CN202252823U - High-purity krypton and xenon filling system - Google Patents
High-purity krypton and xenon filling system Download PDFInfo
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- CN202252823U CN202252823U CN2011203498400U CN201120349840U CN202252823U CN 202252823 U CN202252823 U CN 202252823U CN 2011203498400 U CN2011203498400 U CN 2011203498400U CN 201120349840 U CN201120349840 U CN 201120349840U CN 202252823 U CN202252823 U CN 202252823U
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Abstract
The utility model provides a high-purity krypton and xenon filling system comprising a refrigerating mechanism. The refrigerating mechanism comprises a refrigerating vaporization bottle and a refrigerating device; the refrigerating vaporization bottle is positioned in the refrigerating device; an inlet of the refrigerating vaporization bottle is communicated with a pure krypton/pure xenon feeding pipeline and a pure krypton/pure xenon supplying pipeline respectively by a tee joint; the supplying pipeline is provided with a plurality of gas conveying branch pipes used for connecting a gas filling bottle; and stop valves are installed on the gas conveying branch pipes. According to the high-purity krypton and xenon filling system, krypton/xenon in the refrigerating vaporization bottle is conveyed to each gas conveying branch pipe by utilizing the increased pressure after solid krypton and xenon in the refrigerating vaporization bottle are vaporized, and then is filled in a gas bottle, so that the high purity of the krypton/xenon entering each gas filling bottle when the volume flow of the krypton/xenon is small can be ensured.
Description
Technical field
The utility model relates to a kind of gas filling device, relates in particular to a kind of high-purity, high-purity krypton gas of few flow and the charging system of high-purity xenon.
Background technique
Krypton gas, xenon not only are widely used in each great industrial fields such as welding, space technology and nuclear energy as shielding gas.And at daily life field, it also is widely used in electronics industry, electro-optical source industry, gas laser and the plasma jet, can be used as the bulb blanketing gas like krypton gas, xenon, effectively improves luminance, working life and the stability of bulb; At medicine and hygiene fields, krypton gas can be used for measure cerebral blood flow, and xenon also can be used as a kind of deep anaesthesia agent of being free from side effects, the contrast medium of shadowgraph.And along with industrial technology constantly develops, krypton gas, xenon are being brought into play more and more important effect.Some unique properties that these rare gas have make krypton, xenon be widely used in various industry.
Yet as rare gas, krypton gas, the aerial content of xenon and limited.Krypton content in air only accounts for 1.14 * 10
-6, xenon content in air only accounts for 0.09 * 10
-6And in existing krypton gas and the xenon extraction process, the high-purity krypton that air separation equipment extracts and the volume flow of high-purity xenon are very low.With a cover 60000m
3The O of/h flow
2Air separation equipment is an example, and the volume flow of high-purity krypton and high-purity xenon is respectively 0.268m
3/ h and 0.021m
3/ h.The nominal pressure of krypton gas cylinder is 15MPa, and the nominal pressure of xenon bottle is 5.5MPa.In the cylinder filling process,, will have a strong impact on the service property (quality) of gas if gas is secondary polluted.
In present technology, the common employing membrane compressor that fills of high-purity, few flow gas pressurizes, and gas is charged into gas cylinder.Because the minimum volume flow of membrane compressor receives certain restriction; Bypass line and pressure regulating valve are set on membrane compressor usually; With a part of gas after the pressurization through returning the suction port of membrane compressor after the bypass line decompression, to strengthen the gas volume flow of suction port.This cylinder filling method not only wastes energy, and gas can be secondary polluted.
The model utility content
The utility model provides the charging system of a kind of high-purity krypton gas and high-purity xenon; Its purpose is to overcome above-mentioned existing technology krypton and the defective of xenon in filling bottle process; Fill in bottle process at high-purity krypton gas and high-purity xenon; Guarantee that high-purity krypton gas and xenon amount do not suffer a loss, guaranteed the purity of high-purity krypton gas and xenon simultaneously.
