CN202265417U - Polycrystalline silicon reduction furnace with novel nozzles - Google Patents
Polycrystalline silicon reduction furnace with novel nozzles Download PDFInfo
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- CN202265417U CN202265417U CN2011203469304U CN201120346930U CN202265417U CN 202265417 U CN202265417 U CN 202265417U CN 2011203469304 U CN2011203469304 U CN 2011203469304U CN 201120346930 U CN201120346930 U CN 201120346930U CN 202265417 U CN202265417 U CN 202265417U
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Abstract
The utility model discloses a polycrystalline silicon reduction furnace, which comprises a base plate, a furnace body, sixty pairs of electrodes, an air intake system, an air exhaust system, drainage parts and diversion parts, wherein the sixty pairs of electrodes are arranged on the base plate, and are distributed from first to eighth rings respectively; each nozzle comprises a base where a first air intake cavity is formed; each drainage part is connected with the upper end of each base; a second air intake cavity is formed on each drainage part; each second air intake cavity is communicated with each first air intake cavity; the cross-sectional area of each second air intake cavity is smaller than that of each first air intake cavity; each diversion part is connected with the upper end of each drainage part; a central spray hole positioned on a middle part and a plurality of side spray holes which surround the central spray hole and are distributed uniformly along a circumferential direction are formed on each diversion part; and the central spray hole and the side spray holes are communicated with each second air intake cavity. Due to the adoption of the polycrystalline silicon reduction furnace disclosed by the utility model, heat energy can be utilized reasonably, and the production efficiency of the reduction furnace can be increased simultaneously.
Description
Technical field
The utility model relates to technical field of polysilicon production, particularly relates to a kind of polycrystalline silicon reducing furnace with new type nozzle.
Background technology
Polycrystalline silicon reducing furnace is the nucleus equipment of output the finished product in the production of polysilicon, also is the key link of decision systems production capacity, energy consumption.Therefore, the design of polycrystalline silicon reducing furnace and manufacturing directly have influence on quality, output and the production cost of product.Under the influence along with global economic crisis, the price of polysilicon continues to descend, and industrial profit constantly is compressed, and market competition is growing more intense.Therefore, reducing the polysilicon energy consumption effectively, improve the quality of products, enhance productivity, is the major issue that present production of polysilicon enterprise need solve.
Produce at present polysilicon and mainly adopt " improvement Siemens Method ", usually with the trichlorosilane (SiHCl of certain proportioning
3) and hydrogen (H
2) gas mixture sprays into from bottom air inlet, and the vapour phase reduction reaction takes place in reduction furnace, the silicon (Si) that reaction generates directly is deposited on the silicon wicking surface in the stove, along with reaction continue carry out, the continuous growth of silicon rod finally reaches product requirement.Because the inner silicon core of reduction furnace need maintain 1050 ℃-1100 ℃ and produce; Cool off with cooling jacket the outside; Therefore, it is big to use 12 pairs of rods, the 18 pairs of reduction furnaces such as rod to produce polysilicon reduction energy consumptions, and production cost is high; The incompatible requirement of fierce market competition at present, the appearance of a kind of novel reduction furnace that can save energy and reduce the cost of active demand.
The utility model content
The utility model is intended to one of solve the problems of the technologies described above at least.
For this reason, the utility model purpose is to propose a kind of polycrystalline silicon reducing furnace that can cut down the consumption of energy and can improve output.
The polycrystalline silicon reducing furnace with new type nozzle according to the utility model comprises: chassis and body of heater, said body of heater are connected on the said chassis and between said body of heater and said chassis and limit reaction chamber; 60 counter electrode, said 60 counter electrode are located on the said chassis and are distributed in respectively on first to the 8th circle, and said first to the 8th circle is for said center chassis being center and eight concentric regular hexagons increasing successively from inside to outside; Inlet system, said inlet system comprise a plurality of nozzles that are located at middle part, said chassis; And exhaust system, said exhaust system comprises a plurality of venting ports, said venting port is located on the said chassis and between said the 4th annulus and said body of heater; Wherein, said each nozzle comprises: pedestal is formed with first inlet chamber in the said pedestal; Drainage portion; Said drainage portion link to each other with the upper end of said pedestal and said drainage portion in be formed with second inlet chamber, said second inlet chamber be connected with said first inlet chamber and the cross-sectional area of said second inlet chamber less than the cross-sectional area of said first inlet chamber; And diversion division; Said diversion division link to each other with the upper end of said drainage portion and said drainage portion in be formed with central spray orifice and surrounding said central spray orifice and the along the circumferential direction equally distributed a plurality of side spray orifice that is positioned at the middle part, said central spray orifice and said a plurality of side spray orifice are connected with said second inlet chamber.
