CN102538657B - Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method - Google Patents
Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method Download PDFInfo
- Publication number
- CN102538657B CN102538657B CN201110457072.5A CN201110457072A CN102538657B CN 102538657 B CN102538657 B CN 102538657B CN 201110457072 A CN201110457072 A CN 201110457072A CN 102538657 B CN102538657 B CN 102538657B
- Authority
- CN
- China
- Prior art keywords
- probe
- pvdf
- sample
- piezoelectric film
- dimensional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
本发明公开了一种基于PVDF的三维谐振触发测头及三维谐振触发定位方法,其特征是采用PVDF压电薄膜作为具有简支梁结构的振动梁,将压电薄膜左右两端分别固定在两个相同结构的压电驱动器的外侧,压电驱动器的内侧对称固定设置在T型测头架的两侧,在压电薄膜的下表面的中央位置处固定设置一体式微测杆测头;以正弦交流信号施加于压电驱动器上作为励振信号,驱动压电薄膜带动一体式微测杆测头工作于谐振状态;设置由压电薄膜所带动的一体式微测杆测头在试样的表面进行Z向测试为轻敲模式;在试样侧部进行X向和Y向测试为摩擦模式;检测PVDF压电薄膜的极化表面差动电荷信号的变化用以表征一体式微测杆测头与试样的触碰程度。本发明可应用于各种高精度、微测量力的软材料、微器件、超精密光学器件等三维形貌测量。
The invention discloses a PVDF-based three-dimensional resonance trigger measuring head and a three-dimensional resonance trigger positioning method. The outer side of a piezoelectric driver with the same structure, the inner side of the piezoelectric driver is symmetrically fixed on both sides of the T-shaped probe frame, and the integrated micro-rod probe is fixed at the central position of the lower surface of the piezoelectric film; The AC signal is applied to the piezoelectric driver as an excitation signal to drive the piezoelectric film to drive the integrated micro-rod probe to work in a resonant state; the integrated micro-probe probe driven by the piezoelectric film is set to perform Z-direction on the surface of the sample. The test is in the tapping mode; the X-direction and Y-direction tests on the side of the sample are in the friction mode; the change of the differential charge signal on the polarized surface of the PVDF piezoelectric film is detected to characterize the contact between the integrated micro-probe probe and the sample degree of touch. The invention can be applied to three-dimensional shape measurement of various high-precision, micro-measurement force soft materials, micro devices, ultra-precision optical devices and the like.
Description
技术领域 technical field
本发明涉及一种可以应用在各种高精度、微测量力的软材料、微型机械零件、微器件、超精密光学器件等三维形貌测量领域中的三维谐振触发测头及三维谐振触发定位方法。The invention relates to a three-dimensional resonance trigger probe and a three-dimensional resonance trigger positioning method that can be applied in the field of three-dimensional shape measurement of various high-precision, micro-measurement force soft materials, micro-mechanical parts, micro-devices, ultra-precision optical devices, etc. .
背景技术 Background technique
近年来,纳米定位技术的发展使超精加工和超微加工进入了纳米技术的新时代,使对微小位移量和微小物体的测量达到了纳米、亚纳米量级,对微纳米三坐标测量机(CMM)尤其微纳米测头提出高精度、低测量力等更高要求,目前还没有成熟的技术可以满足需求。In recent years, the development of nano-positioning technology has brought ultra-finishing and ultra-micro-machining into a new era of nanotechnology, enabling the measurement of small displacements and small objects to reach nanometer and sub-nanometer levels. (CMM), especially the micro-nano probe, puts forward higher requirements such as high precision and low measurement force. At present, there is no mature technology to meet the demand.
