CN202267533U - Interferometer shearing amount on-line detection system - Google Patents
Interferometer shearing amount on-line detection system Download PDFInfo
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- 238000010008 shearing Methods 0.000 title claims abstract description 64
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Abstract
The utility model relates to an on-line detection and real-time monitoring of shearing quantity of a spectral imager interferometer component in the assembling and gluing process, which comprises a light source system, a scanning system, a Fourier system and a signal acquisition and processing unit; the scanning system is arranged on an emergent light path of the light source system; the Fourier system is arranged on the emergent light path after passing through the scanning system; the signal acquisition and processing unit is arranged on a focal plane of the Fourier system. The utility model provides a but interferometer shearing amount on-line measuring system that direct real-time measurement interferometer shearing amount, precision are high, the real-time strong, stability is high and the range of application is wide.
Description
Technical field
The utility model belongs to optical field, relates to a kind of spatial modulation type interferometer shearing displacement on-line detecting system, relates in particular to the online detection of optical spectrum imagers interferometer component shearing displacement in assembling and gummed process and monitoring in real time.
Background technology
China is a big country that disaster takes place frequently, because China is vast in territory, the various disasteies that almost take place on the earth all exist in China, and each disaster all causes great casualties and huge economic loss.And in environmental disaster control, optical spectrum imagers plays the effect of performing meritorious deeds never to be obliterated.Its maximum characteristics are " collection of illustrative plates unifications ", and promptly it can not only obtain the spatial information of target, can also obtain the spectral information of target simultaneously; The target of the different target of quality, individual minimum and cluster, have the target of obvious characteristic spectrum for appearance similar, optical spectrum imagers has shown the incomparable advantage of common imaging camera.
The optical spectrum imagers optical system is in a wide spectrum optical imaging system, to add interferometer component, has two kinds of instrumental functions of spectrometer and imager.Wherein interferometer component is the core component of optical spectrum imagers; Interferometer component is divided into two bundles with imaging beam; Two bundle imaging beams interfere on imaging mirror focal plane, through just can obtain the spectral information of target to the processing of interferogram through behind the different paths.
Interferometer component is being born important role in light spectrum image-forming; And the most important index of interferometer is exactly a shearing displacement; The size of shearing displacement directly influences the spectrally resolved ability of total system to target, so, just seem most important for the detection that relates to appearance assembly shearing displacement.
The method of traditional detection interferometer shearing displacement is that a plus lens is installed after interferometer component, on its focal plane, receives with CCD, and the interferogram that CCD is collected calculates the interferometer shearing displacement through handling; Because conventional measurement is to handle afterwards, can not be real-time obtain the interferometer shearing displacement, therefore; The conventional measurement efficiency of measurement is low; Debug to interferometer and to bring very big difficulty,, debug personnel and must spend week age at least especially in the interferometer accurate adjustment stage; Debugging through repeatedly could be transferred to design load with the interferometer shearing displacement, and real-time is poor; Whether the monitoring shearing displacement that in the interferometer solidification process, also need be interrupted afterwards changes.So, slightly adorn at interferometer, each step of hard-cover, sealing, curing all be unable to do without the repeated measurement to the interferometer shearing displacement, and conventional measurement being loaded down with trivial details, efficient is low, and precision is low, has seriously influenced work efficiency.Therefore, need a kind of new testing apparatus of development, to reach high-level efficiency, high-precision test interferometer shearing displacement.
The utility model content
In order to solve the above-mentioned technical matters that exists in the background technology, but the utility model provides the interferometer shearing displacement on-line detecting system of a kind of real time direct stellar interferometer shearing displacement, high, real-time, the stable height of precision and applied range.
The technical solution of the utility model is: the utility model provides a kind of interferometer shearing displacement on-line detecting system, and its special character is: said interferometer shearing displacement on-line detecting system comprises light-source system, scanning system, Fu Shi system and signals collecting and processing unit; Said scanning system is arranged on the emitting light path of light-source system; Said Fu Shi system is arranged on the emitting light path after the scanning system; Said signals collecting and processing unit are arranged on the focal plane of Fu Shi system.
