CN202290529U - Random phase shift frequency-mixing type piezoelectric vibrator combined ultrasonic transducer device - Google Patents
Random phase shift frequency-mixing type piezoelectric vibrator combined ultrasonic transducer device Download PDFInfo
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- CN202290529U CN202290529U CN 201120417509 CN201120417509U CN202290529U CN 202290529 U CN202290529 U CN 202290529U CN 201120417509 CN201120417509 CN 201120417509 CN 201120417509 U CN201120417509 U CN 201120417509U CN 202290529 U CN202290529 U CN 202290529U
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- alternating voltage
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Abstract
The utility model relates to the technical field of ultrasonic transducers, and discloses a random phase shift frequency-mixing type piezoelectric vibrator combined ultrasonic transducer device. A microprocessor of an alternating voltage excitation signal generation and amplification circuit is used for outputting frequency control words and phase shift control words of a plurality of alternating voltage excitation signals to a multichannel alternating voltage excitation signal generation circuit, and at least one phase shift control word is changed at random along with the time variation within a certain range; the multichannel alternating voltage excitation signal generation circuit generates the alternating voltage excitation signals according to the frequency control words and the phase shift control words; a power amplification and impedance matching circuit is used for amplifying the generated alternating voltage excitation signals into driving signals through a power amplification circuit and outputting the driving signals to an ultrasonic transducer assembly through an impedance matching circuit; and the ultrasonic transducer assembly generates a sound field changed at random through the driving signals generated by loading. By the device, a uniform sound field required by surface wet etching and cleaning can be generated.
Description
Technical field
The utility model relates to a kind of mega sonic wave transducer, relates in particular to a kind of random phase shift mixing type piezoelectric vibrator combination mega sonic wave transducer apparatus.
Background technology
Along with the integrated circuit characteristic size enters into the deep-submicron stage; The wet etching in the IC wafer manufacturing process and the control of cleaning require also increasingly high; The precision that will corrode increasingly high; The particle that will clean more and more littler, corrosion and the uniformity of cleaning have become a challenging problem.
Adopt the chemical attack under the mega sonic wave effect and clean the effect that helps accelerated corrosion and cleaning, the removal that has improved contamination particle greatly.But because the interference of mega sonic wave sound field can form the very high focus of a lot of sound field intensities on wafer, also form the very low dead point of a lot of sound field intensities simultaneously, the uniformity of the sound field intensity on wafer is difficult to reach.Though in improved process; There is the way of the frequency scanning utilized to reduce emerging of focus; But because frequency scanning is only around a centre frequency; And this only is applied on the mega sonic wave oscillator around the scanning that centre frequency changes, and the intrinsic frequency of the mechanical oscillation of mega sonic wave oscillator is certain (generally equaling the centre frequency of mega sonic wave), and the variation that departs from centre frequency can cause the minimizing of oscillator amplitude to make the megasonic energy of propagating descend; Thereby the sound energy density that on wafer surface, forms is along with scan frequency changes, and can't produce inhomogeneity sound field.The way of also useful frequency stack combinations, but because the voltage of frequency stack combinations still is applied on the same piezo-electric crystal oscillator, the excessive efficient that has influenced the electroacoustic conversion of the variation of oscillator vibration makes the effect of cleaning descend to some extent.
The utility model content
The technical problem that (one) will solve
The utility model technical problem to be solved is: how to produce the surface wet corrosion and clean needed uniformity sound field.
(2) technical scheme
For solving the problems of the technologies described above, the utility model provides a kind of random phase shift mixing type piezoelectric vibrator combination mega sonic wave transducer apparatus, comprises alternating voltage pumping signal generation amplifying circuit and mega sonic wave transducer assembling body,
Said alternating voltage pumping signal generation amplifying circuit comprises microprocessor linked, multichannel alternating voltage exiting signal generating circuit, power amplification and impedance matching circuit successively;
Said microprocessor is used to export extremely said multichannel alternating voltage exiting signal generating circuit of frequency control word that multiple AC presses pumping signal and phase shifting control word, and the said phase shifting control word at least one road change at random in time within the specific limits;
Said multichannel alternating voltage exiting signal generating circuit is used for producing multiple AC pressure pumping signal according to said frequency control word and phase shifting control word;
Said power amplification and impedance matching circuit are used for through power amplification circuit the alternating voltage pumping signal that is produced being enlarged into the driving signal earlier, export mega sonic wave transducer assembling body to through impedance matching circuit again;
Said mega sonic wave transducer assembling body is used for producing the sound field of change at random through loading said driving signal.
