CN220647850U - Fluorine-neon mixed gas purifying device - Google Patents

Abstract

The application discloses a fluorine-neon mixture purifying device, which comprises a feeding unit, a cooling unit, a purifying unit and a filling unit; the feeding unit, the purifying unit and the filling unit are sequentially connected through pipelines; the cooling unit is connected with the purification unit through a pipeline; the filling unit comprises a purifying system, a fluorine-based mixing system and a filling port; the purifying system, the fluorine-based mixing system and the filling port are sequentially connected through pipelines. Compared with the prior art, the method and the device can effectively purify the filling system and reduce the pollution risk of the terminal product while purifying the fluorine-neon mixture.

Description

Fluorine-neon mixed gas purifying device

Technical Field

The application relates to the field of gas filling and purification, in particular to a fluorine-neon mixed gas purification device.

Background

Excimer laser gas is mainly composed of an active gas and an inert gas. The excimer laser gas has very wide application in the semiconductor industry, can improve the manufacturing precision and efficiency of semiconductor chips, and can reduce the production cost. In the application in the medical industry, the accuracy and the efficiency of medical diagnosis and treatment can be improved, and the medical cost can be reduced.

In the gas packaging process, the cleanliness control of the filling system is particularly important, and since the existing packaging system does not relate to the purification of fluorine-neon mixed gas and the purification of the filling system, if the initial impurity pollution occurs, the end product is disqualified, and the quality accident is caused.

In view of the foregoing, it is desirable to provide a gas purification and filling system that effectively purifies the filling system while purifying the fluorine-neon mixture, and reduces the risk of contamination of the end product.

Disclosure of Invention

Aiming at the technical defects that a neon mixed gas purification system in the prior art cannot purify the system and cannot guarantee the purity of gas, the application provides a filling system for purifying the gas purification system before and after filling the gas purification system

The fluorine-neon mixed gas purifying device is characterized by comprising a feeding unit, a cooling unit, a purifying unit and a filling unit; the feeding unit, the purifying unit and the filling unit are sequentially connected through pipelines; the cooling unit is connected with the purification unit through a pipeline; the filling unit comprises a purifying system, a fluorine-based mixing system and a filling port; the purifying system, the fluorine-based mixing system and the filling port are sequentially connected through pipelines.

Preferably, the purification system comprises a high-pressure replacement purging device, a first low-pressure replacement purging device, a washing tower discharge end and a vacuum pump; the high-pressure replacement purging device is connected with a pipeline bus of the purification system through a first control valve; the first low-pressure replacement purging device is connected with a pipeline bus of the purification system through a second control valve; the discharge end of the washing tower is connected with a pipeline bus of the purification system through a third control valve; the vacuum pump is connected with a pipeline bus of the purification system through a fourth control valve.

Preferably, the cooling unit comprises an input pipeline and an output pipeline; the input pipeline and the output pipeline are connected with the purification unit.

Preferably, the input pipeline comprises an input end, a first electromagnetic valve and a heat preservation layer; the electric control valve is arranged between the input end and the purification unit and is used for controlling the input of cooling medium in the input pipeline; the heat preservation layer covers the outer surface of the input pipeline.

Preferably, the output pipeline further comprises a first output pipeline and a second output pipeline of an output end, and the first output pipeline and the second output pipeline are connected in parallel; a second electromagnetic valve is arranged in the first output pipeline; the second output pipeline comprises a back pressure regulating valve, an electric control assembly and a thermometer; the electric control assembly is used for controlling the back pressure regulating valve.

Preferably, the purification unit comprises a cryogenic dewar, a first heating assembly, a second heating assembly; the first heating component is arranged at one side close to the cooling unit; the second heating assembly is disposed at a side remote from the cooling unit.

Preferably, the low-temperature dewar tank is connected with a vacuumizing device.

Preferably, the feeding unit comprises a feeding port, a sixth control valve, a pressure reducing valve and a seventh control valve; the feeding port, the sixth control valve, the pressure reducing valve and the seventh control valve are sequentially connected through pipelines.

Preferably, the feeding unit is provided with a second low-pressure replacement purging device, and the second low-pressure replacement purging device is connected with a pipeline bus of the feeding unit through an eighth control valve and a pipeline.

