CN209526062U - Vacuum electrode - Google Patents
Vacuum electrode Download PDFInfo
- Publication number
- CN209526062U CN209526062U CN201920174890.6U CN201920174890U CN209526062U CN 209526062 U CN209526062 U CN 209526062U CN 201920174890 U CN201920174890 U CN 201920174890U CN 209526062 U CN209526062 U CN 209526062U
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- outer conductor
- conductor
- hollow cavity
- ceramic window
- vacuum electrode
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Abstract
The utility model discloses a kind of vacuum electrodes, including the first outer conductor, the second outer conductor, inner conductor, ceramic window and flange, the cylindrical structure that first outer conductor and the second outer conductor have center band to have hollow cavity, the lower end of second outer conductor and the upper end of the first outer conductor are socketed and are welded and fixed to form entire outer conductor；The center of the ceramic window is equipped with hollow cavity, and outer peripheral surface is fixedly welded on second outer conductor in the hollow cavity of one end of first outer conductor；The upper end of the inner conductor is placed in the hollow cavity of the second outer conductor, and lower end is successively penetrated out of the ceramic window hollow cavity to the hollow cavity of first outer conductor, and the outside middle portion of the inner conductor is welded and fixed with the ceramic window；The flange welding is fixed on the upper surface of second outer conductor.The vacuum electrode can reach ultrahigh vacuum requirement, and have the characteristics such as high thermal conductivity, highly conductive, nonmagnetic.
Description
Technical field
The utility model relates to a kind of vacuum electrode more particularly to a kind of high powers, high thermal conductivity and non-magnetic vacuum
Electrode.
Background technique
Vacuum electrode, which is called, does vacuum point feedthrough, vacuum feedthroughs.Chamber walls can be passed through as one kind, it will be big
The various electrical power at gas end, electric signal etc. are transferred to the sealing device of internal vacuum chamber, are widely used in electron tube.However
Due to the crunch seal technical requirements of its superelevation, the application of its material is limited, and then limit it to have particular/special requirement some
Application on device.For example, common vacuum electrode mostly uses greatly kovar alloy conduct to guarantee the reliability of crunch seal
Outer conductor and inner conductor.And kovar alloy contains the magnetic elements such as iron, cobalt, nickel in practice, to there is the non-magnetic device of particular/special requirement
Part has certain interference, and its heating conduction is poor.Using other alloys, it is not easy to guarantee the reliability of sealing-in.It is common
Vacuum electrode use Al2O3Ceramics, heating conduction is poor, and high-power applications are limited.
Summary of the invention
In order to overcome drawbacks described above, the utility model provides a kind of vacuum electrode, not only high power, high thermal conductivity, but also
It is nonmagnetic, the application range of conventional vacuum electrode has been widened significantly.
The utility model is to solve technical solution used by its technical problem: a kind of vacuum electrode, including first
Outer conductor, the second outer conductor, inner conductor, ceramic window and flange, first outer conductor and the second outer conductor have center to have
The cylindrical structure of hollow cavity, the lower end of second outer conductor and the upper end of the first outer conductor are socketed and are welded and fixed to be formed
Entire outer conductor；The center of the ceramic window is equipped with hollow cavity, and it is close that outer peripheral surface is fixedly welded on second outer conductor
In the hollow cavity of one end of first outer conductor；The upper end of the inner conductor is placed in the hollow cavity of the second outer conductor,
And lower end is successively penetrated out of the ceramic window hollow cavity to the hollow cavity of first outer conductor, and it is described in lead
The outside middle portion of body is welded and fixed with the ceramic window；The flange welding is fixed on the upper surface of second outer conductor
On.
The radius of the lower end of the inner conductor is less than the radius of the upper end as a further improvement of the utility model, should
The upper surface of the part formation step of the prominent lower end in inner conductor upper end, the step and the ceramic window is cooperatively connected and welds solid
It is fixed.
The step is equipped with welding gasket as a further improvement of the utility model,.
First outer conductor is made as a further improvement of the utility model, of stainless steel material, has preferable
Wearability；Second outer conductor is made of oxygen-free copper, the characteristic with high thermal conductivity.
The inner conductor is made as a further improvement of the utility model, of beryllium-bronze, provides vacuum for vacuum electrode
Part electronic conductor.
The welding gasket is made as a further improvement of the utility model, of oxygenless copper material, as attachment feature
It uses.
The ceramic window is made as a further improvement of the utility model, of aluminium oxide ceramics, includes at least 95 porcelain, 99
One of porcelain and sapphire can effectively completely cut off the vacuum conduction of vacuum electrode and the short circuit of equipment metal shell.
As a further improvement of the utility model, between first outer conductor and the second outer conductor, ceramic window and
Between two outer conductors, once welded into furnace between ceramic window and inner conductor and by soldering between flange and the second outer conductor
It is fixed.
The beneficial effects of the utility model are: the vacuum electrode can reach ultrahigh vacuum requirement, and have high thermal conductivity,
The characteristics such as highly conductive, nonmagnetic.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is Fig. 1 the schematic diagram of the section structure；
Fig. 3 is the entire outer conductor structural schematic diagram of the utility model；
Fig. 4 is the utility model inner conductor structure schematic diagram.
In conjunction with attached drawing, make the following instructions:
1 --- the first outer conductor；2 --- the second outer conductor；
3 --- inner conductor；4 --- gasket；
5 --- ceramic window；6 --- flange.
Specific embodiment
Below in conjunction with attached drawing, elaborate to a preferred embodiment of the utility model.But the guarantor of the utility model
Shield range is not limited to following embodiments, i.e., in every case with simple made by present utility model application the scope of the patents and description
Equivalent changes and modifications all still belong within the utility model patent covering scope.
