CN202393344U - Three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride) - Google Patents
Three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride) Download PDFInfo
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- CN202393344U CN202393344U CN2011205696552U CN201120569655U CN202393344U CN 202393344 U CN202393344 U CN 202393344U CN 2011205696552 U CN2011205696552 U CN 2011205696552U CN 201120569655 U CN201120569655 U CN 201120569655U CN 202393344 U CN202393344 U CN 202393344U
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Abstract
The utility model discloses a three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride), which is characterized in that: a PVDF piezoelectric film is taken as a vibration beam with a simple support beam structure; the left and right ends of the piezoelectric film are fixed on the outer sides of piezoelectric drivers with the same structure respectively; the inner sides of the piezoelectric drivers are symmetrically fixed on both sides of a T-shaped measuring head frame; an integral micro measuring rod measuring head is fixedly arranged at the central position of the lower surface of the piezoelectric film; a sine alternating-current signal is applied to the piezoelectric drivers, is taken as an exciting signal, and is used for driving the piezoelectric film to drive the integrated micro measuring rod measuring head to work in a resonant state; the integrated micro measuring rod measuring head is driven by the piezoelectric film to perform Z-direction testing on a sample in a light knocking mode; X-direction and Y-direction testing is performed on the side part of the sample in a friction mode; and the change of a polarized surface differential charge signal of the PVDF piezoelectric film is detected and used for representing the contact degree of the integrated micro measuring rod measuring head and the sample. The three-dimensional resonant triggering measuring head can be applied to three-dimensional appearance measurement such as various high-precision and micro-measuring-force soft materials, micro devices, ultra-precision optical devices and the like.
Description
Technical field
The utility model relates to a kind of three-dimensional resonance that can be applied in the measuring three-dimensional morphology fields such as soft material that various high precision, micrometering measure one's own ability, micromachine part, micro element, ultraprecise optical device and triggers gauge head.
Background technology
In recent years; The development of nanometer positioning technology makes superfinishing and ultra micro processing get into the New Times of nanometer technology; Make measurement reach nanometer, inferior nanometer scale to small displacement and small items; The especially micro-nano gauge head of micro-nano three coordinate measuring machine (CMM) is proposed requirements at the higher level such as high precision, low ergometry, also do not have proven technique to satisfy the demands at present.
Existing micro-nano CMM gauge head generally has contact measuring head and contactless gauge head.Contact measuring head is that gauge head directly contacts with sample, draws three-dimensional appearance information through acquisition process specimen surface point three-dimensional coordinate; Contactless gauge head generally is according to optical principle, is equipped with light path design and obtains the surface topography data.Contact measuring head good reliability, precision are high, but gauge head when contacting with specimen surface the dynamometry of generation possibly cause elasticity even plastic deformation, energy measurement flexible material not especially.Contactless gauge head has been avoided the influence of contact dynamometry, and measuring speed and SF are high, but receive thing table properties influence bigger, can not reach the resolution and the uncertainty of contact measuring head.
Summary of the invention
The utility model is for avoiding above-mentioned existing in prior technology weak point; Provide a kind of three-dimensional resonance to trigger gauge head based on PVDF; Utilize the piezoelectric property of PVDF, high resonance characteristic and to the hypersensitivity of small power; Combine with integral type micrometering bar gauge head, the three-dimensional resonance of formation micrometering power triggers gauge head, is used to realize that the three-dimensional resonance to high precision such as soft material, micro element, ultraprecise optical device, low ergometry triggers measurement and location.
The utility model adopts following technical scheme for the technical solution problem:
The utility model based on the design feature of the three-dimensional resonance triggering gauge head of PVDF is: adopt the PVDF piezoelectric membrane as the walking beam with simple beam structure; The right ends of said PVDF piezoelectric membrane is separately fixed at the outside of the piezoelectric actuator of two same structures; The inboard symmetry of the piezoelectric actuator of said two same structures is fixedly installed on the both sides of T type head-measuring rack, fixedly installs integral type micrometering bar gauge head in the central position of the lower surface of said PVDF piezoelectric membrane;
Put on the said piezoelectric actuator as encouraging the signal that shakes with sinusoidal ac signal, drive said PVDF piezoelectric membrane and drive integral type micrometering bar gauge head and work in resonant condition;
The test that the integral type micrometering bar gauge head that setting is driven by said PVDF piezoelectric membrane carries out the Z direction on the surface of sample is the pattern of rapping; The integral type micrometering bar gauge head that setting is driven by said PVDF piezoelectric membrane is the friction pattern in the test that the sidepiece of sample carries out directions X and Y direction; The variation of the polarization surface differential charge signal of detection PVDF piezoelectric membrane is in order to characterize the touching degree of said integral type micrometering bar gauge head and sample.
