CN202220221U - Lower chamber heat-insulation structure and polycrystal furnace adopting lower cavity thermal-insulation structure - Google Patents
Lower chamber heat-insulation structure and polycrystal furnace adopting lower cavity thermal-insulation structure Download PDFInfo
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- CN202220221U CN202220221U CN2011202939020U CN201120293902U CN202220221U CN 202220221 U CN202220221 U CN 202220221U CN 2011202939020 U CN2011202939020 U CN 2011202939020U CN 201120293902 U CN201120293902 U CN 201120293902U CN 202220221 U CN202220221 U CN 202220221U
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- lower chamber
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- lower cavity
- insulation construction
- cylindrical portion
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Abstract
the utility model relates to a lower cavity thermal-insulation structure and a polycrystal furnace adopting the lower cavity thermal-insulation structure,comprising a heat field, a thermal-insulation felt, a water channel and a lower cavity, wherein the lower cavity comprises a cylinderical part and a bottom part, the cylinderical part is formed by welding an inner cylinder and an outer cylinder, and a first space is formed between the inner cylinder and the outer cylinder, the bottom is formed by welding an inner layer and an outer layer, and a second space is formed between the inner layer and the outer layer, the water channel is welded in the first space of the cylinderical part of the lower cavity, an air inlet, an air outlet and a temperature measurement port are arranged at the outer layer of the bottom part of the lower cavity, the air inlet and the second space are communicated, and the air outlet and the second space are communicated. The lower cavity thermal-insulation structure has the benifical effects that the thermal insulation effect is good, the strucutre is convenient for growth of a silicon ingot and safety hazards are reduced in the operating process.
Description
Technical field:
The utility model relates to the silicon single crystal manufacturing apparatus technical field, the polycrystalline furnace of particularly a kind of lower chamber insulation construction and employing lower chamber insulation construction.
Background technology:
Polycrystalline silicon ingot or purifying furnace is that polycrystalline silicon material is converted into the indispensable equipment in the polysilicon ingot process process, and polycrystal silicon ingot is the basic material in photovoltaic generation and the semicon industry after art breading.Polycrystal silicon ingot is as the critical support material of advanced information society, is one of most important polycrystalline material in the world at present, and it is not only the major function material of development computingmachine and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.In the production, will reach polysilicon that certain purity requires and pack in the stove, come out of the stove by processing requirement heat fused, directional long crystal, thermal treatment, cooling.The long brilliant such core environment of polysilicon remelting, we are referred to as thermal field, and thermal field provides rational temperature ladder field to obtain satisfactory polysilicon crystal in long brilliant process again not singly for unmelted polycrystalline silicon provides a large amount of heat energy.
In order to improve the growth result of silicon ingot, the lower chamber of polycrystalline furnace is provided with insulation construction, and the lower chamber insulation construction of general common polycrystalline furnace all is to adopt the full water cooling structure, causes phenomenons such as heat insulation effect is poor, SF is low easily.
The utility model content:
In view of this, be necessary to provide the lower chamber that a kind of heat insulation effect is good, SF is high insulation construction.
Also be necessary to provide a kind of polycrystalline furnace that adopts the lower chamber insulation construction.
A kind of polycrystalline furnace that adopts the lower chamber insulation construction comprises thermal field, insulation quilt, water channel and lower chamber, and lower chamber comprises cylindrical portion and bottom; Cylindrical portion is formed by inner cylinder and out cylinder welding, and forms first space between inner cylinder and the out cylinder, and the bottom is formed by internal layer and outer welding equally; And form second space between two-layer; Thermal field is installed in the lower chamber, and insulation quilt is layered on lower chamber the inside, and water channel is welded in first space of cylindrical portion of lower chamber.
A kind of lower chamber insulation construction comprises water channel and lower chamber, and lower chamber comprises cylindrical portion and bottom; Cylindrical portion is formed by two-layer cylinder welding; And form first space between the two-layer cylinder, the bottom is formed by internal layer and outer welding equally, and forms second space between two-layer; Water channel is welded in first space of cylindrical portion of lower chamber; The bottom exterior layer of lower chamber is provided with air inlet, air air outlet and temperature-measuring port, and air inlet communicates with second space, and the air air outlet communicates with second space.
The polycrystalline furnace of lower chamber insulation construction that the utility model provides and employing lower chamber insulation construction provides rational temperature ladder field in long brilliant process, at the shop, bottom of lower chamber insulation quilt raising heat insulation effect, be convenient to the growth of silicon ingot; If silicon ingot in developmental process, leaks,, can not cause big security incident because of the not water flowing of bottom of lower chamber; As finding that in the thermometric process temperature is too high, can pass through the air outlet, discharge gas, guarantee that the body of heater internal temperature is fit to the growth of silicon ingot.
This shows that the beneficial effect of the utility model is: high insulating effect, be convenient to the growth of silicon ingot; Reduce potential safety hazard in the operation process.