Preferably, said mega sonic wave transducer assembling body comprises the combination of piezo-electric crystal oscillator, fixedly chamber, air cooling fluid intake, air cooling fluid issuing, mega sonic wave coupling material and mega sonic wave transducer,
Said piezo-electric crystal oscillator combination comprises center oscillator and peripheral oscillator;
The aggregate erection of said piezo-electric crystal oscillator is indoor at said lock chamber, and the gentle cold fluid outlet of said air cooling fluid intake is separately positioned on the both sides of said fixedly chamber;
The mega sonic wave transducer is bonding through said mega sonic wave coupling material and the combination of said piezo-electric crystal oscillator.
Preferably, said center oscillator is circle or annular, and said peripheral oscillator is an annular.
Preferably, said microprocessor and multichannel alternating voltage exiting signal generating circuit are set up correspondence through the mode of address mapping or the mode of serial communication.
Preferably, to be used to adopt the Direct Digital synthetic technology to produce channelized frequencies be the alternating voltage pumping signal of 700K～2MHz to said multichannel alternating voltage exiting signal generating circuit.
Preferably, said multichannel alternating voltage exiting signal generating circuit comprises reference clock, frequency word register, phase shift word register, phase accumulator, digital adder, output latch, wave memorizer, D/A converter and low pass filter; Said frequency word register, phase shift word register, phase accumulator, digital adder, output latch and wave memorizer are all realized through FPGA; Said reference clock is to be the global clock of fclk by the frequency that the high stable crystal oscillator is produced; The frequency word register is used for the frequency control word K1 of buffer memory by the alternating voltage pumping signal of the first passage of little processing transmission; Said phase accumulator is that a units is the binary adder of N; Said phase shift word register is used for the phase shifting control word P1 of buffer memory by the alternating voltage pumping signal of the first passage of little processing transmission, and P1 is less than or equal to N; In each clock cycle, frequency control word K1 adds up in phase accumulator, accumulation result figure place be in the digital adder of M with phase shifting control word P1 addition; The result outputs to output latch; Wave memorizer is used to store table of natural sines, and carries out addressing according to the value of output latch, and the function amplitude of exporting corresponding table of natural sines is to D/A converter; Obtain the sine ladder wave of required frequency, phase place, after low pass filter is level and smooth, export again as the alternating voltage pumping signal.
Preferably, said center oscillator is used to load the driving signal of the fixed phase drift that is produced by power amplification and impedance matching circuit; The peripheral oscillator of said center oscillator is used to load the driving signal that said relatively center oscillator loaded and has the driving signal that random phase shift changes, or by the driving signal of power amplification with the fixed phase drift of impedance matching circuit generation.
Preferably, said mega sonic wave coupling material is a glue.
Preferably, said mega sonic wave transducer is quartz or ruby mega sonic wave transducer.
(3) beneficial effect
The beneficial effect of the utility model is following:
1) the utility model produces frequency and the controlled alternating voltage pumping signal of phase place based on DDS (Direct Digital is synthetic) technology.The general delay control of adopting analog delay line to realize phase place in the conventional method; Switch the size of coming the control lag amount through the electronic switch segmentation; Cause phase delay controlled variable resolution ratio low; And need build huge LC network and electronic switch matrix, and the electric parameter of analog device drifts about, receives easily electromagnetic interference easily.The numeral that the DDS technology that the utility model adopts is carried out signal from the phase place notion is synthetic, therefore improved greatly signal frequency resolution ratio and phase resolution precision, reduced frequency inverted time and phase noise.
