of description can combine with suitable manner in any one or more embodiment or example.
Although illustrated and described the embodiment of the utility model; Those having ordinary skill in the art will appreciate that: under the situation of principle that does not break away from the utility model and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, the scope of the utility model is limited claim and equivalent thereof.
Claims (9)
1. the diamond fretsaw with stranded core is characterized in that, comprising:
Stranded core, said stranded core comprises at least two strands of wires, said at least two strands of wires are stranded each other;
Cushion, said cushion closely coat said stranded core;
Abrasive material, said abrasive material coats said cushion, and disperses to be inlaid with diamond abrasive grain in the said abrasive material.
2. the diamond fretsaw with stranded core as claimed in claim 1 is characterized in that, said cushion is soft copper layer.
3. the diamond fretsaw with stranded core as claimed in claim 2 is characterized in that, the thickness of said soft copper layer is 1-50 μ m.
4. the diamond fretsaw with stranded core as claimed in claim 1; It is characterized in that; Said abrasive material comprises nickel or nickel alloy layer, and said nickel or nickel alloy layer are formed on the said cushion through the mode of electroplating, and said diamond abrasive grain disperses to be embedded in said nickel or the nickel alloy layer.
5. the diamond fretsaw with stranded core as claimed in claim 4 is characterized in that, the thickness of said nickel or nickel alloy layer is 5-20 μ m.
6. the diamond fretsaw with stranded core as claimed in claim 1 is characterized in that, the external diameter of said stranded core is 50-500 μ m.
7. the diamond fretsaw with stranded core as claimed in claim 1 is characterized in that: said wire diameter is 5-250 μ m.
8. the diamond fretsaw with stranded core as claimed in claim 1 is characterized in that: said at least two strands of wires are stranded each other with the stranded mode of rule.
9. the diamond fretsaw with stranded core as claimed in claim 1 is characterized in that: said wire is a steel wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204533191U CN202428048U (en) | 2011-11-15 | 2011-11-15 | Diamond fretsaw with stranded core wire |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204533191U CN202428048U (en) | 2011-11-15 | 2011-11-15 | Diamond fretsaw with stranded core wire |
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| Publication Number | Publication Date |
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| CN202428048U true CN202428048U (en) | 2012-09-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011204533191U Expired - Fee Related CN202428048U (en) | 2011-11-15 | 2011-11-15 | Diamond fretsaw with stranded core wire |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102489781A (en) * | 2011-11-15 | 2012-06-13 | 李园 | Diamond wire saw with stranded core and manufacturing process thereof |
| CN103707426A (en) * | 2013-12-30 | 2014-04-09 | 镇江市港南电子有限公司 | Silicon wafer cutting machine |
| CN103722626A (en) * | 2013-12-30 | 2014-04-16 | 镇江市港南电子有限公司 | Silicon wafer cutting steel wire |
| CN111923262A (en) * | 2020-09-21 | 2020-11-13 | 天津市镍铠表面处理技术有限公司 | Circular wire saw and manufacturing method thereof |
-
2011
- 2011-11-15 CN CN2011204533191U patent/CN202428048U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102489781A (en) * | 2011-11-15 | 2012-06-13 | 李园 | Diamond wire saw with stranded core and manufacturing process thereof |
| WO2013071794A1 (en) * | 2011-11-15 | 2013-05-23 | Li Yuan | Diamond wire saw with stranded core and manufacturing process thereof |
| CN103707426A (en) * | 2013-12-30 | 2014-04-09 | 镇江市港南电子有限公司 | Silicon wafer cutting machine |
| CN103722626A (en) * | 2013-12-30 | 2014-04-16 | 镇江市港南电子有限公司 | Silicon wafer cutting steel wire |
| CN103707426B (en) * | 2013-12-30 | 2016-04-13 | 福能科技江苏有限公司 | A kind of silicon chip cutter |
| CN103722626B (en) * | 2013-12-30 | 2016-04-13 | 福能科技江苏有限公司 | A kind of silicon chip cutting steel wire |
| CN111923262A (en) * | 2020-09-21 | 2020-11-13 | 天津市镍铠表面处理技术有限公司 | Circular wire saw and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120912 Termination date: 20151115 |
|
| EXPY | Termination of patent right or utility model |