CN103775822A - Full-automatic high-precision super-pure gas filling system - Google Patents
Full-automatic high-precision super-pure gas filling system Download PDFInfo
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- CN103775822A CN103775822A CN201410049129.1A CN201410049129A CN103775822A CN 103775822 A CN103775822 A CN 103775822A CN 201410049129 A CN201410049129 A CN 201410049129A CN 103775822 A CN103775822 A CN 103775822A
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Abstract
The invention provides a full-automatic high-precision super-pure gas filling system. A full-automatic high-precision (quality precision superior to 0.5 percent) 6N super-pure gas filling system is adopted, and comprises a super-pure gas source, a super-pure gas storage tank, a vacuum filling chamber, a pipeline vacuumizing device, a vacuum chamber vacuumizing device, a waste recovering and treating device, a stop valve, a heater band, a refrigerating machine, a cold drawing plate, a heating cage, a Coriolis flowmeter, a pressure sensor, a temperature sensor, and an operating console. All pipelines of the system and the inner wall of a container are capable of heating and degassing and repeatedly replacing and cleaning, a filling product is placed under a vacuum environment for filling so that external impurity gases are prevented from reversely permeating, and the super-high purity of the gas is ensured; and temperatures of all parts of the filling system are accurately controlled through a heating control temperature device and a refrigerating device, pressures and working medium flows in all places of a filling pipeline are maintained constant, and high filling mass precision of the gas is finally realized by combining the high-measurement precision Coriolis flowmeter and a full-automatic filling procedure.
Description
Technical field
The invention belongs to industry manufacture field, relate to a kind of gas filling technology, the high quality precision (being better than 0.5%) that can meet 6N hyperpure gas fills.
Background technique
In recent years, hyperpure gas constantly increases in the demand in the field such as microelectronic, thermal conduction study.In intergrated circuit industry, from preparing many product silicon to final annealing process, in the whole process that IC makes, all use hyperpure gas, if contain the hydrocarbon of a few millionths or the impurity of oxygen in gas, just on product sheet, cause pit, affect the quality of later process.Heat-pipe technology field in thermal conduction study, internal working medium purity requirement is very high, if there is impurity non-condensible gas, will directly affect its temperature conductivity and working life.Inside heat pipe working medium fills too much or very few its heat output that all can affect in addition, even cannot start, therefore its working medium is filled to quality required precision high especially, take space flight with micro-, small-sized aluminium ammonia conduit heat pipe as example, it definitely fills quality magnitude is gram level, fills be not less than ± 0.5g of precision General Requirements.
Therefore in hyperpure gas using process, filling of gas is the operation of most critical, if charging system or to fill the design of technological process unreasonable will cause gas purity or fill quality precision reducing greatly.At present gas filling system in the industry or pay attention to fill purity or pay attention to fill quality precision, and filling process mostly is manual operation, lacks that hyperpure gas is full-automatic, highi degree of accuracy fills technology.
Summary of the invention
The technical problem that the present invention solves is: overcome the deficiencies in the prior art, a kind of hyperpure gas full-automatic high precision charging system is proposed, realize automatically filling of gas, can effectively guarantee the purity that fills of 6N hyperpure gas, can make gas filling quality precision reach 0.5% simultaneously.
Technological scheme of the present invention is: a kind of hyperpure gas full-automatic high precision charging system, comprises that ultrapure source of the gas, hyperpure gas storage tank, vacuum fill chamber, pipeline vacuum pumping device, vacuum chamber vacuum pumping, waste gas recycling and processing device, heating tape, refrigerator, pressure transducer, temperature transducer; Ultrapure source of the gas is connected with hyperpure gas storage tank by tonifying Qi pipeline, and to make-up gas in hyperpure gas storage tank; Hyperpure gas storage tank is connected with the vacuum chamber of filling by loading line, for vacuum fills indoor product inflation to be charged; One end of pipeline vacuum pumping device is connected to respectively tonifying Qi pipeline, hyperpure gas storage tank, loading line by exhaust pipe, the other end of pipeline vacuum pumping device is connected to waste gas recycling and processing device, the gas of extraction is delivered to waste gas recycling and processing device, and carry out nothing by waste gas recycling and processing device and poison processing; Vacuum chamber vacuum pumping, refrigerator are all connected with the vacuum chamber of filling, and fill room temperature for the vacuum chamber of filling vacuumizes processing and controls vacuum; Tonifying Qi pipeline, hyperpure gas storage tank, loading line and exhaust pipe are all connected with waste gas recycling and processing device by multiple pressure pipe road, and each pipeline or container are replaced to cleaning; Hyperpure gas storage tank is also connected to waste gas recycling and processing device by overvoltage protection pipeline, for the superpressure unloading of system; Each pipeline disposed outside heating tape and temperature transducer, for carrying out bake out to pipeline; The pressure transducer for monitoring state is equipped with on hyperpure gas storage tank and each pipeline; In described multiple pressure pipe road, be furnished with multiple pressure valve, in described tonifying Qi pipeline, exhaust pipe and loading line, be furnished with stop valve, in described overvoltage protection pipeline, be furnished with safety valve.