The charging system of a kind of high-purity krypton gas of the utility model and high-purity xenon is realized purpose through following technological scheme:
The charging system of a kind of high-purity krypton gas and high-purity xenon wherein, comprises freezing mechanism; Said freezing mechanism comprises a freezing vaporization bottle and a refrigerating plant; Said freezing vaporization bottle is arranged in said refrigerating plant; The import of said freezing vaporization bottle communicates with pure krypton/pure xenon admission line and air duct respectively through threeway; Said air duct is provided with many gas transmission arms that are used to connect gas filling bottle; On the described gas transmission arm of each bar stop valve is housed all.High-purity gas gets into the freezing vaporization bottle that is immersed in refrigerating plant, and at low temperatures, gas changes into solid-state in freezing vaporization bottle.Then, freezing vaporization bottle is removed said refrigerating plant, and suitably heat, the solid state medium in the freezing vaporization bottle is vaporized fast, and high-purity gas is charged in the gas cylinder to the pressure reduction that gaseous state produced by solid-state at the outer surface of vaporization bottle.Wherein, the preferential employing geometric volume of said freezing vaporization bottle is 2L or 5L, and nominal pressure is about 20MPa, and operating temperature is-196 ℃ to+60 ℃, and material is the vaporization bottle of aluminum alloy.
The above-mentioned high-purity krypton and the charging system of high-purity xenon wherein, all are equipped with a gas filling bottle on every said gas transmission arm; And the inner wall surface of said gas filling bottle is through Nickel Plating Treatment.
The above-mentioned high-purity krypton gas and the charging system of high-purity xenon wherein, also comprise vacuum pump, and said vacuum pump and said air duct join.
The above-mentioned high-purity krypton gas and the charging system of high-purity xenon, wherein, described refrigerating plant is for being equipped with liquid nitrogen, the Dewar type container of open upper end.In normal pressure liquid nitrogen temperature-196 ℃, and the fusing point of xenon-111.9 ℃, boiling point is (107.1 ± 3) ℃; The fusing point of krypton gas is-156.6 ℃, and boiling point is (152.3 ± 1.0) ℃.The low temperature of liquid nitrogen is enough to krypton gas and xenon are solidified, and after moving apart liquid nitrogen, suitably heats at freezing vaporization bottle surface; The krypton gas and the xenon of solid state are vaporized rapidly; And boost pressure extrudes gas thus, sends in the gas pipeline, and gets in each bar gas transmission arm.
The above-mentioned high-purity krypton gas and the charging system of high-purity xenon, wherein, said refrigerating plant below is provided with a lift that is used to adjust the position height of said refrigerating plant.
The above-mentioned high-purity krypton gas and the charging system of high-purity xenon wherein, also comprise a krypton gas/xenon recovering mechanism, and said krypton gas/xenon recovering mechanism communicates with said air duct.
The above-mentioned high-purity krypton gas and the charging system of high-purity xenon wherein, on air duct, between said freezing vaporization bottle and said krypton gas/xenon recovering mechanism, are provided with the concentration analysis testing apparatus.And on said snorkel 12, be positioned at the said gas transmission arm of each bar 5 upper reaches (the upstream and downstream here refer to the gas flow order that extrudes in the freezing vaporization bottle 1 described in the gas replenishment process) also to be provided with a safety valve 27 and a stop valve 23; On described pure krypton/pure xenon admission line and air duct, be respectively equipped with pressure gauge, as safety installation.
The above-mentioned high-purity krypton gas and the charging system of high-purity xenon wherein, also comprise air conduit, and said air conduit one end is the mouth of heating, the said mouthful inlet of aiming at said freezing vaporization bottle that heats; The said air conduit the other end connects gas source; And said air conduit is provided with stop valve.The said mouthful inlet of aiming at said freezing vaporization bottle that heats heats continuously.And described gas source can be the air that adopts compressor etc. to assemble, or other are used for the gas that the inlet to said freezing vaporization bottle heats, like nitrogen etc.
The above-mentioned high-purity krypton gas and the charging system of high-purity xenon wherein, are equipped with a joint in the import of said freezing vaporization bottle, and said joint one end is fixedly connected with the bottleneck of said freezing vaporization bottle; The other end is connected with the inlet pipeline of said freezing vaporization bottle.
The above-mentioned high-purity krypton gas and the charging system of high-purity xenon, wherein, said joint outer surface is provided with two sections thread sections and two sections straight lengths; Described two ends thread section and two sections straight lengths are spaced apart.
