CN202164127U - Polysilicon reducing furnace - Google Patents
Polysilicon reducing furnace Download PDFInfo
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- CN202164127U CN202164127U CN2011202322001U CN201120232200U CN202164127U CN 202164127 U CN202164127 U CN 202164127U CN 2011202322001 U CN2011202322001 U CN 2011202322001U CN 201120232200 U CN201120232200 U CN 201120232200U CN 202164127 U CN202164127 U CN 202164127U
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Abstract
The utility model discloses a polysilicon reducing furnace. The polysilicon reducing furnace comprises a chassis, a furnace body, 48 pairs of electrodes, an air inlet system and an exhaust system, wherein the furnace body is connected on the chassis; a reaction chamber is limited between the furnace body and the chassis; the 48 pairs of electrodes are arranged on the chassis and are respectively arranged at a first circumference, a second circumference, a third circumference and a fourth circumference; the first circumference, the second circumference, the third circumference and the fourth circumference are concentric circumferences, the center of the chassis serves as the center of circle of the concentric circumferences, and radii of the concentric circumferences increase in sequence; the air inlet system comprises a plurality of nozzles, and the plurality of nozzles are arranged at the central part of the chassis; and the exhaust system comprises a plurality of air vents, and the air vents are arranged on the chassis and are arranged between the fourth circumference and the furnace body. When the polysilicon reducing furnace disclosed by the utility model is adopted, heat energy can be utilized reasonably, an inner side wall of the furnace body can be prevented from carrying away excessive heat, and heat loss can be reduced.
Description
Technical field
The utility model relates to technical field of polysilicon production, particularly relates to a kind of polycrystalline silicon reducing furnace.
Background technology
Polycrystalline silicon reducing furnace is the nucleus equipment of output the finished product in the production of polysilicon, also is the key link of decision systems production capacity, energy consumption.Therefore, the design of polycrystalline silicon reducing furnace and manufacturing directly have influence on quality, output and the production cost of product.Under the influence along with global economic crisis, the price of polysilicon continues to descend, and industrial profit constantly is compressed, and market competition is growing more intense.Therefore, reducing the polysilicon energy consumption effectively, improve the quality of products, enhance productivity, is the major issue that present production of polysilicon enterprise need solve.
Produce at present polysilicon and mainly adopt " improvement Siemens Method ", usually with the trichlorosilane (SiHCl of certain proportioning
3) and hydrogen (H
2) gas mixture sprays into from bottom air inlet, and the vapour phase reduction reaction takes place in reduction furnace, the silicon (Si) that reaction generates directly is deposited on the silicon wicking surface in the stove, along with reaction continue carry out, the continuous growth of silicon rod finally reaches product requirement.Because the inner silicon core of reduction furnace need maintain 1050 ℃-1100 ℃ and produce; Cool off with cooling jacket the outside; Therefore, it is big to use 12 pairs of rods, the 18 pairs of reduction furnaces such as rod to produce polysilicon reduction energy consumptions, and production cost is high; The incompatible requirement of fierce market competition at present, the appearance of a kind of novel reduction furnace that can save energy and reduce the cost of active demand.
The utility model content
The utility model is intended to one of solve the problems of the technologies described above at least.
For this reason, the utility model purpose is to propose a kind of polycrystalline silicon reducing furnace that can cut down the consumption of energy and can improve output.
Polycrystalline silicon reducing furnace according to the utility model comprises: chassis and body of heater, said body of heater are connected on the said chassis and between said body of heater and said chassis and limit reaction chamber; 48 counter electrode; Said 48 counter electrode are located on the said chassis and are distributed in the first, second, third and the 4th circumference respectively, and the said first, second, third and the 4th circumference is for being the concentric circumference that the center of circle and radius increase successively with said center chassis; Inlet system, said inlet system comprise a plurality of nozzles that are located at middle part, said chassis; And exhaust system, said exhaust system comprises a plurality of venting ports, said venting port is located on the said chassis and between said the 4th circumference and said body of heater.
Polycrystalline silicon reducing furnace according to the utility model; Said 48 counter electrode are located on the said chassis and are distributed in the first, second, third and the 4th circumference respectively, thus, can rationally utilize heat energy; Simultaneously also can avoid the furnace body inside cornice to walk too much heat, can reduce thermal losses.