Described loading line comprises the 5th stop valve, the 6th stop valve, the 7th stop valve, the 3rd pressure gauge, the 4th pressure gauge, the 5th pressure gauge and Coriolis flowmeter; The gas of hyperpure gas storage tank output arrives vacuum successively and fills chamber after the 5th stop valve, Coriolis flowmeter, the 6th stop valve, the 7th stop valve, the 3rd pressure gauge is housed between the 5th stop valve and Coriolis flowmeter, between Coriolis flowmeter and the 6th stop valve, the 4th pressure gauge is housed, between the 6th stop valve and the 7th stop valve, the 5th pressure gauge is housed; Monitor and control hyperpure gas storage tank and fill to vacuum pressure and the flow of the gas of indoor output of products to be filled by Coriolis flowmeter and the 3rd pressure gauge, the 4th pressure gauge, the 5th manometric value.
Described vacuum fills indoor top the heating cage for product to be filled being carried out to bake out is installed; Vacuum fills bottom, chamber cold drawing is installed, and cold drawing is connected to external refrigeration machine, and is the cooling of the vacuum chamber of filling, and then the product to be filled being opposite to above cold drawing carries out cooling; Vacuum fills chamber interior temperature transducer is also installed, and temperature sensor probe is sticky to be posted on product to be filled, detects in real time product temperature to be filled.
Described stop valve, multiple pressure valve are air-operated solenoid valve.
Also comprise operating console; Described Coriolis flowmeter, pressure transducer, temperature transducer, each stop valve, pipeline vacuum pumping device, vacuum chamber vacuum pumping are all by the real-time display measurement value of operating console or control switch, start-stop.
The present invention's beneficial effect is compared with prior art:
(1) tonifying Qi pipeline of the present invention, hyperpure gas storage tank, loading line, exhaust pipe and product to be filled all have bake out function, and all can repeatedly replace cleaning, and the high-purity that has realized hyperpure gas fills.
(2) product that fills of the present invention is placed in vacuum and fills indoor filling, and has avoided the phenomenon of foreign matter gas to interiors of products diffusion, has further guaranteed that the high-purity of hyperpure gas fills.
(3) the present invention's quality control apparatus used is import Coriolis flowmeter, and mass flow rate is adjustable, and total discharge statistical accuracy is high, has realized gas highi degree of accuracy and has filled function.
(4) whole filling process of the present invention is by operating control device Automatic Control, and the deviation of having avoided manual operation to introduce, has further guaranteed that the highi degree of accuracy of gas fills.
(5) heating and temperature controlling device of the present invention and refrigeration plant can accurately be controlled charging system each several part temperature, make to fill pipeline everywhere pressure and working medium flow remain constant, further guaranteed that the highi degree of accuracy of gas fills.
(6) the cleaning replacement process of tonifying Qi pipeline of the present invention, hyperpure gas storage tank, loading line, tonifying Qi pipeline, product to be filled all can be designed to full-automatic technological process, has saved human cost.
(7) vacuum of the present invention fills chamber and can carry out coolingly to filling product, and the step-down that is conducive to hyperpure gas is even liquefied, and increases and fills pressure reduction, has guaranteed gas filling gross mass.
(8) the present invention has taken into full account the corrosion resistance of material, instrumentation in the time of design and select material, therefore can fill corrosivity hyperpure gases such as comprising ammonia.
Accompanying drawing explanation
Fig. 1 is hyperpure gas full-automatic high precision charging system composition schematic diagram of the present invention.