Above-mentioned interference appearance shearing displacement on-line detecting system also comprises the colimated light system that is arranged between light-source system and the scanning system.
Above-mentioned colimated light system comprises frosted glass, colimated light system primary mirror, colimated light system secondary mirror and first iris; Said frosted glass is arranged on the emitting light path of light-source system; Said colimated light system secondary mirror is arranged on the transmitted light path after the frosted glass transmission; Said colimated light system primary mirror is arranged on the reflected light path after the colimated light system time mirror reflection; Said first iris is arranged on the reflected light path after the reflection of colimated light system primary mirror; Said colimated light system primary mirror is an off-axis parabolic mirror; Said colimated light system secondary mirror is a plane mirror.
Above-mentioned scanning system comprises double mirror and is used to drive the servomotor that double mirror at the uniform velocity rotates; Said double mirror is arranged on the emitting light path behind the colimated light system.
Above-mentioned Fu Shi system comprises second iris, Fu Shi system primary mirror and visible/infrared switched mirror; Said second iris is arranged between colimated light system and the scanning system; Said Fu Shi system primary mirror is arranged on the emitting light path after the scanning system; Said visible/infrared switched mirror is arranged on the emitting light path of Fu Shi system primary mirror; Said Fu Shi system primary mirror is off axis reflector mirror or parabolic mirror; Said visible/infrared switched mirror is a plane mirror.
Above-mentioned interference appearance shearing displacement on-line detecting system also comprises control module and display unit; Said signals collecting and processing unit insert display unit through control module.
Above-mentioned signals collecting and processing unit comprise photodetector and the signal processing unit that is electrical connected with photodetector; Said photodetector is arranged on the focal plane of Fu Shi system.
Above-mentioned photodetector comprises visible light electric explorer and infrared photoelectric detector; Said visible light electric explorer and infrared photoelectric detector place respectively the Fu Shi system about on two focal planes.
Above-mentioned photodetector also comprises the parasitic light diaphragm that disappears that is arranged on the photodetector.
Above-mentioned light-source system comprises laser instrument and is arranged at the laser divergent mirror on the laser emitting light path; Said laser instrument is visible laser or infrared laser.
The utility model has the advantages that:
1, can directly measure the interferometer shearing displacement.The utility model is through the rotation of scanning reflection mirror; Can the interference information of space distribution be converted into the temporal information that distributes with strength of current and input to signal processing unit; Processing and calculating through signal processing unit; Can be with the interferometer shearing displacement with real-time the showing of digital form, filled up domestic blank that can't real time direct stellar interferometer shearing displacement.
2, measuring accuracy is high.The interferometer shearing displacement on-line detecting system of the utility model, employing be the spot scan device, avoided in the traditional measurement method, because the error that the nonparallelism of CCD light-sensitive surface and Fu Shi mirror focal plane is brought the interference fringe distance measurement; Simultaneously; The utility model uses the variation of photodetector probing interference fringe energy; Because the response time of photodetector is the microsecond magnitude, so the method for testing that the utility model proposed is littler than the conventional measurement SI, measuring accuracy is higher.The 3rd, the interferometer shearing displacement on-line detecting system of the utility model, collimating mirror and Fu Shi mirror all adopt the off axis reflector structure, have avoided the influence of aberration, can measure the shearing displacement of visible interferometer and infrared interferometer.The 4th, the interferometer shearing displacement on-line detecting system of the utility model, the place is equipped with iris at the test macro incidence window; The parasitic light diaphragm that disappears respectively is installed before visible light electric explorer and infrared photoelectric detector, can effectively blocks parasitic light, improve measuring accuracy.The 5th, the scanning reflection mirror that the utility model uses is double mirror, can obtain two groups of scan-datas in the cycle at single pass, has improved measuring accuracy and measurement stability.
