CN202420819U - Rotary positioning fixture for optical element - Google Patents
Rotary positioning fixture for optical element Download PDFInfo
- Publication number
- CN202420819U CN202420819U CN2011204910582U CN201120491058U CN202420819U CN 202420819 U CN202420819 U CN 202420819U CN 2011204910582 U CN2011204910582 U CN 2011204910582U CN 201120491058 U CN201120491058 U CN 201120491058U CN 202420819 U CN202420819 U CN 202420819U
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- positioning
- rotating
- universal stage
- optical element
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Abstract
The utility model relates to a rotary positioning fixture for an optical element. The rotary positioning fixture is characterized by consisting of a rotary positioning mark plate, a rotary table and a two-dimensional eccentric regulating table, wherein the two-dimensional eccentric regulating table is provided with a concave disc for installing the rotary table and two regulating knobs which are arranged in two mutually-vertical direction of the concave disc; the rotary table is provided with a cylindrical notch for installing the optical element to be measured; internal threads are formed at the edge opening of the cylindrical notch; the rotary positioning mark plate is screwed into the internal threads of the cylindrical notch of the rotary table by external threads of the rotary positioning mark plate; and a rotary shaft of the rotary table passes through the center of the rotary positioning mark plate. The rotary positioning fixture has the characteristics of simple structure and low cost, and the problem that an absolute test method is dependent on the high-accuracy rotary table at present is solved.
Description
Technical field
The utility model relates to optical element and detects a kind of optical element positioning of rotating anchor clamps that are used for definitely checking the bearing test optical element.
Background technology
There is high requirement in the contemporary optics system that with large space telescope, laser inertial confinement nuclear fusion device, great scale integrated circuit manufacturing system is representative to the quality of optical element.The quality of optical element has often determined the performance of whole optical system, so the optical element detection technique is the basis that makes up the contemporary optics system.The influence of reference surface face shape error and interferometer system error has been eliminated in absolute check, obtains the absolute value of tested surface face shape, can be used for the calibration of index plane shape, has satisfied the high precision face shape detection demand that contemporary optics is made basically.
In absolute checkout procedure, need be rotated the measured optical unit, just need once rotate like the face graphic data on the every survey straight line of the mutual inspection in three planes of standard and (see formerly technological: G.Schulz etc.; Establishing an optical flatness standard, Applied Optics, 1976; 10 (4)), the odd even function method need carry out 45 °, 90 °, 180 ° rotations and (sees formerly technology: Chiayu Ai etc., Absolute testing of flats by using even and odd functions; Applied Optics, 1993,32 (25)); The rotation balanced method (is seen formerly technological: Klaus R.Freischlad, Absolute interferometric testing based on reconstruction of rotational shear, Applied Optics; 2001; 40 (10)) and the minute surface balanced method (see formerly technology: Ulf Griesmann, Three-flat test solutions based on simple mirror symmetry, Applied Optics; 2006,45 (10)) then need repeatedly rotate.Therefore, universal stage is a necessary component of definitely checking the measured optical unit anchor clamps.
The rotating eccentricity error of universal stage is the key factor (seeing formerly technological: the absolute inspection technology analysis of measurement errors of plane surface shapes such as Xu Yang, Chinese laser, 2011,38 (10)) of the absolute testing accuracy of influence.Adopt the little high-accuracy universal stage of rotating eccentricity can realize high absolute testing accuracy, but also improved system cost.The general weight and volume of high precision universal stage is all bigger than normal, causes absolute inspection jig complicated in mechanical structureization.
Summary of the invention
To the problem that above-mentioned prior art exists, the utility model provides a kind of optical element positioning of rotating anchor clamps, to eliminate the rotating eccentricity error of the measured optical unit in the absolute checkout procedure, improves accuracy of detection.These anchor clamps have simple in structure, and the advantage that cost is low has solved the dependence problem of the at present absolute method of inspection to the high precision universal stage.
The technical solution of the utility model is following:
A kind of optical element positioning of rotating anchor clamps that are used for absolute check; Its characteristics are to be made up of positioning of rotating marking plate, universal stage and two-dimentional eccentric adjusting platform; Described two-dimentional eccentric adjusting platform has one and supplies spill disk that described universal stage installs and be provided with two adjusting knobs in two orthogonal directions of this spill disk; Described universal stage has the tubular notch that supplies the measured optical unit to install; The limit mouth of this tubular notch has internal thread, and described positioning of rotating marking plate is through its internal thread that screws into described universal stage tubular notch, and the turning axle of said universal stage is through the center of said positioning of rotating marking plate.