Polycrystalline silicon reducing furnace according to the utility model with new type nozzle; Said 60 counter electrode are located on the said chassis and are distributed in respectively on the first, second, third and the 4th annulus; Thus; Can rationally utilize heat energy, also can avoid the furnace body inside cornice to walk too much heat simultaneously, can reduce thermal losses; Said nozzle can increase process gas flow rates and process gas is evenly distributed, and can improve the production efficiency of said reduction furnace.
In addition, the polycrystalline silicon reducing furnace with new type nozzle according to the utility model the foregoing description can also have following additional technical characterictic:
On every limit of said first lap, be distributed with an electrode, on every limit of said second circle, be distributed with an electrode, six electrodes on the said first lap are corresponding to one by one to constitute six counter electrode with six electrodes on said second encloses.
On every limit of said the 3rd circle, be distributed with two electrodes, on every limit of said the 4th circle, be distributed with two electrodes, 12 electrodes on said the 3rd circle are corresponding to one by one to constitute 12 counter electrode with 12 electrodes on the said the 4th encloses.
On every limit of said the 5th circle, be distributed with three electrodes, on every limit of said the 6th circle, be distributed with three electrodes, 18 electrodes on said the 5th circle are corresponding to one by one to constitute 18 counter electrode with 18 electrodes on the said the 6th encloses.
On every limit of said the 7th circle, be distributed with four electrodes, on every limit of said the 8th circle, be distributed with four electrodes, 24 electrodes on said the 7th circle are corresponding to one by one to constitute 24 counter electrode with 24 electrodes on the said the 8th encloses.
The corresponding sides of said first to the 8th circle are parallel.
Said a plurality of nozzle is distributed in respectively on said center chassis place and the 9th to the 12 circle; The the said the 9th to the 12 circle is for said center chassis being center and four concentric regular hexagons increasing successively from inside to outside; Wherein said the 9th circle is between first and second circles; Said the tenth circle is between said third and fourth circle, and said the 11 circle is between the said the 5th and the 6th circle, and said the 12 circle is between the said the 7th and the 8th circle.
The corresponding sides of said the first to the 12 circle are parallel.
The quantity of said a plurality of nozzles is 55; Wherein on said the 9th circle, be distributed with six nozzles; On said the tenth circle, be distributed with 12 nozzles; On said the 11 circle, be distributed with 18 nozzles, on said the 12 circle, be distributed with 18 nozzles, wherein the electrode on the nozzle on the arbitrary circle in the 9th to the 12 circle and the circle adjacent with it is along circumferential staggered arrangement.
Said inlet system also comprises: air inlet endless tube, said air inlet endless tube are positioned at below, said chassis and are connected with external air source; 55 inlet pipe, said 55 inlet pipe are connected with said air inlet endless tube through said 55 inlet pipe with corresponding one by one and said 55 nozzles of said 55 nozzles respectively.
The cross-sectional area of the central spray orifice of the diversion division of said nozzle is greater than each cross-sectional area of said a plurality of side spray orifices.
Each of said a plurality of side spray orifices is from the bottom to be scheduled to the sidespin spray orifice that the elevation angle rotates to the top.
The bus of the internal surface of said a plurality of sidespin spray orifices is hyperbolic line, para-curve, oval camber line or involute urve.
The top of the drainage portion of said nozzle is formed with the connection awl section of outer broadening formation, and said diversion division is engaged in the said connection awl section.
The quantity of said a plurality of venting ports is that 12 and the center that is distributed in said chassis are on the circumference in the center of circle.
Be formed with first cooling chamber in the said chassis; And said first cooling chamber has first cooling medium inlet and the outlet of a plurality of first heat-eliminating medium; Said first cooling medium inlet is positioned at the central authorities on said chassis; And said a plurality of first heat-eliminating medium outlet and the corresponding one by one setting of said a plurality of venting ports, each said first heat-eliminating medium outlet is connected with first cooling tube and each said venting port is connected with offgas duct, and said first cooling tube is set on the said offgas duct.