3, real-time.The interferometer shearing displacement on-line detecting system of the utility model; The place is equipped with iris at colimated light system outgoing window; Can adjust the bore of colimated light system outgoing beam according to the clear aperture size of different interferometer component, to satisfy the online detection of different optical spectrum imagers interferometer component shearing displacements.
4, stability is high.The utility model uses servomotor to drive the scanning reflection rotation, has high scanning stabilization.
5, applied range, easy to use.The utility model is provided with visible/infrared switched mirror in Fu Shi mirror emitting light path, according to interferometer component service band switched mirror, and applied range, easy to use.
Description of drawings
Fig. 1 is the structural representation of the interferometer shearing displacement on-line detecting system that provides of the utility model;
Wherein:
1-laser instrument, 2-laser divergent mirror, 3-frosted glass, 4-colimated light system secondary mirror, 5-colimated light system primary mirror, 6-first iris, 7-interferometer, 8-second iris, 9-scanning reflection mirror, 10-servomotor, 11-Fu Shi mirror, 12-be visible/infrared switched mirror, 13-visible light electric explorer, 14-first diaphragm for eliminating stray light, 15-infrared photoelectric detector, 16-second diaphragm for eliminating stray light, 17-signal processing unit, 18-control module, 19-display unit.
Embodiment
Referring to Fig. 1, the interferometer shearing displacement on-line detecting system of the utility model comprises light-source system, colimated light system, scanning system, Fu Shi system, signals collecting and processing unit, control module and display unit.
Light-source system comprises laser instrument 1 and laser divergent mirror 2, and laser divergent mirror 2 is installed on the emitting light path of laser instrument 1;
Colimated light system 20 comprises frosted glass 3, colimated light system secondary mirror 4, colimated light system primary mirror 5 and first iris 6; Frosted glass 3 is installed on colimated light system 20 focal planes; Colimated light system secondary mirror 4 is installed on the middle light path of colimated light system primary mirror 5 and frosted glass 3, and first iris 6 is installed on the outgoing window of colimated light system 20.
Scanning system comprises scanning reflection mirror 9 and servomotor 10, and scanning reflection mirror 9 is installed on the light path between tested interferometer 7 and the Fu Shi mirror 11.
The Fu Shi system comprises second iris 8; Fu Shi mirror 11; It is thus clear that/infrared switched mirror 12; Second iris 8 is installed on the incidence window of test macro light path, and Fu Shi mirror 11 is installed on the emitting light path of scanning reflection mirror 9, and visible/infrared switched mirror 12 is installed on the emitting light path of Fu Shi mirror 11.
Signals collecting and processing unit comprise visible light electric explorer 13; First diaphragm for eliminating stray light 14, infrared photoelectric detector 15, second diaphragm for eliminating stray light 16 and signal processing unit 17; Visible light electric explorer 13 is installed on the focal plane, Fu Shi system right side; First diaphragm for eliminating stray light is installed on the visible light electric explorer 13; Infrared photoelectric detector 15 is installed on the focal plane, Fu Shi system left side, and second diaphragm for eliminating stray light 16 is installed on the infrared photoelectric detector 15, and signal processing unit 17, control module 18 are installed on the detection system inwall; Display unit 19 is installed on the test macro outer wall.
Colimated light system is bore Φ 100mm, and focal length 1000mm off-axis reflection optical structure, Fu Shi system are bore Φ 200mm, focal length 400mm off-axis reflection optical structure, and the frosted glass material is Φ 40mm for quartzy, bore.
The course of work of the utility model is: the quasi-monochromatic light that laser instrument 1 sends shines on the laser divergent mirror 2; After 2 modulation of laser divergent mirror, formation has than the homogeneous beam at Vernonia parishii Hook angle and is full of frosted glass 3, and the diameter of frosted glass 3 is Φ 40mmm; Behind the colimated light system collimation; Form field angle and be ± 1.14 ° collimated monochromatic light bundle, adjust from the bore of the parallel beam of colimated light system outgoing, make the clear aperture of itself and tested interferometer 7 suitable through first iris 6; The collimated monochromatic light bundle that comes out from colimated light system forms two and restraints the light beam with coherence and incide the test macro 21 through interferometer 7 modulation backs; Adjust the clear aperture size of second iris 8 and beam size sizableness, get into test macro, measuring accuracy is had a negative impact to reduce extraneous parasitic light from interferometer 7 outgoing; Two coherent light beams incide on the scanning reflection mirror 9 after getting into test macro, because scanning reflection mirror 9 at the uniform velocity rotates, will be reflected into the light beam that is parallel to Fu Shi mirror optical axis successively from the coherent light beam of each visual field of interferometer 7 outgoing; Focus on visible light electric explorer 13 or the infrared photoelectric detector 15 after visible/infrared switched mirror 12 reflections from the converging beam of Fu Shi mirror 11 outgoing; The electric signal that photodetector distributes according to the bright dark corresponding output of the variation same frequency strength of current of interference fringe; Be input to signal processing unit 17; After the segmentation and processing of electric signal through signal processing unit 17; According to the wavelength parameter of control module 18 input and the rotating speed parameter of servomotor, can calculate the shearing displacement of tested interferometer 7, and be input to display unit 19 and show; Shine on the photodetector in order to reduce diffusing on the test macro inwall; To the light signal generating influence of gathering, first disappear the parasitic light diaphragm 14 and second diaphragm for eliminating stray light 16 is installed respectively outside the light-sensitive surface of visible light electric explorer 13 and infrared photoelectric detector 15.
The principle of work of the utility model is following:
The monochromatic light that laser instrument 1 sends shines on the frosted glass 3 after laser divergent mirror 2 is dispersed; Through forming the collimated monochromatic light bundle behind colimated light system 20 collimations; The collimated monochromatic light bundle forms the light beam that two bundles have the coherence through interferometer 7 modulation back and incides on the scanning reflection mirror 9, and through again after Fu Shi mirror 11 converges, two coherent light beams interfere on Fu Shi mirror 11 focal planes; Form interference fringe, its light intensity energy is by cosine distribution.The general formula of interferometer shearing displacement:
d＝f/s*λ (1)
In the formula: d is the interferometer shearing displacement, and f is a Fu Shi mirror focal length, and s is the interference fringe spacing, and λ is the monochromatic source wavelength.
Can know that by formula (1) only need measure the interference fringe distance s just can calculate the interferometer shearing displacement.Because monochromatic interference fringe is equally spaced, before Fu Shi mirror 11, install one and scan system, when servomotor 10 at the uniform velocity rotated with the angular velocity drive scanning reflection mirror 9 of ω rad/s, interference fringe also can be at the uniform velocity mobile on Fu Shi mirror 11 image planes.The speed v that interference fringe moves on as the plane can be used formula (2) expression
v＝2*f*ω (2)
So photodetector 15 can detect the interference fringe of different visual fields successively, owing to being cosine function, so what photodetector 15 was exported also is the current signal of strength of current by cosine distribution as the light distribution on the plane.Through the calculating of signal processing unit 17, can obtain the mistiming t between the current peak peak response value, can obtain the interference fringe distance s with formula (3).
s＝t*v＝2*t*f*ω (3)
Bring formula (3) into formula (1), get the computing formula (4) of interferometer shearing displacement d
d＝λ/(2*t*ω) (4)
The interferometer shearing displacement on-line measuring device of the utility model; Rotation through scanning reflection mirror 9; To be reflected into the light beam that is parallel to Fu Shi mirror 11 optical axises from two bundle coherent light beams of the different visual fields that interferometer comes out; Converge through the Fu Shi mirror and to interfere; On Fu Shi mirror 11 image planes, form the interference fringe of light intensity intensity by cosine distribution, because scanning reflection mirror 9 at the uniform velocity rotates, interference fringe also can take place on as the plane at the uniform velocity mobile at Fu Shi mirror 11; What photodetector 15 will survey that the light intensity energy distribution is converted into the strength of current DISTRIBUTED REAL-TIME is input to signal processing unit 17; Can obtain the time interval t between the signal peak peak value after signal processing unit 17 process segmentations and the interpolation, get final product the real-time shearing displacement that calculates interferometer according to the wavelength value λ of input and the rotational speed omega of scanning reflection mirror according to formula (4) again, and show in real time.
The method of traditional measurement interferometer shearing displacement all is on Fu Shi mirror 11 focal planes, ccd detector to be installed; Survey two-dimensional image information collection and preservation with CCD with interference fringe; Size according to the CCD pixel dimension calculates fringe spacing s again, uses formula (1) to calculate the interferometer shearing displacement again.Though classic method can calculate the interferometer shearing displacement, there are two very big shortcomings: 1, can not measure the interference shearing displacement in real time, the efficient of debuging of interferometer is brought and seriously influenced; 2, because the CCD pixel has certain size, can lose the detailed information of interferogram, and the parallelism error of ccd detector and image planes can cause directly also and calculate not accurate enough to the interference fringe distance s.
The interferometer shearing displacement on-line measuring device of the utility model; Driving the surface sweeping catoptron through servomotor at the uniform velocity rotates; The interferogram light intensity energy information collection of space distribution is the distributed current strength information by the time; Through after the signal processing unit processes, the interferometer shearing displacement is shown in real time.So; The interferometer shearing displacement of the utility model is at pick-up unit; Solved traditional measurement method and can not detect the shortcoming of interferometer shearing displacement in real time, thereby improved the efficient that interferometer is debug and detected, and a kind of means of real-time monitoring are provided for the sealing curing of interferometer.
Present stage, photodetector has become a kind of industry of maturation, and the common photoelectric detector response time is all in the microsecond magnitude, and high performance photodetector can reach nanosecond.With the sampling time be 1 μ s, Fu Shi mirror focal length is 400mm, the scanning mirror rotating speed calculates for π rad/s, photodetector is 2.5 μ m to the SI of interference fringe.And for conventional measurement; Because the CCD pixel dimension is generally (infrared is about 30 μ m) about 10 μ m; So the detection method that the utility model proposes has improved a nearly one magnitude than the method sampling density of traditional measurement interferometer shearing displacement; Improved measuring accuracy, and avoided because CCD light-sensitive surface and image planes parallelism error errors caused.
In addition; The detection method that the utility model proposed can be through repeatedly scanning; The mean value of asking for the interference fringe peak-to-peak value calculates the interferometer shearing displacement, can avoid the qualitative errors caused of servomotor rotary speed unstabilization effectively like this, has improved measuring stability.
Claims (10)
1. interferometer shearing displacement on-line detecting system, it is characterized in that: said interferometer shearing displacement on-line detecting system comprises light-source system, scanning system, Fu Shi system and signals collecting and processing unit; Said scanning system is arranged on the emitting light path of light-source system; Said Fu Shi system is arranged on the emitting light path after the scanning system; Said signals collecting and processing unit are arranged on the focal plane of Fu Shi system.
2. interferometer shearing displacement on-line detecting system according to claim 1 is characterized in that: said interferometer shearing displacement on-line detecting system also comprises the colimated light system that is arranged between light-source system and the scanning system.
3. interferometer shearing displacement on-line detecting system according to claim 2 is characterized in that: said colimated light system comprises frosted glass, colimated light system primary mirror, colimated light system secondary mirror and first iris; Said frosted glass is arranged on the emitting light path of light-source system; Said colimated light system secondary mirror is arranged on the transmitted light path after the frosted glass transmission; Said colimated light system primary mirror is arranged on the reflected light path after the colimated light system time mirror reflection; Said first iris is arranged on the reflected light path after the reflection of colimated light system primary mirror; Said colimated light system primary mirror is an off-axis parabolic mirror; Said colimated light system secondary mirror is a plane mirror.
