CN202238736U - Silicon wafer cleaning and degumming basket - Google Patents
Silicon wafer cleaning and degumming basket Download PDFInfo
- Publication number
- CN202238736U CN202238736U CN 201120330570 CN201120330570U CN202238736U CN 202238736 U CN202238736 U CN 202238736U CN 201120330570 CN201120330570 CN 201120330570 CN 201120330570 U CN201120330570 U CN 201120330570U CN 202238736 U CN202238736 U CN 202238736U
- Authority
- CN
- China
- Prior art keywords
- basket
- degumming
- cleaning
- silicon wafer
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model discloses a silicon wafer cleaning and degumming basket. The silicon wafer cleaning and degumming basket comprises a basket body and a rinsing pipe, wherein the rinsing pipe is arranged on the basket body; and water spray holes are formed on the rinsing pipe towards the inner side of the basket body. The silicon wafer cleaning and degumming basket has the advantages that: the rinsing pipe is arranged on the silicon wafer degumming basket, and sliced silicon rods can be cleaned and degummed after being directly put into the degumming basket and are not required to be transported repeatedly, so that the damage to the silicon rods possibly caused in the transportation process is reduced, and the yield of the silicon rods is improved.
Description
Technical field
The utility model relates to a kind of solar silicon wafers bogey, particularly a kind of cleaning and degumming silicon chip bogey.
Background technology
In the solar silicon wafers production process, silicon rod cuts into silicon chip after being adhesive on the work plate, need pass through then when cleaning and removing is removed section and be infected with the impurity such as greasy dirt on the silicon chip, through coming unstuck silicon chip is split away off from work plate again.Normally will be bonded at the silicon rod of having cut into slices on the work plate lifts to flushed channel and cleans; Being placed into the groove that comes unstuck again comes unstuck; In handling process repeatedly, cause the silicon chip damage that comes off so easily, if it is insufficient to come unstuck, hand-lifting sheet or turn over rod and also can cause silicon chip to collapse limit, damaged.
The utility model content
The utility model purpose: to the problems referred to above, the purpose of the utility model provides a kind of cleaning and degumming silicon chip basket, reduces the silicon rod of having cut into slices and in cleaning, the process of coming unstuck, damages because of repeatedly carrying the silicon chip that causes, and the centralized operation program improves the silicon chip yield rate.
Technical scheme: a kind of cleaning and degumming silicon chip basket, comprise the basket body, also comprise the cleaning hose that is arranged on the said basket body, said cleaning hose is offered hole for water spraying towards said basket body private side.
Said cleaning hose does not hinder the silicon rod of having cut into slices to place along the basket mouth edge placement of said basket body, and current flow out from height point again and clean silicon rod simultaneously.
Said cleaning hose one end sealing, the water source only flows out from hole for water spraying from entering of cleaning hose, possesses the hydraulic pressure of certain cleaning silicon rod.
Beneficial effect: compared with prior art; The utility model has the advantages that on the silicon wafer stripping basket cleaning hose is set; The silicon rod of having cut into slices directly is positioned over the processing of can successively cleaning and come unstuck in the basket that comes unstuck; Need not repeatedly to carry the silicon rod of having cut into slices, reduce the silicon chip that in transport process, possibly cause and damage, improve the silicon chip yield rate.
Description of drawings
Fig. 1 is the utility model front view;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the partial enlarged view I of Fig. 2.
The specific embodiment
Below in conjunction with accompanying drawing and specific embodiment; Further illustrate the utility model; Should understand these embodiment only be used to the utility model is described and be not used in the restriction the utility model scope; After having read the utility model, those skilled in the art all fall within the application's accompanying claims institute restricted portion to the modification of the various equivalent form of values of the utility model.
Shown in accompanying drawing 1-3, a kind of cleaning and degumming silicon chip basket comprises basket body 1, also comprises cleaning hose 2, and cleaning hose 2 is arranged on the basket body 1, and along basket mouth edge placement, cleaning hose 2 is offered hole for water spraying 3 towards basket body 1 an inner side.The sealing of cleaning hose 2 one ends, the other end cleans water supply line for being cut into angle so that connect.
The silicon rod of having cut into slices that is bonded on the work plate is positioned in the utility model cleaning and degumming silicon chip basket, silicon rod two is clamped, in case that silicon chip falls down is impaired with clamp bar.With cleaning the angle end that water supply line is connected to cleaning hose 2, current promptly wash silicon chip from hole for water spraying 3, and flushing directly places the groove that comes unstuck to come unstuck together with the cleaning and degumming silicon chip basket after accomplishing.
Claims (3)
1. a cleaning and degumming silicon chip basket comprises basket body (1), it is characterized in that: also comprise the cleaning hose (2) that is arranged on the said basket body (1), said cleaning hose (2) is offered hole for water spraying (3) towards said basket body (1) private side.
2. a kind of cleaning and degumming silicon chip basket according to claim 1 is characterized in that: said cleaning hose (2) is along the basket mouth edge placement of said basket body (1).
3. a kind of cleaning and degumming silicon chip basket according to claim 1 is characterized in that: said cleaning hose (2) one ends sealing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201120330570 CN202238736U (en) | 2011-09-05 | 2011-09-05 | Silicon wafer cleaning and degumming basket |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201120330570 CN202238736U (en) | 2011-09-05 | 2011-09-05 | Silicon wafer cleaning and degumming basket |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202238736U true CN202238736U (en) | 2012-05-30 |
Family
ID=46100039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201120330570 Expired - Fee Related CN202238736U (en) | 2011-09-05 | 2011-09-05 | Silicon wafer cleaning and degumming basket |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202238736U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102303024A (en) * | 2011-09-05 | 2012-01-04 | 镇江大成新能源有限公司 | Silicon chip cleaning and degumming basket |
-
2011
- 2011-09-05 CN CN 201120330570 patent/CN202238736U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102303024A (en) * | 2011-09-05 | 2012-01-04 | 镇江大成新能源有限公司 | Silicon chip cleaning and degumming basket |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120530 Termination date: 20140905 |
|
EXPY | Termination of patent right or utility model |