2) the utility model is with two or more driving signals, and wherein at least one drives the phase deviation setting at random within the specific limits in time of signal, is loaded into respectively on the combined mega sonic wave transducer.By fixed phase drift with have distortion that driving signal that random phase shift changes acts on the mega sonic wave institute synthetic waveform that different piezoelectric vibrators combinations are excited has produced a change at random in the medium sound field that corrosion is cleaned sound field relatively; Make and to form relevant focus and the dead point that is produced of the synthetic sound field of fixedly mega sonic wave that at present existing mega sonic wave transducer is excited; Thereby produce the surface wet corrosion and clean needed uniformity sound field, reduce and eliminated the violent cavitation erosion that produces by focus the characteristic size structural damage.
Description of drawings
Fig. 1 is the apparatus structure signal of the utility model embodiment;
Fig. 2 is the theory diagram of multichannel alternating voltage exiting signal generating circuit;
Fig. 3 is the theory diagram of power amplification and impedance matching circuit;
Fig. 4 is the structural representation of mega sonic wave transducer assembling body.
The specific embodiment
Regard to a kind of random phase shift mixing type piezoelectric vibrator combination mega sonic wave transducer apparatus that the utility model proposes down, specify in conjunction with accompanying drawing and embodiment.
The utility model adopts two or more driving signals; Signal frequency is between 700KHz～2MHz scope; Wherein at least one drives the phase deviation setting at random within the specific limits in time of signal, is loaded into respectively on the mega sonic wave transducer assembling body.Act on the combination of different piezo-electric crystal a period of time by fixed phase drift with the driving signal that has the random phase shift variation relatively; The mega sonic wave synthetic waveform that is excited produces the sound field of a change at random in the corrosion cleansing medium; Can not form relevant focus and the dead point that is produced of the synthetic sound field of fixedly mega sonic wave that at present existing mega sonic wave transducer is excited; Thereby produce the surface wet corrosion and clean needed uniformity sound field, reduce and eliminated the violent cavitation erosion that produces by focus the characteristic size structural damage.
Fig. 1 is the apparatus structure sketch map; Comprise microprocessor, multichannel alternating voltage exiting signal generating circuit, power amplification and impedance matching circuit, mega sonic wave transducer assembling body; Wherein microprocessor and multichannel alternating voltage exiting signal generating circuit can be set up correspondence through the mode of address mapping or the mode of serial communication, and microprocessor all is connected through circuit with impedance matching circuit with multichannel alternating voltage exiting signal generating circuit, multichannel alternating voltage exiting signal generating circuit, power amplification.
The operation principle of Fig. 1 is following: microprocessor is set the frequency control word of each passage alternating voltage pumping signal according to the intrinsic frequency of each piezo-electric crystal oscillator; And adopt existing random number to produce the phase place random offset value that algorithm produces at least one passage, be set at the phase shifting control word of alternating voltage pumping signal.The frequency control word of each passage alternating voltage pumping signal and phase shifting control word write in the multichannel alternating voltage exiting signal generating circuit in the inner relevant register of FPGA through expanding peripherals register or serial communication mode.Multichannel alternating voltage exiting signal generating circuit produces the multiple AC pressure pumping signal of certain frequency and phase place according to frequency control word and phase shifting control word.Power amplification and impedance matching circuit are enlarged into the driving signal through power amplification circuit with the alternating voltage pumping signal; Export mega sonic wave transducer assembling body again to; Through the piezo-electric crystal oscillator combination in the excitation mega sonic wave transducer assembling body; Produce the sound field of a change at random, thereby guarantee the uniformity of the required sound field of surface wet corrosion cleaning.
Fig. 2 is the theory diagram of multichannel alternating voltage exiting signal generating circuit, and it is made up of reference clock, frequency word register, phase shift word register, phase accumulator, digital adder, output latch, wave memorizer, D/A converter, low pass filter.Wherein frequency word register, phase shift word register, phase accumulator, digital adder, output latch, wave memorizer are realized through FPGA.
