CN202275797U - Atmospheric plasma processing apparatus - Google Patents

Atmospheric plasma processing apparatus Download PDF

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Publication number
CN202275797U
CN202275797U CN2011204035995U CN201120403599U CN202275797U CN 202275797 U CN202275797 U CN 202275797U CN 2011204035995 U CN2011204035995 U CN 2011204035995U CN 201120403599 U CN201120403599 U CN 201120403599U CN 202275797 U CN202275797 U CN 202275797U
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CN
China
Prior art keywords
gas
air chamber
processing device
liquid processing
electric liquid
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Expired - Fee Related
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CN2011204035995U
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Chinese (zh)
Inventor
黄俊铭
陈宏易
林博镛
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Mactech Corp
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Mactech Corp
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Publication of CN202275797U publication Critical patent/CN202275797U/en
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Abstract

An atmospheric plasma processing apparatus includes a processing stage, at least one gas distribution unit, a discharge chamber, a pair of electrodes and a high voltage power supply. The gas shunting unit comprises a buffer gas chamber arranged on the treatment table and a gas flow homogenizing piece positioned in the buffer gas chamber, the buffer gas chamber is provided with a gas inlet and a gas outlet, the discharge gas chamber is arranged on the treatment table and connected with the gas outlet, the electrodes are respectively positioned on two sides of the discharge gas chamber and coated by insulators, and the electrodes are connected with the high-voltage power supply in series to enable an electric field to be generated in the discharge gas chamber. Therefore, when gas enters from the gas inlet and passes through the gas flow uniform piece, the gas can uniformly flow into the discharge gas chamber, finally, the gas is subjected to plasma treatment to form plasma which is uniformly sprayed out, and the operation quality can be improved.

Description

The atmosphere Electric liquid processing device
Technical field
The utility model relates to a kind of electricity slurry technology, particularly relates to a kind of atmosphere Electric liquid processing device.
Background technology
Existing Electric liquid processing device exports institute by two parallel electrode plates, a gas access and an electric slurry to be formed, after gas gets into this gas access, through forming electric slurry ejection after the generation of the electric field between the said parallel electrode plate particle encounter.
Said electricity slurry sprays and is usually used in carrying out surface treatments such as film formation, etching, surfaction, organic pollutant removal, cleaning, drainingization, hydrophiling.
There is disadvantage in existing Electric liquid processing device:
One, from this gas access to this electricity the slurry outlet, often inhomogeneous because of gas flow, the electric pulp density that causes spraying is inhomogeneous, very easily causes surface treatment incomplete, influences operation quality.
Two, existing Electric liquid processing device is difficult for being implemented on the atmospheric electricity sizing device of big fabric width; Because the atmospheric electricity sizing device space of big fabric width is bigger; Can cause gas flow inhomogeneous because of flow gap is excessive; Make that the electric pulp density of ejection is also inhomogeneous, cause surface treatment incomplete, influence operation quality.
Three, the bigger air chamber in space suppresses gas flow rates easily, makes that the spouting velocity of electricity slurry is slower, influences operating efficiency.
Summary of the invention
The purpose of the utility model is to provide a kind of gas flow that can make evenly to promote operation quality, can be implemented on the atmospheric electricity sizing device of big fabric width, can improve the atmosphere Electric liquid processing device of operating efficiency.
The utility model atmosphere Electric liquid processing device comprises a treatment bench, at least one gas dividing cell, discharge air chamber, pair of electrodes and a high voltage source, it is characterized in that:
Said gas dividing cell comprises a buffering air chamber that is arranged at this treatment bench, and is positioned at an indoor even part of gas flow of said cushion gas, and said buffering air chamber has a gas access and a gas vent.
This discharge air chamber is arranged at this treatment bench and is connected with said gas vent.
Said electrode lays respectively at this discharge air chamber both sides, and said electrode insulated body coats and contacts with this high voltage source.
The described atmosphere Electric liquid processing device of the utility model, this atmosphere Electric liquid processing device also comprise and are arranged at this treatment bench and at least one slit between said buffering air chamber and this discharge air chamber.
The described atmosphere Electric liquid processing device of the utility model; This atmosphere Electric liquid processing device is provided with two gas dividing cell; And comprise one and be arranged at this treatment bench and the spacing block between said gas dividing cell, this spacing block has at least one hypotenuse that is positioned at said slit.
The described atmosphere Electric liquid processing device of the utility model, the even part of said gas flow is the porous branching block, this porous branching block has a plurality of apertures.
The described atmosphere Electric liquid processing device of the utility model, the even part of said gas flow are difference tracheae piece, have multistage branch pipe in this difference tracheae piece, and it is identical to be positioned at the length of two branch pipes of both sides, an input port.
The beneficial effect of the utility model is: through the even part of the gas flow of said gas dividing cell, can make gas flow into this discharge air chamber equably, make gas electric pulpization form the evenly ejection of electricity slurry at last, and then can promote operation quality.
Description of drawings
Fig. 1 is the sketch map of the utility model atmosphere Electric liquid processing device first preferred embodiment;
Fig. 2 is the sketch map of the utility model atmosphere Electric liquid processing device second preferred embodiment;
Fig. 3 is the sketch map of a porous branching block of the utility model atmosphere Electric liquid processing device;
Fig. 4 is the sketch map of a difference tracheae piece of the utility model atmosphere Electric liquid processing device.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is elaborated.
Be noted that in following description similar elements is to represent with identical numbering.
As shown in Figure 1, the atmosphere Electric liquid processing device 100 of the utility model first preferred embodiment comprises a treatment bench 1, and is arranged at a gas dividing cell 2, a slit 3, discharge air chamber 4, pair of electrodes 5 and a high voltage source 9 of this treatment bench 1.
This gas dividing cell 2 comprises that a buffering air chamber 21 and is positioned at the even part 22 of gas flow of this buffering air chamber 21.
This buffering air chamber 21 has a gas access 211 and a gas vent 212.
The even part 22 of this gas flow has the result of use that can make gas stream go into and evenly flow out, and in the utility model, the even part 22 of this gas flow can be porous branching block 22a as shown in Figure 3, or difference tracheae piece 22b as shown in Figure 4.Have a plurality of apertures 23 in this porous branching block 22a.Have multistage branch pipe 24 in this difference tracheae piece 22b, and it is identical to be positioned at length L 1, the L2 of two branch pipes 24 of 25 both sides, an input port, preferably, the length of two branch pipes after all shuntings is all identical.The design of a plurality of apertures 23 through this porous branching block 22a; Or the design of the multistage branch pipe 24 through this difference tracheae piece 22b; When gas gets into from this gas access 211; The even part 22 of this gas flow of flowing through, just this porous branching block 22a or this difference tracheae piece 22b can make gas flow flow out from this gas vent 212 equably.
This discharge air chamber 4 is arranged at this treatment bench 1 and is connected with this gas vent 212, and this discharge air chamber 4 has an electricity slurry outlet 41.
This slit 3 is arranged at this treatment bench 1 and between the gas vent 212 and this electric panel room 4 of this buffering air chamber 21.
Said electrode 5 is arranged at this treatment bench 1 respectively and is positioned at this discharge air chamber 4 both sides, and said electrode 5 insulated bodys 51 coat and contact with this high voltage source 9, can make in this discharge air chamber 4 and produce electric fields.
During use; The gas of the electric pulp of desire is imported from this gas access 211; Then flowing into the even part 22 of this gas flow flows out gas flow equably from this gas vent 212; Get into this slit 3 then and get into this discharge air chamber 4 again, make gas electric pulpization form the electricity slurry through the electric field in this discharge air chamber 4 at last via these electricity slurry outlet 41 ejections.Because the space of this slit 3 is little than the space at these 211 places, gas access,, can produce the effect of accelerating electricity slurry spouting velocity so after gas gets into this slit 3, pick up speed is got into the air chamber 4 that should discharge.
As shown in Figure 2; The atmosphere Electric liquid processing device 200 of the utility model second preferred embodiment comprises a treatment bench 1, and is arranged at two gas dividing cell 2, a spacing block 6, two slits 7, discharge air chamber 4, pair of electrodes 5 and a high voltage source 9 of this treatment bench 1.
Said gas dividing cell 2 is and is arranged at this treatment bench 1 dividually, and this second preferred embodiment is arranged at this treatment bench 1 with this spacing block 6 and between said gas dividing cell 2, said gas dividing cell was opened in 2 minutes.
The gas dividing cell 2 of this second preferred embodiment is identical with the gas dividing cell 2 of first preferred embodiment, comprises that a buffering air chamber 21 and is positioned at the even part 22 of gas flow of this buffering air chamber 21.This buffer gas 21 has a gas access 211 and a gas vent 212.The even part 22 of this gas flow has the result of use that can make gas stream go into and evenly flow out, and the even part 22 of this gas flow can be porous branching block 22a as shown in Figure 3, or difference tracheae piece 22b as shown in Figure 4.
This discharge air chamber 4 is arranged at this treatment bench 1 and is connected with said gas vent 212, and this discharge air chamber 4 has an electricity slurry outlet 41.
Said electrode 5 is arranged at this treatment bench 1 respectively and is positioned at this discharge air chamber 4 both sides, and said electrode 5 insulated bodys 51 coat and contact with this high voltage source 9, can make in this discharge air chamber 4 and produce electric fields.
Said slit 7 is arranged at this treatment bench 1 and lays respectively between the gas vent 212 and this electric panel room 4 of said buffering air chamber 21.
This spacing block 6 has two hypotenuses 61 that lay respectively in the said slit 7, and getting in order to guiding gas should discharge air chamber 4.
During use; The gas of the electric pulp of desire is imported from said gas access 211; Then flowing into the even part 22 of said gas flow flows out gas flow equably from said gas vent 212; Get into said slit 7 then and the gas guiding is got into this discharge air chamber 4, make gas electric pulpization form the electricity slurry through the electric fields in this discharge air chamber 4 at last and starch to export 41 and spray via this electricity through said hypotenuse 61.Because the space of said slit 7 is little than the space at these 211 places, gas access, two hypotenuses 61 of this spacing block 6 of arranging in pairs or groups again have can guiding gas function, can make the gas pick up speed get into this discharge air chamber 4 whereby, produce and accelerate electric effect of starching spouting velocity.
What be worth explanation is that said gas dividing cell 2 also can be installed on Xelminator except being installed on this enforcement novel air Electric liquid processing device.
Can know that through above explanation the utility model atmosphere Electric liquid processing device has following beneficial effect:
One, the utility model is through the even part 22 of the gas flow of said gas dividing cell 2; Can make the gas of the electric pulp of desire flow into this discharge air chamber 4 equably; Making gas electric pulpization form the electricity slurry and export 41 via this electricity slurry at last evenly sprays; Can make surface treatment complete, can promote operation quality.
Two, the utlity model has the uniform operating characteristic of the electric pulp density that can make ejection, can be implemented on the atmospheric electricity sizing device of big fabric width.
Three, the utility model can make the gas pick up speed get into this discharge air chamber 4 through the design of said slit, can accelerate the spouting velocity of electricity slurry, can improve operating efficiency.

Claims (5)

1. an atmosphere Electric liquid processing device comprises a treatment bench, at least one gas dividing cell, discharge air chamber, pair of electrodes and a high voltage source, it is characterized in that:
Said gas dividing cell comprises a buffering air chamber that is arranged at this treatment bench, and is positioned at an indoor even part of gas flow of said cushion gas, and said buffering air chamber has a gas access and a gas vent;
This discharge air chamber is arranged at this treatment bench and is connected with said gas vent;
Said electrode lays respectively at this discharge air chamber both sides, and said electrode insulated body coats and contacts with this high voltage source.
2. atmosphere Electric liquid processing device according to claim 1 is characterized in that:
This atmosphere Electric liquid processing device also comprises and is arranged at this treatment bench and at least one slit between said buffering air chamber and this discharge air chamber.
3. atmosphere Electric liquid processing device according to claim 2 is characterized in that:
This atmosphere Electric liquid processing device is provided with two gas dividing cell, reaches one and is arranged at this treatment bench and the spacing block between said gas dividing cell, and this spacing block has at least one hypotenuse that is positioned at said slit.
4. according to each described atmosphere Electric liquid processing device in the claim 1 to 3, it is characterized in that:
The even part of said gas flow is the porous branching block, and this porous branching block has a plurality of apertures.
5. according to each described atmosphere Electric liquid processing device in the claim 1 to 3, it is characterized in that:
The even part of said gas flow is a difference tracheae piece, has multistage branch pipe in this difference tracheae piece, and it is identical to be positioned at the length of two branch pipes of both sides, an input port.
CN2011204035995U 2010-12-14 2011-10-21 Atmospheric plasma processing apparatus Expired - Fee Related CN202275797U (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW099224249 2010-12-14
TW99224249U TWM416295U (en) 2010-12-14 2010-12-14 Gas diversion device

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CN202275797U true CN202275797U (en) 2012-06-13

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TW (1) TWM416295U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105142324A (en) * 2015-08-17 2015-12-09 深圳市华鼎星科技有限公司 Linear plasma generator
CN108781499A (en) * 2016-03-14 2018-11-09 株式会社富士 Plasma generator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105142324A (en) * 2015-08-17 2015-12-09 深圳市华鼎星科技有限公司 Linear plasma generator
CN108781499A (en) * 2016-03-14 2018-11-09 株式会社富士 Plasma generator
CN108781499B (en) * 2016-03-14 2020-09-29 株式会社富士 Plasma generator

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Publication number Publication date
TWM416295U (en) 2011-11-11

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120613

Termination date: 20191021

CF01 Termination of patent right due to non-payment of annual fee