Adopt the advantage of the charging system of a kind of high-purity krypton gas of the utility model and high-purity xenon to be:
The charging system of a kind of high-purity krypton gas of the utility model and high-purity xenon its utilize the pressure after solid-state krypton gas in the freezing vaporization bottle/xenon vaporization to make the krypton gas/xenon in the freezing vaporization bottle flow into each arm; Charge in the gas cylinder again; When having guaranteed that the little volume flow of krypton gas/xenon gets into gas filling bottle, get into the high-purity of krypton gas/xenon in each gas filling bottle.
2. the charging system of a kind of high-purity krypton gas of the utility model and high-purity xenon can be controlled the up-down of cylindrical Dewar through lift, thereby controls the immersion of freezing vaporization bottle or leave Dewar type container, and technological operation is simple; The pipeline that is connected with gas cylinder is provided with the purity analysis of krypton gas or xenon and surveys device, has guaranteed that impure krypton and impure xenon in time reclaim, thereby has guaranteed to get into the purity requirement of krypton gas/xenon in the gas cylinder.
Description of drawings
Fig. 1 is the structural representation of the charging system of the high-purity krypton of the utility model and high-purity xenon;
Fig. 2 is the structural representation of joint of the charging system of the high-purity krypton of the utility model and high-purity xenon.
Embodiment
As shown in Figure 1, the utility model provides the charging system of a kind of high-purity krypton gas and high-purity xenon, comprises freezing mechanism; Said freezing mechanism comprises 1 and refrigerating plant 2 of a freezing vaporization bottle; Said refrigerating plant 2 is a liquid nitrogen bath that liquid nitrogen is housed.When the said freezing vaporization bottle 1 that pure krypton gas/xenon is housed, when being immersed in the said refrigerating plant 2, the pure krypton gas/xenon in the said freezing vaporization bottle 1 is a solid, shaped (xenon fusing point-111.9 ℃; Krypton gas fusing point-156.6 ℃; The boiling point of nitrogen-195.8 ℃).Said liquid nitrogen bath is the Dewar type container of an open upper end, and said Dewar type container comprises inner bag and shell, is vacuum insulation between said inner bag and the shell, can effectively be incubated like this.
1 import of said freezing vaporization bottle is connected with pure krypton/pure xenon admission line 11 and air duct 12 through threeway and communicates; And said air duct 12 is provided with many gas transmission arms 5, and the end of said gas transmission arm 5 is through metallic hose, connection gas filling bottle 4.The inner wall surface of described a plurality of gas filling bottle 4 is preserved thereby be more conducive to gas through Nickel Plating Treatment.A plurality of like this gas filling bottles 4 are connected on the said air duct 12 through gas transmission arm 5 separately side by side, are used to fill krypton gas/xenon; Described pure krypton/pure xenon admission line 11 is used for charging into pure krypton gas/xenon to said freezing vaporization bottle 1.When the said freezing vaporization bottle 1 that pure krypton gas/xenon is housed; When being immersed in the said refrigerating plant 2; Pure krypton gas/xenon in the said freezing vaporization bottle 1 becomes solid, after said freezing vaporization bottle 1 leaves said refrigerating plant 2, waters the outer surface that drenches freezing vaporization bottle 1 with cold water or warm water; Krypton gas/xenon in the freezing vaporization bottle 1 gasifies rapidly; Supercharging is overflowed from bottle, and gets into said air duct 12 by the inlet pipeline 13 of said freezing vaporization bottle 1, is sent in each gas filling bottle 4 by the said gas transmission arm 5 of each bar again.Wherein, on said pure krypton/pure xenon admission line 11, be provided with stop valve 22, and all be provided with stop valve 21 on the said gas transmission arm 5 of each bar, with flowing of pure krypton/pure xenon in the pilot line.It should be noted that as shown in Figure 1ly, on said pure krypton/pure xenon admission line 11 and air duct 12, respectively be provided with a pressure gauge 82 and 81, it is used for monitoring the pipeline variation in pressure, and the assurance system normally moves; In addition; On said snorkel 12; Be positioned at the said gas transmission arm of each bar 5 upper reaches (wherein; The upstream and downstream here refer to the gas flow order of emitting in the freezing vaporization bottle 1 described in the gas replenishment process) also be provided with a safety valve 27 and a stop valve 23, said stop valve 23 can be used for overall control by the unlatching of the krypton gas/pure xenon that leads to each said gas transmission arm 5 in the said freezing vaporization bottle 1 or close; Safety valve 27 then can prevent superpressure and misoperation in each root pipeline in the gas replenishment process, has guaranteed manufacturing operation safety.These valves have all improved Security and the flexibility of operation of the charging system of the high-purity krypton of the utility model and high-purity xenon greatly.