Be provided with second cooling chamber and said second cooling chamber in the said body of heater and be connected with second cooling medium inlet and the outlet of second heat-eliminating medium; Said second cooling medium inlet is positioned at the bottom of said body of heater and the top that the outlet of said second heat-eliminating medium is positioned at said body of heater; Be provided with in said second cooling chamber a plurality of at a distance from the stream baffle plates, said a plurality of at a distance from the stream baffle plates in said second cooling chamber from the bottom to top around said reaction chamber in the shape of a spiral shape distribute.
Said body of heater comprises cylindrical shell that is positioned at the bottom and the end socket that is located at said cylinder top, and said end socket is the hollow hemisphere.
Also be provided with a plurality of sight glasss on the said body of heater, said a plurality of sight glasss uniform distribution on the short transverse of said cylindrical shell becomes the circumferential uniform distribution of the said cylindrical shell of many rows and said a plurality of sight glasss edge.
Additional aspect of the utility model and advantage part in the following description provide, and part will become obviously from the following description, or recognize through the practice of the utility model.
Description of drawings
Above-mentioned and/or additional aspect of the utility model and advantage obviously with are easily understood becoming the description of embodiment from combining figs, wherein:
Fig. 1 is the synoptic diagram according to the polycrystalline silicon reducing furnace with new type nozzle of an embodiment of the utility model;
Fig. 2 is the synoptic diagram according to the polycrystalline silicon reducing furnace with new type nozzle of another embodiment of the utility model; With
Fig. 3 is the synoptic diagram according to the nozzle of the polycrystalline silicon reducing furnace with new type nozzle of an embodiment of the utility model.
Embodiment
Describe the embodiment of the utility model below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the utility model, and can not be interpreted as restriction the utility model.
In the description of the utility model; It will be appreciated that; The orientation of indications such as term " " center ", " vertically ", " laterally ", " on ", D score, " preceding ", " back ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward " or position relation are for based on orientation shown in the drawings or position relation; only be to describe with simplifying for the ease of describing the utility model; rather than the device or the element of indication or hint indication must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction to the utility model.
In addition, term " first ", " second " etc. only are used to describe purpose, and can not be interpreted as indication or hint relative importance.
In the description of the utility model, need to prove that only if clear and definite regulation and qualification are arranged in addition, term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be to be fixedly connected, connect integratedly, also can be to removably connect; Can be mechanical connection or electrical connection, also can be the connection of two element internals; Can be directly to link to each other, also can link to each other indirectly, for those of ordinary skill in the art, can understand the concrete implication of above-mentioned term as the case may be through intermediary.
Be described in detail with reference to the attached drawings polycrystalline silicon reducing furnace below with new type nozzle according to the utility model.
Shown in Fig. 1-3, the polycrystalline silicon reducing furnace with new type nozzle according to the utility model embodiment comprises: chassis 10, body of heater 20, six ten counter electrode 30, inlet system and exhaust system.
Particularly, body of heater 20 is connected on the chassis 10 and between body of heater 20 and chassis 10 and limits reaction chamber 1020.
60 counter electrode 30 are located on the chassis 10 and are distributed in respectively on first lap C1, the second circle C2, the 3rd circle C3, the 4th circle C4, the 5th circle C5, the 6th circle C6, the 7th circle C7 and the 8th circle C8.First to the 8th circle is for 10 centers, chassis being center and eight concentric regular hexagons increasing successively from inside to outside.
Said inlet system comprises a plurality of nozzles 41 that are located at 10 middle parts, chassis.
Said exhaust system comprises a plurality of venting ports 51, and venting port 51 is located on the chassis 10 and between said the 4th circumference and body of heater 20.
Wherein, nozzle 41 comprises, pedestal 411, drainage portion 412 and diversion division 413.
Be formed with first inlet chamber 4111 in the pedestal 411.
Polycrystalline silicon reducing furnace according to the utility model with new type nozzle; 60 counter electrode 30 are located on the chassis 10 and are distributed in four donuts respectively is on the first, second, third and the 4th annulus; Thus; Can rationally utilize heat energy, also can avoid the furnace body inside cornice to walk too much heat simultaneously, can reduce thermal losses; And the nozzle 41 of employing can increase process gas flow rates and process gas is evenly distributed, and can improve the production efficiency of said reduction furnace.