Description of drawings:
Accompanying drawing 1 is the utility model lower chamber insulation construction and the polycrystalline furnace section schematic configuration diagram that adopts the lower chamber insulation construction;
Accompanying drawing 2 is cavity insulation construction frontviews under the utility model lower chamber insulation construction and the polycrystalline furnace that adopts the lower chamber insulation construction;
Accompanying drawing 3 is cavity insulation construction sectional views under the utility model lower chamber insulation construction and the polycrystalline furnace that adopts the lower chamber insulation construction;
Among the figure:
Thermal field 1, insulation quilt 2, water channel 3, lower chamber 4, cylindrical portion 41, out cylinder 411, inner cylinder 412, first space 413, bottom 42, internal layer 421, outer 422, second space 423, air inlet 424, air air outlet 425, temperature-measuring port 426
Embodiment:
Please be simultaneously referring to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, a kind of polycrystalline furnace that adopts the lower chamber insulation construction comprises thermal field 1, insulation quilt 2, water channel 3 and lower chamber 4; Lower chamber 4 comprises cylindrical portion 41 and bottom 42; Cylindrical portion 41 is formed by out cylinder 411 and inner cylinder 412 two-layer welding, and forms first space 413 between out cylinder 411 and the inner cylinder 412, and bottom 42 is formed by internal layer 421 and outer 422 welding equally; And form second space 423 between internal layer 421 and outer 422; Thermal field 1 is installed in the lower chamber 4, and insulation quilt 2 is layered on internal layer 421 internal surfaces of lower chamber 4 bottoms 42, and water channel 3 is welded in first space 413 of cylindrical portion 41 of lower chamber 4.
Please combine Fig. 3 and Fig. 4; A kind of lower chamber insulation construction comprises water channel 3 and lower chamber 4, and lower chamber 4 comprises cylindrical portion 41 and bottom 42; Cylindrical portion 41 is formed by out cylinder 411 and inner cylinder 412 two-layer welding; And form first space 413 between out cylinder 411 and the inner cylinder 412, bottom 42 is formed by internal layer 421 and outer 422 welding equally, and forms second space 423 between internal layer 421 and outer 422; Water channel 3 is welded in first space 413 of cylindrical portion 41 of lower chamber 4; The bottom 42 outer 422 of lower chamber 4 is provided with air inlet 424, air air outlet 425 and temperature-measuring port 426, and air inlet 424 communicates with second space 423, and air air outlet 425 communicates with second space 423.
The polycrystalline furnace of lower chamber insulation construction that the utility model provides and employing lower chamber insulation construction provides rational temperature ladder field in long brilliant process, the 42 shop insulation quilts raising heat insulation effects in the bottom of lower chamber 4 are convenient to the growth of silicon ingot; If silicon ingot in developmental process, leaks, the bottom 42 not water flowings because of lower chamber 4 can not cause big security incident; As finding that in the thermometric process temperature is too high, can discharge gas through air air outlet 425, guarantee that the body of heater internal temperature is fit to the growth of silicon ingot.
Claims (3)
1. a lower chamber insulation construction and adopt the polycrystalline furnace of lower chamber insulation construction comprises thermal field, insulation quilt, water channel and lower chamber, and it is characterized in that: lower chamber comprises cylindrical portion and bottom; Cylindrical portion is formed by inner cylinder and out cylinder welding; And form first space between inner cylinder and the out cylinder, the bottom is formed by internal layer and outer welding equally, and forms second space between two-layer; Thermal field is installed in the lower chamber, and insulation quilt is layered on the lower chamber the inside;
The lower chamber insulation construction comprises water channel and lower chamber, and lower chamber comprises cylindrical portion and bottom; Cylindrical portion is formed by inner cylinder and out cylinder welding; And form first space between inner cylinder and the out cylinder, the bottom is formed by internal layer and outer welding equally, and forms second space between two-layer; Water channel is welded in first space of cylindrical portion of lower chamber; The bottom exterior layer of lower chamber is provided with air inlet, air air outlet and temperature-measuring port, and air inlet communicates with second space, and the air air outlet communicates with second space.
2. lower chamber insulation construction according to claim 1 and adopt the polycrystalline furnace of lower chamber insulation construction is characterized in that: water channel welds inner cylinder and out cylinder after being welded in the inner cylinder of cylindrical portion of lower chamber again.
3. lower chamber insulation construction according to claim 1 and adopt the polycrystalline furnace of lower chamber insulation construction is characterized in that: water channel welds out cylinder and inner cylinder after being welded in the out cylinder of cylindrical portion of lower chamber again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202939020U CN202220221U (en) | 2011-08-15 | 2011-08-15 | Lower chamber heat-insulation structure and polycrystal furnace adopting lower cavity thermal-insulation structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202939020U CN202220221U (en) | 2011-08-15 | 2011-08-15 | Lower chamber heat-insulation structure and polycrystal furnace adopting lower cavity thermal-insulation structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202220221U true CN202220221U (en) | 2012-05-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202939020U Withdrawn - After Issue CN202220221U (en) | 2011-08-15 | 2011-08-15 | Lower chamber heat-insulation structure and polycrystal furnace adopting lower cavity thermal-insulation structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202220221U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102286779A (en) * | 2011-08-15 | 2011-12-21 | 宁夏日晶新能源装备股份有限公司 | Lower chamber heat-insulation structure and polycrystalline furnace using same |
-
2011
- 2011-08-15 CN CN2011202939020U patent/CN202220221U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102286779A (en) * | 2011-08-15 | 2011-12-21 | 宁夏日晶新能源装备股份有限公司 | Lower chamber heat-insulation structure and polycrystalline furnace using same |
| CN102286779B (en) * | 2011-08-15 | 2014-04-16 | 宁夏日晶新能源装备股份有限公司 | Polycrystalline furnace using lower chamber heat-insulation structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120516 Effective date of abandoning: 20140416 |
|
| RGAV | Abandon patent right to avoid regrant |