Embodiment
The constitutional diagram of a kind of hyperpure gas full-automatic high precision of the present invention charging system as shown in Figure 1, comprises that ultrapure source of the gas, hyperpure gas storage tank, vacuum fill chamber, pipeline vacuum pumping device, vacuum chamber vacuum pumping, waste gas recycling and processing device, heating tape, refrigerator, pressure transducer, temperature transducer; Ultrapure source of the gas is connected with hyperpure gas storage tank by tonifying Qi pipeline, and to make-up gas in hyperpure gas storage tank; Hyperpure gas storage tank is connected with the vacuum chamber of filling by loading line, for vacuum fills indoor product inflation to be charged; One end of pipeline vacuum pumping device is connected to respectively tonifying Qi pipeline, hyperpure gas storage tank, loading line by exhaust pipe, the other end of pipeline vacuum pumping device is connected to waste gas recycling and processing device, the gas of extraction is delivered to waste gas recycling and processing device, and carry out nothing by waste gas recycling and processing device and poison processing; Vacuum chamber vacuum pumping, refrigerator are all connected with the vacuum chamber of filling, and fill room temperature for the vacuum chamber of filling vacuumizes processing and controls vacuum; Tonifying Qi pipeline, hyperpure gas storage tank, loading line and exhaust pipe are all connected with waste gas recycling and processing device by multiple pressure pipe road, and each pipeline or container are replaced to cleaning; Hyperpure gas storage tank is also connected to waste gas recycling and processing device by overvoltage protection pipeline, for the superpressure unloading of system; Each pipeline disposed outside heating tape and temperature transducer, for carrying out bake out to pipeline; The pressure transducer for monitoring state is equipped with on hyperpure gas storage tank and each pipeline; In described multiple pressure pipe road, be furnished with multiple pressure valve, in described tonifying Qi pipeline, exhaust pipe and loading line, be furnished with stop valve, in described overvoltage protection pipeline, be furnished with safety valve; Described loading line comprises the 5th stop valve, the 6th stop valve, the 7th stop valve, the 3rd pressure gauge, the 4th pressure gauge, the 5th pressure gauge and Coriolis flowmeter; The gas of hyperpure gas storage tank output arrives vacuum successively and fills chamber after the 5th stop valve, Coriolis flowmeter, the 6th stop valve, the 7th stop valve, the 3rd pressure gauge is housed between the 5th stop valve and Coriolis flowmeter, between Coriolis flowmeter and the 6th stop valve, the 4th pressure gauge is housed, between the 6th stop valve and the 7th stop valve, the 5th pressure gauge is housed; Monitor and control hyperpure gas storage tank and fill to vacuum pressure and the flow of the gas of indoor output of products to be filled by Coriolis flowmeter and the 3rd pressure gauge, the 4th pressure gauge, the 5th manometric value; Described vacuum fills indoor top the heating cage for product to be filled being carried out to bake out is installed; Vacuum fills bottom, chamber cold drawing is installed, and cold drawing is connected to external refrigeration machine, and is the cooling of the vacuum chamber of filling, and then the product to be filled being opposite to above cold drawing carries out cooling; Vacuum fills chamber interior temperature transducer is also installed, and temperature sensor probe is sticky to be posted on product to be filled, detects in real time product temperature to be filled.Described stop valve, multiple pressure valve are air-operated solenoid valve.Also include operating console; Described Coriolis flowmeter, pressure transducer, temperature transducer, each stop valve, pipeline vacuum pumping device, vacuum chamber vacuum pumping are all by the real-time display measurement value of operating console or control switch, start-stop.
When concrete application implementation, hyperpure gas source is the liquefied ammonia that purity is better than 6N, and ultrapure source of the gas steel cylinder volume is 40L.Product to be filled is that volume is the stainless steel cylinder of 316L of 1.5L, and with switching ball.Hyperpure gas tank volume is 800L.Heating and temperature controlling device can heating system pipeline, more than container or product temperature to 120 to be charged ℃.Refrigerator can cooling product temperature to be filled to below-50 ℃.Pipeline vacuum pumping device and vacuum chamber vacuum pumping all can make respective line, vacuum degree of vessel reach 10
-3more than Pa.Hyperpure gas is full-automatic, high-precision filling system operation technological process is as follows:
1, tonifying Qi pipeline, hyperpure gas storage tank, loading line, exhaust pipe displacement are cleaned
In tonifying Qi pipeline, hyperpure gas storage tank, loading line, exhaust pipe, pour a certain amount of ammonia by ultrapure source of the gas, then by multiple pressure pipe road, it is pressed again, by pipeline axle vacuum system, it is vacuumized successively, simultaneously by heating tape to its heated baking, until degree of vacuum and temperature reach setting value.Repeat said process 3～5 times, the displacement that completes tonifying Qi pipeline, hyperpure gas storage tank, loading line, exhaust pipe is cleaned.
2, hyperpure gas storage tank tonifying Qi
By ultrapure source of the gas to hyperpure gas storage tank be filled with certain pressure ammonia, guarantee that hyperpure gas tank inside air pressure keeps within the specific limits.
3, filling product displacement cleans
Product to be filled is connected in cutting ferrule mode with loading line interface, and product to be filled and vacuum fill indoor cold drawing heat conduction and install, and close tank door, by vacuum chamber pumped vacuum systems, the vacuum chamber of filling are evacuated to setting value.Be filled with a certain amount of ammonia by hyperpure gas storage tank to filling product, then press again, vacuumize by pipeline axle vacuum system by multiple pressure pipe road, treat and charge product heated baking by heating cage simultaneously, until degree of vacuum and temperature reach setting value, repeat this process 3～5 times, the displacement that completes product inwall to be filled is cleaned.
4, filling gas product fills
Setting fills quality, by refrigerator, product to be filled is freezed, by pipeline pumped vacuum systems, product to be filled is vacuumized, by heating tape to hyperpure gas storage tank heat, to product degree of vacuum to be filled and temperature reaches setting value, hyperpure gas tank temperature reaches setting value, in product to be filled, quantitatively fill ammonia by hyperpure gas storage tank.
5, fill Product Uninstallation
The vacuum chamber of filling is depressed into normal pressure again, opens tank door, closes and fills product ball valve.By multiple pressure pipe road, loading line is pressed again, by pipeline pumped vacuum systems, loading line vacuumized, with the residual ammonia in emptying inside.Turn on product to be filled and loading line interface cutting ferrule, unload and fill product.
The content not being described in detail in specification of the present invention belongs to those skilled in the art's known technology.
Claims (5)
1. a hyperpure gas full-automatic high precision charging system, is characterized in that: comprise that ultrapure source of the gas, hyperpure gas storage tank, vacuum fill chamber, pipeline vacuum pumping device, vacuum chamber vacuum pumping, waste gas recycling and processing device, heating tape, refrigerator, pressure transducer, temperature transducer; Ultrapure source of the gas is connected with hyperpure gas storage tank by tonifying Qi pipeline, and to make-up gas in hyperpure gas storage tank; Hyperpure gas storage tank is connected with the vacuum chamber of filling by loading line, for vacuum fills indoor product inflation to be charged; One end of pipeline vacuum pumping device is connected to respectively tonifying Qi pipeline, hyperpure gas storage tank, loading line by exhaust pipe, the other end of pipeline vacuum pumping device is connected to waste gas recycling and processing device, the gas of extraction is delivered to waste gas recycling and processing device, and carry out nothing by waste gas recycling and processing device and poison processing; Vacuum chamber vacuum pumping, refrigerator are all connected with the vacuum chamber of filling, and fill room temperature for the vacuum chamber of filling vacuumizes processing and controls vacuum; Tonifying Qi pipeline, hyperpure gas storage tank, loading line and exhaust pipe are all connected with waste gas recycling and processing device by multiple pressure pipe road, and each pipeline or container are replaced to cleaning; Hyperpure gas storage tank is also connected to waste gas recycling and processing device by overvoltage protection pipeline, for the superpressure unloading of system; Each pipeline disposed outside heating tape and temperature transducer, for carrying out bake out to pipeline; The pressure transducer for monitoring state is equipped with on hyperpure gas storage tank and each pipeline; In described multiple pressure pipe road, be furnished with multiple pressure valve, in described tonifying Qi pipeline, exhaust pipe and loading line, be furnished with stop valve, in described overvoltage protection pipeline, be furnished with safety valve.
