CN202423214U

CN202423214U - Device for leading radio frequency power supply electrode into vacuum cavity

Info

Publication number: CN202423214U
Application number: CN2011204907842U
Authority: CN
Inventors: 王春柱
Original assignee: Shenzhen Trony Technology Development Co Ltd
Current assignee: Shenzhen Trony Technology Development Co Ltd
Priority date: 2011-12-01
Filing date: 2011-12-01
Publication date: 2012-09-05
Anticipated expiration: 2021-12-01

Abstract

The utility model relates to a device for leading a radio frequency power supply electrode into a vacuum cavity, which is widely applied to a solar cell and a liquid crystal display and belongs to the field of electricity. The utility model aims to provide a device for ensuring a split electrode connecting device to enter the vacuum cavity to replace a conventional integrated radio frequency electrode for the large-area thin film deposition. The device has the technical characteristics that the electrode is formed by an inner electrode and an outer electrode which are separated; an anode and the vacuum cavity are grounded in a sealed mode; a conductive screw in an outer cathode runs through an insulation sheet to an inner cathode and is connected with the inner cathode; and the head part of the inner cathode is connected with a cathode target plate. The device has the beneficial effects of improving the power stability and the large-area thin film deposition rate, reducing the loss of parts and prolonging the service life of the cathodes of an electrode body.

Description

A kind of radio-frequency power supply electrode is introduced the device of vacuum cavity

Technical field

The utility model discloses the electrode assembly that a kind of radio-frequency power supply inserts vacuum cavity, belongs to the radio-frequency power supply applied technical field.

Background technology

At present, thin-film solar cells adopts low temperature depositing plasma enhanced chemical vapor deposition technology (PECVD), parallel electrode plate capacitive discharge pattern.With negative electrode target plate in radio-frequency power supply (RF) power signal transmissions to the vacuum chamber.The advantage that adopts ceramic sintering technology is the plate conductor of electrode and cathode conductor to be sintered into as a whole, reaches the sealing of plate conductor and cathode conductor.Simultaneously, utilize pottery self insulating properties that plate conductor and cathode conductor insulation are isolated.Weak point, heavy in section radio frequency electrode cathode conductor sintering technology is difficult to realize the large tracts of land sintering. at present, the speed of large area film deposition can reach 4 ~ 5/s, and power density can reach 0.2 ~ 0.4w/cm ², general deposit film 1.5 ~ 5.7m ²Need the power of 3 ~ 20KW, frequency directly influences film deposition rate, and existing ceramic sintering technology is difficult to make the heavy in section radio frequency electrode.In addition, the ceramic post sintering cathode conductor starts long generation rapidly of operating time high temperature, causes the entire electrode body superheating phenomenon to occur, and one quits work, and the entire electrode temperature drops to normal temperature.Electrodes conduct body intensification, cooling repeatedly like this makes the pottery at sintering place, electrode input port damage because of expanding with heat and contract with cold, and destroys sealing.Certainly, the standing wave effect and the skin effect that also have very high frequency(VHF) to cause also can cause damage by the target body.Therefore, need effective very high frequency(VHF) feed-in pattern, make that interface can be good at insulated enclosure, Isolated Shield between input electrode and the bonding conductor.

The utility model content

The utility model purpose be intended to solve by the very high frequency(VHF) power power-supply transfer to electrode get into the vacuum cavity interface more than producing the said electrode sections that causes because of ceramic post sintering long-pending too small; Be prone to scaling loss; The vacuum cavity sealing is descended, have a strong impact on deposition rate and stability.Be the large area film deposition; Radio frequency electrode interfacing in a kind of very high frequency(VHF) power source input vacuum cavity is provided; Power is more than 2000 ~ 3000 watts, and frequency range is 13.56MHz ~ 100MHz, and cathode voltage is about 2000 volts; Get in the vacuum cavity with a kind of detachable electrode jockey, substitute traditional integral type radio frequency electrode.

