CN202221301U - Probe structure for detecting flatness of substrate - Google Patents
Probe structure for detecting flatness of substrate Download PDFInfo
- Publication number
- CN202221301U CN202221301U CN2011202654473U CN201120265447U CN202221301U CN 202221301 U CN202221301 U CN 202221301U CN 2011202654473 U CN2011202654473 U CN 2011202654473U CN 201120265447 U CN201120265447 U CN 201120265447U CN 202221301 U CN202221301 U CN 202221301U
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- China
- Prior art keywords
- substrate
- probe structure
- utility
- model
- flatness
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a probe structure for detecting flatness of a substrate. The probe structure includes a working table arranged on a platform horizontally. A laser interferometer probe is arranged right above the working table. The probe structure for detecting flatness of the substrate can detect the flatness of the substrate automatically. Problems of low precision caused by human detection are reduced. And product yield can be improved effectively.
Description
Technical field
The utility model relates to a kind of detection probe structure, relates in particular to a kind of sonde configuration that the flatness of semiconductor chip is detected.
Background technology
Carry out non-contact type through the automatic substrate transport of external mechanical hand and detect, and divide a kind of necessary testing process in other film magazine of putting different definition into according to testing result.The user can carry out the substrate of different parameters follow-up reprocessing, sell and select for use, and can be real-time also classify automatically for the user provides accurate data is convenient to the user and conveniently is provided with.But, at home, not having production of units at present, similar products like is provided, foreign-made company also mainly concentrates on few several companies, and brings a high price.And most domestic enterprise all is the detection of being correlated with through manual work, but manual method very easily causes accuracy of detection not high.
The utility model content
The purpose of the utility model is to provide a kind of sonde configuration that can detect basic flatness, to solve the not high problem of accuracy of detection of existing flatness to substrate.
To achieve these goals, the technical scheme taked of the utility model is:
A kind of substrate flatness of the utility model detection probe structure comprises a worktable, and wherein, said worktable level is located on the platform, and a laser interference instrument probe is set directly over the said worktable.
Among one embodiment of the utility model substrate flatness detection probe structure, wherein, said worktable is divided into the upper and lower, and said upper strata area is less than said lower floor area.
Among one embodiment of the utility model substrate flatness detection probe structure, wherein, also comprise support, said two probes are fixed on the said support.
Among one embodiment of the utility model substrate flatness detection probe structure, wherein, said upper strata and said lower floor are the rectangle platform of thinner thickness.
Among one embodiment of the utility model substrate flatness detection probe structure, wherein, the material of said support and said platform is marble.
The utility model is owing to adopted above-mentioned technology, and the good effect that makes it to have is:
Substrate flatness detection probe structure through can detecting with automatic flatness to substrate of this structure, reduces the not high problem of precision that manual detection causes, and can have and improve yield of products effectively.
Description of drawings
Fig. 1 is the synoptic diagram of the substrate flatness detection probe structure of the utility model.
Embodiment
Provide the embodiment of the utility model substrate flatness detection probe structure below in conjunction with accompanying drawing.
Fig. 1 is the synoptic diagram of the substrate flatness detection probe structure of the utility model, sees also shown in Figure 1.A vertically disposed laser interference instrument probe 1 was formed directly over a kind of substrate flatness detection probe structure of the utility model, this structure mainly were horizontally set on platform 5 upper tables 6 and the top that is positioned at this worktable 6 by one.Wherein, worktable 6 is divided into two-layer, and the area on upper strata 3 is less than the area of lower floor 4, and the shape of upper strata 3 and said lower floor 4 all can be the rectangle platform of thinner thickness.Be fixed with support 2 on the platform 6, probe 1 is fixed on the support 2.
Wherein, above-mentioned support 2 all can be marble with the material of platform 5.
In sum, the utility model substrate flatness detection probe structure through can be automatically the flatness of substrate being detected of this structure, reduces the not high problem of precision that manual detection causes, and can have and improve yield of products effectively.
The above is merely the preferred embodiment of the utility model; Not in order to restriction the utility model; Any modification of being done within all spirit and principles at the utility model, be equal to replacement and improvement etc., all should be included within the protection domain of the utility model.
Claims (5)
1. a substrate flatness detection probe structure comprises a worktable, it is characterized in that said worktable level is located on the platform, and a laser interference instrument probe is set directly over the said worktable.
2. structure according to claim 1 is characterized in that said worktable is divided into the upper and lower, and said upper strata area is less than said lower floor area.
3. structure according to claim 1 is characterized in that, also comprises support, and said two probes are fixed on the said support.
4. structure according to claim 2 is characterized in that, said upper strata and said lower floor are the rectangle platform of thinner thickness.
5. structure according to claim 3 is characterized in that the material of said support and said platform is marble.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202654473U CN202221301U (en) | 2011-07-26 | 2011-07-26 | Probe structure for detecting flatness of substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202654473U CN202221301U (en) | 2011-07-26 | 2011-07-26 | Probe structure for detecting flatness of substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202221301U true CN202221301U (en) | 2012-05-16 |
Family
ID=46043325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202654473U Expired - Fee Related CN202221301U (en) | 2011-07-26 | 2011-07-26 | Probe structure for detecting flatness of substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202221301U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110470250A (en) * | 2019-07-30 | 2019-11-19 | 湖北三江航天万山特种车辆有限公司 | A kind of detection device and detection method of piece surface flatness |
| CN110514123A (en) * | 2019-09-20 | 2019-11-29 | 成都博奥晶芯生物科技有限公司 | A kind of microstructured bodies two-dimensional detecting method and device based on laser displacement sensor |
-
2011
- 2011-07-26 CN CN2011202654473U patent/CN202221301U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110470250A (en) * | 2019-07-30 | 2019-11-19 | 湖北三江航天万山特种车辆有限公司 | A kind of detection device and detection method of piece surface flatness |
| CN110470250B (en) * | 2019-07-30 | 2021-06-15 | 湖北三江航天万山特种车辆有限公司 | Detection device and detection method for surface flatness of part |
| CN110514123A (en) * | 2019-09-20 | 2019-11-29 | 成都博奥晶芯生物科技有限公司 | A kind of microstructured bodies two-dimensional detecting method and device based on laser displacement sensor |
| CN110514123B (en) * | 2019-09-20 | 2021-04-02 | 成都博奥晶芯生物科技有限公司 | Microstructure two-dimensional detection method and device based on laser displacement sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120516 Termination date: 20130726 |