2. a kind of hyperpure gas full-automatic high precision charging system according to claim 1, is characterized in that: described loading line comprises the 5th stop valve, the 6th stop valve, the 7th stop valve, the 3rd pressure gauge, the 4th pressure gauge, the 5th pressure gauge and Coriolis flowmeter; The gas of hyperpure gas storage tank output arrives vacuum successively and fills chamber after the 5th stop valve, Coriolis flowmeter, the 6th stop valve, the 7th stop valve, the 3rd pressure gauge is housed between the 5th stop valve and Coriolis flowmeter, between Coriolis flowmeter and the 6th stop valve, the 4th pressure gauge is housed, between the 6th stop valve and the 7th stop valve, the 5th pressure gauge is housed; Monitor and control hyperpure gas storage tank and fill to vacuum pressure and the flow of the gas of indoor output of products to be filled by Coriolis flowmeter and the 3rd pressure gauge, the 4th pressure gauge, the 5th manometric value.
3. a kind of hyperpure gas full-automatic high precision charging system according to claim 1, is characterized in that: described vacuum fills indoor top the heating cage for product to be filled being carried out to bake out is installed; Vacuum fills bottom, chamber cold drawing is installed, and cold drawing is connected to external refrigeration machine, and is the cooling of the vacuum chamber of filling, and then the product to be filled being opposite to above cold drawing carries out cooling; Vacuum fills chamber interior temperature transducer is also installed, and temperature sensor probe is sticky to be posted on product to be filled, detects in real time product temperature to be filled.
4. a kind of hyperpure gas full-automatic high precision charging system according to claim 1, is characterized in that: described stop valve, multiple pressure valve are air-operated solenoid valve.
5. a kind of hyperpure gas full-automatic high precision charging system according to claim 1, is characterized in that: also comprise operating console; Described Coriolis flowmeter, pressure transducer, temperature transducer, each stop valve, pipeline vacuum pumping device, vacuum chamber vacuum pumping are all by the real-time display measurement value of operating console or control switch, start-stop.
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| CN104075104A (en) * | 2014-06-24 | 2014-10-01 | 北京控制工程研究所 | Thermal pressurizing type xenon filling method of satellite electric propulsion system |
| CN104075105A (en) * | 2014-06-24 | 2014-10-01 | 北京控制工程研究所 | Thermal pressurizing type xenon filling system of electric satellite propelling system |
| CN106439481A (en) * | 2016-08-25 | 2017-02-22 | 杭州艾尔柯制冷剂科技有限公司 | Charging technology for refrigerant gas cylinders less than 1 liter |
| CN107084766A (en) * | 2017-05-19 | 2017-08-22 | 吉林省众鑫汽车装备有限公司 | Fill ammonia metering device and fill at a slow speed ammonia and it is quick fill ammonia fill ammonia metering method |
| CN108196505A (en) * | 2018-01-10 | 2018-06-22 | 北京微焓科技有限公司 | A kind of room temperature gaseous working medium quantifies charging system and its methods for filling |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6688115B1 (en) * | 2003-01-28 | 2004-02-10 | Air Products And Chemicals, Inc. | High-pressure delivery system for ultra high purity liquid carbon dioxide |
| WO2006010828A1 (en) * | 2004-06-25 | 2006-02-02 | Europeenne D'electricite Automatismes Informatises S.A. | Equipment for recycling and pressurizing a condensable gas, in particular xenon in closed circuit |
| US20060231144A1 (en) * | 2005-04-14 | 2006-10-19 | Mirko Schwan | Method of discharging high pressure storage vessels |
| CN102213362A (en) * | 2011-05-19 | 2011-10-12 | 吴纳新 | Pollution-free filling method for high purity ammonia |
| CN202252823U (en) * | 2011-09-19 | 2012-05-30 | 上海启元空分技术发展股份有限公司 | High-purity krypton and xenon filling system |
-
2014
- 2014-02-12 CN CN201410049129.1A patent/CN103775822B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6688115B1 (en) * | 2003-01-28 | 2004-02-10 | Air Products And Chemicals, Inc. | High-pressure delivery system for ultra high purity liquid carbon dioxide |