Preferably, the filling port specifically comprises a first filling port and a second filling port; the first filling port and the second filling port are both provided with an electronic scale.

Compared with the defects of the prior art, the technical scheme provides the fluorine-neon mixed gas purifying device. The technical scheme comprises a feeding unit, a cooling unit, a purifying unit and a filling unit; the feeding unit, the purifying unit and the filling unit are sequentially connected through pipelines; the cooling unit is connected with the purification unit through a pipeline; the filling unit comprises a purifying system, a fluorine-based mixing system and a filling port; the purifying system, the fluorine-based mixing system and the filling port are sequentially connected through pipelines. The purifying unit is used for purifying the fluorine-neon mixture gas and ensuring the purity of the gas. The purification system in the filling unit purifies the filling port, provides the environment of high cleanliness for the filling of gas, further ensures that the gas is not polluted in the transportation process. According to the technical scheme, the purity of the gas is guaranteed from two angles of raw material purification and purification of the filling system, gas pollution is effectively avoided, and the purity in the gas filling process is remarkably improved.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is an assembly schematic diagram of a fluorine-neon mixture purifying device according to the present embodiment;

fig. 2 is a schematic diagram of a filling unit of the fluorine-neon mixture purifying device according to the present embodiment;

fig. 3 is a schematic diagram of a cooling unit of the fluorine-neon mixture purifying device according to the embodiment;

fig. 4 is a schematic diagram of a purification unit of the fluorine-neon mixture purification device provided in the present embodiment;

fig. 5 is a schematic diagram of a feeding unit of the fluorine-neon mixture purifying device provided in this embodiment.

Detailed Description

In order to better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below, and it is obvious that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element; when an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present application and simplify description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be configured and operated in a particular orientation, and therefore should not be construed as limiting the present application.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of a plurality of "a number" is two or more, unless explicitly defined otherwise.

It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the scope of the present disclosure, since any structural modifications, proportional changes, or dimensional adjustments made by those skilled in the art should not be made in the present disclosure without affecting the efficacy or achievement of the present disclosure.

The fluorine-neon mixture purifying device is characterized by comprising a feeding unit 100, a cooling unit 200, a purifying unit 300 and a filling unit 400; the feeding unit 100, the purifying unit 300 and the filling unit 400 are sequentially connected through pipelines; the cooling unit 200 is connected to the purifying unit 300 through a pipe; the filling unit 400 comprises a purification system 410, a fluorine-based compounding system 420, and a filling port 430; the purification system 410, the fluorine-based compounding system 420 and the filling port 430 are sequentially connected through pipes. The purifying unit is used for purifying the fluorine-neon mixture gas and ensuring the purity of the gas. The purification system in the filling unit purifies the filling port, provides the environment of high cleanliness for the filling of gas, further ensures that the gas is not polluted in the transportation process. According to the technical scheme, the purity of the gas is guaranteed from two angles of raw material purification and purification of the filling system, gas pollution is effectively avoided, and the purity in the gas filling process is remarkably improved.

It should be noted that, in the specific embodiment of the present application, all the pipes in the filling system are conveying pipes made of stainless steel 316L EP grade material, so as to ensure that the whole system has a specific stronger pressure resistance, and the purification unit meets the high pressure requirement (3000 Psia). The device is only suitable for a low-concentration fluorine-neon mixed gas purifying device. The purification process for high-concentration fluorine neon requires that the prior 316L EP grade stainless steel material does not have high corrosion resistance. Can be replaced by a higher-grade corrosion-resistant alloy material, and the specific material is not limited herein. The vacuum pump adopted in the implementation of the filling system is an Edwards vacuum pump, an advanced oil pressure loop of the Edwards vacuum pump can provide effective lubrication, when the pump is closed, a spring type distributing valve can provide oil and air suck-back protection, an industrial-grade roller bearing is arranged on a transmission shaft rod, the reliability is very high, the service life and the fault-free working time are longer, the center of gravity of the pump is low, and the high-speed running stability is good.