The technical solution of the utility model is: a kind of radio frequency electrode apparatus that transmits very high frequency(VHF) power source access vacuum cavity; Comprise the radio-frequency power power supply, adaptation is by the interface electrode of vacuum electrode introducing vacuum cavity; It is characterized in that: electrode constitutes abbreviation inner part and exterior part by two electrod assemblies that separate; Exterior part comprises that external anode centers on external cathode, and inner part comprises that internal anode centers on external cathode, constitutes the one electrod assembly of shielding, insulation, sealing respectively; Anode component is installed on the outer wall of vacuum cavity, and anode conducting body and vacuum cavity outer wall interface end all shield, seal, outer wall ground connection.The isolated insulation sheet is arranged between external cathode and the inner cathode, and the conductive lever in the external cathode connects insulating trip to inner cathode, and is connected with inner cathode, and the inner cathode head connects the negative electrode target plate.

Internal anode: be a stairstepping shaft flange with holes, this flange front end shaft extension is gone in the vacuum cavity, with vacuum cavity sealing and combine closely; At internal anode shaft flange large end face counterbore and intermediate throughholes are arranged, this intermediate throughholes is passed through into vacuum cavity by inner cathode, and this through hole forms shielding to inner cathode.Anode component is a stairstepping shaft flange with holes, and this flange front end shaft extension is gone in the vacuum cavity, and seals, combines closely with vacuum cavity.

External anode: the multidiameter flange that is a band through hole equally; At the flange large end face counterbore is arranged; The centre has through hole to hold external cathode; The positive pole of the inner surface of through hole and radio-frequency power supply input closely electrically contacts, and connects internal anode and external anode by conducting bolt, is fixed on the vacuum cavity plus earth.

Inner cathode: be a conduction axis body, there is internal thread hole front end band external screw thread, rear end, and the front end external screw thread of axle links to each other with the cable joint of the negative electrode target plate of vacuum cavity inside, and the rear end internal thread is connected with the negative electrode screw rod.

External cathode: be the conduction axis body of a band shoulder hole, on the hole wall of its axis body, have elastomeric slit, this axis body closely contacts with the cathode aperture wall inner surface of radio-frequency power supply input port; Having of the other end of shoulder hole has seal groove in the aperture; Its built-in ring is pressed on the insulating trip, and conductive lever is the little multidiameter in two broad in the middle, and one has external screw thread; Screw into the internal thread of inner cathode; The middle end face of screw rod has seal groove, and the sealing ring of packing into is pressed on the macropore inner face of the shoulder hole of external cathode, and external cathode is connected conducting through screw rod with inner cathode.Insulating trip is to be placed in the middle of external cathode and the internal anode.External female extremely internal diameter guarantees that less than the external diameter of the impedance matching box output cathode conductor of radio-frequency power supply contact is good when adaptation output cathode conductor inserts the external cathode with elastomeric slit, reduces contact resistance, reduces power loss, reduces heating.Inside and outside negative electrode and anode and screw rod are conductor, and inside and outside negative electrode is preferably the brass of surface gold-plating, and the inside and outside anode is preferably the aluminium alloy of surface oxidation treatment.Described insulating trip is an insulating material, is preferably pottery.

The beneficial effect of the utility model has been realized the utility model purpose, has effectively solved very high frequency(VHF) feed-in pattern, because the electrodes use separating component, makes that interface can be good at sealing, insulation, Isolated Shield between input electrode and the bonding conductor.Radio-frequency power stability and large area film deposition rate and uniformity have been improved.Use this device to reduce the parts loss, the negative electrode of electrode body is prolonged useful life.

Description of drawings

Fig. 1, be that the utility model power supply is introduced the vacuum cavity sketch map.

Fig. 2, be the electrode plane structural representation of the utility model embodiment 1.

Fig. 3, be the utility model perspective view.

Fig. 4, be the utility model adaptation and introduce the sketch map that electrode is connected.