The utility model is to trigger gauge head with said three-dimensional resonance to keep motionless based on the three-dimensional resonance trigger positioning method of the three-dimensional resonance triggering gauge head of PVDF, accomplishes three-dimensional resonance with the translation of sample in surface level and triggers the three-dimensional triggered location of gauge head at specimen surface; Or the sample maintenance is motionless, triggers the translation of gauge head in surface level with three-dimensional resonance and accomplishes its three-dimensional triggered location at specimen surface.
The utility model utilizes the piezoelectric property of PVDF film, high resonance characteristic and to the hypersensitivity of small power; Combine to make up the PVDF walking beam gauge head system that declines with integral type micrometering bar gauge head; Reach resonant condition through the drive gauge head; Detect the electric signal of processing PVDF piezoelectric membrane polarization surface generation and relatively realize the amplitude feedback by signal processing circuit, realize the measurement and the three-dimensional resonance triggered location of three-dimensional resonance triggering gauge head with setting voltage value.Compared with present technology, the beneficial effect of the utility model is embodied in:
1, the utility model adopts the PVDF piezoelectric membrane simultaneously as free beam and Micro-force sensor, adopts integral type micrometering bar to survey ball and constitutes vibration beam type three dimensional probe, 3-D probe, can realize the high-precision three-dimensional topography measurement to multiple microdevice.
2, the utility model vibration beam type three dimensional probe, 3-D probe works in resonant condition, and integral type micrometering bar gauge head and sample rap pattern or friction mode scanning with hundreds of nN level micrometering power, can realize that flexible material is hanged down destructive small power to be measured.
3, the utility model all can reach inferior nanometer scale resolution through experimental verification in X, Y, three directions of Z, and wherein the systematic survey resolution on the directions X is about 0.22nm; Systematic survey resolution is about 0.29nm on the Y direction; The Z direction attendes system's vertical resolution and is about 0.26nm.
Description of drawings
Fig. 1 a is the three-dimensional resonance gauge head of the utility model PVDF at the Z synoptic diagram of upwards working;
Fig. 1 b is the three-dimensional resonance gauge head of the utility model PVDF at X, the Y synoptic diagram of upwards working;
Fig. 2 a is the amplitude frequency diagram of the utility model gauge head PVDF piezoelectric membrane;
Fig. 2 b is the amplitude frequency diagram after the utility model gauge head PVDF piezoelectric membrane and micrometering bar are surveyed the ball combination;
Fig. 3 a be in the utility model the PVDF gauge head at Z direction free vibration synoptic diagram;
Fig. 3 b be in the utility model the PVDF gauge head in Z direction free vibration oscillogram;
Fig. 4 a is PVDF gauge head vibration synoptic diagram when Z direction micrometering bar survey ball touches sample in the utility model;
Fig. 4 b is PVDF gauge head vibrational waveform figure when Z direction micrometering bar survey ball touches sample in the utility model;
Fig. 5 a be in the utility model the PVDF gauge head at X, Y to the free vibration synoptic diagram;
Fig. 5 b is a PVDF gauge head free vibration oscillogram in the utility model;
PVDF gauge head vibration synoptic diagram when Fig. 6 a is X in the utility model, Y direction micrometering bar survey ball friction sample;
PVDF gauge head vibrational waveform figure when Fig. 6 b is X in the utility model, Y direction micrometering bar survey ball friction sample;
Fig. 7 a is a directions X force curve experimental result in the utility model;
Fig. 7 b is a Y direction force curve experimental result in the utility model;
Fig. 7 c is a Z direction force curve experimental result in the utility model;
Label among the figure: 1 is the PVDF piezoelectric membrane; 2 is piezoelectric actuator; 3 is T type head-measuring rack; 4 is integral type micrometering bar gauge head; 5 samples; 6 sinusoidal ac signals; 7 differential charge signals.
