CN102538657B - Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method - Google Patents
Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method Download PDFInfo
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- CN102538657B CN102538657B CN201110457072.5A CN201110457072A CN102538657B CN 102538657 B CN102538657 B CN 102538657B CN 201110457072 A CN201110457072 A CN 201110457072A CN 102538657 B CN102538657 B CN 102538657B
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Abstract
The invention discloses a three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and a three-dimensional resonance trigger positioning method. The three-dimensional resonance trigger measuring head based on PVDF is characterized in that a PVDF piezoelectric membrane is adopted as a vibrating beam with a simply supported beam structure, the left and the right ends of the piezoelectric membrane are fixed on the outer sides of two piezoelectric actuators with same structures, the inner sides of the piezoelectric actuators are symmetrically fixed on the two sides of a T-shaped measuring head bracket, and an integrated micro-measuring rod head is fixed at the center of the lower surface of the piezoelectric membrane; sinusoidal AC signals are applied to the piezoelectric actuators to serve as excitation signals, and the piezoelectric membrane is driven to drive the integrated micro-measuring rod head to work in the resonance state; the Z-direction testing of the integrated micro-measuring rod head driven by the piezoelectric membrane on the surface of the sample is set to be in a tapping mode; the X-direction and Y-direction testing at the side part of the sample is set to be in a friction mode; and the variation of the polarized surface differential electric charge signal of the PVDF piezoelectric membrane is detected so as to represent the contact degree of the integrated micro-measuring rod head and the sample. The three-dimensional resonance trigger measuring head based on PVDF and the three-dimensional resonance trigger positioning method can be used for the three-dimensional topography measurement of the soft materials, the micro elements, super-precision optical devices, and the like with high precision and micro-measuring power.
Description
Technical field
The present invention relates to a kind of three-dimensional resonance trigger measuring head and three-dimensional resonance trigger positioning method that can be applied in the measuring three-dimensional morphology fields such as soft material that various high precision, micrometering measure one's own ability, micromachine part, micro element, ultraprecise optical device.
Background technology
In recent years, the development of nanotechnology makes superfinishing and ultra micro processing enter the New Times of nanometer technology, make the measurement of small displacement and small items reach nanometer, sub-nanometer scale, the especially micro-nano gauge head of micro-nano three coordinate measuring machine (CMM) is proposed to the requirements at the higher level such as high precision, low ergometry, also do not have at present proven technique to satisfy the demands.
Existing micro-nano CMM gauge head generally has contact measuring head and contactless gauge head.Contact measuring head is that gauge head directly contacts with sample, draws three-dimensional appearance information by acquisition process specimen surface point three-dimensional coordinate; Contactless gauge head is generally according to optical principle, is equipped with light path design and obtains surface topography data.Contact measuring head good reliability, precision are high, but the dynamometry that gauge head produces while contacting with specimen surface may cause even plastic deformation of elasticity, especially can not measure flexible material.Contactless gauge head has been avoided the impact of contact dynamometry, and measuring speed and sample frequency are high, but are subject to thing table properties influence larger, can not reach resolution and the uncertainty of contact measuring head.
Summary of the invention
The present invention is for avoiding the existing weak point of above-mentioned prior art, a kind of three-dimensional resonance trigger measuring head and three-dimensional resonance trigger positioning method based on PVDF is provided, utilize the piezoelectric property of PVDF, high resonance characteristic and the hypersensitivity to small power, combine with integral type micrometering bar gauge head, form micrometering power three-dimensional resonance trigger measuring head, for realizing, the three-dimensional resonance of the high precision such as soft material, micro element, ultraprecise optical device, low ergometry is triggered and measured and location.
The present invention be technical solution problem by the following technical solutions:
The design feature that the present invention is based on the three-dimensional resonance trigger measuring head of PVDF is: adopt PVDF piezoelectric membrane as the walking beam with simple beam structure, the two ends, left and right of described PVDF piezoelectric membrane are separately fixed to the outside of the piezoelectric actuator of two same structures, the inner side symmetry of the piezoelectric actuator of described two same structures is fixedly installed on the both sides of T-shaped head-measuring rack, is fixedly installed integral type micrometering bar gauge head in the central position of the lower surface of described PVDF piezoelectric membrane;
Put on described piezoelectric actuator as encouraging the signal that shakes using sinusoidal ac signal, drive described PVDF piezoelectric membrane to drive integral type micrometering bar gauge head to work in resonant condition;
The integral type micrometering bar gauge head that setting is driven by described PVDF piezoelectric membrane carries out Z direction test on the surface of sample is the pattern of rapping; The test that the integral type micrometering bar gauge head that setting is driven by described PVDF piezoelectric membrane carries out directions X and Y-direction at the sidepiece of sample is friction pattern; The variation of the polarization surface differential charge signal of detection PVDF piezoelectric membrane is in order to characterize the touching degree of described integral type micrometering bar gauge head and sample.
The feature that the present invention is based on the three-dimensional resonance trigger positioning method of the three-dimensional resonance trigger measuring head of PVDF is to keep motionless with described three-dimensional resonance trigger measuring head, and the translation with sample in surface level completes the three-dimensional triggered location of three-dimensional resonance trigger measuring head at specimen surface; Or sample maintenance is motionless, the translation with three-dimensional resonance trigger measuring head in surface level completes its three-dimensional triggered location at specimen surface.
The present invention utilizes the piezoelectric property of PVDF film, high resonance characteristic and the hypersensitivity to small power, be combined with integral type micrometering bar gauge head and build PVDF walking-beam type micrometering head system, reach resonant condition by drive gauge head, the electric signal being produced by signal processing circuit Check processing PVDF piezoelectric membrane polarization surface is also relatively realized amplitude feedback with setting voltage value, realizes measurement and the three-dimensional resonance triggered location of three-dimensional resonance trigger measuring head.Compared with the prior art, beneficial effect of the present invention is embodied in:
1, the present invention adopts PVDF piezoelectric membrane simultaneously as free beam and Micro-force sensor, adopts integral type micrometering bar to survey ball and forms walking-beam type three dimensional probe, 3-D probe, can realize high-precision three-dimensional topography measurement to multiple microdevice.
2, walking-beam type three dimensional probe, 3-D probe of the present invention works in resonant condition, and integral type micrometering bar gauge head and sample rap pattern or friction Mode scans with hundreds of nN level micrometering power, can realize flexible material is carried out to the small power measurement of low destructiveness.
3, the present invention, through experimental verification, all can reach sub-nanometer scale resolution in X, Y, tri-directions of Z, and wherein the systematic survey resolution on directions X is about 0.22nm; In Y-direction, systematic survey resolution is about 0.29nm; In Z direction, system vertical resolution is about 0.26nm.
Brief description of the drawings
Fig. 1 a is the PVDF three-dimensional resonance gauge head of the present invention schematic diagram of working in Z-direction;
Fig. 1 b is the PVDF three-dimensional resonance gauge head of the present invention schematic diagram of working in X, Y-direction;
Fig. 2 a is the amplitude frequency diagram of gauge head PVDF piezoelectric membrane of the present invention;
Fig. 2 b is that gauge head PVDF piezoelectric membrane of the present invention and micrometering bar are surveyed the amplitude frequency diagram after ball combination;
Fig. 3 a be in the present invention PVDF gauge head at Z direction free vibration schematic diagram;
Fig. 3 b be in the present invention PVDF gauge head in Z direction free vibration oscillogram;
Fig. 4 a is PVDF gauge head vibration schematic diagram when Z direction micrometering bar survey ball touches sample in the present invention;
Fig. 4 b is PVDF gauge head vibrational waveform figure when Z direction micrometering bar survey ball touches sample in the present invention;
Fig. 5 a be in the present invention PVDF gauge head at X, Y-direction free vibration schematic diagram;
Fig. 5 b is PVDF gauge head free vibration oscillogram in the present invention;
PVDF gauge head vibration schematic diagram when Fig. 6 a is X in the present invention, Y-direction micrometering bar survey ball friction sample;
PVDF gauge head vibrational waveform figure when Fig. 6 b is X in the present invention, Y-direction micrometering bar survey ball friction sample;
Fig. 7 a is directions X force curve experimental result in the present invention;
Fig. 7 b is Y-direction force curve experimental result in the present invention;
Fig. 7 c is Z direction force curve experimental result in the present invention;
Number in the figure: 1 is PVDF piezoelectric membrane; 2 is piezoelectric actuator; 3 is T-shaped head-measuring rack; 4 are integrated the measuring staff gauge head that declines; 5 samples; 6 sinusoidal ac signals; 7 differential charge signals.