Preferably, the purification system 410 includes a high pressure displacement purge 411, a first low pressure displacement purge 412, a scrubber discharge 413, a vacuum pump 414; the high-pressure replacement purging device 411 is connected with a pipeline bus of the purification system 410 through a first control valve C1; the first low pressure displacement purge device 412 is connected to the pipeline bus of the purge system 410 via a second control valve C2; the scrubber discharge 413 is connected to the pipe bus of the purge system 410 via a third control valve C3; the vacuum pump 414 is connected to the line bus of the purging system 410 via a fourth control valve C4.

Specifically, when the connection between the filling port and the filling container is completed, the PLC control module starts an automatic purification program, after receiving a control signal, the purification system 410 opens the second control valve C2, performs positive low pressure purging on each manifold and the filling container through the first low pressure replacement purging device 412, opens the first control valve C1 after purging is completed, performs a gas pressure maintaining test through the high pressure replacement purging device 411, discharges the residual gas in the system after passing the test, opens the fourth control valve C4, performs a vacuumizing operation by the vacuum pump 414, and performs a vacuumizing treatment on the raw material pipeline and the filling pipeline by the Edwards vacuum pump valve until the vacuumizing is less than 30 millitorr. Prevent the impurities such as moisture, oxygen and nitrogen in the air from entering the system. In the production flow of the end mix product, a proper amount of intermediate product end fluorine-neon mixture is introduced into the filling unit 400, and then the fifth control valve C5 is opened to introduce the rest of the components of the fluorine-based blending system 450 into the end product gas cylinder to finish the final product preparation. The tail gas of the compounding process flows into the washing tower from the control valve C4 to be safely discharged.

Once the connection is complete, a system purge leak test will be performed, and the system piping is purged/evacuated/pressure checked. Purifying the raw material feeding environment. The process can purify the filling port and the filling container, and prevent the gas from being polluted in the filling process.

Preferably, the cooling unit includes an input pipe 210 and an output pipe 220; the inlet line 210 and the outlet line 220 are connected to the purification unit 300.

In this technical solution, the cooling medium circulates in the purification unit 300 through the input pipeline 210 and the output pipeline 220, so that the purification unit 300 is at a more suitable working temperature to achieve a better purification effect.

As a more preferable embodiment of the present utility model, the input pipeline 210 includes an input end 211, a first electromagnetic valve 212, and a heat insulation layer; the first electromagnetic valve 212 is disposed between the input end 211 and the purifying unit 300, and is used for controlling the input of cooling medium in the input pipeline 210; the heat-insulating layer covers the outer surface of the input pipeline 210.

Specifically, in this embodiment, the cooling medium is liquid carbon dioxide, and the first electromagnetic valve 212 controls the input of the liquid carbon dioxide, and cooperates with the output pipeline 220 to achieve the purpose of regulating and controlling the temperature of the purification unit 300.

Further, an insulation layer is disposed on the outer wall of the input pipeline 210; because the temperature of the liquid carbon dioxide is very low, heat preservation measures are needed to prevent the liquid carbon dioxide from being heated and gasified, and then the cooling effect is affected.

As a more preferred embodiment of the present utility model, the output pipeline 220 further includes a first output pipeline and a second output pipeline at an output end, where the first output pipeline and the second output pipeline are connected in parallel; a second electromagnetic valve 222 is arranged in the first output pipeline; the second output pipeline comprises a back pressure regulating valve 223, an electric control component 224 and a thermometer 225; the electronic control assembly 224 is used to control the backpressure regulating valve 223.

It should be noted that the purpose of providing two output lines is to address different cooling stages. In the initial stage of cooling, since it is required to rapidly lower the temperature of the purification unit 300 to a preset range, the output rate of gaseous carbon dioxide is increased by opening the second solenoid valve, so that rapid temperature reduction is achieved. In mid-refrigeration, it is desirable to maintain the purification unit 300 within a predetermined range, which is then controlled by the electronic control assembly 224. Specifically, the electric control component 224 can be connected to a control center, the back pressure regulating valve 223 is controlled by the electric control component 224, and the back pressure regulating valve 223 controls the output of the gaseous carbon dioxide after passing through the purification unit 300, so as to achieve the purpose of intelligently regulating and controlling the temperature of the purification unit 300. The thermometer is used for measuring the temperature of the output pipeline.