Refering to fig. 1-4, be a kind of vacuum electrode described in the utility model, including the first outer conductor 1, the second outer conductor 2,
Inner conductor 3, ceramic window 5 and flange 6, the cylindrical body that first outer conductor and the second outer conductor have center band to have hollow cavity
Structure, the lower end of second outer conductor and the upper end of the first outer conductor are socketed and are welded and fixed to form entire outer conductor；It is described
The center of ceramic window is equipped with hollow cavity, and outer peripheral surface is fixedly welded on second outer conductor close to first outer conductor
In the hollow cavity of one end；The upper end of the inner conductor is placed in the hollow cavity of the second outer conductor, and lower end is successively from described
Penetrated in the hollow cavity of ceramic window to the hollow cavity of first outer conductor, and the outside middle portion of the inner conductor with
The ceramic window is welded and fixed；The flange welding is fixed on the upper surface of second outer conductor.
Wherein, the radius of the lower end of the inner conductor is less than the radius of the upper end, the portion of the prominent lower end in the inner conductor upper end
Divide and form step, which is equipped with welding gasket 4, which cooperates company by the upper surface of weldment gasket and the ceramic window
It connects and is welded and fixed.
Preferably, first outer conductor is made of stainless steel material, has preferable wearability；Second outer conductor
It is made of oxygen-free copper, the characteristic with high thermal conductivity；The inner conductor is made of beryllium-bronze, provides vacuum section electricity for vacuum electrode
Sub- conductor；The welding gasket is made of oxygenless copper material, uses as attachment feature；The ceramic window is aluminium oxide ceramics system
At including at least one of 95 porcelain, 99 porcelain and sapphire, can effectively completely cut off the vacuum conduction and equipment metal of vacuum electrode
The short circuit of shell；Between first outer conductor and the second outer conductor, between ceramic window and the second outer conductor, ceramic window is led with interior
It is once welded and fixed into furnace between body and by soldering between flange and the second outer conductor.
The outer conductor that the vacuum electrode is composed using oxygen-free copper and stainless steel, not only can guarantee the wearability but also energy of screw thread
Improve the thermal conductivity of outer conductor；Using non-magnetic beryllium-bronze and oxygen-free copper as internal and external conductor, magnetic element is avoided to device
The magnetic interference of part；Using soldering once into furnace, simplify technique requirement, avoid multiple welding cause weld seam gas leakage and other
Uncertain factor.In addition, to can be used stainless steel silver-plated for inner conductor, its conductive capability is made to get a promotion.Ceramic window can also be used
The materials such as silicon carbide, beryllium oxide meet its device for having particular/special requirement individually.
The vacuum electrode is hunted leak after weld formation, and vacuum leak rate is less than 10-10Pa*L/S。
It can be seen that the vacuum electrode can reach ultrahigh vacuum requirement, and there is high thermal conductivity, highly conductive, nonmagnetic
Etc. characteristics.
Claims (8)
1. a kind of vacuum electrode, it is characterised in that: including the first outer conductor (1), the second outer conductor (2), inner conductor (3), ceramics
Window (5) and flange (6), the cylindrical structure that first outer conductor and the second outer conductor have center band to have hollow cavity, institute
The upper end of the lower end and the first outer conductor of stating the second outer conductor is socketed and is welded and fixed to form entire outer conductor；The ceramic window
Center is equipped with hollow cavity, and outer peripheral surface is fixedly welded on second outer conductor close to the sky of one end of first outer conductor
In chambers of the heart body；The upper end of the inner conductor is placed in the hollow cavity of the second outer conductor, and lower end is successively from the ceramic window
It is penetrated in hollow cavity to the hollow cavity of first outer conductor, and the outside middle portion of the inner conductor and the ceramics
Window is welded and fixed；The flange welding is fixed on the upper surface of second outer conductor.
2. vacuum electrode according to claim 1, it is characterised in that: the radius of the lower end of the inner conductor is less than the upper end
Radius, the part of the prominent lower end in the inner conductor upper end forms step, and the upper surface of the step and the ceramic window is cooperatively connected
And it is welded and fixed.
3. vacuum electrode according to claim 2, it is characterised in that: the step is equipped with welding gasket (4).
4. vacuum electrode according to claim 3, it is characterised in that: first outer conductor is made of stainless steel material；
Second outer conductor is made of oxygen-free copper.
5. vacuum electrode according to claim 3, it is characterised in that: the inner conductor is made of beryllium-bronze.
6. vacuum electrode according to claim 3, it is characterised in that: the welding gasket is made of oxygenless copper material.
7. vacuum electrode according to claim 1, it is characterised in that: the ceramic window is made of aluminium oxide ceramics, at least
Including one of 95 porcelain, 99 porcelain and sapphire.
8. vacuum electrode according to claim 1, it is characterised in that: between first outer conductor and the second outer conductor,
Between ceramic window and the second outer conductor, pass through soldering one between ceramic window and inner conductor and between flange and the second outer conductor
It is secondary to be welded and fixed into furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920174890.6U CN209526062U (en) | 2019-01-31 | 2019-01-31 | Vacuum electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920174890.6U CN209526062U (en) | 2019-01-31 | 2019-01-31 | Vacuum electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209526062U true CN209526062U (en) | 2019-10-22 |
Family
ID=68231160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920174890.6U Active CN209526062U (en) | 2019-01-31 | 2019-01-31 | Vacuum electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209526062U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109830411A (en) * | 2019-01-31 | 2019-05-31 | 昆山国力大功率器件工业技术研究院有限公司 | Vacuum electrode |
-
2019
- 2019-01-31 CN CN201920174890.6U patent/CN209526062U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109830411A (en) * | 2019-01-31 | 2019-05-31 | 昆山国力大功率器件工业技术研究院有限公司 | Vacuum electrode |
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