Embodiment
The version of the three-dimensional resonance trigger measuring head based on PVDF in the present embodiment is:
As shown in Fig. 1 a and Fig. 1 b, adopt PVDF piezoelectric membrane 1 as the walking beam with simple beam structure, also be as Micro-force sensor simultaneously, the two ends, left and right of PVDF piezoelectric membrane 1 are separately fixed to the outside of the PZT piezoelectric actuator 2 of two same structures, the inner side symmetry of the piezoelectric actuator 2 of two same structures is fixedly installed on the both sides of T-shaped head-measuring rack 3, central position at the lower surface of PVDF piezoelectric membrane 1 is fixedly installed integral type micrometering bar gauge head 4, and sample 5 is horizontal positioned.
Put on piezoelectric actuator 2 as encouraging the signal that shakes using sinusoidal ac signal, drive PVDF piezoelectric membrane 1 to drive integral type micrometering bar gauge head 4 to work in resonant condition;
The integral type micrometering bar gauge head 4 that setting is driven by PVDF piezoelectric membrane 1 carries out Z direction test on the surface of sample 5 is the pattern of rapping; The test that the integral type micrometering bar gauge head 4 that setting is driven by PVDF piezoelectric membrane 1 carries out directions X and Y-direction at the sidepiece of sample 5 is friction pattern; Signalization treatment circuit for detection of and process the variation of the polarization surface differential charge signal of PVDF piezoelectric membrane 1, in order to characterize the touching degree of integral type micrometering bar gauge head 4 and sample 5.
Measuring method:
Horizontal positioned sample 5, encourage piezoelectric actuator 2 with sinusoidal ac signal 6, the gauge head system that PVDF piezoelectric membrane 1 and integral type micrometering bar gauge head 4 are formed reaches resonant condition, and with uniform amplitude free vibration, PVDF piezoelectric membrane 1 surface produces polarization charge signal; Simultaneously using PVDF piezoelectric membrane 1 as Micro-force sensor, when integral type micrometering bar gauge head 4 in Z-direction with the pattern of rapping or at X, Y-direction during with the Surface Contact of friction pattern and sample 5, due to energy leakage, cause PVDF piezoelectric membrane 1 gauge head system amplitude to reduce, the decay of surface charge amount, amplify this differential charge signal 7 and relatively export pressure difference signal with setting voltage signal by Check processing, realize amplitude FEEDBACK CONTROL in conjunction with control system, realize gauge head system and measure and location at the resonant trigger of X, Y, Z tri-directions, and obtain corresponding force curve figure.
In the present embodiment, the three-dimensional resonance trigger positioning method of the three-dimensional resonance trigger measuring head based on PVDF is: keep motionless with three-dimensional resonance trigger measuring head, the translation with sample 5 in surface level completes the three-dimensional triggered location of three-dimensional resonance trigger measuring head at specimen surface; Or sample 5 keeps motionless, the translation with three-dimensional resonance trigger measuring head in surface level completes its three-dimensional triggered location at specimen surface.
Amplitude frequency diagram when Fig. 2 a is depicted as PVDF piezoelectric membrane and does not install integral type micrometering bar gauge head additional, resonance frequency is about 3470Hz, and it is 0.79V that signal amplitude is pressed in its corresponding front electric discharge, and quality factor q is about 45; Fig. 2 b is depicted as the amplitude frequency diagram after PVDF piezoelectric membrane is combined with integral type micrometering bar gauge head, and its resonance frequency is 2406Hz, and resonance peak is 2.6V, and its quality factor q is about 29.
Fig. 3 a is Z direction PVDF three-dimensional resonance trigger measuring head free vibration schematic diagram, and Fig. 3 b is Z direction PVDF three-dimensional resonance trigger measuring head free vibration oscillogram, and in Fig. 3 b, horizontal ordinate t represents the time, and ordinate A represents gauge head system resonance amplitude.When integral type micrometering bar gauge head does not contact with sample, gauge head system is with compared with large amplitude A
0in free harmonic vibration state, as shown in Figure 3 a and Figure 3 b shows; Due to the hypersensitivity of resonant condition PVDF piezoelectric membrane gauge head system to micro-power, when integral type micrometering bar gauge head constantly approaches specimen surface to rapping pattern when contact, energy leakage causes gauge head system amplitude fading to A
1, as shown in Fig. 4 a Fig. 4 b.
In like manner, shown in Fig. 5 a and Fig. 5 b, be respectively PVDF three-dimensional resonance trigger measuring head in X, Y-direction free vibration schematic diagram and free vibration oscillogram, Fig. 6 a is three-dimensional resonance trigger measuring head contacts sample with friction pattern schematic diagram in X, Y-direction, and Fig. 6 b is gauge head system vibration oscillogram under this friction pattern.
