CN202415678U - Double-crucible electron gun - Google Patents
Double-crucible electron gun Download PDFInfo
- Publication number
- CN202415678U CN202415678U CN201120576487XU CN201120576487U CN202415678U CN 202415678 U CN202415678 U CN 202415678U CN 201120576487X U CN201120576487X U CN 201120576487XU CN 201120576487 U CN201120576487 U CN 201120576487U CN 202415678 U CN202415678 U CN 202415678U
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- water
- crucible
- electron beam
- thermal source
- crucibles
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Abstract
The utility model discloses a double-crucible electron gun which comprises a heat source, two rotating crucibles, a bottom plate, a water cooling mechanism and a driving mechanism, wherein the two rotating crucibles are respectively arranged on the two sides of the heat source; the bottom of the heat source is connected with the water cooling mechanism; the bottom plate is arranged below the heat source and the two rotating crucibles; and the lower part of the water cooling mechanism is connected with the driving mechanism. The double-crucible electron gun has the beneficial effects that as the two rotating crucibles are arranged, an electron beam of the double-crucible electron gun can simultaneously realize deflection angles of 270 degrees and 180 degrees by adjusting a power supply to adapt to workpieces conforming to the different film plating requirements, so that the film plating efficiency is effectively improved; and meanwhile, the double-crucible electron gun is simple in structure, is convenient in operation and is applied to the workpieces conforming to the different film plating requirements without replacing the whole electron gun only through adjusting the power supply, so that the operation is convenient; and the efficiency can also be effectively improved.
Description
Technical field
The utility model relates to the electron beam evaporation technique field, particularly a kind of pair of crucible electron beam gun.
Background technology
Electron beam gun is the parts that produce electron beam, is made up of linearity spiral tungsten cathode, grid and anode.Its principle is: negative electrode is in identical negative potential with grid, the plus earth current potential.Negative electrode is heated by Alternating Current Power Supply, makes it emitting electrons, and electronics receives the influence of grid potential, under anode voltage quickens, forms the electron beam of assembling.Under the effect in magnetic field, electron beam is further focused on and deflection is injected for 270 ° or 180 ° and is equipped with by in the crucible of plated film material, and its kinetic energy becomes heat energy makes the material hydatogenesis on substrate, reaches the requirement of required rete.Electron beam gun at present commonly used only is provided with a crucible, and its electron beam can only be realized the deflection angle of 270 ° or 180 °, so the workpiece that requires to different plated films can only be realized plated film through changing electron beam gun, and its complex operation, plated film efficient is also low.
The utility model content
The purpose of the utility model is to overcome the deficiency of prior art, and a kind of pair of crucible electron beam gun is provided, and the electron beam of this electron beam gun can be realized the deflection angle of 270 ° and 180 ° simultaneously, to adapt to the workpiece of different plated film requirements, effectively improves its plated film efficient.
The technical scheme of the utility model is: a kind of pair of crucible electron beam gun; Comprise thermal source, two rotation crucibles, base plate, water-cooled mechanism and driving mechanisms; Two rotation crucibles are located at the both sides of thermal source respectively; The thermal source bottom is connected with water-cooled mechanism, and base plate is located at thermal source and two rotation crucible belows, and water-cooled mechanism below is connected with driving mechanism.
Said water-cooled mechanism comprises water-cooled axle and two water input seats, and the water-cooled axle is connected with the thermal source bottom, is connected with the water-cooled axle after two water input seats pass base plate respectively, and two water is imported respectively correspondence and is located at below two rotation crucibles.
Said driving mechanism comprises motor, output gear and two transmitting gears, and the output gear center is connected with motor output end, and two transmitting gears are located at the output gear periphery respectively, and the corresponding connections of seat are imported with two water respectively in the center of two transmitting gears.
Said motor and two water input seats are individually fixed on the erecting frame.
The joint of said water-cooled axle and two rotation crucible bottom is provided with rotating seal.
Said two rotation crucibles top also is respectively equipped with butterfly.
Said thermal source is a filament, the power supply of the external PLC control of thermal source variable power.
When this pair of crucible electron beam gun uses; Its principle is: in the driving mechanism; Motor sends power to water-cooled mechanism through output gear and transmitting gear; Water-cooled mechanism drives two rotation crucibles and rotates respectively, and thermal source ejected electron bundle is injected respectively in the rotation crucible of being located at its both sides, and the variation of electron beam emission angle can be regulated the power realization of power supply through PLC.
The utility model has following beneficial effect with respect to prior art:
This pair of crucible electron beam gun is through two rotation crucibles are set, and through the adjusting of power supply, makes its electron beam can realize the deflection angle of 270 ° and 180 ° simultaneously, to adapt to the workpiece of different plated film requirements, effectively improves its plated film efficient.Simultaneously, this pair crucible electron gun structure is simple, and is easy to operate, when being applied to the workpiece of different plated film requirements, as long as regulate power supply, and need not change whole electron beam gun, simple to operate, also can effectively raise the efficiency.