Embodiment
The version that triggers gauge head based on the three-dimensional resonance of PVDF in the present embodiment is:
Shown in Fig. 1 a and Fig. 1 b; Adopt PVDF piezoelectric membrane 1 as walking beam with simple beam structure; Also be as Micro-force sensor simultaneously, the right ends of PVDF piezoelectric membrane 1 is separately fixed at the outside of the PZT piezoelectric actuator 2 of two same structures, the inboard symmetry of the piezoelectric actuator 2 of two same structures is fixedly installed on the both sides of T type head-measuring rack 3; Central position at the lower surface of PVDF piezoelectric membrane 1 fixedly installs integral type micrometering bar gauge head 4, and sample 5 is horizontal positioned.
Put on the piezoelectric actuator 2 as encouraging the signal that shakes with sinusoidal ac signal, drive PVDF piezoelectric membrane 1 and drive integral type micrometering bar gauge head 4 and work in resonant condition;
The test that the integral type micrometering bar gauge head 4 that setting is driven by PVDF piezoelectric membrane 1 carries out the Z direction on the surface of sample 5 is the pattern of rapping; The integral type micrometering bar gauge head 4 that setting is driven by PVDF piezoelectric membrane 1 is the friction pattern in the test that the sidepiece of sample 5 carries out directions X and Y direction; The signalization treatment circuit is used to detect and handle the variation of the polarization surface differential charge signal of PVDF piezoelectric membrane 1, in order to characterize the touching degree of integral type micrometering bar gauge head 4 and sample 5.
Measuring method:
Horizontal positioned sample 5; With sinusoidal ac signal 6 excitation piezoelectric actuators 2; Make PVDF piezoelectric membrane 1 and the gauge head system that integral type micrometering bar gauge head 4 constitutes reach resonant condition, with uniform amplitude free vibration, PVDF piezoelectric membrane 1 surface produces the polarization charge signal; Simultaneously with PVDF piezoelectric membrane 1 as Micro-force sensor; When integral type micrometering bar gauge head 4 Z to the pattern of rapping or at X, Y when contacting with the surface of sample 5 with the friction pattern; Because energy is revealed, and causes PVDF piezoelectric membrane 1 gauge head system amplitude to reduce, the decay of surface charge amount; Amplify this differential charge signal 7 and relatively export pressure difference signal through detecting to handle with the setting voltage signal; Realize the amplitude FEEDBACK CONTROL in conjunction with control system, realize that promptly the gauge head system triggers measurement and location at the resonance of X, Y, Z three directions, and obtain corresponding force curve figure.
In the present embodiment, the three-dimensional resonance trigger positioning method that triggers gauge head based on the three-dimensional resonance of PVDF is: trigger gauge head with three-dimensional resonance and keep motionless, accomplish three-dimensional resonance with the translation of sample 5 in surface level and trigger the three-dimensional triggered location of gauge head at specimen surface; Or sample 5 maintenances are motionless, trigger the translation of gauge head in surface level with three-dimensional resonance and accomplish its three-dimensional triggered location at specimen surface.
Amplitude frequency diagram when Fig. 2 a is depicted as the PVDF piezoelectric membrane and does not install integral type micrometering bar gauge head additional, resonance frequency is about 3470Hz, and to press signal amplitude be 0.79V in discharge before it was pairing, and quality factor q is about 45; Amplitude frequency diagram after Fig. 2 b is depicted as the PVDF piezoelectric membrane and integral type micrometering bar gauge head combines, its resonance frequency is 2406Hz, and resonance peak is 2.6V, and its quality factor q is about 29.
Fig. 3 a is that the three-dimensional resonance of Z direction PVDF triggers gauge head free vibration synoptic diagram, and Fig. 3 b is that the three-dimensional resonance of Z direction PVDF triggers gauge head free vibration oscillogram, horizontal ordinate t express time among Fig. 3 b, and ordinate A representes gauge head system resonance amplitude.When integral type micrometering bar gauge head did not contact with sample, the gauge head system was with than large amplitude A
0Be in the free harmonic vibration state, shown in Fig. 3 a and Fig. 3 b; Because resonant condition PVDF piezoelectric membrane gauge head system is to the hypersensitivity of little power, when integral type micrometering bar gauge head constantly approaches specimen surface when rapping the pattern contact, energy is revealed and is caused gauge head system amplitude fading to A
1, shown in Fig. 4 a Fig. 4 b.