The charging system of the high-purity krypton of the utility model and high-purity xenon also comprises vacuum pump 9; Said vacuum pump 9 joins with said air duct 12; And communicate with institute freezing vaporization bottle 1, vacuumize replacement Treatment with vacuum pump 9 and 25 pairs of whole systems of stop valve and (be generally and be evacuated to 5 * 10
-2Pa).And said vacuum pump 9 is positioned at said air duct 12 ends; Be positioned at the downstream of the said gas transmission arm 5 of each bar; It can be used for the xenon/krypton gas after the vaporization in the said freezing vaporization bottle 1 is introduced in the said air duct 12; And through in said gas transmission arm 21 each gas cylinders 4 of entering of each bar, thereby increase charging efficiency.On said vacuum pump inlet pipeline, be provided with stop valve 25 equally, be used for controlling of the control of said vacuum pump 9, increase operating flexibility for each pipeline gas flow.
Said refrigerating plant 2 (among the figure, being the Dewar type container that liquid nitrogen is housed) below is provided with a lift 3 that is used to adjust said refrigerating plant 2 position height.Said freezing vaporization bottle 1 is fixed; Can effectively control the height of said refrigerating plant 2 through said lift 3; Thereby control said freezing vaporization bottle 1 entering or break away from said refrigerating plant 2, and get into the position in the said refrigerating plant 2, improve the flexibility of operation.
A joint 7 has been installed by inlet at said freezing vaporization bottle 1, is used for said freezing vaporization bottle 1 and is connected with its inlet pipeline 13.As shown in Figure 2; Said joint 7 preferred structures do, the outer surface of said joint 7 is provided with the two ends thread section, and thread section 71 and thread section 73 are (wherein; Said thread section 71 is not necessarily consistent with thread section 73 sizes); And two sections straight lengths, straight length 72 and straight length 74 (wherein, said straight length 71 is not necessarily consistent with straight length 73 sizes); Described two ends thread section 71 and 73 and two sections straight lengths 72 and 74 are spaced apart; Like figure; The said thread section 71 that wherein is positioned at said joint 7 one ends is used to connect freezing vaporization bottle 1, and the straight tube end 74 that is positioned at said joint 7 the other ends can link to each other with inlet pipeline 13 through technologies such as welding.Can also be chosen in simultaneously a fixed plate 15 is installed on lift 3 supports; And on fixed plate 15, offer the aperture that is complementary with said joint screw thread section 73 structures; Thread section 73 passes the aperture on the fixed plate 15; And in said aperture upper and lower sides is respectively installed a nut 75; Said joint 7 is fixedly connected with said fixed plate 15, (also can directly on said fixed plate 15, offer the screw that is complementary with said thread section 73 structures, said joint 7 is fixedly connected with fixed plate 15) thus said freezing vaporization bottle 1 is fixing.Through having fixed joint 7 position of freezing vaporization bottle 1 is fixed.
During use:
Step 1: before the gas filling, close stop valve 22, guarantee that this system does not leak after, vacuumize replacement Treatment with vacuum pump 9 and 25 pairs of whole systems of stop valve and (be generally and be evacuated to 5 * 10
-2Pa);
Step 2: with being full of liquid nitrogen in the described refrigerating plant 2; With lift 3 with refrigerating plant 2 to suitable height; Guarantee that freezing vaporization bottle 1 (said freezing vaporization bottle 1 adopts 2L or 5L, and nominal pressure is 20MPa, adopts aluminum alloy to process) all is immersed in the liquid nitrogen;
Step 3: open stop valve 22; Close stop valve 23, pure krypton/pure xenon gets in the freezing vaporization bottle 1 through stop valve 22 and pure krypton/pure xenon admission line 11, and they change into solid-state under the low temperature of liquid nitrogen; When the pressure of the pure krypton of import/pure xenon admission line 11 go to zero (pressure gauge 82) that descend; And notice that the liquid-nitrogen boiling phenomenon of observing in the refrigerating plant 2 stops, and explain that in the freezing vaporization bottle 1 all be solid-state krypton or solid xenon, should stop to import krypton gas or xenon;
Step 4: open stop valve 23; Remove refrigerating plant 2 with lift 3; The outer wall surface that adopts cold water or warm water to water the freezing vaporization bottle 1 of pouring vaporizes the interior solid-state krypton/xenon of freezing vaporization bottle, through stop valve 23 fast; Air duct 12 gets into gas cylinder 4 through stop valve 21, gas transmission arm 5 backs respectively again.Monitor force table 81 shows pressure to the certain value (like the krypton storage pressure to 15MPa, xenon bottle pressure to 5.5MPa time) of said gas filling bottle, and freezing vaporization bottle 1 should stop vaporization.