Description of drawings
Fig. 1 is the structural representation of this pair crucible electron beam gun.
Fig. 2 is the A-A view of Fig. 1.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is done further to specify, but the embodiment of the utility model is not limited thereto.
Embodiment
A kind of pair of crucible electron beam gun of present embodiment; Its structure such as Fig. 1 or shown in Figure 2; Comprise thermal source 1, two rotation crucibles 2, base plate 3, water-cooled mechanism and driving mechanisms, two rotation crucibles 2 are located at the both sides of thermal source 1 respectively, and the thermal source bottom is connected with water-cooled mechanism; Base plate is located at thermal source and two rotation crucible belows, and water-cooled mechanism below is connected with driving mechanism.
Water-cooled mechanism comprises water-cooled axle 4 and two water input seat 5, and the water-cooled axle is connected with the thermal source bottom, is connected with the water-cooled axle after two water input seats pass base plate respectively, and two water is imported respectively correspondence and is located at below two rotation crucibles.
Driving mechanism comprises motor 6, output gear 7 and two transmitting gears 8, and the output gear center is connected with motor output end, and two transmitting gears are located at the output gear periphery respectively, and the corresponding connections of seat are imported with two water respectively in the center of two transmitting gears.
Motor 6 and two water input seats 5 are individually fixed on the erecting frame 9.
The joint of water-cooled axle 4 and two rotation crucible 2 bottoms is provided with rotating seal 10.
Two rotation crucible 2 tops also are respectively equipped with butterfly 11.
Thermal source is a filament, the power supply of the external PLC control of thermal source variable power.
When this pair of crucible electron beam gun uses; Its principle is: in the driving mechanism; Motor sends power to water-cooled mechanism through output gear and transmitting gear; Water-cooled mechanism drives two rotation crucibles and rotates respectively, and thermal source ejected electron bundle (shown in dotted line among Fig. 1) is injected respectively in the rotation crucible of being located at its both sides, and the variation of electron beam emission angle can be regulated the power realization of power supply through PLC.
As stated, can realize preferably that just the utility model, the foregoing description are merely the preferred embodiment of the utility model, be not the practical range that is used for limiting the utility model; Be that all equalizations of being done according to the utility model content change and modification, all contained by the utility model claim scope required for protection.
Claims (7)
1. two crucible electron beam gun; It is characterized in that; Comprise thermal source, two rotation crucibles, base plate, water-cooled mechanism and driving mechanisms, two rotation crucibles are located at the both sides of thermal source respectively, and the thermal source bottom is connected with water-cooled mechanism; Base plate is located at thermal source and two rotation crucible belows, and water-cooled mechanism below is connected with driving mechanism.
2. according to claim 1 pair of crucible electron beam gun; It is characterized in that; Said water-cooled mechanism comprises water-cooled axle and two water input seats; Water-cooled axle and thermal source bottom is connected, is connected with the water-cooled axle after two water input seats pass base plate respectively, and two water inputs respectively correspondence are located at below two rotation crucibles.
3. according to claim 2 pair of crucible electron beam gun; It is characterized in that; Said driving mechanism comprises motor, output gear and two transmitting gears; The output gear center is connected with motor output end, and two transmitting gears are located at the output gear periphery respectively, and the corresponding connections of seat are imported with two water respectively in the center of two transmitting gears.
4. according to claim 3 pair of crucible electron beam gun is characterized in that, said motor and two water input seats are individually fixed on the erecting frame.
5. according to claim 2 pair of crucible electron beam gun is characterized in that, the joint of said water-cooled axle and two rotation crucible bottom is provided with rotating seal.
6. according to claim 1 pair of crucible electron beam gun is characterized in that, said two rotation crucibles top also is respectively equipped with butterfly.
7. according to claim 1 pair of crucible electron beam gun is characterized in that said thermal source is a filament, the power supply of the external PLC control of thermal source variable power.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120576487XU CN202415678U (en) | 2011-12-31 | 2011-12-31 | Double-crucible electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120576487XU CN202415678U (en) | 2011-12-31 | 2011-12-31 | Double-crucible electron gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202415678U true CN202415678U (en) | 2012-09-05 |
Family
ID=46740458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120576487XU Expired - Fee Related CN202415678U (en) | 2011-12-31 | 2011-12-31 | Double-crucible electron gun |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202415678U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104264114A (en) * | 2014-10-14 | 2015-01-07 | 秦皇岛国泰玻璃有限公司 | Full-automatic vacuum electronic gun film coating device |
-
2011
- 2011-12-31 CN CN201120576487XU patent/CN202415678U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104264114A (en) * | 2014-10-14 | 2015-01-07 | 秦皇岛国泰玻璃有限公司 | Full-automatic vacuum electronic gun film coating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120905 Termination date: 20161231 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |