CN202229742U - Membrane thickness detecting probe structure - Google Patents
Membrane thickness detecting probe structure Download PDFInfo
- Publication number
- CN202229742U CN202229742U CN2011202654308U CN201120265430U CN202229742U CN 202229742 U CN202229742 U CN 202229742U CN 2011202654308 U CN2011202654308 U CN 2011202654308U CN 201120265430 U CN201120265430 U CN 201120265430U CN 202229742 U CN202229742 U CN 202229742U
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- probe structure
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- thickness
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Abstract
Disclosed is a membrane thickness detecting probe structure, comprising a working bench, wherein a vertically arranged ultrasonic transducer is installed right above the working bench. The membrane thickness detecting probe structure can automatically detect the defects and pollution of a substrate, overcome the weakness of poor precision with manual detection, and effectively improve product yield.
Description
Technical field
The utility model relates to a kind of manufacturing industry detection architecture, relates in particular to a kind of sonde configuration that can detect thickness.
Background technology
The thickness probe detector is the detection type equipment to the substrate thickness.Carry out non-contact type through the automatic substrate transport of external mechanical hand and detect, and divide a kind of necessary testing process in other film magazine of putting different definition into according to testing result.The user can carry out the substrate of different parameters follow-up reprocessing, sell and select for use, and can be real-time also classify automatically for the user provides accurate data is convenient to the user and conveniently is provided with.But, at home, not having production of units at present, similar products like is provided, foreign-made company also mainly concentrates on few several companies, and bring a high price (average about 300,000 dollars).And most domestic enterprise all is the detection of being correlated with through manual work, but manual method very easily causes accuracy of detection not high.
The utility model content
The purpose of the utility model is to provide a kind of sonde configuration that can detect thickness, adopts manual detection to cause the not high problem of accuracy of detection to solve existing substrate thickness.
To achieve these goals, the technical scheme taked of the utility model is:
A kind of thickness detection probe structure comprises a worktable, wherein, is provided with a vertically disposed ultrasonic probe directly over the said worktable.
Among one embodiment of the utility model thickness detection probe structure, wherein, said worktable is divided into the upper and lower, and said upper strata area is less than said lower floor area.
Among one embodiment of the utility model thickness detection probe structure, wherein, also comprise a platform, said driving water is flat on the said platform.
Among one embodiment of the utility model thickness detection probe structure, wherein, also comprise support, said ultrasonic probe is fixed on the said support.
Among one embodiment of the utility model thickness detection probe structure, wherein, said upper strata and said lower floor are the rectangle platform of thinner thickness.
Among one embodiment of the utility model thickness detection probe structure, wherein, the material of said support and said platform is marble.
The utility model is owing to adopted above-mentioned technology, and the good effect that makes it to have is:
Thickness detection probe structure through can installing automatically the substrate thickness is surveyed of this structure, reduces the not high problem of precision that manual detection causes, and can have and improve yield of products effectively.
Description of drawings
Fig. 1 is the synoptic diagram of the thickness detection probe structure of the utility model.
Embodiment
Provide the embodiment of the utility model thickness detection probe structure below in conjunction with accompanying drawing.
Fig. 1 is the synoptic diagram of the thickness detection probe structure of the utility model, sees also shown in Figure 1.A kind of thickness detection probe structure of the utility model, this structure mainly by a worktable 6 be positioned at this worktable 6 directly over a vertically disposed ultrasonic probe 1.Wherein, worktable 6 is divided into two-layer, and the area on upper strata 4 is less than the area of lower floor 5, and the shape of upper strata 4 and said lower floor 5 all can be the rectangle platform of thinner thickness.These worktable 6 levels place on the platform 3, are fixed with support 2 on the platform 3, and ultrasonic probe 1 is fixed on the support 2.
Wherein, above-mentioned support 2 all can be marble with the material of platform 3.
In sum, the utility model thickness detection probe structure through can installing automatically the substrate thickness is surveyed of this structure, reduces the not high problem of precision that manual detection causes, and can have and improve yield of products effectively.
The above is merely the preferred embodiment of the utility model; Not in order to restriction the utility model; Any modification of being done within all spirit and principles at the utility model, be equal to replacement and improvement etc., all should be included within the protection domain of the utility model.
Claims (6)
1. a thickness detection probe structure comprises a worktable, it is characterized in that, is provided with a vertically disposed ultrasonic probe directly over the said worktable.
2. structure according to claim 1 is characterized in that said worktable is divided into the upper and lower, and said upper strata area is less than said lower floor area.
3. structure according to claim 1 is characterized in that, also comprises a platform, and said driving water is flat on the said platform.
4. structure according to claim 1 is characterized in that, also comprises support, and said ultrasonic probe is fixed on the said support.
5. structure according to claim 2 is characterized in that, said upper strata and said lower floor are the rectangle platform of thinner thickness.
6. structure according to claim 4 is characterized in that the material of said support and said platform is marble.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202654308U CN202229742U (en) | 2011-07-26 | 2011-07-26 | Membrane thickness detecting probe structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202654308U CN202229742U (en) | 2011-07-26 | 2011-07-26 | Membrane thickness detecting probe structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202229742U true CN202229742U (en) | 2012-05-23 |
Family
ID=46080327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202654308U Expired - Fee Related CN202229742U (en) | 2011-07-26 | 2011-07-26 | Membrane thickness detecting probe structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202229742U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106248008A (en) * | 2016-08-31 | 2016-12-21 | 惠晶显示科技（苏州）有限公司 | A kind of thinning after liquid crystal panel method for measuring thickness |
| CN108627126A (en) * | 2017-03-24 | 2018-10-09 | 天津邦特磁性材料有限公司 | A kind of on-line detecting system of neodymium iron boron magnetic body surface vacuum coating equipment |
| CN114253066A (en) * | 2021-12-07 | 2022-03-29 | 青岛天仁微纳科技有限责任公司 | Nanoimprint equipment capable of measuring structure precision and nanoimprint method |
-
2011
- 2011-07-26 CN CN2011202654308U patent/CN202229742U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106248008A (en) * | 2016-08-31 | 2016-12-21 | 惠晶显示科技（苏州）有限公司 | A kind of thinning after liquid crystal panel method for measuring thickness |
| CN108627126A (en) * | 2017-03-24 | 2018-10-09 | 天津邦特磁性材料有限公司 | A kind of on-line detecting system of neodymium iron boron magnetic body surface vacuum coating equipment |
| CN114253066A (en) * | 2021-12-07 | 2022-03-29 | 青岛天仁微纳科技有限责任公司 | Nanoimprint equipment capable of measuring structure precision and nanoimprint method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120523 Termination date: 20130726 |