See shown in Figure 1ly, radio-frequency power power supply 9 is imported into power signal to vacuum chamber 301 through introducing electrode 7 by adaptation 8.Among Fig. 2, inner cathode 101, external cathode 102, copper screw bolt 103, internal anode 201, external anode 202, fastening bolt 203, insulating trip 3, sealing ring 4, vacuum cavity outer wall 5, tunable capacitor C1, C2, inductance L.See Fig. 4, radio-frequency power supply adaptation output 801.Transfer to and introduce electrode 7 for being installed in the cathode conductor of the inner radio frequency electrode of vacuum cavity; Be installed in the plate conductor of the inner radio frequency electrode of vacuum cavity; 5 is the outer wall of vacuum cavity, and 4 is " O " RunddichtringO, and 203 is the bolt anode component; 102 for the external cathode conductor is installed in the external anode 202, and screw rod 103 connects insulating trip 3 inside and outside negative electrodes 101,102.Insulating trip 3 is with anode component and cathode assembly sealed insulation, and cathode conductor can adopt brass, influences conductivity for preventing surface oxidation, and gold-plated processing can be adopted in the surface; Insulating trip 3 can adopt pottery or polytetrafluoroethylmaterial material; For the weight that alleviates parts guarantees good electrical conductivity simultaneously, plate conductor can adopt the surface through anti-oxidation aluminium alloy treated material.Through " O " RunddichtringO 4 and the negative electrode 102 conductors sealing of cathode conductor fastening bolt 203 with negative electrode 101 conductors and the vacuum cavity outer electrode of vacuum cavity internal electrode.Through " O " RunddichtringO 4 and fastening bolt 203 and insulating trip 3 plate conductor 201 of vacuum cavity internal electrode and the plate conductor of vacuum cavity outer electrode are sealed.

See 3-4 figure; Vacuum cavity outer wall 5 is installed external cathode 102; 103 screw rods are connected with inner cathode 101 through external cathode 102 cavity inner walls, and external anode 202 sun are fastening through bolt 203 and vacuum cavity outer wall 5, for guaranteeing external cathode 102 conductors and radio-frequency power supply input 6 excellent electric contact are arranged; With evenly cutting around external cathode 102 conductors, the internal diameter of conductor is slightly less than the external diameter of the cathode conductor of radio-frequency power supply output.

Embodiment

Example 1, see Fig. 2, present embodiment is made up of inner cathode 101, external cathode 102, copper screw bolt 103, internal anode 201, external anode 202, fastening bolt 203, insulating trip 3, sealing ring 4, and internal anode 201 is for being with fastener hole multidiameter flange; Flange front end shaft extension is gone in the vacuum cavity outer wall 5, and the flange front end face has seal groove, and the sealing ring 4 of packing into compresses with vacuum cavity outer wall 5; The flange large end face has counterbore; Be used for placing insulating trip 3, the counterbore inner face has seal groove, and the sealing ring 4 of packing into is pressed on the insulating trip 3; Intermediate throughholes is used for making inner cathode 101 to pass and gets in the vacuum chamber; External anode 202 also is a multidiameter flange with holes, and the flange large end face has the counterbore of counterbore and internal anode 201 flange large end faces together insulating trip 3 to be clamped to compress; Intermediate throughholes is used for holding external cathode 102; The inner surface of through hole contacts with the anode of the output 801 of radio-frequency power supply 9 adaptations 8, through bolt 203 internal anode 201 and external anode 202 is fixed on the vacuum cavity outer wall 5 together, realizes that anode connects.Inner cathode 101 is the axle of a front end band external screw thread, rear end band internal thread hole, and the front end external screw thread is used for linking to each other with the inner cathode electrode plate of vacuum cavity, and the rear end internal thread is used for being connected with copper screw bolt 103; External cathode 102 is the axle of band shoulder hole, and hole wall has otch, makes it have elasticity; The negative electrode of radio-frequency power supply adaptation output 801 inserts inner surface and can closely contact, and external cathode 102 end faces have seal groove, and the sealing ring 4 of packing into is pressed on the insulating trip 3; Screw rod 103 is the little multidiameter in two broad in the middle; One has external screw thread, screws into the internal thread of inner cathode 101, and the middle end face of screw rod 103 has seal groove; The sealing ring 4 of packing into is pressed on the shoulder hole end face of external cathode 102, and external cathode 102 realizes that with inner cathode 101 negative electrode is connected through screw rod 103.