现有微纳米CMM测头一般有接触式测头和非接触式测头。接触式测头是测头与试样直接接触,通过采集处理试样表面轮廓点三维坐标得出三维形貌信息;非接触式测头一般是根据光学原理,配以光路设计来获取表面形貌数据。接触式测头可靠性好、精度高,但测头与试样表面接触时产生的测力可能引起弹性甚至塑性形变,尤其不能测量柔软材料。非接触式测头避免了接触测力的影响,测量速度和采样频率高,但受物表特性影响较大,不能达到接触式测头的分辨率和不确定度。Existing micro-nano CMM probes generally include contact probes and non-contact probes. The contact probe is in direct contact with the sample, and the three-dimensional shape information is obtained by collecting and processing the three-dimensional coordinates of the surface contour points of the sample; the non-contact probe is generally based on the optical principle and equipped with optical path design to obtain the surface topography data. The contact probe has good reliability and high precision, but the measuring force generated when the probe contacts the surface of the sample may cause elastic or even plastic deformation, especially soft materials cannot be measured. The non-contact probe avoids the influence of contact force, and has high measurement speed and sampling frequency, but it is greatly affected by the characteristics of the object surface, and cannot reach the resolution and uncertainty of the contact probe.
发明内容 Contents of the invention
本发明是为避免上述现有技术所存在的不足之处,提供一种基于PVDF的三维谐振触发测头及三维谐振触发定位方法,利用PVDF的压电特性、高谐振特性和对微小力的高敏感性,与一体式微测杆测头相结合,构成微测力三维谐振触发测头,用于实现对软材料、微器件、超精密光学器件等高精度、低测量力的三维谐振触发测量和定位。In order to avoid the shortcomings of the above-mentioned prior art, the present invention provides a PVDF-based three-dimensional resonance trigger probe and a three-dimensional resonance trigger positioning method. Sensitivity, combined with the integrated micro-rod probe, constitutes a micro-force three-dimensional resonance trigger probe, which is used to realize high-precision, low-measurement force three-dimensional resonance trigger measurement and position.
本发明为解决技术问题采用以下技术方案:The present invention adopts the following technical solutions for solving technical problems:
本发明基于PVDF的三维谐振触发测头的结构特点是:采用PVDF压电薄膜作为具有简支梁结构的振动梁,将所述PVDF压电薄膜的左右两端分别固定在两个相同结构的压电驱动器的外侧,所述两个相同结构的压电驱动器的内侧对称固定设置在T型测头架的两侧,在所述PVDF压电薄膜的下表面的中央位置处固定设置一体式微测杆测头;The structural characteristics of the PVDF-based three-dimensional resonant trigger measuring head of the present invention are as follows: the PVDF piezoelectric film is used as a vibrating beam with a simply supported beam structure, and the left and right ends of the PVDF piezoelectric film are respectively fixed on two piezoelectric plates with the same structure. The outer side of the electric driver, the inner side of the two piezoelectric drivers of the same structure are symmetrically fixed on both sides of the T-shaped probe frame, and an integrated micro-probe is fixed at the central position of the lower surface of the PVDF piezoelectric film Probe;
以正弦交流信号施加于所述压电驱动器上作为励振信号,驱动所述PVDF压电薄膜带动一体式微测杆测头工作于谐振状态;A sinusoidal AC signal is applied to the piezoelectric driver as an excitation signal to drive the PVDF piezoelectric film to drive the integrated micro-rod probe to work in a resonance state;
设置由所述PVDF压电薄膜所带动的一体式微测杆测头在试样的表面进行Z方向的测试为轻敲模式;设置由所述PVDF压电薄膜所带动的一体式微测杆测头在试样的侧部进行X方向和Y方向的测试为摩擦模式;检测PVDF压电薄膜的极化表面差动电荷信号的变化用以表征所述一体式微测杆测头与试样的触碰程度。Setting the integrated micro-rod probe driven by the PVDF piezoelectric film on the surface of the sample to perform the Z-direction test is a tapping mode; setting the integrated micro-probe probe driven by the PVDF piezoelectric film in the The side of the sample is tested in the X direction and Y direction as the friction mode; the change of the differential charge signal on the polarized surface of the PVDF piezoelectric film is detected to characterize the contact degree between the integrated micro-probe probe and the sample .
本发明基于PVDF的三维谐振触发测头的三维谐振触发定位方法的特点是以所述三维谐振触发测头保持不动,以试样在水平面内的平移完成三维谐振触发测头在试样表面的三维触发定位;或试样保持不动,以三维谐振触发测头在水平面内的平移完成其在试样表面的三维触发定位。The characteristics of the three-dimensional resonance triggering positioning method of the PVDF-based three-dimensional resonance triggering probe in the present invention are that the three-dimensional resonance triggering probe remains stationary, and the translation of the sample in the horizontal plane completes the positioning of the three-dimensional resonance triggering probe on the surface of the sample. Three-dimensional trigger positioning; or the sample remains still, and the translation of the probe in the horizontal plane is triggered by three-dimensional resonance to complete its three-dimensional trigger positioning on the sample surface.