Preferably, the purification unit 300 includes a cryogenic dewar 310, a first heating assembly 320, a second heating assembly 330; the first heating assembly 320 is disposed at a side close to the cooling unit 200; the second heating assembly 330 is disposed at a side remote from the cooling unit 200.

Specifically, the low temperature dewar 310 has an adsorbent therein, and the adsorbent has a good adsorption effect in a low temperature environment. The first heating unit 320 and the second heating unit 330 are specifically composed of heating resistance wires and a thermometer, and regulate the temperature of the low-temperature dewar 310 in cooperation with the cooling unit 200. That is, when the temperature in the dewar is too low and the cooling unit 200 cannot be controlled in time, the temperature of the low temperature dewar 310 may be controlled using the first heating assembly 320 and the second heating assembly 330. The two purposes are to make the heating more uniform and sufficient.

Preferably, the cryogenic dewar 310 is connected with a vacuum pumping device 340 for pumping air in the cryogenic dewar 310 to maintain the vacuum state before the cryogenic dewar 310 is operated.

Specifically, the low-temperature dewar tank is a jacketed tank body, and the vacuumizing device is used for vacuumizing air in the jacket so that the jacket is in a near-vacuum state. The influence of the ambient temperature is effectively isolated, so that the working temperature of the low-temperature dewar is more stable. The vacuum pump technology adopts a double-pump design. Firstly, starting a diaphragm pump, pumping to 500pa, and then automatically switching and starting a molecular pump, wherein the limiting pressure is-6 pa of 10.

Preferably, the feeding unit 100 includes a feeding port 110, a sixth control valve C6, a pressure reducing valve 120, and a seventh control valve C7; the feeding port 110, the sixth control valve C6, the pressure reducing valve 120, and the seventh control valve C7 are sequentially connected through pipes; the raw material is depressurized to a preset pressure by the depressurization valve 120 before formally entering the purification stage.

Preferably, the feeding unit is provided with a second low pressure displacement purge device 130, and the second low pressure displacement purge device 130 is connected with a pipeline bus of the feeding unit 110 through an eighth control valve C8 and a pipeline.

Specifically, when the raw material gas is qualified for the analysis in the factory, the raw material gas enters the filling system through the feeding port 110; after connection is completed, an automatic purification program is selected through a control interface of the control device, after a control signal is received, the control valve C8 is opened, and positive low-pressure purging is performed on each feeding manifold through the first low-pressure replacement purging device 122, so that impurities such as air are prevented from entering the system.

It is to be noted that four valve bodies are adopted in the technical scheme, and the valve bodies comprise a control valve, a pressure reducing valve, a back pressure regulating valve and an electric control valve; wherein the control valve is a common pneumatic control valve, and no external power supply is needed for driving. Since the input/output of the cooling medium is required to be controlled in the piping of the cooling unit, an electronically controlled valve is required here. The purposes of manual intervention and dynamic regulation are realized through external current control. The back pressure regulating valve is operated by a built-in spring, and can maintain the pressure required by the pipeline in a state that the pressure of the pipeline or the equipment container is unstable. The pressure reducing valve is a metering control valve, and consists of a valve body, a valve cover and a spring, and can be used for reducing the pressure of gas input from a raw material end to a specified range so as to adapt to the working state of a purification system.

Preferably, the filling port specifically comprises a first filling port and a second filling port; the first filling port and the second filling port are both provided with an electronic scale.

Before filling, placing the terminal product bottle on a high-precision electronic balance, and performing zero clearing operation; the filling data can be monitored in real time in the filling process, and after filling, the product bottle is placed on the electronic balance for re-weighing in order to ensure the accuracy of the filling amount after filling. The bottle valve and the bottle mouth are well sealed, and the helium detector detects leakage. Whether the temperature of the bottle body is abnormally increased or not is shown, and whether the bottle body has serious defects such as bulge deformation or leakage or the like or not is shown. Once the overfilling is found, the overfilling should be immediately handled, the overfilled gas is properly discharged in time, and the overfilling steel cylinders are strictly forbidden to leave the factory.

