CN202423230U - Cleaning and drying apparatus for disk-shaped chip - Google Patents
Cleaning and drying apparatus for disk-shaped chip Download PDFInfo
- Publication number
- CN202423230U CN202423230U CN 201120552147 CN201120552147U CN202423230U CN 202423230 U CN202423230 U CN 202423230U CN 201120552147 CN201120552147 CN 201120552147 CN 201120552147 U CN201120552147 U CN 201120552147U CN 202423230 U CN202423230 U CN 202423230U
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- Prior art keywords
- thin slice
- drying
- slice pan
- arm
- disk
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- Withdrawn - After Issue
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Abstract
The utility model relates to the technical field of integrated circuit processing techniques, in particular to a cleaning and drying apparatus for a disk-shaped chip. The apparatus comprises a drying unit and a chuck, wherein the drying unit is provided with first nozzles, second nozzles and vacuum holes, which are respectively connected with a liquid pipe, a gas pipe and a vacuum pipe; and the chuck is arranged below the drying unit, and can rotate together with the disk-shaped chip. According to the embodiment of the utility model, gas and liquid synchronously act at the back of the disk-shaped chip for cleaning and drying, and vacuum pumping is carried out for residual liquid drops, thereby completely cleaning residual liquid and grains at the back of the disk-shaped chip and ensuring no pollution of the disk-shaped chip; and in addition, the apparatus is simple in structure and easy to realize.
Description
Technical field
The utility model relates to integrated circuit technology field, and particularly a kind of thin slice pan cleans drier.
Background technology
In the machining process of integrated circuit; The thin slice pan; For example wafer or silicon chip, its back side when dispatching from the factory is owing to be attached with various impurity thereby need wash with chemical liquid, and can residually there be chemical liquid at the back side after cleaning; And in critical machining state process, also can produce some particles attached to its back side, soup that these are residual and particle all need wash.A kind of traditional cleaning method is rotation thin slice thin slice pan in the prior art; And the chemical liquid before the another kind of liquid of the surface sprinkling of thin slice thin slice pan washes; The centrifugal force that rotation produces can dry the chemical liquid on thin slice thin slice pan surface, and the defective of this method is the chemical residual that still can stay this a kind of liquid; Another kind of cleaning method is a rotation thin slice thin slice pan, sprays another kind of liquid and sprays nitrogen (the perhaps gas of other types) to it then, and gas is with the liquid of helping dry thin slice thin slice pan surface, and the defective of this method is to stay the liquid seal.
The utility model content
The technical problem that (one) will solve
The technical problem that the utility model will solve be how thoroughly, the soup that adheres on the thin slice pan with integrated circuit fast is residual and particle cleans up.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a thin slice pan to clean drier, comprising:
Dry device, have first nozzle, second nozzle and vacuum hole on it, be connected with liquid line, flue and vacuum tube respectively;
Chuck is arranged on the below of said drying device, can rotate with said drying device.
Further technical scheme is, said drying device comprises that the first drying arm and second arranged in a crossed manner dries arm, has the liquid line that is communicated with first nozzle in the said first drying arm, has the gas piping that is communicated with second nozzle in the said second drying arm.
Further technical scheme is, the vacuum hole at the said second drying arm two ends is connected with its inner vacuum line.
Further technical scheme is, the crosspoint that the first drying arm and second dries arm is provided with siphunculus.
Further technical scheme is, said chuck comprises some supports, and the link of each said support is provided with through hole.
Further technical scheme is that said siphunculus is arranged in said through hole.
Further technical scheme is, said support is the L type, and an end connects, and the other end is towards the top and have a fastener.
Further technical scheme is that said chuck is connected with drive unit.
Further technical scheme is that the number of said support is three.
(3) beneficial effect
Technique scheme has following beneficial effect: act on thin slice pan back simultaneously through adopting gas and soup; It is cleaned and dries; And through residual drop is vacuumized; Can thoroughly clean up with particle the soup at the thin slice pan back side is residual, guarantee the pollution-free of thin slice pan, and this apparatus structure simple, be easy to realize.
Description of drawings
Fig. 1 is the STRUCTURE DECOMPOSITION sketch map that the thin slice pan of the utility model embodiment cleans drier;
Fig. 2 is the structural representation that the thin slice pan of the utility model embodiment cleans drier;
Fig. 3 is the vertical view that the thin slice pan of the utility model embodiment cleans drier;
Fig. 4 is the cutaway view that the thin slice pan of the utility model embodiment cleans the drying arm of drier.
Wherein, 2: the thin slice pan; 4: dry device; 41: the first drying arms; 42: the second drying arms; 43: the first nozzles; 44: the second nozzles; 45: gas piping; 46: vacuum line; 47: vacuum hole; 48: siphunculus; 49: liquid line; 5: chuck; 51: support; 52: through hole; 6: liquid line; 7: flue; 8: vacuum tube.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the embodiment of the utility model is described in further detail.Following examples are used to explain the utility model, but are not used for limiting the scope of the utility model.
Like Fig. 1-shown in Figure 4, the thin slice pan that the utility model embodiment provides cleans drier, comprising: chuck 5 dries device 4, three pipelines and thin slice pans 2.
Wherein, chuck 5 is a three-legged support, is 120 ° of angles between two two stands 51, and its junction has 52, three supports 51 of through hole and is the L type, and an end is towards the top, and this section is provided with draw-in groove or other fastener is used for support slice pan 2 towards the top.Chuck 5 and drive unit connect such as motor, and drive unit is used for drive chuck 5 rotations.