本发明利用PVDF薄膜的压电特性、高谐振特性和对微小力的高敏感性,与一体式微测杆测头结合构建PVDF振动梁式微测头系统,通过驱动信号驱动测头达到谐振状态,由信号处理电路检测处理PVDF压电薄膜极化表面产生的电信号并与设定电压值比较实现振幅反馈,实现三维谐振触发测头的测量与三维谐振触发定位。与已有技术相比,本发明的有益效果体现在:The invention utilizes the piezoelectric characteristics, high resonance characteristics and high sensitivity to tiny forces of PVDF film, and combines with the integrated micro-rod measuring head to construct a PVDF vibrating beam-type micro-probing system, and drives the measuring head to reach a resonance state through a driving signal. The signal processing circuit detects and processes the electrical signal generated by the polarized surface of the PVDF piezoelectric film and compares it with the set voltage value to realize amplitude feedback and realize the measurement of the three-dimensional resonance triggering probe and the positioning of the three-dimensional resonance triggering. Compared with the prior art, the beneficial effects of the present invention are reflected in:
1、本发明采用PVDF压电薄膜同时作为简支梁和微力传感器,采用一体式微测杆测球构成振动梁式三维测头,可对多种微型器件实现高精度三维形貌测量。1. The present invention uses PVDF piezoelectric film as a simply supported beam and a micro force sensor at the same time, and uses an integrated micro measuring rod measuring ball to form a vibrating beam type three-dimensional measuring head, which can realize high-precision three-dimensional shape measurement for various micro devices.
2、本发明振动梁式三维测头工作于谐振状态,一体式微测杆测头与试样以数百nN级微测力轻敲模式或摩擦模式扫描,可实现对柔软材料进行低破坏性微小力测量。2. The vibrating beam-type three-dimensional measuring head of the present invention works in a resonant state, and the integrated micro-rod measuring head and the sample are scanned in tap mode or friction mode with hundreds of nN-level micro-measurement force, which can realize low-destructive micro-scale measurement of soft materials. force measurement.
3、本发明经实验验证,在X、Y、Z三个方向均能达到亚纳米量级分辨率,其中X方向上的系统测量分辨率约为0.22nm;Y方向上系统测量分辨率约为0.29nm;Z方向上系统垂直分辨率约为0.26nm。3. It has been verified by experiments that the present invention can achieve sub-nanometer resolution in the three directions of X, Y and Z, wherein the system measurement resolution in the X direction is about 0.22nm; the system measurement resolution in the Y direction is about 0.29nm; the vertical resolution of the system in the Z direction is about 0.26nm.