The two filling interfaces can improve the filling speed of the system, and can be used for connecting various filling containers including steel cylinders, tank trucks and torpedo cars by arranging different interface types. The design can be used for continuous filling operation without interruption, and the filling efficiency is improved. In practical application, the number of the filling interfaces may be set according to the situation, and may be three or four, which is not limited herein.

In the specific embodiment of the application, the specific position of the fluorine-neon mixture purifying device is provided with the instruments (not shown in the figure) such as the pressure gauge and the thermometer, so that the fluorine-neon mixture purifying device can be conveniently operated and managed by a worker.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. The fluorine-neon mixed gas purifying device is characterized by comprising a feeding unit (100), a cooling unit (200), a purifying unit (300) and a filling unit (400);

the feeding unit (100), the purifying unit (300) and the filling unit (400) are connected through pipelines in sequence;

the cooling unit (200) is connected with the purification unit (300) through a pipeline;

the filling unit comprises a purification system (410), a fluorine-based compounding system (420) and a filling port (430);

the purifying system (410), the fluorine-based compounding system (420) and the filling port (430) are sequentially connected through pipelines.

2. The fluorine-neon mixture purifying apparatus according to claim 1, wherein,

the purification system (410) comprises a high-pressure replacement purging device (411), a first low-pressure replacement purging device (412), a washing tower discharge end (413) and a vacuum pump (414);

the high-pressure replacement purging device (411) is connected with a pipeline bus of the purification system (410) through a first control valve (C1);

the first low-pressure replacement purge device (412) is connected with a pipeline bus of the purification system (410) through a second control valve (C2);

the scrubber discharge (413) is connected to a pipe bus of the purification system (410) via a third control valve (C3);

the vacuum pump (414) is connected to a line bus of the purification system (410) via a fourth control valve (C4).

3. The fluorine-neon mixture purifying apparatus according to claim 1, wherein,

the cooling unit (200) comprises an input pipeline (210) and an output pipeline (220);

the inlet line (210) and the outlet line (220) are connected to the purification unit (300).

4. The fluorine-neon mixture purifying apparatus according to claim 3, wherein,

the input pipeline (210) comprises an input end (211), a first electromagnetic valve (212) and an insulation layer;

the first electromagnetic valve (212) is arranged between the input end (211) and the purification unit (300) and is used for controlling the input of cooling medium in the input pipeline (210);

the heat preservation layer covers the outer surface of the input pipeline (210).

5. The fluorine-neon mixture purifying apparatus according to claim 3, wherein,

the output pipeline (220) further comprises an output end (221), namely a first output pipeline and a second output pipeline, wherein the first output pipeline and the second output pipeline are connected in parallel;

a second electromagnetic valve (222) is arranged in the first output pipeline;

the second output pipeline comprises a back pressure regulating valve (223), an electric control assembly (224) and a thermometer (225);

the electronic control assembly (224) is used for controlling the back pressure regulating valve (223).

6. The fluorine-neon mixture purifying apparatus according to claim 2, 4 or 5, wherein,

the purification unit (300) comprises a cryogenic dewar (310), a first heating assembly (320), a second heating assembly (330);

the first heating assembly (320) is disposed at a side close to the cooling unit (200);

the second heating assembly (330) is disposed at a side remote from the cooling unit (200).

7. The fluorine-neon mixture purifying apparatus according to claim 6, wherein,

the low-temperature dewar tank (310) is connected with a vacuumizing device (340).

8. The fluorine-neon mixture purifying apparatus according to claim 7, wherein,

the feeding unit (100) comprises a feeding port (110), a sixth control valve (C6), a pressure reducing valve (120) and a seventh control valve (C7);

the feeding port (110), the sixth control valve (C6), the pressure reducing valve (120) and the seventh control valve (C7) are sequentially connected through pipelines.

9. The fluorine-neon mixture purifying apparatus according to claim 8, wherein,

the feeding unit is provided with a second low-pressure replacement purging device (130), and the second low-pressure replacement purging device (130) is connected with a pipeline bus of the feeding unit (100) through an eighth control valve (C8) and a pipeline.

10. The fluorine-neon mixture purifying apparatus according to claim 9, wherein,

the filling port (430) specifically comprises a first filling port (431) and a second filling port (432);

the first filling port (431) and the second filling port (432) are both provided with an electronic scale.