In like manner; Be respectively shown in Fig. 5 a and Fig. 5 b the three-dimensional resonance of PVDF trigger gauge head at X, Y to free vibration synoptic diagram and free vibration oscillogram; Fig. 6 a is that three-dimensional resonance triggers gauge head at X, the Y direction synoptic diagram with friction pattern contact sample, and Fig. 6 b is a gauge head system vibration oscillogram under this friction pattern.
The three-dimensional resonance of the utility model triggers the spatial resolution that gauge head has inferior nanometer scale, through experiment test, and the about 6mV of system noise levels on directions X, sensitivity can reach 27.7V/ μ m, and the vertical resolution 0.22nm of system is shown in Fig. 7 a.The about 9mV of system noise levels on the Y direction, sensitivity can reach 31.1V/ μ m, and the vertical resolution 0.29nm of system is shown in Fig. 7 b.The about 9mV of system noise levels on the Z direction, sensitivity can reach 35V/ μ m, and the vertical resolution 0.26nm of system is shown in Fig. 7 c.
Claims (1)
1. the three-dimensional resonance based on PVDF triggers gauge head; It is characterized in that: adopt PVDF piezoelectric membrane (1) as walking beam with simple beam structure; The right ends of said PVDF piezoelectric membrane (1) is separately fixed at the outside of the piezoelectric actuator (2) of two same structures; The inboard symmetry of the piezoelectric actuator of said two same structures (2) is fixedly installed on the both sides of T type head-measuring rack (3), fixedly installs integral type micrometering bar gauge head (4) in the central position of the lower surface of said PVDF piezoelectric membrane (1);
Put on said piezoelectric actuator (2) with sinusoidal ac signal and go up, drive said PVDF piezoelectric membrane (1) drive integral type micrometering bar gauge head (4) and work in resonant condition as encouraging the signal that shakes;
The test that the integral type micrometering bar gauge head (4) that setting is driven by said PVDF piezoelectric membrane (1) carries out the Z direction on the surface of sample (5) is the pattern of rapping; The integral type micrometering bar gauge head (4) that setting is driven by said PVDF piezoelectric membrane (1) is the friction pattern in the test that the sidepiece of sample (5) carries out directions X and Y direction; The variation of the polarization surface differential charge signal of detection PVDF piezoelectric membrane (1) is in order to characterize the touching degree of said integral type micrometering bar gauge head (4) and sample.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011205696552U CN202393344U (en) | 2011-12-30 | 2011-12-30 | Three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride) |
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| CN2011205696552U CN202393344U (en) | 2011-12-30 | 2011-12-30 | Three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride) |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538657A (en) * | 2011-12-30 | 2012-07-04 | 合肥工业大学 | Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method |
| CN104019736A (en) * | 2014-06-12 | 2014-09-03 | 合肥工业大学 | Double-end tuning fork three-dimensional resonance triggering probe system and true three-dimensional measurement method thereof |
-
2011
- 2011-12-30 CN CN2011205696552U patent/CN202393344U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538657A (en) * | 2011-12-30 | 2012-07-04 | 合肥工业大学 | Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method |
| CN102538657B (en) * | 2011-12-30 | 2014-12-03 | 合肥工业大学 | Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method |
| CN104019736A (en) * | 2014-06-12 | 2014-09-03 | 合肥工业大学 | Double-end tuning fork three-dimensional resonance triggering probe system and true three-dimensional measurement method thereof |
| CN104019736B (en) * | 2014-06-12 | 2017-01-25 | 合肥工业大学 | Double-end tuning fork three-dimensional resonance triggering probe system and true three-dimensional measurement method thereof |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Huang Qiangxian Inventor after: Wei Jinpeng Inventor after: Yu Huijuan Inventor after: Huang Shuai Inventor after: Gong Ermin Inventor after: Li Zhibo Inventor before: Huang Qiangxian Inventor before: Wei Jinpeng Inventor before: Yu Huijuan Inventor before: Xia Ruixue Inventor before: Shi Yanqiong Inventor before: Liu Ning |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: HUANG QIANGXIAN WEI JINPENG YU HUIJUAN XIA RUIXUE SHI YANQIONG LIU NING TO: HUANG QIANGXIAN WEI JINPENG YU HUIJUAN HUANG SHUAI GONG ERMIN LI ZHIBO |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20120822 Effective date of abandoning: 20141203 |
|
| RGAV | Abandon patent right to avoid regrant |