附图说明 Description of drawings
图1a是本发明PVDF三维谐振测头在Z向上工作示意图;Figure 1a is a schematic diagram of the PVDF three-dimensional resonant probe of the present invention working in the Z direction;
图1b是本发明PVDF三维谐振测头在X、Y向上工作示意图;Figure 1b is a schematic diagram of the PVDF three-dimensional resonant probe of the present invention working in the X and Y directions;
图2a是本发明测头PVDF压电薄膜的幅频图;Fig. 2a is the amplitude-frequency diagram of the probe PVDF piezoelectric film of the present invention;
图2b是本发明测头PVDF压电薄膜与微测杆测球组合后的幅频图;Fig. 2b is an amplitude-frequency diagram after the PVDF piezoelectric film of the probe of the present invention is combined with the micro-rod measuring ball;
图3a是本发明中PVDF测头在Z方向自由振动示意图;Fig. 3 a is a schematic diagram of free vibration of the PVDF measuring head in the Z direction in the present invention;
图3b是本发明中PVDF测头在Z方向自由振动波形图;Fig. 3b is a free vibration waveform diagram of the PVDF probe in the Z direction in the present invention;
图4a是本发明中Z方向微测杆测球轻触试样时PVDF测头振动示意图;Fig. 4a is a schematic diagram of the vibration of the PVDF probe when the Z-direction micro-rod measuring ball lightly touches the sample in the present invention;
图4b是本发明中Z方向微测杆测球轻触试样时PVDF测头振动波形图;Figure 4b is a vibration waveform diagram of the PVDF measuring head when the measuring ball of the Z-direction micro measuring rod lightly touches the sample in the present invention;
图5a是本发明中PVDF测头在X、Y向自由振动示意图;Figure 5a is a schematic diagram of the free vibration of the PVDF measuring head in the X and Y directions in the present invention;
图5b是本发明中PVDF测头自由振动波形图;Fig. 5b is a free vibration waveform diagram of the PVDF measuring head in the present invention;
图6a是本发明中X、Y方向微测杆测球摩擦试样时PVDF测头振动示意图;Figure 6a is a schematic diagram of the vibration of the PVDF measuring head when the micro measuring rod in the X and Y directions measures the ball friction sample in the present invention;
图6b是本发明中X、Y方向微测杆测球摩擦试样时PVDF测头振动波形图;Fig. 6b is the vibration waveform diagram of the PVDF measuring head when the micro measuring rod in the X and Y directions measures the ball friction sample in the present invention;
图7a是本发明中X方向力曲线实验结果;Fig. 7a is the experimental result of X direction force curve in the present invention;
图7b是本发明中Y方向力曲线实验结果;Fig. 7b is the experimental result of Y direction force curve among the present invention;
图7c是本发明中Z方向力曲线实验结果;Fig. 7c is the experimental result of Z direction force curve in the present invention;
图中标号:1为PVDF压电薄膜;2为压电驱动器;3为T型测头架;4为一体式微测杆测头;5试样;6正弦交流信号;7差动电荷信号。Numbers in the figure: 1 is the PVDF piezoelectric film; 2 is the piezoelectric driver; 3 is the T-shaped probe holder; 4 is the integrated micro-rod probe; 5 is the sample; 6 is the sinusoidal AC signal; 7 is the differential charge signal.
具体实施方式 Detailed ways
本实施例中基于PVDF的三维谐振触发测头的结构形式是:In this embodiment, the structural form of the three-dimensional resonance trigger probe based on PVDF is:
如图1a和图1b所示,采用PVDF压电薄膜1作为具有简支梁结构的振动梁,同时也是作为微力传感器,将PVDF压电薄膜1的左右两端分别固定在两个相同结构的PZT压电驱动器2的外侧,两个相同结构的压电驱动器2的内侧对称固定设置在T型测头架3的两侧,在PVDF压电薄膜1的下表面的中央位置处固定设置一体式微测杆测头4,试样5呈水平放置。As shown in Figure 1a and Figure 1b, the PVDF piezoelectric film 1 is used as a vibrating beam with a simply supported beam structure, and it is also used as a micro force sensor. The left and right ends of the PVDF piezoelectric film 1 are respectively fixed on two PZT with the same structure. On the outside of the piezoelectric actuator 2, the inner sides of two piezoelectric actuators 2 with the same structure are symmetrically fixed on both sides of the T-shaped probe frame 3, and an integrated micrometer is fixed on the central position of the lower surface of the PVDF piezoelectric film 1. The rod measuring head 4 and the sample 5 are placed horizontally.
以正弦交流信号施加于压电驱动器2上作为励振信号,驱动PVDF压电薄膜1带动一体式微测杆测头4工作于谐振状态;A sinusoidal AC signal is applied to the piezoelectric driver 2 as an excitation signal to drive the PVDF piezoelectric film 1 to drive the integrated micro-rod probe 4 to work in a resonance state;
设置由PVDF压电薄膜1所带动的一体式微测杆测头4在试样5的表面进行Z方向的测试为轻敲模式;设置由PVDF压电薄膜1所带动的一体式微测杆测头4在试样5的侧部进行X方向和Y方向的测试为摩擦模式;设置信号处理电路用于检测并处理PVDF压电薄膜1的极化表面差动电荷信号的变化,用以表征一体式微测杆测头4与试样5的触碰程度。Set the integrated micro-rod probe 4 driven by the PVDF piezoelectric film 1 to perform the test in the Z direction on the surface of the sample 5 as a tapping mode; set the integrated micro-probe probe 4 driven by the PVDF piezoelectric film 1 The test in the X direction and Y direction on the side of the sample 5 is the friction mode; the signal processing circuit is set to detect and process the change of the differential charge signal on the polarized surface of the PVDF piezoelectric film 1, so as to characterize the integrated micrometer The degree of contact between the rod probe 4 and the sample 5.