On embodiment 1 basis, increase a krypton gas/xenon recovering mechanism 10, be used for recovery channel moderate purity krypton gas/xenon not up to standard.Like figure, said krypton gas/xenon recovering mechanism 10 communicates with said snorkel 12, and said recovering mechanism 10 is preferably mounted at the downstream of said many gas pipelines 5.On said air duct 12; Between said freezing vaporization bottle 1 and said krypton gas/xenon recovering mechanism 10, be provided with concentration analysis measuring point 6; The concentration analysis testing apparatus that connects xenon/krypton gas in the air duct 12 on the said concentration analysis measuring point 6; Be used for testing the concentration of the krypton gas/xenon that gets into the said gas transmission arm 4 of each bar,, then the gas in the said air duct 12 introduced in said krypton gas/xenon recovering mechanism 10 if the gas concentration in the said air duct 12 is defective.Equally, be provided with stop valve 24 at the inlet pipeline place of said krypton gas/xenon recovering mechanism 10.
During use; In the step 4 of the foregoing description 1, when the solid xenon/krypton gas in the said freezing vaporization bottle 1 gets in the said air duct 12, during through said concentration analysis measuring point 6; Detect to such an extent that krypton gas/xenon purity meets the requirements of, then gas is got in each bar gas transmission arm 5.If concentration is defective, then open stop valve 24, krypton gas/xenon that concentration is not up to standard is sent in said krypton gas/xenon recovering mechanism 10.And after whole inflation is accomplished, gas unnecessary in the pipeline can be sent in said krypton gas/xenon recovering mechanism 10 equally.
On the basis of embodiment 1 or 2, in the charging system of said high-purity krypton and high-purity xenon, increase air conduit 14, said air conduit 14 1 ends connect gas source for the mouth 16 of heating, the other end; Said pipeline 14 heat mouthfuls 16 aim at (note, be not fixedly connected) said freezing vaporization bottle 1 an inlet, it can be heated to the inlet of said freezing vaporization bottle 1 continuously, thereby prevents to be frozen near the bottleneck of freezing vaporization bottle 1; Said air conduit 14 the other ends connect gas source, are used to introduce normal temperature air or nitrogen.On said air conduit 14, be provided with stop valve, be used for control air or nitrogen and feed.
Use is, in the step 3 and 4 of said embodiment's 1 using process, opens the stop valve 26 of said air conduit 14, with heating continuously near normal temperature air or the import of nitrogen facing to freezing vaporization bottle 1.
More than the specific embodiment of the utility model is described in detail, but it is just as example, the utility model is not restricted to the specific embodiment of above description.To those skilled in the art, any equivalent modifications that the utility model is carried out with substitute also all among the category of the utility model.Therefore, equivalents and the modification under aim that does not break away from the utility model and scope, done all should be encompassed in the scope of the utility model.
Claims (10)
1. the charging system of high-purity krypton gas and high-purity xenon is characterized in that, comprises freezing mechanism; Said freezing mechanism comprises a freezing vaporization bottle and a refrigerating plant; Said freezing vaporization bottle is arranged in said refrigerating plant; The import of said freezing vaporization bottle communicates with pure krypton/pure xenon admission line and air duct respectively through threeway; Said air duct is provided with many gas transmission arms that are used to connect gas filling bottle; On the described gas transmission arm of each bar stop valve is housed all.
2. the charging system of high-purity krypton gas according to claim 1 and high-purity xenon is characterized in that, on every said gas transmission arm, a gas filling bottle is installed all; And the inner wall surface of said gas filling bottle is through Nickel Plating Treatment.
3. the charging system of high-purity krypton gas according to claim 1 and high-purity xenon is characterized in that, also comprises vacuum pump, and said vacuum pump and said air duct join.