Dry device 4, comprise that first dries the arm 41 and the second drying arm 42.Two dry arm 41 and orthogonally are cross with 42, first dry arm 41 the upper surface of upper surface with several first nozzles, 43, the second drying arms 42 have several second nozzles 44.Wherein first nozzle 43 is used for spray liquid, and first dries arm 41 inside has soup pipeline 49, and soup pipeline 49 is connected with first nozzle 43; Second nozzle 44 is used to spray gas.The second drying arm, 42 inside have gas piping 45, the second nozzles 44 and communicate with gas piping 45; Second dries on the arm 42 and also has two vacuum lines 46, and second dry arm 42 two ends have two vacuum holes 47 respectively, vacuum hole 47 is connected with vacuum line 46.
The junction that the first drying arm 41 and second dries arm 42 has siphunculus 48, and siphunculus 48 is arranged in the through hole 52 of chuck 5.
Three pipes of the following termination of siphunculus 48 are respectively liquid line 6, flue 7 and vacuum tube 8; Liquid line 6 is connected with liquid line 49, and flue 7 is connected with gas piping 45, and vacuum tube 8 is connected with vacuum line 46.
Wherein, the distance between the thin slice pan 2 and first nozzle 43, second nozzle 44 depends on the shape of first nozzle 43, second nozzle 44 and sprays envelope.The distance that thin slice pan 2 and first dries between arm 41, the second drying arm 42 depends on nozzle form equally and sprays envelope and jet velocity etc.
The thin slice pan that brief description the utility model provides cleans the operation principle of drier:
After drive unit drive chuck 5 high speed rotating got up, controlling liquid pipe 6 was carried soup in soup pipeline 49, and soup sprays from first nozzle 43 of the first drying arm 41, sprays to the back side of thin slice pan 2, and the back side of thin slice pan 2 is cleaned; Liquid line 6 starts flue 7 and carries gas to gas piping 45 when carrying soup; For example nitrogen or other gas; Gas sprays from second nozzle 44; Be used for the soup at thin slice pan 2 back sides is stirred, make soup more even, and the drop at thin slice pan 2 back sides is dried the cleaning at thin slice pan 2 back sides.When soup has cleaned thin slice pan 2 soon; Chuck 5 is adjusted into low speed rotation by high speed rotating, and at this moment at this moment the only remaining fine drop in the back side of thin slice pan 2 can stop liquor charging by controlling liquid pipe 6; Starting vacuum tube 8 vacuumizes; The debris at thin slice pan 2 back sides drops under the effect of negative pressure of vacuum and is inhaled in the vacuum line 46 through vacuum hole 47, and along with the rotation of chuck 5, the edge that drop moves to thin slice pan 2 also can drop in the vacuum hole 47.Thorough in order to guarantee that thin slice pan 2 back sides are cleaned, flue 7 is jet gas always.
Can find out by above embodiment; The utility model embodiment acts on thin slice pan back simultaneously through adopting gas and soup; It is cleaned and dries, and through residual drop is vacuumized, can thoroughly clean up with particle the soup at the thin slice pan back side is residual; Guarantee the pollution-free of thin slice pan, and this apparatus structure simple, be easy to realize.
The above only is the preferred implementation of the utility model; Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model know-why, can also make some improvement and modification, these improvement and modification also should be regarded as the protection range of the utility model.
Claims (9)
1. a thin slice pan cleans drier, it is characterized in that, comprising:
Dry device, have first nozzle, second nozzle and vacuum hole on it, be connected with liquid line, flue and vacuum tube respectively;
Chuck is arranged on the below of said drying device, can rotate with said drying device.
2. thin slice pan as claimed in claim 1 cleans drier; It is characterized in that; Said drying device comprises that the first drying arm and second arranged in a crossed manner dries arm; Have the liquid line that is communicated with first nozzle in the said first drying arm, have the gas piping that is communicated with second nozzle in the said second drying arm.
3. thin slice pan as claimed in claim 2 cleans drier, it is characterized in that, the vacuum hole at the said second drying arm two ends is connected with its inner vacuum line.
4. thin slice pan as claimed in claim 2 cleans drier, it is characterized in that, the crosspoint that the first drying arm and second dries arm is provided with siphunculus.
5. thin slice pan as claimed in claim 4 cleans drier, it is characterized in that said chuck comprises some supports, and the link of each said support is provided with through hole.
6. thin slice pan as claimed in claim 5 cleans drier, it is characterized in that said siphunculus is arranged in said through hole.
7. thin slice pan as claimed in claim 5 cleans drier, it is characterized in that said support is the L type, and an end connects, and the other end is towards the top and have a fastener.
8. thin slice pan as claimed in claim 5 cleans drier, it is characterized in that said chuck is connected with drive unit.
9. thin slice pan as claimed in claim 5 cleans drier, it is characterized in that the number of said support is three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120552147 CN202423230U (en) | 2011-12-26 | 2011-12-26 | Cleaning and drying apparatus for disk-shaped chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120552147 CN202423230U (en) | 2011-12-26 | 2011-12-26 | Cleaning and drying apparatus for disk-shaped chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202423230U true CN202423230U (en) | 2012-09-05 |
Family
ID=46747964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120552147 Withdrawn - After Issue CN202423230U (en) | 2011-12-26 | 2011-12-26 | Cleaning and drying apparatus for disk-shaped chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202423230U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103177934A (en) * | 2011-12-26 | 2013-06-26 | 北京七星华创电子股份有限公司 | Cleaning and drying device of thin disc-shaped object |
-
2011
- 2011-12-26 CN CN 201120552147 patent/CN202423230U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103177934A (en) * | 2011-12-26 | 2013-06-26 | 北京七星华创电子股份有限公司 | Cleaning and drying device of thin disc-shaped object |
| CN103177934B (en) * | 2011-12-26 | 2016-06-15 | 北京七星华创电子股份有限公司 | Thin slice pan cleans drier |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120905 Effective date of abandoning: 20160615 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |