CN202268332U - Spray bar for rinsing bath of wet etching machine - Google Patents
Spray bar for rinsing bath of wet etching machine Download PDFInfo
- Publication number
- CN202268332U CN202268332U CN2011202256866U CN201120225686U CN202268332U CN 202268332 U CN202268332 U CN 202268332U CN 2011202256866 U CN2011202256866 U CN 2011202256866U CN 201120225686 U CN201120225686 U CN 201120225686U CN 202268332 U CN202268332 U CN 202268332U
- Authority
- CN
- China
- Prior art keywords
- spray boom
- spray
- base plate
- spray bar
- wet etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model discloses a spray bar for a rinsing bath of a wet etching machine. The spray bar comprises spray bars, wherein one end of each spray bar is connected with a motor group; the lower ends of the spray bars are provided with a base plate; the arrangement direction of the spray bars is the running direction of the base plate; and nozzles are formed on the spray bars. After the motor group is started, the spray bars continuously swings, and the nozzles spray liquid to the base plate so as to wash the base plate. The spray bar has the characteristics of saving water, reducing the probability that the base plate is not washed uniformly and increasing the yield.
Description
Technical field
The utility model relates to that the 0LED field uses wet quarter machine parts, specifically be particularly related to machine rinsing bowl spray boom at a kind of wet quarter.
Background technology
Be used to make liquid crystal and oled panel machine rinsing bowl spray boom at wet quarter at present; Adopting technology more widely is that the spray boom direction and the substrate traffic direction of setting is orthogonal; After wet quarter, the machine major part changed inclination conveyance substrate into; Because the relative top of washing displacement, bottom fully causes washing inhomogeneous, make substrate occur washing irregular bad in process of production.
Summary of the invention
Goal of the invention
In order to overcome the shortcoming of above-mentioned prior art; The purpose of the utility model be to provide a kind of wet quarter machine rinsing bowl spray boom; The position of spray boom is adjusted, in etching method production, not only can be improved washing displacement efficiency, using water wisely; And can reduce substrate and produce the irregular probability of washing, improve yields.
To achieve these goals; The technical scheme of the utility model is: a kind of wet quarter machine rinsing bowl spray boom, comprise spray boom 1, an end of spray boom 1 is connected with motor unit 4; The lower end of spray boom 1 is provided with substrate 2, and the orientation of described spray boom 1 is the traffic direction of substrate 2.
Described spray boom 1 is provided with nozzle 3.
Because the direction of spray boom 1 is identical with the traffic direction of substrate 2, thus using water wisely had, and can reduce the irregular probability of substrate generation washing, improve the characteristics of yields.
Description of drawings
Accompanying drawing is the structure principle chart of the utility model.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is done further to specify.
With reference to accompanying drawing, a kind of wet quarter, machine rinsing bowl spray boom comprised spray boom 1, and an end of spray boom 1 is connected with motor unit 4, and the lower end of spray boom 1 is provided with substrate 2, and the orientation of described spray boom 1 is the traffic direction of substrate 2.
Described spray boom 1 is provided with nozzle 3.
Claims (2)
- One kind wet quarter machine rinsing bowl spray boom, comprise spray boom (1), an end of spray boom (1) is connected with motor unit (4), the lower end of spray boom (1) is provided with substrate (2), it is characterized in that, the orientation of said spray boom (1) is the traffic direction of substrate (2).
- 2. a kind of wet quarter according to claim 1, machine rinsing bowl spray boom is characterized in that described spray boom (1) is provided with nozzle (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202256866U CN202268332U (en) | 2011-06-29 | 2011-06-29 | Spray bar for rinsing bath of wet etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202256866U CN202268332U (en) | 2011-06-29 | 2011-06-29 | Spray bar for rinsing bath of wet etching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202268332U true CN202268332U (en) | 2012-06-06 |
Family
ID=46159116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202256866U Expired - Fee Related CN202268332U (en) | 2011-06-29 | 2011-06-29 | Spray bar for rinsing bath of wet etching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202268332U (en) |
-
2011
- 2011-06-29 CN CN2011202256866U patent/CN202268332U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120606 Termination date: 20120629 |