4. the charging system of high-purity krypton gas according to claim 1 and high-purity xenon is characterized in that, described refrigerating plant is for being equipped with liquid nitrogen, the Dewar type container of open upper end.
5. the charging system of high-purity krypton gas according to claim 1 and high-purity xenon is characterized in that, said refrigerating plant below is provided with a lift that is used to adjust the position height of said refrigerating plant.
6. the charging system of high-purity krypton gas according to claim 1 and high-purity xenon is characterized in that, also comprises a krypton gas/xenon recovering mechanism, and said krypton gas/xenon recovering mechanism communicates with said air duct.
7. the charging system of high-purity krypton gas according to claim 1 and high-purity xenon is characterized in that, on air duct, between said freezing vaporization bottle and said krypton gas/xenon recovering mechanism, is provided with the concentration analysis testing apparatus.
8. the charging system of high-purity krypton gas according to claim 1 and high-purity xenon is characterized in that, also comprises air conduit, and said air conduit one end is the mouth of heating, the said mouthful inlet of aiming at said freezing vaporization bottle that heats; The said air conduit the other end connects gas source; And said air conduit is provided with stop valve.
9. the charging system of high-purity krypton gas according to claim 1 and high-purity xenon is characterized in that, in the import of said freezing vaporization bottle a joint is housed, and said joint one end is fixedly connected with the bottleneck of said freezing vaporization bottle; The other end is connected with the inlet pipeline of said freezing vaporization bottle.
10. the charging system of high-purity krypton gas according to claim 9 and high-purity xenon is characterized in that, said joint outer surface is provided with two sections thread sections and two sections straight lengths; Described two ends thread section and two sections straight lengths are spaced apart.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203498400U CN202252823U (en) | 2011-09-19 | 2011-09-19 | High-purity krypton and xenon filling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203498400U CN202252823U (en) | 2011-09-19 | 2011-09-19 | High-purity krypton and xenon filling system |
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| CN202252823U true CN202252823U (en) | 2012-05-30 |
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| CN103486434A (en) * | 2013-09-16 | 2014-01-01 | 佛山市华特气体有限公司 | Gas transferring device |
| CN103775822A (en) * | 2014-02-12 | 2014-05-07 | 北京空间机电研究所 | Full-automatic high-precision super-pure gas filling system |
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| CN108548091A (en) * | 2018-04-18 | 2018-09-18 | 衢州杭氧特种气体有限公司 | A kind of krypton, xenon fill technique and its production line |
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| CN103486434A (en) * | 2013-09-16 | 2014-01-01 | 佛山市华特气体有限公司 | Gas transferring device |
| CN103486434B (en) * | 2013-09-16 | 2015-07-15 | 佛山市华特气体有限公司 | Gas transferring device |
| CN103775822A (en) * | 2014-02-12 | 2014-05-07 | 北京空间机电研究所 | Full-automatic high-precision super-pure gas filling system |
| CN103775822B (en) * | 2014-02-12 | 2015-11-11 | 北京空间机电研究所 | A kind of hyperpure gas full-automatic high precision charging system |
| CN105757448B (en) * | 2016-04-07 | 2018-11-16 | 核工业理化工程研究院 | The accurate subpackage apparatus of gas |
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| CN107726042A (en) * | 2017-09-06 | 2018-02-23 | 武汉钢铁集团气体有限责任公司 | A kind of continuous fill system of gas and its method |
| CN108204521A (en) * | 2018-01-30 | 2018-06-26 | 邯郸钢铁集团有限责任公司 | High-purity rare gas gas cylinder pretreatment system and preprocess method |
| CN108204521B (en) * | 2018-01-30 | 2023-06-30 | 邯郸钢铁集团有限责任公司 | Pretreatment system and pretreatment method for high-purity rare gas cylinder |
| CN108548091A (en) * | 2018-04-18 | 2018-09-18 | 衢州杭氧特种气体有限公司 | A kind of krypton, xenon fill technique and its production line |
| CN109268675A (en) * | 2018-09-28 | 2019-01-25 | 杭州杭氧股份有限公司 | A kind of high-purity isotope filling equipment |
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| CN114210272A (en) * | 2021-09-16 | 2022-03-22 | 苏州思萃同位素技术研究所有限公司 | Preparation device and preparation method of purified carbon dioxide |
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