As shown in Figure 2, according to embodiment of the utility model, on every limit of first lap C1, be distributed with an electrode 30, on every limit of the second circle C2, be distributed with an electrode 30.Six electrodes 30 on the first lap C1 are corresponding to one by one to constitute six counter electrode with six electrodes 30 on the second circle C2.Can connect through the battery lead plate (not shown) between the two adjacent counter electrode.
On every limit of the 3rd circle C3, be distributed with two electrodes 30, on every limit of the 4th circle C4, be distributed with two electrodes 30.12 electrodes that ten two electrode 30 of the 3rd circle on the C3 and the 4th encloses on the C4 are corresponding to one by one to constitute 12 counter electrode.Can connect through the battery lead plate (not shown) between the two adjacent counter electrode.
On every limit of the 5th circle C5, be distributed with three electrodes 30, on every limit of the 6th circle C6, be distributed with three electrodes 30.18 electrodes 30 that ten eight electrode 30 of the 5th circle on the C5 and the 6th encloses on the C6 are corresponding to one by one to constitute 18 counter electrode.Can connect through the battery lead plate (not shown) between the two adjacent counter electrode.
On every limit of the 7th circle C7, be distributed with four electrodes 30, on every limit of the 8th circle C8, be distributed with four electrodes 30.24 electrodes 30 that two ten four electrode 30 of the 7th circle on the C7 and the 8th encloses on the C8 are corresponding to one by one to constitute 24 counter electrode.Can connect through the battery lead plate (not shown) between the two adjacent counter electrode.Thus, the control of counter electrode 30 can be simplified, and heat energy can be farthest rationally utilized.
As shown in Figure 2, be distributed in electrode 30 arranged alternate successively radially on second to the 7th circle, can make the distribution of electrode 30 reasonable thus, farthest improve the service efficiency on chassis 10.
According to some embodiment of the utility model, as shown in Figure 2, the corresponding sides of first lap C1, the second circle C2, the 3rd circle C3, the 4th circle C4, the 5th circle C5, the 6th circle C6, the 7th circle C7 and the 8th circle C8 are parallel.Thus, can make rationally distributed and designs simplification according to the polycrystalline silicon reducing furnace of the utility model embodiment.
According to an example of the utility model, a plurality of nozzles 41 are distributed in respectively on 10 centers, chassis and the 9th circle C9, the tenth circle C10, the 11 circle C11 and the 12 circle C12.The the 9th to the 12 circle is for 10 centers, chassis being center and four concentric regular hexagons increasing successively from inside to outside.Wherein the 9th circle C9 is between the first lap C1 and the second circle C2, and the tenth circle C10 is between the 3rd circle C3 and the 4th circle C4, and the 11 circle C11 is between the 5th circle C5 and the 6th circle C6, and the 12 circle C12 is between the 7th circle C7 and the 8th circle C8.Thus, process gas uniform distribution in reaction chamber 1020 can be made, single furnace output can be improved.
Advantageously; According to concrete example of the utility model, the corresponding sides of first lap C1, the second circle C2, the 3rd circle C3, the 4th circle C4, the 5th circle C5, the 6th circle C6, the 7th circle C7, the 8th circle C8, the 9th circle C9, the tenth circle C10, the 11 circle C11 and the 12 circle C12 are parallel.Thus, can make according to the rationally distributed and further simplified construction of the polycrystalline silicon reducing furnace of the utility model embodiment.
Advantageously, according to some examples of the utility model, the quantity of a plurality of nozzles 41 is 55.Wherein on the 9th circle C9, be distributed with six nozzles 41, on the tenth circle C10, be distributed with 12 nozzles 41, on the 11 circle C11, be distributed with 18 nozzles 41, on the 12 circle C12, be distributed with 18 nozzles 41.Wherein the electrode 30 on the nozzle 41 on the arbitrary circle in the 9th to the 12 circle and the circle adjacent with it is along circumferential staggered arrangement.Thus, can make the layout of nozzle 41 more reasonable, can match with 60 counter electrode effectively.
Further, according to embodiment of the utility model, said inlet system also comprises, air inlet endless tube 42 and 55 inlet pipe 43.
Particularly, air inlet endless tube 42 is positioned at 10 belows, chassis and is connected with external air source.