4. interferometer shearing displacement on-line detecting system according to claim 3 is characterized in that: said scanning system comprises double mirror and is used to drive the servomotor that double mirror at the uniform velocity rotates; Said double mirror is arranged on the emitting light path behind the colimated light system.
5. interferometer shearing displacement on-line detecting system according to claim 4 is characterized in that: said Fu Shi system comprises second iris, Fu Shi system primary mirror and visible/infrared switched mirror; Said second iris is arranged between colimated light system and the scanning system; Said Fu Shi system primary mirror is arranged on the emitting light path after the scanning system; Said visible/infrared switched mirror is arranged on the emitting light path of Fu Shi system primary mirror; Said Fu Shi system primary mirror is off axis reflector mirror or parabolic mirror; Said visible/infrared switched mirror is a plane mirror.
6. according to claim 1 or 2 or 3 or 4 or 5 described interferometer shearing displacement on-line detecting systems, it is characterized in that: said interferometer shearing displacement on-line detecting system also comprises control module and display unit; Said signals collecting and processing unit insert display unit through control module.
7. interferometer shearing displacement on-line detecting system according to claim 6 is characterized in that: said signals collecting and processing unit comprise photodetector and the signal processing unit that is electrical connected with photodetector; Said photodetector is arranged on the focal plane of Fu Shi system.
8. interferometer shearing displacement on-line detecting system according to claim 7, it is characterized in that: said photodetector comprises visible light electric explorer and infrared photoelectric detector; Said visible light electric explorer and infrared photoelectric detector place respectively the Fu Shi system about on two focal planes.
9. interferometer shearing displacement on-line detecting system according to claim 8 is characterized in that: said photodetector also comprises the parasitic light diaphragm that disappears that is arranged on the photodetector.
10. interferometer shearing displacement on-line detecting system according to claim 1 is characterized in that: said light-source system comprises laser instrument and is arranged at the laser divergent mirror on the laser emitting light path; Said laser instrument is visible laser or infrared laser.
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| CN2011203775333U CN202267533U (en) | 2011-09-28 | 2011-09-28 | Interferometer shearing amount on-line detection system |
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| CN2011203775333U CN202267533U (en) | 2011-09-28 | 2011-09-28 | Interferometer shearing amount on-line detection system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103017906A (en) * | 2011-09-28 | 2013-04-03 | 中国科学院西安光学精密机械研究所 | Interferometer shearing amount on-line detection system |
| CN103017899A (en) * | 2012-11-23 | 2013-04-03 | 北京振兴计量测试研究所 | Convergent mirror |
| CN103063410A (en) * | 2012-12-12 | 2013-04-24 | 中国科学院西安光学精密机械研究所 | Automatic detection system and detection method for parameters of ultraviolet or visible light optical system |
-
2011
- 2011-09-28 CN CN2011203775333U patent/CN202267533U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103017906A (en) * | 2011-09-28 | 2013-04-03 | 中国科学院西安光学精密机械研究所 | Interferometer shearing amount on-line detection system |
| CN103017906B (en) * | 2011-09-28 | 2014-10-15 | 中国科学院西安光学精密机械研究所 | Interferometer shearing amount on-line detection system |
| CN103017899A (en) * | 2012-11-23 | 2013-04-03 | 北京振兴计量测试研究所 | Convergent mirror |
| CN103017899B (en) * | 2012-11-23 | 2015-06-17 | 北京振兴计量测试研究所 | Convergent mirror |
| CN103063410A (en) * | 2012-12-12 | 2013-04-24 | 中国科学院西安光学精密机械研究所 | Automatic detection system and detection method for parameters of ultraviolet or visible light optical system |
| CN103063410B (en) * | 2012-12-12 | 2015-05-27 | 中国科学院西安光学精密机械研究所 | Automatic detection system and detection method for parameters of ultraviolet or visible light optical system |
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