Said universal stage and said two-dimentional eccentric adjusting platform have counterrotating degree of freedom, but in the plane vertical with turning axle no relative two dimensional motion.
Described positioning of rotating marking plate is made up of transparent zone and mark zone two parts; Described transparent zone is meant the zone that the luminous energy interference-free passes through; Described mark zone has at least 3 positioning of rotating marks.
Described positioning of rotating mark is circular, triangle, or the printing opacity of rectangle or light tight signature; The home position of circular feature mark, the vertex position of triangle character mark, the characteristic point positions such as center of rectangular characteristic mark are called the position of positioning of rotating mark; The position of all positioning of rotating marks is on the circle in the center of circle at the center with the positioning of rotating marking plate all.
The adjacent position of described universal stage periphery and described two-dimentional eccentric adjusting platform has the rotation scale, is used for confirming the anglec of rotation.
Description of drawings
Fig. 1 is the positioning of rotating anchor clamps synoptic diagram of the utility model
Fig. 2 has installed the positioning of rotating anchor clamps synoptic diagram behind the optical element
Fig. 3 definitely checks positioning of rotating anchor clamps dress school synoptic diagram in the interferometer measuration system
Fig. 4 is the related a kind of positioning of rotating marking plate synoptic diagram of the positioning of rotating anchor clamps of the utility model
Fig. 5 is the related a kind of positioning of rotating marking plate synoptic diagram of the positioning of rotating anchor clamps of the utility model
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is further specified, but should not limit protection scope of the present invention with this embodiment.
The absolute check of the utility model is as shown in Figure 1 with optical element positioning of rotating clamp structure synoptic diagram.Visible by figure, the utility model optical element positioning of rotating anchor clamps 1 are made up of positioning of rotating marking plate 101, universal stage 102, two-dimentional eccentric adjusting platform 103.Two dimension eccentric adjusting platform 103 has spill disk that a confession universal stage 102 installs and is provided with two adjusting knob 103A, 103B in two orthogonal directions of this spill disk; Universal stage 102 has the tubular notch that supplies the measured optical unit 2 to install, and the limit mouth of this tubular notch has internal thread; Positioning of rotating marking plate 101 screws into the internal thread of universal stage 102 tubular notches through it, and the turning axle of universal stage 102 is through the center of positioning of rotating marking plate 101.
Two dimension eccentric adjusting platform 103 is in perpendicular to the plane of universal stage turning axle, to carry out the adjusting platform that two linear degree of freedom are regulated.
The mounting structure synoptic diagram of optical element is as shown in Figure 2; When the measured optical unit 2 is installed in 1 last time of these positioning of rotating anchor clamps; The measured optical unit 2 that directly adapts with the inboard tubular notch of universal stage is installed in earlier in the universal stage 102 inboard tubular grooves; Tested surface one side of the measured optical unit 2 outwardly, and is and vertical with the turning axle 102A of universal stage.Then positioning of rotating marking plate 101 is screwed into universal stage 102 internal threads through it and be pressed in locking on the described the measured optical unit 2.
Fig. 3 definitely checks positioning of rotating anchor clamps dress school synoptic diagram in the interferometer measuration system; Positioning of rotating anchor clamps 1 are installed in absolute check interferometer measuration system emergent pupil 301 the place aheads; Regulate positioning of rotating anchor clamps 1 in absolute check interferometer measuration system optical axis direction position; Make the measured optical unit 2 tested surfaces in the positioning of rotating anchor clamps in to check interferometer measuration system 3, become sharply defined image, even the tested surface of the measured optical unit is positioned on the imaging surface 3B of interferometer measuration system in the anchor clamps.
The related a kind of positioning of rotating marking plate structural representation of positioning of rotating anchor clamps is as shown in Figure 4.This positioning of rotating marking plate 101 is by transparent zone 101-TR and mark zone 101-MR flat board dimerous.Transparent zone 101-TR is meant the zone that the luminous energy interference-free passes through, and mark zone 101-MR is meant the zone that has 3 positioning of rotating mark 101-M.Positioning of rotating mark 101-M is circular light transmission characteristics mark 101-M001,101-M002,101-M003; The home position of circular feature mark is called the position of positioning of rotating mark; The position of all positioning of rotating marks is on the round 101-C in the center of circle at the center with the positioning of rotating marking plate all.Positioning of rotating is marked in the measurement aperture of absolute check interferometer measuration system.