In addition, the polycrystalline silicon reducing furnace according to the utility model the foregoing description can also have following additional technical characterictic:
On the said first, second, third and the 4th circumference, along the circumferential direction be evenly distributed with six pairs, ten pairs, 14 pairs and 18 counter electrode successively.
Said a plurality of nozzle is distributed in respectively on the 5th, the 6th, the 7th and the 8th circumference, said the 5th, the 6th, the 7th and the 8th circumference all with said center chassis be the center of circle and lay respectively within said first circumference and first and second circumference, the second and the 3rd circumference and the 3rd and the 4th circumference between.
The quantity of said a plurality of nozzles is 24, wherein on the said the 5th and the 6th circumference, is evenly distributed with four nozzles respectively, is evenly distributed with eight nozzles on the 7th and the 8th circumference respectively.
Said inlet system also comprises: air inlet endless tube, said air inlet endless tube are positioned at below, said chassis and are connected with external air source; 24 inlet pipe, said 24 inlet pipe are connected with said air inlet endless tube through said 24 inlet pipe with corresponding one by one and said 24 nozzles of said 24 nozzles respectively.
The quantity of said a plurality of venting ports is eight.
Be formed with first cooling chamber in the said chassis; And said first cooling chamber has first cooling medium inlet and the outlet of a plurality of first heat-eliminating medium; Said first cooling medium inlet is positioned at the central authorities on said chassis; And said a plurality of first heat-eliminating medium outlet and the corresponding one by one setting of said a plurality of venting ports, each said first heat-eliminating medium outlet is connected with first cooling tube and each said venting port is connected with offgas duct, and said first cooling tube is set on the said offgas duct.
Be provided with second cooling chamber and said second cooling chamber in the said body of heater and be connected with second cooling medium inlet and the outlet of second heat-eliminating medium; Said second cooling medium inlet is positioned at the bottom of said body of heater and the top that the outlet of said second heat-eliminating medium is positioned at said body of heater; Be provided with in said second cooling chamber a plurality of at a distance from the stream baffle plates, said a plurality of at a distance from the stream baffle plates in said second cooling chamber from the bottom to top around said reaction chamber in the shape of a spiral shape distribute.
Said body of heater comprises cylindrical shell that is positioned at the bottom and the end socket that is located at said cylinder top, and said end socket is the hollow hemisphere.
Also be provided with a plurality of sight glasss on the said body of heater, said a plurality of sight glasss uniform distribution on the short transverse of said cylindrical shell becomes the circumferential uniform distribution of the said cylindrical shell of many rows and said a plurality of sight glasss edge.
Additional aspect of the utility model and advantage part in the following description provide, and part will become obviously from the following description, or recognize through the practice of the utility model.
Description of drawings
Above-mentioned and/or additional aspect of the utility model and advantage obviously with are easily understood becoming the description of embodiment from combining figs, wherein:
Fig. 1 is the synoptic diagram according to the polycrystalline silicon reducing furnace of an embodiment of the utility model; With
Fig. 2 is the synoptic diagram according to the polycrystalline silicon reducing furnace of another embodiment of the utility model.
Embodiment
Describe the embodiment of the utility model below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the utility model, and can not be interpreted as restriction the utility model.
In the description of the utility model; It will be appreciated that; The orientation of indications such as term " " center ", " vertically ", " laterally ", " on ", D score, " preceding ", " back ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward " or position relation are for based on orientation shown in the drawings or position relation; only be to describe with simplifying for the ease of describing the utility model; rather than the device or the element of indication or hint indication must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction to the utility model.
In addition, term " first ", " second " etc. only are used to describe purpose, and can not be interpreted as indication or hint relative importance.
In the description of the utility model, need to prove that only if clear and definite regulation and qualification are arranged in addition, term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be to be fixedly connected, connect integratedly, also can be to removably connect; Can be mechanical connection or electrical connection, also can be the connection of two element internals; Can be directly to link to each other, also can link to each other indirectly, for those of ordinary skill in the art, can understand the concrete implication of above-mentioned term as the case may be through intermediary.
Be described in detail with reference to the attached drawings polycrystalline silicon reducing furnace below according to the utility model.
Shown in Fig. 1-2, the polycrystalline silicon reducing furnace according to the utility model comprises: chassis 10, body of heater 20, four 18 counter electrode 30, inlet system and exhaust system.
Particularly, body of heater 20 is connected on the chassis 10 and between body of heater 20 and chassis 10 and limits reaction chamber 1020.