Corresponding one by one with 55 nozzles 41 respectively and 55 nozzles 41 of 55 inlet pipe 43 are connected with air inlet endless tube 42 through 55 inlet pipe 43.Thus, the air input of each nozzle 41 all is consistent, thereby can guarantees that air-flow is evenly smooth in the reaction chamber 1020.
Further, as shown in Figure 3, according to a concrete example of the utility model, the cross-sectional area of the central spray orifice 4131 of the diversion division 413 of nozzle 41 is greater than each cross-sectional area of a plurality of side spray orifices 4132.Thus, the shared large percentage of central fluidizing gas can be made, the process gas supply of reduction furnace middle and upper part can be kept better.
Further, according to embodiment of the utility model, each of a plurality of side spray orifices 4132 is from the bottom to be scheduled to the sidespin spray orifice that the elevation angle rotates to the top.The better effects if that thus, can form the sidespin air-flow and the sidespin air-flow is expanded laterally.
Further, according to concrete example of the utility model, the bus of the internal surface of said a plurality of sidespin spray orifices is hyperbolic line, para-curve, oval camber line or involute urve.Thus, can be so that processing.
According to embodiment of the utility model, as shown in Figure 3, the top of the drainage portion 412 of nozzle 41 is formed with the connection awl section of outer broadening formation, and diversion division 413 is engaged in the said connection awl section.Thus, can be so that being connected of diversion division 413 and drainage portion 412.
According to embodiment of the utility model, the quantity of a plurality of venting ports 51 is that 12 and the center with chassis 10 of being distributed in are (promptly as shown in Figure 2 the circumference between the periphery edge on the 8th circle C8 and chassis 10) on the circumference in the center of circle.Thus, reaction end gas is in time discharged.
As shown in Figure 1; According to embodiment of the utility model; Be formed with first cooling chamber 101 in the chassis 10; And first cooling chamber 101 has first cooling medium inlet 102 and exports the central authorities that 103, the first cooling medium inlets 102 are positioned at chassis 10 with a plurality of first heat-eliminating mediums, and outlet 103 of a plurality of first heat-eliminating medium and the corresponding one by one setting of a plurality of venting ports 51; Each first heat-eliminating medium outlet 103 is connected with first cooling tube and each venting port 51 is connected with offgas duct, and said first cooling tube is set on the said offgas duct.Thus, can simplify the design of polycrystalline silicon reducing furnace and can improve working condition, can guarantee safety in production.
According to example of the utility model; Be provided with second cooling chamber 203 and second cooling chamber 203 in the body of heater 20 and be connected with second cooling medium inlet 204 and second heat-eliminating medium outlet 205; Second cooling medium inlet 204 is positioned at the bottom of body of heater 20 and the top that second heat-eliminating medium outlet 205 is positioned at body of heater 20; Be provided with in second cooling chamber 203 a plurality of at a distance from stream baffle plates 206, a plurality of at a distance from stream baffle plates 206 in second cooling chamber 203 from the bottom to top around reaction chamber 1020 in the shape of a spiral shape distribute.Thus, working condition can be improved, safety in production can be guaranteed.
According to some embodiment of the utility model, body of heater 20 comprises the cylindrical shell 201 that is positioned at the bottom and is located at cylindrical shell 201 vertical end sockets 202 that end socket 202 is the hollow hemisphere.Thus, can reduce the rising resistance of upstream at reaction chamber 1020 tops.
Advantageously, as shown in Figure 1 according to embodiment of the utility model, also be provided with a plurality of sight glasss 60 on the body of heater 20, a plurality of sight glasss 60 uniform distribution on the short transverse of cylindrical shell 201 becomes many rows and a plurality of sight glass 60 circumferential uniform distribution along cylindrical shell 201.Thus, can in time observe the interior situation of said reaction chamber.