The related another kind of positioning of rotating marking plate structural representation of positioning of rotating anchor clamps is as shown in Figure 5.Positioning of rotating mark 101-M is the light tight signature 101-M001 of triangle, 101-M002,101-M003; The vertex position of triangle character mark is called the position of positioning of rotating mark; The position of all positioning of rotating marks is on the round 101-C in the center of circle at the center with the positioning of rotating marking plate all.
Claims (5)
1. one kind is used for the absolute optical element positioning of rotating anchor clamps of checking; It is characterized in that forming by positioning of rotating marking plate (101), universal stage (102) and two-dimentional eccentric adjusting platform (103); Described two-dimentional eccentric adjusting platform (103) has one and supplies spill disk that described universal stage (102) installs and be provided with two adjusting knobs (103A, 103B) in two orthogonal directions of this spill disk; Described universal stage (102) has the tubular notch that confession the measured optical unit (2) is installed; The limit mouth of this tubular notch has internal thread; Described positioning of rotating marking plate (101) screws into the internal thread of described universal stage (102) tubular notch through it, and the turning axle of said universal stage (102) is through the center of said positioning of rotating marking plate (101).
2. optical element positioning of rotating anchor clamps according to claim 1 is characterized in that said universal stage (102) and said two-dimentional eccentric adjusting platform (103) have counterrotating degree of freedom, but in the plane vertical with turning axle no relative two dimensional motion.
3. optical element positioning of rotating anchor clamps according to claim 1 is characterized in that described positioning of rotating marking plate (101) is made up of transparent zone (101-TR) and mark zone (101-MR) two parts; Described transparent zone is meant the zone that the luminous energy interference-free passes through; Described mark zone (101-MR) has at least 3 positioning of rotating marks.
4. optical element positioning of rotating anchor clamps according to claim 3 is characterized in that, described positioning of rotating mark is circular, triangle, or the printing opacity of rectangle or light tight signature; The home position of circular feature mark, the vertex position of triangle character mark, the characteristic point positions such as center of rectangular characteristic mark are called the position of positioning of rotating mark; The position of all positioning of rotating marks is on the circle in the center of circle at the center with the positioning of rotating marking plate all.
5. optical element positioning of rotating anchor clamps according to claim 1 and 2 is characterized in that the adjacent position of described universal stage (102) periphery and described two-dimentional eccentric adjusting platform (103) has the rotation scale, are used for confirming the anglec of rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204910582U CN202420819U (en) | 2011-11-30 | 2011-11-30 | Rotary positioning fixture for optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204910582U CN202420819U (en) | 2011-11-30 | 2011-11-30 | Rotary positioning fixture for optical element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202420819U true CN202420819U (en) | 2012-09-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204910582U Expired - Fee Related CN202420819U (en) | 2011-11-30 | 2011-11-30 | Rotary positioning fixture for optical element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202420819U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519389A (en) * | 2011-11-30 | 2012-06-27 | 中国科学院上海光学精密机械研究所 | Rotation positioning clamp and rotation positioning method for optical element |
| CN106164641A (en) * | 2014-03-31 | 2016-11-23 | 柯尼卡美能达株式会社 | The mensuration fixture of optical element, eccentric determinator and eccentric assay method |
-
2011
- 2011-11-30 CN CN2011204910582U patent/CN202420819U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519389A (en) * | 2011-11-30 | 2012-06-27 | 中国科学院上海光学精密机械研究所 | Rotation positioning clamp and rotation positioning method for optical element |
| CN102519389B (en) * | 2011-11-30 | 2014-10-01 | 中国科学院上海光学精密机械研究所 | Rotation positioning clamp and rotation positioning method for optical element |
| CN106164641A (en) * | 2014-03-31 | 2016-11-23 | 柯尼卡美能达株式会社 | The mensuration fixture of optical element, eccentric determinator and eccentric assay method |
| CN106164641B (en) * | 2014-03-31 | 2018-09-21 | 柯尼卡美能达株式会社 | The measurement fixture of optical element, eccentric measurement device and eccentric assay method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120905 Termination date: 20151130 |
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| EXPY | Termination of patent right or utility model |