48 counter electrode 30 are located on the chassis 10 and are distributed in the first, second, third and the 4th circumference respectively, and the said first, second, third and the 4th circumference is for being the concentric circumference that the center of circle and radius increase successively with 10 centers, chassis.
Said inlet system comprises a plurality of nozzles 41 that are located at 10 middle parts, chassis.
Said exhaust system comprises a plurality of venting ports 51, and venting port 51 is located on the chassis 10 and between said the 4th circumference and body of heater 20.
Polycrystalline silicon reducing furnace according to the utility model; 48 counter electrode 30 are located on the chassis 10 and are distributed in four concentric circumference respectively is on the first, second, third and the 4th circumference; Thus; Can rationally utilize heat energy, also can avoid the furnace body inside cornice to walk too much heat simultaneously, can reduce thermal losses.
As shown in Figure 2; According to embodiment of the utility model, (promptly as shown in Figure 2 from the inside to the outside second, the 4th, the 6th and the 8th circumference) along the circumferential direction is evenly distributed with six pairs, ten pairs, 14 pairs and 18 counter electrode 30 successively on the said first, second, third and the 4th circumference.On each circumference of the said first, second, third and the 4th circumference, adjacent two electrodes 30 connect through battery lead plate, become pair of electrodes thus.Thus, the control of counter electrode 30 can be simplified, and heat energy can be farthest rationally utilized.
According to some embodiment of the utility model; A plurality of nozzles 41 be distributed in respectively and be distributed in respectively on the 5th, the 6th, the 7th and the 8th circumference (promptly as shown in Figure 2 from the inside to the outside first, the 3rd, the 5th and the 7th circumference) on, said the 5th, the 6th, the 7th and the 8th circumference all with said center chassis be the center of circle and lay respectively within said first circumference and first and second circumference, the second and the 3rd circumference and the 3rd and the 4th circumference between.That is to say that the circumference at the circumference at electrode 30 places and nozzle 41 places is the space.Thus, process gas uniform distribution in reaction chamber 1020 can be made, single furnace output can be improved.
Advantageously, according to example of the utility model, the quantity of a plurality of nozzles 41 is 24, wherein is evenly distributed with eight nozzles 41 respectively being evenly distributed with respectively on four nozzles 41, the seven and the 8th circumference on the said the 5th and the 6th circumference.Thus, can make the layout of nozzle 41 more reasonable, can match with said 48 counter electrode effectively.
Further, according to concrete example of the utility model, said inlet system also comprises, air inlet endless tube 42 and 24 inlet pipe 43.
Particularly, air inlet endless tube 42 is positioned at 10 belows, chassis and is connected with external air source.
Corresponding one by one with 24 nozzles 41 respectively and 24 nozzles 41 of 24 inlet pipe 43 are connected with air inlet endless tube 42 through 24 inlet pipe 43.Thus, the air input of each nozzle 41 all is consistent, thereby can guarantees that air-flow is evenly smooth in the reaction chamber 1020.
According to embodiment of the utility model, the quantity of a plurality of venting ports 51 is eight.Advantageously, as shown in Figure 2 according to concrete example of the utility model, eight venting ports are (promptly as shown in Figure 2 the 9th circumference from the inside to the outside) along the center with chassis 10 on the circumference in the center of circle.Thus, reaction end gas is in time discharged.
As shown in Figure 1; According to embodiment of the utility model; Be formed with first cooling chamber 101 in the chassis 10; And first cooling chamber 101 has first cooling medium inlet 102 and exports the central authorities that 103, the first cooling medium inlets 102 are positioned at chassis 10 with a plurality of first heat-eliminating mediums, and outlet 103 of a plurality of first heat-eliminating medium and the corresponding one by one setting of a plurality of venting ports 51; Each first heat-eliminating medium outlet 103 is connected with first cooling tube and each venting port 51 is connected with offgas duct, and said first cooling tube is set on the said offgas duct.Thus, can simplify the design of polycrystalline silicon reducing furnace and can improve working condition, can guarantee safety in production.
According to example of the utility model; Be provided with second cooling chamber 203 and second cooling chamber 203 in the body of heater 20 and be connected with second cooling medium inlet 204 and second heat-eliminating medium outlet 205; Second cooling medium inlet 204 is positioned at the bottom of body of heater 20 and the top that second heat-eliminating medium outlet 205 is positioned at body of heater 20; Be provided with in second cooling chamber 203 a plurality of at a distance from stream baffle plates 206, a plurality of at a distance from stream baffle plates 206 in second cooling chamber 203 from the bottom to top around reaction chamber 1020 in the shape of a spiral shape distribute.Thus, working condition can be improved, safety in production can be guaranteed.
According to some embodiment of the utility model, body of heater 20 comprises the cylindrical shell 201 that is positioned at the bottom and is located at cylindrical shell 201 vertical end sockets 202 that end socket 202 is the hollow hemisphere.Thus, can reduce the rising resistance of upstream at reaction chamber 1020 tops.
Advantageously, as shown in Figure 1 according to embodiment of the utility model, also be provided with a plurality of sight glasss 60 on the body of heater 20, a plurality of sight glasss 60 uniform distribution on the short transverse of cylindrical shell 201 becomes many rows and a plurality of sight glass 60 circumferential uniform distribution along cylindrical shell 201.Thus, can in time observe the interior situation of said reaction chamber.
According to the polycrystalline silicon reducing furnace of the utility model, 48 counter electrode 30 (promptly as shown in Figure 2 from the inside to the outside second, the 4th, the 6th and the 8th circumference) on the said first, second, third and the 4th circumference along the circumferential direction are evenly distributed with six pairs, ten pairs, 14 pairs and 18 counter electrode 30 successively.The layout of this electrode 30 helps maximization and rationally utilizes heat energy, avoids the inboard cooling wall of stove tube to take away too much heat simultaneously, reduces thermal losses.The the 5th, the 6th, the 7th and the 8th circumference (promptly as shown in Figure 2 from the inside to the outside first, the 3rd, the 5th and the 7th circumference) on evenly be provided with four, four, eight and eight nozzles respectively; Along being that (promptly as shown in Figure 2 the 9th circumference from the inside to the outside) evenly is provided with eight venting ports 51 with the center on chassis 10 on the circumference in the center of circle; Central air outlet has been cancelled in such design; Avoided central air outlet neighbouring, improved the production efficiency of lower regions in the reaction chamber 1020 owing to the flow dead that builds the pressure and cause.The structure of using the outer ring to give vent to anger when making in the reduction furnace airflow circulation, is directly discharged from the outer ring, avoids byproduct of reaction to get back to the air-flow rising area of central authorities, causes the material back mixing.The end socket 202 on body of heater 10 tops is a hemispherical head.Hemispherical head stressed good, spherical shell stress is little, compares with cylindrical shell 201, and the more other forms of end socket of thickness is attenuate suitably.Advanced analog calculation; The upstream of the bottom of dome head reduces at the rising resistance at top; Gas speed obviously increases about height 2400-3200mm, helps solving the serious problem of silicon rod top cauliflower, and silicon rod bridging quality is partly had certain improvement effect; This characteristic shows more obvious on the inner ring silicon rod, and the general ellipsoidal head of silicon rod surface gas speed ratio has the lifting about 10%.
Polycrystalline silicon reducing furnace according to the utility model; Through scantlings of the structure to chassis of polycrystalline silicon reducing furnace 10 and body of heater 20; And after the distribution of electrode 30, inlet mouth 41 and venting hole 51 is optimized design; Per kilogram polysilicon energy consumption can reduce 25%-35%, and single furnace output can reach the 10-12 ton, can effectively reduce the production of polysilicon cost.
In the description of this specification sheets, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means the concrete characteristic, structure, material or the characteristics that combine this embodiment or example to describe and is contained among at least one embodiment or example of the utility model.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete characteristic, structure, material or the characteristics of description can combine with suitable manner in any one or more embodiment or example.
Although illustrated and described the embodiment of the utility model; Those having ordinary skill in the art will appreciate that: under the situation of principle that does not break away from the utility model and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, the scope of the utility model is limited claim and equivalent thereof.
Claims (10)
1. a polycrystalline silicon reducing furnace is characterized in that, comprising:
Chassis and body of heater, said body of heater are connected on the said chassis and between said body of heater and said chassis and limit reaction chamber;
48 counter electrode; Said 48 counter electrode are located on the said chassis and are distributed in the first, second, third and the 4th circumference respectively, and the said first, second, third and the 4th circumference is for being the concentric circumference that the center of circle and radius increase successively with said center chassis;
Inlet system, said inlet system comprise a plurality of nozzles that are located at middle part, said chassis; With
Exhaust system, said exhaust system comprises a plurality of venting ports, said venting port is located on the said chassis and between said the 4th circumference and said body of heater.
2. polycrystalline silicon reducing furnace according to claim 1 is characterized in that, on the said first, second, third and the 4th circumference, along the circumferential direction is evenly distributed with six pairs, ten pairs, 14 pairs and 18 counter electrode successively.
3. polycrystalline silicon reducing furnace according to claim 1; It is characterized in that; Said a plurality of nozzle is distributed in respectively on the 5th, the 6th, the 7th and the 8th circumference, said the 5th, the 6th, the 7th and the 8th circumference all with said center chassis be the center of circle and lay respectively within said first circumference and first and second circumference, the second and the 3rd circumference and the 3rd and the 4th circumference between.
4. polycrystalline silicon reducing furnace according to claim 3; It is characterized in that; The quantity of said a plurality of nozzles is 24, wherein on the said the 5th and the 6th circumference, is evenly distributed with four nozzles respectively, is evenly distributed with eight nozzles on the 7th and the 8th circumference respectively.
5. polycrystalline silicon reducing furnace according to claim 4 is characterized in that, said inlet system also comprises:
Air inlet endless tube, said air inlet endless tube are positioned at below, said chassis and are connected with external air source;
24 inlet pipe, said 24 inlet pipe are connected with said air inlet endless tube through said 24 inlet pipe with corresponding one by one and said 24 nozzles of said 24 nozzles respectively.
6. polycrystalline silicon reducing furnace according to claim 1 is characterized in that, the quantity of said a plurality of venting ports is eight.
7. polycrystalline silicon reducing furnace according to claim 1; It is characterized in that; Be formed with first cooling chamber in the said chassis; And said first cooling chamber has first cooling medium inlet and the outlet of a plurality of first heat-eliminating medium, and said first cooling medium inlet is positioned at the central authorities on said chassis, and said a plurality of first heat-eliminating medium outlet and the corresponding one by one setting of said a plurality of venting ports; Each said first heat-eliminating medium outlet is connected with first cooling tube and each said venting port is connected with offgas duct, and said first cooling tube is set on the said offgas duct.
8. polycrystalline silicon reducing furnace according to claim 1; It is characterized in that; Be provided with second cooling chamber and said second cooling chamber in the said body of heater and be connected with second cooling medium inlet and the outlet of second heat-eliminating medium; Said second cooling medium inlet is positioned at the bottom of said body of heater and the top that the outlet of said second heat-eliminating medium is positioned at said body of heater; Be provided with in said second cooling chamber a plurality of at a distance from the stream baffle plates, said a plurality of at a distance from the stream baffle plates in said second cooling chamber from the bottom to top around said reaction chamber in the shape of a spiral shape distribute.
9. polycrystalline silicon reducing furnace according to claim 1 is characterized in that, said body of heater comprises cylindrical shell that is positioned at the bottom and the end socket that is located at said cylinder top, and said end socket is the hollow hemisphere.
10. polycrystalline silicon reducing furnace according to claim 9; It is characterized in that; Also be provided with a plurality of sight glasss on the said body of heater, said a plurality of sight glasss uniform distribution on the short transverse of said cylindrical shell becomes the circumferential uniform distribution of the said cylindrical shell of many rows and said a plurality of sight glasss edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202322001U CN202164127U (en) | 2011-07-01 | 2011-07-01 | Polysilicon reducing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202322001U CN202164127U (en) | 2011-07-01 | 2011-07-01 | Polysilicon reducing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202164127U true CN202164127U (en) | 2012-03-14 |
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ID=45799968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202322001U Withdrawn - After Issue CN202164127U (en) | 2011-07-01 | 2011-07-01 | Polysilicon reducing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202164127U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102351192A (en) * | 2011-07-01 | 2012-02-15 | 中国恩菲工程技术有限公司 | Polysilicon reducing furnace |
| CN113912065A (en) * | 2021-12-02 | 2022-01-11 | 内蒙古新特硅材料有限公司 | Reduction furnace |
-
2011
- 2011-07-01 CN CN2011202322001U patent/CN202164127U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102351192A (en) * | 2011-07-01 | 2012-02-15 | 中国恩菲工程技术有限公司 | Polysilicon reducing furnace |
| CN113912065A (en) * | 2021-12-02 | 2022-01-11 | 内蒙古新特硅材料有限公司 | Reduction furnace |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120314 Effective date of abandoning: 20130717 |
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| RGAV | Abandon patent right to avoid regrant |