The operation principle of Fig. 2 is following:
Reference clock is to be f by the frequency that the high stable crystal oscillator is produced
ClkGlobal clock.CH1 frequency word register buffer memory is by the frequency control word K1 of the alternating voltage pumping signal of the passage 1 of little processing transmission.Phase accumulator is that a units is the binary adder of N.CH1 phase shift word register buffer memory is by the phase shifting control word P1 of the alternating voltage pumping signal of the passage 1 of little processing transmission, and P1 is less than or equal to the word length N of phase accumulator.In each clock cycle frequency control word K1 is added up in phase accumulator, accumulation result figure place be in the digital adder of M with phase shifting control word P1 addition, the result outputs to the CH1 output latch.And storing a table of natural sines in the wave memorizer; Can carry out addressing according to the value of CH1 output latch; The function amplitude of exporting corresponding list cell obtains the sine ladder wave of required frequency, phase place to D/A converter, output after low pass filter is level and smooth again.The alternating voltage pumping signal output principle of passage 2 is similar with it, and the value of same phase shifting control word is exported by microprocessor.Utilize the parallel processing capability of FPGA, also the multichannel alternating voltage pumping signal of line output.And the phase shifting control word that wherein has a passage at least is the random number by microprocessor output.
If the alternating voltage exciting signal frequency of output is f
Out, frequency resolution is Δ f
Min, then
Wherein, N is the word length of phase accumulator.
Phase shift resolution ratio does
Wherein, M is the word length of digital adder.
Fig. 3 is the theory diagram of power amplification and impedance matching circuit.This circuit is made up of signaling conversion circuit, power amplification circuit and impedance matching circuit.Concrete operation principle is described below:
Import two-way driving signal SIG1, the SIG2 that the signal that multichannel alternating voltage exiting signal generating circuit is produced with door and RC delay circuit converts the band dead band respectively into through the not gate shown in Fig. 3 (a), two, wherein the RC delay circuit is made up of resistance and electric capacity.The driving signal of output supplies the power amplification circuit shown in Fig. 3 (b) to use, and 1 is chip for driving among Fig. 3 (b), and 2 is the N-channel MOS pipe, and 3 is coupling transformer, and 4 is the equivalent load of mega sonic wave transducer.Particularly, the power amplification circuit described in the utility model can be used the full bridge power amplifying circuit realization that four N-channel MOS pipes are formed.Drive four metal-oxide-semiconductors of IR2110 chip for driving driving that signal can pass through IR company, to improve the driving force that drives signal.The operating voltage of full-bridge circuit is obtained through behind the rectifying and wave-filtering by the 220VAC power supply.The piezo-electric crystal oscillator combination that the output of power amplification circuit is connected to mega sonic wave transducer assembling body after transformer coupled is gone up and is formed impedance matching circuit, and the impedance change action through coupling transformer makes the source driving signal and the piezo-electric crystal oscillator combination load impedance phase of mega sonic wave transducer assembling body mate.
Fig. 4 is the sketch map of mega sonic wave transducer assembling body.As shown in the figure; 5 are the combination of piezo-electric crystal oscillator (common used material is that lead zirconate titanate is handled through polarization); When certain oscillator two sides applies a frequency at the driving signal of 700KHz to 2MHz; Quartz crystal unit produces mechanical oscillation under the effect that drives signal, if drive the natural mode shape that the frequency of oscillation of signal equals quartz crystal unit itself, the mechanical oscillation amplitude of this oscillator is maximum.Oscillator is combined as circular, and the center oscillator is circular, and is also annular; 6 for installing and fixing the chamber of piezo-electric crystal oscillator; 7 for introducing the inlet of air cooling fluid; 8 for deriving the outlet of air cooling fluid; Can the heat that piezo-electric crystal oscillator combination 5 produces under the dither effect be distributed through the 7 gentle cold fluid outlets 8 of air cooling fluid intake; 9 is quartz or ruby mega sonic wave transducer, and the size of transducer should guarantee through propagating the far sound field end that the mega sonic wave that arrives the wafer surface medium is in transducer; 10 is the mega sonic wave coupling material, and the glue very low like fusing point also can be designed to the multilayer couplant, and the effect of couplant can be used as acoustic filter, makes the mega sonic wave that meets cleaning requirement reach the maximum efficient of passing through; Mega sonic wave transducer 9 closely sticks together through mega sonic wave coupling material 10 and piezo-electric crystal oscillator combination 5.Concrete operation principle is following:
In piezo-electric crystal oscillator combination 5, load two or more driving signals, signal frequency is between 700KHz～2MHz scope, and wherein at least one drives the phase deviation setting at random within the specific limits in time of signal.Particularly; Can be at the center oscillator load the driving signal of fixed displacement; The oscillator of adjacent outer shroud then adopts relative center oscillator institute load driver signal to have the driving signal that random phase shift changes; Next outer shroud adopts the driving signal of fixed phase drift or has the driving signal that random phase shift changes relatively, also can be in contrast, or carry out the combination of load mode according to certain rules.The mega sonic wave that is excited through piezo-electric crystal oscillator combination 5; Through mega sonic wave coupling material 10; Make the mega sonic wave that meets cleaning requirement reach the maximum efficient of passing through; And then in corrosion cleansing medium sound field, produced the sound field of a change at random through the distortion of sound wave synthetic waveform at the far sound field end of mega sonic wave transducer 9; Make to form focus and the dead point that sound wave interference produces, clean needed uniformity sound field, reduce and eliminated the violent cavitation erosion that produces by focus the characteristic size structural damage thereby produce the surface wet corrosion.
Above embodiment only is used to explain the utility model; And be not the restriction to the utility model; The those of ordinary skill in relevant technologies field under the situation of spirit that does not break away from the utility model and scope, can also be made various variations and modification; Therefore all technical schemes that are equal to also belong to the category of the utility model, and the scope of patent protection of the utility model should be defined by the claims.
Claims (9)
1. a random phase shift mixing type piezoelectric vibrator combination mega sonic wave transducer apparatus is characterized in that, comprises alternating voltage pumping signal generation amplifying circuit and mega sonic wave transducer assembling body,
Said alternating voltage pumping signal generation amplifying circuit comprises microprocessor linked, multichannel alternating voltage exiting signal generating circuit, power amplification and impedance matching circuit successively;
Said microprocessor is used to export extremely said multichannel alternating voltage exiting signal generating circuit of frequency control word that multiple AC presses pumping signal and phase shifting control word, and the said phase shifting control word at least one road change at random in time within the specific limits;
Said multichannel alternating voltage exiting signal generating circuit is used for producing multiple AC pressure pumping signal according to said frequency control word and phase shifting control word;
Said power amplification and impedance matching circuit are used for through power amplification circuit the alternating voltage pumping signal that is produced being enlarged into the driving signal earlier, export mega sonic wave transducer assembling body again to;
Said mega sonic wave transducer assembling body is used for producing the sound field of change at random through loading said driving signal.
2. device as claimed in claim 1 is characterized in that, said mega sonic wave transducer assembling body comprises the combination of piezo-electric crystal oscillator, fixedly chamber, air cooling fluid intake, air cooling fluid issuing, mega sonic wave coupling material and mega sonic wave transducer,
Said piezo-electric crystal oscillator combination comprises center oscillator and peripheral oscillator;
The aggregate erection of said piezo-electric crystal oscillator is indoor at said lock chamber, and the gentle cold fluid outlet of said air cooling fluid intake is separately positioned on the both sides of said fixedly chamber;
The mega sonic wave transducer is bonding through said mega sonic wave coupling material and the combination of said piezo-electric crystal oscillator.
3. device as claimed in claim 2 is characterized in that, said center oscillator is circle or annular, and said peripheral oscillator is an annular.
4. device as claimed in claim 1 is characterized in that, said microprocessor and multichannel alternating voltage exiting signal generating circuit are set up correspondence through the mode of address mapping or the mode of serial communication.
5. device as claimed in claim 1 is characterized in that, said multichannel alternating voltage exiting signal generating circuit is used to adopt the Direct Digital synthetic technology to produce multiple AC pressure pumping signal.