According to the polycrystalline silicon reducing furnace of the utility model, 60 counter electrode 30 are being distributed on first to the 8th circle respectively and are being arranged to six pairs, 12 pairs, 18 pairs and 24 counter electrode 30 respectively.The layout of this electrode 30 helps maximization and rationally utilizes heat energy, avoids the inboard cooling wall of stove tube to take away too much heat simultaneously, reduces thermal losses.On the first, second, third and the 4th circumference, evenly be provided with six, 12,18 and 18 nozzles respectively; On the circumference that along center is the center of circle, evenly be provided with 12 venting ports 51 with chassis 10; Central air outlet has been cancelled in such design; Avoided central air outlet neighbouring, improved the production efficiency of lower regions in the reaction chamber 1020 owing to the flow dead that builds the pressure and cause.The structure of using the outer ring to give vent to anger when making in the reduction furnace airflow circulation, is directly discharged from the outer ring, avoids byproduct of reaction to get back to the air-flow rising area of central authorities, causes the material back mixing.Show that through analog calculation the layout on chassis 10 has following advantage: because every silicon rod all has 3 corresponding equidistance air inlet sources, reduction furnace flow field ability uniform distribution helps silicon rod and evenly grows (1); (2) the silicon rod spacing is in full accord, and every silicon rod all has corresponding 3 equidistance radiant heat source, and the reduction furnace thermal field is evenly distributed; (3) give vent to anger and make hot gas walk the outside in the outer ring, the gas field can be maximized rationally utilize heat energy, avoids the inboard cooling wall of stove tube to take away too much heat simultaneously, reduces thermal losses.Simultaneously, this optimization design makes the manufacturing cost of reduction furnace effectively reduce, and the occupation of land space is little, helps being used on a large scale producing.
The end socket 202 on body of heater 10 tops is a hemispherical head.Hemispherical head stressed good, spherical shell stress is little, compares with cylindrical shell 201, and the more other forms of end socket of thickness is attenuate suitably.Advanced analog calculation; The upstream of the bottom of dome head reduces at the rising resistance at top; Gas speed obviously increases about height 2400-3200mm, helps solving the serious problem of silicon rod top cauliflower, and silicon rod bridging quality is partly had certain improvement effect; This characteristic shows more obvious on the inner ring silicon rod, and the general ellipsoidal head of silicon rod surface gas speed ratio has the lifting about 15%.
When producing, process gas at first gets into nozzle 41 from the inlet pipe 43 on reduction furnace chassis 10 according to the polycrystalline silicon reducing furnace with new type nozzle of the utility model.Because the cross-sectional area of second inlet chamber 4121 is less than the cross-sectional area of first inlet chamber 4111,412 flow velocity has definitely and increases gas in the Drainage Section.After gas gets into the diversion section 413 on top subsequently; Get into central spray orifice 4131 and sidespin spray orifice 4132 in certain proportion respectively; Because total cross-sectional area of central spray orifice 4131 and sidespin spray orifice 4132 is less than the cross-sectional area of second inlet chamber 4121, gas is further quickened.Speed through nozzle 41 back process gass can be increased to original 200-400%.
Gas is divided into central fluidizing gas and sidespin air-flow after leaving nozzle 41, the gas speed and the shared tolerance large percentage of central fluidizing gas can arrive the reduction furnace top preferably, keep the gas supply of reduction furnace middle and upper part.The sidespin air-flow can enlarge the range of influence of charge air flow, and make reduction furnace inner body air velocity distribution trend evenly effectively to the side-walls expansion of reduction furnace.Use proof through the scene, nozzle 41 can improve the polycrystalline silicon rod surface quality effectively, and the thickness of control silicon rod main body changes in 10%.
Polycrystalline silicon reducing furnace according to the utility model with new type nozzle; Through scantlings of the structure to chassis of polycrystalline silicon reducing furnace 10 and body of heater 20; And after the distribution of electrode 30, inlet mouth 41 and venting hole 51 is optimized design; Per kilogram polysilicon energy consumption can reduce 25%-35%, and single furnace output can reach the 14-16 ton, can effectively reduce the production of polysilicon cost.
In the description of this specification sheets, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means the concrete characteristic, structure, material or the characteristics that combine this embodiment or example to describe and is contained among at least one embodiment or example of the utility model.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete characteristic, structure, material or the characteristics of description can combine with suitable manner in any one or more embodiment or example.
Although illustrated and described the embodiment of the utility model; Those having ordinary skill in the art will appreciate that: under the situation of principle that does not break away from the utility model and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, the scope of the utility model is limited claim and equivalent thereof.