| WO2006010828A1 (en) * | 2004-06-25 | 2006-02-02 | Europeenne D'electricite Automatismes Informatises S.A. | Equipment for recycling and pressurizing a condensable gas, in particular xenon in closed circuit |
| US20060231144A1 (en) * | 2005-04-14 | 2006-10-19 | Mirko Schwan | Method of discharging high pressure storage vessels |
| CN102213362A (en) * | 2011-05-19 | 2011-10-12 | 吴纳新 | Pollution-free filling method for high purity ammonia |
| CN202252823U (en) * | 2011-09-19 | 2012-05-30 | 上海启元空分技术发展股份有限公司 | High-purity krypton and xenon filling system |
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| CN104075104A (en) * | 2014-06-24 | 2014-10-01 | 北京控制工程研究所 | Thermal pressurizing type xenon filling method of satellite electric propulsion system |
| CN104075105A (en) * | 2014-06-24 | 2014-10-01 | 北京控制工程研究所 | Thermal pressurizing type xenon filling system of electric satellite propelling system |
| CN104075105B (en) * | 2014-06-24 | 2016-02-10 | 北京控制工程研究所 | A kind of hot supercharging xenon loading system for satellite electric propulsion system |
| CN104075104B (en) * | 2014-06-24 | 2016-02-10 | 北京控制工程研究所 | Satellite electric propulsion system hot supercharging xenon charging method |
| CN106439481A (en) * | 2016-08-25 | 2017-02-22 | 杭州艾尔柯制冷剂科技有限公司 | Charging technology for refrigerant gas cylinders less than 1 liter |
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| CN107084766B (en) * | 2017-05-19 | 2024-04-19 | 科林蓝泰环境科技(长春)有限公司 | Ammonia filling metering device, slow ammonia filling and rapid ammonia filling metering method |
| CN108196505A (en) * | 2018-01-10 | 2018-06-22 | 北京微焓科技有限公司 | A kind of room temperature gaseous working medium quantifies charging system and its methods for filling |
| CN108196505B (en) * | 2018-01-10 | 2023-06-30 | 北京微焓科技有限公司 | Normal-temperature gaseous working medium quantitative filling system and filling method thereof |
| CN108704329A (en) * | 2018-06-11 | 2018-10-26 | 周兴明 | A kind of metal caesium or the canned system and device of rubidium molecular distillation and technological process |
| CN108612570B (en) * | 2018-06-27 | 2024-05-17 | 西安热工研究院有限公司 | Supercritical carbon dioxide impeller mechanical working medium replacement device and method adopting dry gas seal |
| CN108612570A (en) * | 2018-06-27 | 2018-10-02 | 西安热工研究院有限公司 | Using the supercritical carbon dioxide turbomachine working medium displacement apparatus and method of dry gas seals |
| CN110792921A (en) * | 2018-08-01 | 2020-02-14 | 乔治洛德方法研究和开发液化空气有限公司 | Device and method for filling a container with a pressurized gas |
| CN109268680A (en) * | 2018-10-18 | 2019-01-25 | 浙江海天气体有限公司 | A kind of industrial gasses automatic charging device |
| CN109268680B (en) * | 2018-10-18 | 2023-10-27 | 浙江海畅气体股份有限公司 | Automatic filling device for industrial gas |
| US10873070B2 (en) | 2019-10-07 | 2020-12-22 | South 8 Technologies, Inc. | Method and apparatus for liquefied gas solvent delivery for electrochemical devices |
| WO2021071542A1 (en) * | 2019-10-07 | 2021-04-15 | South 8 Technologies, Inc. | Method and apparatus for liquefied gas solvent delivery for electrochemical devices |
| CN110966518B (en) * | 2019-12-25 | 2022-03-08 | 苏州焜原光电有限公司 | Gas filling system and filling method |
| CN110966518A (en) * | 2019-12-25 | 2020-04-07 | 苏州焜原光电有限公司 | Gas filling system and filling method |
| CN112432049A (en) * | 2020-10-29 | 2021-03-02 | 北京空间机电研究所 | Celebration palace lantern fills gassing device fast |
| CN112815227A (en) * | 2021-01-21 | 2021-05-18 | 北京空间机电研究所 | On-satellite on-line ultra-pure ammonia working medium filling system for two-phase fluid loop system |
| CN113432465A (en) * | 2021-06-21 | 2021-09-24 | 西安交通大学 | High-temperature heat pipe working medium purifying and filling device and method |
| CN113432465B (en) * | 2021-06-21 | 2022-08-05 | 西安交通大学 | High-temperature heat pipe working medium purifying and filling device and method |
| CN114542954A (en) * | 2022-02-21 | 2022-05-27 | 北京微焓科技有限公司 | Working medium filling system and working medium filling method |
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