测量方法:Measurement methods:
水平放置试样5,以正弦交流信号6激励压电驱动器2,使PVDF压电薄膜1与一体式微测杆测头4构成的测头系统达到谐振状态,以恒定振幅自由振动,PVDF压电薄膜1表面产生极化电荷信号;同时将PVDF压电薄膜1作为微力传感器,当一体式微测杆测头4在Z向以轻敲模式或在X、Y向以摩擦模式与试样5的表面接触时,由于能量泄露,导致PVDF压电薄膜1测头系统振幅减小,表面电荷量衰减,通过检测处理放大该差动电荷信号7并与设定电压信号比较输出压差信号,结合控制系统实现振幅反馈控制,即实现测头系统在X、Y、Z三方向的谐振触发测量与定位,并得到相应的力曲线图形。The sample 5 is placed horizontally, and the piezoelectric driver 2 is excited by a sinusoidal AC signal 6, so that the probe system composed of the PVDF piezoelectric film 1 and the integrated micro-rod probe 4 reaches a resonance state and freely vibrates with a constant amplitude. The PVDF piezoelectric film 1 The surface generates polarized charge signals; at the same time, the PVDF piezoelectric film 1 is used as a micro-force sensor, when the integrated micro-rod measuring head 4 contacts the surface of the sample 5 in the tapping mode in the Z direction or in the friction mode in the X and Y directions At this time, due to energy leakage, the amplitude of the PVDF piezoelectric film 1 measuring head system decreases, and the surface charge attenuates. The differential charge signal 7 is amplified through detection processing and compared with the set voltage signal to output the differential pressure signal. Combined with the control system to achieve Amplitude feedback control, that is, to realize the resonance trigger measurement and positioning of the probe system in the X, Y, and Z directions, and obtain the corresponding force curve graph.
本实施例中,基于PVDF的三维谐振触发测头的三维谐振触发定位方法是:以三维谐振触发测头保持不动,以试样5在水平面内的平移完成三维谐振触发测头在试样表面的三维触发定位;或试样5保持不动,以三维谐振触发测头在水平面内的平移完成其在试样表面的三维触发定位。In this embodiment, the three-dimensional resonance triggering positioning method of the PVDF-based three-dimensional resonance triggering probe is: the three-dimensional resonance triggering probe remains stationary, and the translation of the sample 5 in the horizontal plane completes the three-dimensional resonance triggering probe on the surface of the sample. or the sample 5 remains still, and the three-dimensional trigger positioning on the sample surface is completed by the translation of the three-dimensional resonance trigger probe in the horizontal plane.
图2a所示为PVDF压电薄膜未加装一体式微测杆测头时的幅频图,谐振频率约为3470Hz,其所对应的前放电压信号幅值为0.79V,品质因数Q约为45;图2b所示为PVDF压电薄膜与一体式微测杆测头结合后的幅频图,其谐振频率为2406Hz,谐振峰值为2.6V,其品质因数Q约为29。Figure 2a shows the amplitude-frequency diagram of the PVDF piezoelectric film without an integrated micro-rod probe, the resonance frequency is about 3470Hz, the corresponding pre-amp voltage signal amplitude is 0.79V, and the quality factor Q is about 45 ; Figure 2b shows the amplitude-frequency diagram of the combination of the PVDF piezoelectric film and the integrated micro-rod probe, the resonant frequency is 2406Hz, the resonant peak value is 2.6V, and the quality factor Q is about 29.