But adopting present embodiment production and processing specification is 1100mm * 1400mm and above large-area thin-film solar cells, and adopting the frequency of radio-frequency power supply is 40.68MHZ, and power is at 3～4.5kW; The cross section of external cathode 102 conductors be Φ 20mm or more than, can normally use, the high phenomenon of electrode temperature can not appear; Use the electrode of ceramic post sintering little before the contrast because of the cross section of cathode conductor; Cause power about 2KW, it is too high the entire electrode temperature just to occur, causes electrode burnout.

Claims

1. a radio-frequency power supply electrode is introduced the device of vacuum cavity; Comprise the radio-frequency power power supply; Adaptation, electrode and vacuum cavity is characterized in that it is vacuum electrode that electrode inserts vacuum cavity; This electrode is to be made up of inside and outside two shieldings, the seal members that separate, and exterior part and inner part are made up of external anode and external cathode, internal anode and inner cathode respectively; Anode component is made up of external anode and two parts of internal anode, and is installed in vacuum cavity outer wall ground connection; Cathode assembly is made up of outer cathode and two parts of inner cathode, and the inner cathode head connects the negative electrode target plate, and the conductive lever in the external cathode connects insulating trip to inner cathode, and is connected with vacuum cavity inner cathode target plate.

2. radio-frequency power supply electrode according to claim 1 is introduced the device of vacuum cavity, it is characterized in that said anode component is a stairstepping shaft flange with holes, and this flange front end shaft extension is gone in the vacuum cavity, and seals, combines closely with vacuum cavity.

3. radio-frequency power supply electrode according to claim 2 is introduced the device of vacuum cavity; The internal anode that it is characterized in that said anode component is a stairstepping shaft flange with holes; Counterbore and through hole are arranged in the middle of this shaft flange large end face; Inner cathode is passed through this internal anode intermediate throughholes and is got into vacuum cavity, and said internal anode through hole forms insulation shielding to inner cathode.

4. radio-frequency power supply electrode according to claim 2 is introduced the device of vacuum cavity; It is characterized in that said external anode is the multidiameter flange of a band through hole; At the flange large end face counterbore is arranged; Have through hole to hold external cathode in the middle of this counterbore, the inner surface of through hole closely contacts with the anodal of radio-frequency power supply input; Connect internal anode and external anode by conducting bolt, be fixed on the vacuum cavity plus earth.

5. radio-frequency power supply electrode according to claim 1 is introduced the device of vacuum cavity; It is characterized in that said inner cathode is an axle electric conductor; There is internal thread hole this electric conductor front end band external screw thread, rear end; The front end external screw thread of axle links to each other with the cable joint of the negative electrode target plate of vacuum cavity inside, and the rear end internal thread is connected with the negative electrode screw rod.

6. radio-frequency power supply electrode according to claim 1 is introduced the device of vacuum cavity; It is characterized in that said external cathode is the conductive shaft of a band shoulder hole; On the hole wall of its axis body, have elastomeric slit; This axis body closely contacts with the cathode aperture wall inner surface of radio-frequency power supply input port, and having of the other end of shoulder hole has seal groove in the aperture, and its built-in ring is pressed on the insulating trip.

7. radio-frequency power supply electrode according to claim 6 is introduced the device of vacuum cavity; It is characterized in that the screw rod in the said external cathode is an electric conductor, screw rod is the little multidiameter in a two broad in the middle, and one has external screw thread; Screw into inner cathode; The middle end face of screw rod has seal groove, and the sealing ring of packing into is pressed on the macropore inner face of the shoulder hole of external cathode, and external cathode is connected conducting through screw rod with inner cathode.

8. radio-frequency power supply electrode according to claim 1 is introduced the device of vacuum cavity, it is characterized in that placing insulating trip between said external cathode and the internal anode.

9. radio-frequency power supply electrode according to claim 7 is introduced the device of vacuum cavity, it is characterized in that said external cathode, its external female extremely internal diameter less than the external diameter of the adaptation output cathode conductor of radio-frequency power supply.

10. radio-frequency power supply electrode according to claim 9 is introduced the device of vacuum cavity, it is characterized in that said external cathode comprises the input with elastomeric slit.