Claims (19)
1. the polycrystalline silicon reducing furnace with new type nozzle is characterized in that, comprising:
Chassis and body of heater, said body of heater are connected on the said chassis and between said body of heater and said chassis and limit reaction chamber;
60 counter electrode, said 60 counter electrode are located on the said chassis and are distributed in respectively on first to the 8th circle, and said first to the 8th circle is for said center chassis being center and eight concentric regular hexagons increasing successively from inside to outside;
Inlet system, said inlet system comprise a plurality of nozzles that are located at middle part, said chassis; With
Exhaust system, said exhaust system comprises a plurality of venting ports, said venting port is located on the said chassis and between the periphery edge on said the 8th circle and said chassis;
Wherein, said each nozzle comprises:
Pedestal is formed with first inlet chamber in the said pedestal;
Drainage portion; Said drainage portion link to each other with the upper end of said pedestal and said drainage portion in be formed with second inlet chamber, said second inlet chamber be connected with said first inlet chamber and the cross-sectional area of said second inlet chamber less than the cross-sectional area of said first inlet chamber; With
Diversion division; Said diversion division link to each other with the upper end of said drainage portion and said drainage portion in be formed with central spray orifice and surrounding said central spray orifice and the along the circumferential direction equally distributed a plurality of side spray orifice that is positioned at the middle part, said central spray orifice and said a plurality of side spray orifice are connected with said second inlet chamber.
2. polycrystalline silicon reducing furnace according to claim 1; It is characterized in that; On every limit of said first lap, be distributed with an electrode; On every limit of said second circle, be distributed with an electrode, six electrodes on the said first lap are corresponding to one by one to constitute six counter electrode with six electrodes on said second encloses.
3. polycrystalline silicon reducing furnace according to claim 1; It is characterized in that; On every limit of said the 3rd circle, be distributed with two electrodes; On every limit of said the 4th circle, be distributed with two electrodes, 12 electrodes on said the 3rd circle are corresponding to one by one to constitute 12 counter electrode with 12 electrodes on the said the 4th encloses.
4. polycrystalline silicon reducing furnace according to claim 1; It is characterized in that; On every limit of said the 5th circle, be distributed with three electrodes; On every limit of said the 6th circle, be distributed with three electrodes, 18 electrodes on said the 5th circle are corresponding to one by one to constitute 18 counter electrode with 18 electrodes on the said the 6th encloses.
5. polycrystalline silicon reducing furnace according to claim 1; It is characterized in that; On every limit of said the 7th circle, be distributed with four electrodes; On every limit of said the 8th circle, be distributed with four electrodes, 24 electrodes on said the 7th circle are corresponding to one by one to constitute 24 counter electrode with 24 electrodes on the said the 8th encloses.
6. according to each described polycrystalline silicon reducing furnace among the claim 1-5, it is characterized in that the corresponding sides of said first to the 8th circle are parallel.
7. the polycrystalline silicon reducing furnace with new type nozzle according to claim 1; It is characterized in that; Said a plurality of nozzle is distributed in respectively on said center chassis place and the 9th to the 12 circle; The the said the 9th to the 12 circle is for being center and four concentric regular hexagons increasing successively from inside to outside with said center chassis, and wherein said the 9th circle is between first and second circles, and said the tenth circle is between said third and fourth circle; Said the 11 circle is between the said the 5th and the 6th circle, and said the 12 circle is between the said the 7th and the 8th circle.
8. polycrystalline silicon reducing furnace according to claim 7 is characterized in that, the corresponding sides of said the first to the 12 circle are parallel.
9. the polycrystalline silicon reducing furnace with new type nozzle according to claim 7; It is characterized in that the quantity of said a plurality of nozzles is 55, wherein on said the 9th circle, be distributed with six nozzles; On said the tenth circle, be distributed with 12 nozzles; On said the 11 circle, be distributed with 18 nozzles, on said the 12 circle, be distributed with 18 nozzles, wherein the electrode on the nozzle on the arbitrary circle in the 9th to the 12 circle and the circle adjacent with it is along circumferential staggered arrangement.
10. the polycrystalline silicon reducing furnace with new type nozzle according to claim 9 is characterized in that, said inlet system also comprises:
Air inlet endless tube, said air inlet endless tube are positioned at below, said chassis and are connected with external air source;
55 inlet pipe, said 55 inlet pipe are connected with said air inlet endless tube through said 55 inlet pipe with corresponding one by one and said 55 nozzles of said 55 nozzles respectively.
11. the polycrystalline silicon reducing furnace with new type nozzle according to claim 10 is characterized in that, the cross-sectional area of the central spray orifice of the diversion division of said nozzle is greater than each cross-sectional area of said a plurality of side spray orifices.