6. device as claimed in claim 1; It is characterized in that said multichannel alternating voltage exiting signal generating circuit comprises reference clock, frequency word register, phase shift word register, phase accumulator, digital adder, output latch, wave memorizer, D/A converter and low pass filter; Said frequency word register, phase shift word register, phase accumulator, digital adder, output latch and wave memorizer are all realized through FPGA; Said reference clock is to be f by the frequency that the high stable crystal oscillator is produced
ClkGlobal clock; The frequency word register is used for the frequency control word K1 of buffer memory by the alternating voltage pumping signal of the first passage of little processing transmission; Said phase accumulator is that a units is the binary adder of N; Said phase shift word register is used for the phase shifting control word P1 of buffer memory by the alternating voltage pumping signal of the first passage of little processing transmission, and P1 is less than or equal to N; In each clock cycle, frequency control word K1 adds up in phase accumulator, accumulation result figure place be in the digital adder of M with phase shifting control word P1 addition; The result outputs to output latch; Wave memorizer is used to store table of natural sines, and carries out addressing according to the value of output latch, and the function amplitude of exporting corresponding table of natural sines is to D/A converter; Obtain the sine ladder wave of required frequency, phase place, after low pass filter is level and smooth, export again as the alternating voltage pumping signal.
7. device as claimed in claim 2 is characterized in that, said center oscillator is used to load the driving signal of the fixed phase drift that is produced by power amplification and impedance matching circuit; The peripheral oscillator of said center oscillator is used to load the driving signal that said relatively center oscillator loaded and has the driving signal that random phase shift changes, or by the driving signal of power amplification with the fixed phase drift of impedance matching circuit generation.
8. device as claimed in claim 2 is characterized in that, said mega sonic wave coupling material is a glue.
9. like each described device in the claim 2～8, it is characterized in that said mega sonic wave transducer is quartz or ruby mega sonic wave transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120417509 CN202290529U (en) | 2011-10-27 | 2011-10-27 | Random phase shift frequency-mixing type piezoelectric vibrator combined ultrasonic transducer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120417509 CN202290529U (en) | 2011-10-27 | 2011-10-27 | Random phase shift frequency-mixing type piezoelectric vibrator combined ultrasonic transducer device |
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| Publication Number | Publication Date |
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| CN202290529U true CN202290529U (en) | 2012-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120417509 Withdrawn - After Issue CN202290529U (en) | 2011-10-27 | 2011-10-27 | Random phase shift frequency-mixing type piezoelectric vibrator combined ultrasonic transducer device |
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| CN (1) | CN202290529U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102397838A (en) * | 2011-10-27 | 2012-04-04 | 北京七星华创电子股份有限公司 | Random phase-shifting hybridfrequency type piezoelectric vibrator combination mega soundwave transducer device |
| WO2016018878A1 (en) * | 2014-07-30 | 2016-02-04 | Corning Incorporated | Ultrasonic tank and methods for uniform glass substrate etching |
-
2011
- 2011-10-27 CN CN 201120417509 patent/CN202290529U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102397838A (en) * | 2011-10-27 | 2012-04-04 | 北京七星华创电子股份有限公司 | Random phase-shifting hybridfrequency type piezoelectric vibrator combination mega soundwave transducer device |
| CN102397838B (en) * | 2011-10-27 | 2013-12-18 | 北京七星华创电子股份有限公司 | Random phase-shifting hybrid frequency type piezoelectric vibrator combination mega soundwave transducer device |
| WO2016018878A1 (en) * | 2014-07-30 | 2016-02-04 | Corning Incorporated | Ultrasonic tank and methods for uniform glass substrate etching |
| CN106573829A (en) * | 2014-07-30 | 2017-04-19 | 康宁股份有限公司 | Ultrasonic tank and methods for uniform glass substrate etching |
| CN106573829B (en) * | 2014-07-30 | 2020-05-05 | 康宁股份有限公司 | Ultrasonic groove and uniform glass substrate etching method |
| US11610783B2 (en) | 2014-07-30 | 2023-03-21 | Corning Incorporated | Ultrasonic tank and methods for uniform glass substrate etching |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120704 Effective date of abandoning: 20131218 |
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| RGAV | Abandon patent right to avoid regrant |