图3a为Z方向PVDF三维谐振触发测头自由振动示意图,图3b为Z方向PVDF三维谐振触发测头自由振动波形图,图3b中横坐标t表示时间,纵坐标A表示测头系统谐振幅值。一体式微测杆测头与试样不接触时,测头系统以较大振幅A0处于自由谐振状态,如图3a和图3b所示;由于谐振状态PVDF压电薄膜测头系统对微力的高敏感性,当一体式微测杆测头不断逼近试样表面至轻敲模式接触时,能量泄露导致测头系统振幅衰减至A1,如图4a图4b所示。Figure 3a is a schematic diagram of the free vibration of the PVDF three-dimensional resonance triggering probe in the Z direction, and Figure 3b is a free vibration waveform diagram of the PVDF three-dimensional resonance triggering probe in the Z direction. In Figure 3b, the abscissa t represents time, and the ordinate A represents the resonance amplitude of the probe system . When the one-piece micro-probe probe is not in contact with the sample, the probe system is in a free resonance state with a large amplitude A 0 , as shown in Figure 3a and Figure 3b; due to the resonance state, the PVDF piezoelectric film probe system is highly sensitive to the micro-force Sensitivity, when the one-piece micro-rod probe continuously approaches the sample surface to tap mode contact, the energy leakage causes the probe system amplitude to attenuate to A 1 , as shown in Figure 4a and Figure 4b.
同理,图5a和图5b所示分别为PVDF三维谐振触发测头在X、Y向自由振动示意图及自由振动波形图,图6a为三维谐振触发测头在X、Y方向以摩擦模式接触试样的示意图,图6b为该摩擦模式下测头系统振动波形图。Similarly, Fig. 5a and Fig. 5b show the free vibration diagram and free vibration waveform diagram of the PVDF three-dimensional resonance trigger probe in the X and Y directions respectively. Figure 6b is the vibration waveform diagram of the probe system in this friction mode.
本发明三维谐振触发测头具有亚纳米量级的空间分辨率,通过实验测试,在X方向上系统噪声水平约6mV,灵敏度可以达到27.7V/μm,系统垂直分辨率0.22nm,如图7a所示。在Y方向上系统噪声水平约9mV,灵敏度可以达到31.1V/μm,系统垂直分辨率0.29nm,如图7b所示。在Z方向上系统噪声水平约9mV,灵敏度可以达到35V/μm,系统垂直分辨率0.26nm,如图7c所示。The three-dimensional resonant trigger probe of the present invention has a sub-nanometer spatial resolution. Through experimental tests, the system noise level in the X direction is about 6mV, the sensitivity can reach 27.7V/μm, and the system vertical resolution is 0.22nm, as shown in Figure 7a Show. The system noise level in the Y direction is about 9mV, the sensitivity can reach 31.1V/μm, and the system vertical resolution is 0.29nm, as shown in Figure 7b. The noise level of the system in the Z direction is about 9mV, the sensitivity can reach 35V/μm, and the vertical resolution of the system is 0.26nm, as shown in Figure 7c.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110457072.5A CN102538657B (en) | 2011-12-30 | 2011-12-30 | Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110457072.5A CN102538657B (en) | 2011-12-30 | 2011-12-30 | Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102538657A CN102538657A (en) | 2012-07-04 |
CN102538657B true CN102538657B (en) | 2014-12-03 |
Family
ID=46346172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110457072.5A Expired - Fee Related CN102538657B (en) | 2011-12-30 | 2011-12-30 | Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102538657B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105004267B (en) * | 2015-07-03 | 2017-11-28 | 合肥工业大学 | The coordinate contact measuring head of resonant mode nanometer three based on Fiber Bragg Grating FBG |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0871006B1 (en) * | 1997-04-09 | 2004-07-07 | Seiko Instruments Inc. | Scanning probe microscope |
CN101393008A (en) * | 2008-09-26 | 2009-03-25 | 合肥工业大学 | PVDF-based tap-type high-sensitivity SPM probe and measurement method |
CN202393344U (en) * | 2011-12-30 | 2012-08-22 | 合肥工业大学 | Three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride) |
-
2011
- 2011-12-30 CN CN201110457072.5A patent/CN102538657B/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0871006B1 (en) * | 1997-04-09 | 2004-07-07 | Seiko Instruments Inc. | Scanning probe microscope |
CN101393008A (en) * | 2008-09-26 | 2009-03-25 | 合肥工业大学 | PVDF-based tap-type high-sensitivity SPM probe and measurement method |
CN202393344U (en) * | 2011-12-30 | 2012-08-22 | 合肥工业大学 | Three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride) |