12. the polycrystalline silicon reducing furnace with new type nozzle according to claim 11 is characterized in that, each of said a plurality of side spray orifices is from the bottom to be scheduled to the sidespin spray orifice that the elevation angle rotates to the top.
13. the polycrystalline silicon reducing furnace with new type nozzle according to claim 12 is characterized in that, the bus of the internal surface of said a plurality of sidespin spray orifices is hyperbolic line, para-curve, oval camber line or involute urve.
14. the polycrystalline silicon reducing furnace with new type nozzle according to claim 7 is characterized in that, the top of the drainage portion of said nozzle is formed with the connection awl section of outer broadening formation, and said diversion division is engaged in the said connection awl section.
15. the polycrystalline silicon reducing furnace with new type nozzle according to claim 1 is characterized in that, the quantity of said a plurality of venting ports is that 12 and the center that is distributed in said chassis are on the circumference in the center of circle.
16. the polycrystalline silicon reducing furnace with new type nozzle according to claim 1; It is characterized in that; Be formed with first cooling chamber in the said chassis; And said first cooling chamber has first cooling medium inlet and the outlet of a plurality of first heat-eliminating medium, and said first cooling medium inlet is positioned at the central authorities on said chassis, and said a plurality of first heat-eliminating medium outlet and the corresponding one by one setting of said a plurality of venting ports; Each said first heat-eliminating medium outlet is connected with first cooling tube and each said venting port is connected with offgas duct, and said first cooling tube is set on the said offgas duct.
17. the polycrystalline silicon reducing furnace with new type nozzle according to claim 1; It is characterized in that; Be provided with second cooling chamber and said second cooling chamber in the said body of heater and be connected with second cooling medium inlet and the outlet of second heat-eliminating medium; Said second cooling medium inlet is positioned at the bottom of said body of heater and the top that the outlet of said second heat-eliminating medium is positioned at said body of heater; Be provided with in said second cooling chamber a plurality of at a distance from the stream baffle plates, said a plurality of at a distance from the stream baffle plates in said second cooling chamber from the bottom to top around said reaction chamber in the shape of a spiral shape distribute.
18. the polycrystalline silicon reducing furnace with new type nozzle according to claim 1 is characterized in that, said body of heater comprises cylindrical shell that is positioned at the bottom and the end socket that is located at said cylinder top, and said end socket is the hollow hemisphere.
19. the polycrystalline silicon reducing furnace with new type nozzle according to claim 18; It is characterized in that; Also be provided with a plurality of sight glasss on the said body of heater, said a plurality of sight glasss uniform distribution on the short transverse of said cylindrical shell becomes the circumferential uniform distribution of the said cylindrical shell of many rows and said a plurality of sight glasss edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203469304U CN202265417U (en) | 2011-09-15 | 2011-09-15 | Polycrystalline silicon reduction furnace with novel nozzles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203469304U CN202265417U (en) | 2011-09-15 | 2011-09-15 | Polycrystalline silicon reduction furnace with novel nozzles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202265417U true CN202265417U (en) | 2012-06-06 |
Family
ID=46156225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203469304U Expired - Lifetime CN202265417U (en) | 2011-09-15 | 2011-09-15 | Polycrystalline silicon reduction furnace with novel nozzles |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202265417U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104401998A (en) * | 2014-11-25 | 2015-03-11 | 中国恩菲工程技术有限公司 | Nozzle |
| CN106477580A (en) * | 2016-12-09 | 2017-03-08 | 永平县泰达废渣开发利用有限公司 | A kind of cooling system for silicon liquid granulating and forming |
| CN107098349A (en) * | 2017-05-05 | 2017-08-29 | 中国矿业大学 | Observe visor and polycrystalline silicon reducing furnace |
-
2011
- 2011-09-15 CN CN2011203469304U patent/CN202265417U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104401998A (en) * | 2014-11-25 | 2015-03-11 | 中国恩菲工程技术有限公司 | Nozzle |
| CN106477580A (en) * | 2016-12-09 | 2017-03-08 | 永平县泰达废渣开发利用有限公司 | A kind of cooling system for silicon liquid granulating and forming |
| CN107098349A (en) * | 2017-05-05 | 2017-08-29 | 中国矿业大学 | Observe visor and polycrystalline silicon reducing furnace |
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| C14 | Grant of patent or utility model | ||
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Granted publication date: 20120606 |
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| CX01 | Expiry of patent term |