Three-dimensional resonance trigger measuring head of the present invention has the spatial resolution of sub-nanometer scale, test by experiment, and the about 6mV of system noise levels on directions X, sensitivity can reach 27.7V/ μ m, system vertical resolution 0.22nm, as shown in Figure 7a.The about 9mV of system noise levels in the Y direction, sensitivity can reach 31.1V/ μ m, system vertical resolution 0.29nm, as shown in Figure 7b.The about 9mV of system noise levels in Z direction, sensitivity can reach 35V/ μ m, system vertical resolution 0.26nm, as shown in Figure 7 c.
Claims (2)
1. the three-dimensional resonance trigger measuring head based on PVDF, it is characterized in that: adopt PVDF piezoelectric membrane (1) as the walking beam with simple beam structure, the two ends, left and right of described PVDF piezoelectric membrane (1) are separately fixed to the outside of the piezoelectric actuator (2) of two same structures, the inner side symmetry of the piezoelectric actuator (2) of described two same structures is fixedly installed on the both sides of T-shaped head-measuring rack (3), is fixedly installed integral type micrometering bar gauge head (4) in the central position of the lower surface of described PVDF piezoelectric membrane (1);
Put on described piezoelectric actuator (2) using sinusoidal ac signal upper as encouraging the signal that shakes, drive described PVDF piezoelectric membrane (1) to drive integral type micrometering bar gauge head (4) to work in resonant condition;
The integral type micrometering bar gauge head (4) that setting is driven by described PVDF piezoelectric membrane (1) carries out Z direction test on the surface of sample (5) is the pattern of rapping; The test that the integral type micrometering bar gauge head (4) that setting is driven by described PVDF piezoelectric membrane (1) carries out directions X and Y-direction at the sidepiece of sample (5) is friction pattern; The variation of the polarization surface differential charge signal of detection PVDF piezoelectric membrane (1) is in order to characterize the touching degree of described integral type micrometering bar gauge head (4) and sample.
2. the three-dimensional resonance trigger positioning method of the three-dimensional resonance trigger measuring head based on PVDF described in a claim 1, it is characterized in that keeping motionless with described three-dimensional resonance trigger measuring head, the translation with sample (5) in surface level completes the three-dimensional triggered location of three-dimensional resonance trigger measuring head at specimen surface; Or sample (5) keeps motionless, the translation with three-dimensional resonance trigger measuring head in surface level completes its three-dimensional triggered location at specimen surface.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0871006B1 (en) * | 1997-04-09 | 2004-07-07 | Seiko Instruments Inc. | Scanning probe microscope |
| CN101393008A (en) * | 2008-09-26 | 2009-03-25 | 合肥工业大学 | Tapping type high-sensitivity SPM feeler based on PVDF and measurement method |
| CN202393344U (en) * | 2011-12-30 | 2012-08-22 | 合肥工业大学 | Three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride) |
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- 2011-12-30 CN CN201110457072.5A patent/CN102538657B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0871006B1 (en) * | 1997-04-09 | 2004-07-07 | Seiko Instruments Inc. | Scanning probe microscope |
| CN101393008A (en) * | 2008-09-26 | 2009-03-25 | 合肥工业大学 | Tapping type high-sensitivity SPM feeler based on PVDF and measurement method |
| CN202393344U (en) * | 2011-12-30 | 2012-08-22 | 合肥工业大学 | Three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride) |
Non-Patent Citations (3)
| Title |
|---|
| 候茂盛.基于PVDF薄膜振动梁式测头的新型轻敲式扫描探针显微系统研制.《工程科技Ⅱ辑》.2009, * |
| 表面轮廓测定用扫描探针测头研究;黄强先;《机械工程学报》;20050831;第41卷(第8期);213-217 * |
| 黄强先.表面轮廓测定用扫描探针测头研究.《机械工程学报》.2005,第41卷(第8期), * |
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Inventor after: Huang Qiangxian Inventor after: Yu Huijuan Inventor after: Wei Jinpeng Inventor after: Huang Shuai Inventor after: Gong Ermin Inventor after: Li Zhibo Inventor before: Huang Qiangxian Inventor before: Wei Jinpeng Inventor before: Yu Huijuan Inventor before: Huang Shuai Inventor before: Gong Ermin Inventor before: Li Zhibo |
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