Non-Patent Citations (3)
Title |
---|
候茂盛.基于PVDF薄膜振动梁式测头的新型轻敲式扫描探针显微系统研制.《工程科技Ⅱ辑》.2009, * |
表面轮廓测定用扫描探针测头研究;黄强先;《机械工程学报》;20050831;第41卷(第8期);213-217 * |
黄强先.表面轮廓测定用扫描探针测头研究.《机械工程学报》.2005,第41卷(第8期), * |
Also Published As
Publication number | Publication date |
---|---|
CN102538657A (en) | 2012-07-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107449939B (en) | Multi-parameter synchronous measurement method by adopting magnetic drive peak force modulation atomic force microscope | |
Claverley et al. | Development of a three-dimensional vibrating tactile probe for miniature CMMs | |
US20160153881A1 (en) | Measuring head for nanoindentation instrument and measuring method | |
CN101003356B (en) | Method for making nano microstructure based on constant height mode of atomic force microscope | |
CN102506701B (en) | Three-dimensional resonance trigger probe based on quartz tuning fork and three-dimensional resonance trigger location method | |
KR102484671B1 (en) | Heterodyne atomic force microscopy apparatus, method and lithography system | |
CN203310858U (en) | Measuring system based on detection of reference model having nanometer surface microstructure | |
CN101493487A (en) | Method for measuring nanometer electronic thin film micro-zone piezoelectric coefficient based on atomic microscope | |
CN107192857A (en) | A kind of nano film thickness detection means and its method based on ultrasonic AFM | |
CN101776436A (en) | Quartz tuning fork-based nano measuring head and sample surface micro-topography measuring method | |
US9829427B2 (en) | Method and system for characterization of nano- and micromechanical structures | |
CN103645348B (en) | A kind of micro-nano-scale coupled vibrations high-resolution measurement method | |
CN103645347B (en) | The single-point tracking measurement method of micro-nano-scale Dynamic Coupling vibration | |
CN202393344U (en) | Three-dimensional resonant triggering measuring head based on PVDF (Polyvinylidene Fluoride) | |
CN104155477A (en) | Method of tracking atomic force acoustical microscopy probe contact resonant frequency | |
CN102538657B (en) | Three-dimensional resonance trigger measuring head based on PVDF (polyvinylidene fluoride) and three-dimensional resonance trigger positioning method | |
CN202274866U (en) | Three-dimensional resonance trigger measuring head based on quartz tuning fork | |
CN201266162Y (en) | Tap type high-sensitivity SPM gauge head based on PVDF | |
JP2017096906A (en) | Method of measuring topographic profile and/or topographic image | |
Zhai et al. | Noncontact subnanometer resolution displacement sensing with wide bandwidth based on squeeze film damping effect | |
CN104076826B (en) | The position calculating apparatus and position calculating method of actuator | |
CN101393008B (en) | Tapping type high-sensitivity SPM feeler based on PVDF and measurement method | |
CN102706924B (en) | Device for realizing second-order resonant excitation of micro-cantilever probe | |
Huang et al. | High precision and low force resonant probe based on quartz tuning fork | |
Buetefisch et al. | Novel design for an ultra high precision 3D micro probe for CMM applications |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C53 | Correction of patent of invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Huang Qiangxian Inventor after: Yu Huijuan Inventor after: Wei Jinpeng Inventor after: Huang Shuai Inventor after: Gong Ermin Inventor after: Li Zhibo Inventor before: Huang Qiangxian Inventor before: Wei Jinpeng Inventor before: Yu Huijuan Inventor before: Huang Shuai Inventor before: Gong Ermin Inventor before: Li Zhibo |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: HUANG QIANGXIAN WEI JINPENG YU HUIJUAN HUANG SHUAI GONG ERMIN LI ZHIBO TO: HUANG QIANGXIAN YU HUIJUAN WEI JINPENG HUANG SHUAI GONG ERMIN LI ZHIBO |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141203 |
|
CF01 | Termination of patent right due to non-payment of annual fee |