CN202204593U - Three-component vibration calibration device - Google Patents

Abstract

The utility model discloses a three-component vibration calibration device. The device comprises a three-component standard vibration table, wherein the three-component standard vibration table comprises a base, an X-axial electromagnetic vibration table, a Y-axial electromagnetic vibration table, a Z-axial electromagnetic vibration table and a three-dimensional vibration platform, wherein each axial vibration table is provided with a laser vibration measurer; vibration signals acquired by the laser vibration measurers are input into a data acquisition device; each axial vibration table is provided with a standard sensor; output signals of the standard sensors are input into a feedback controller; the other input end of the feedback controller is connected with a multi-channel signal generator; the output of the feedback controller drives each axial vibration table to move after passing through a power amplification group; the multi-channel signal generator is controlled by a processor; the output voltage of a calibrated three-dimensional vibration measuring sensor placed on the three-dimensional vibration platform is input into the data acquisition device; the data acquisition device is connected with the processor; and the processor calculates a sensitivity matrix of the calibrated three-dimensional vibration measuring sensor. The device has the advantages that: the three measurement axes of the three-dimensional vibration measuring sensor can be excited at the same time so as to obtain the sensitivity matrix which reflects the coupling relationship among the dimensions of the device.

Description

Three-component vibration calibration device

Technical Field

The utility model relates to a three-component vibration calibrating device.

Technical Field

With the development of the fields of aerospace, robots, automobiles, medicine and the like, people have higher and higher requirements on multi-dimensional vibration testing, and multi-dimensional vibration measuring sensors are increasingly applied to the fields of inertial navigation systems, seismic monitoring, geological exploration, power equipment fault diagnosis and the like. However, at present, no unified and complete national or industrial standard for the calibration of the multi-dimensional vibration measurement sensor exists at home and abroad, and the application of the multi-dimensional vibration measurement sensor and the development of the multi-dimensional vibration research field are greatly limited.

At present, a single-dimensional vibration calibration device is mostly adopted to calibrate three measurement axes of the three-dimensional vibration measurement sensor in sequence, the method is long in time consumption and complex in data processing, and meanwhile, the mutual coupling among all dimensions of the three-dimensional sensor is considered, the method is low in calibration precision, and a sensitivity matrix reflecting the coupling relation among the dimensions is difficult to obtain. Therefore, the three-component vibration calibration device capable of simultaneously exciting the three axes of the three-dimensional vibration measurement sensor is developed, and the three-component vibration calibration device has important theoretical and practical significance for the development of the vibration measurement sensor calibration technology and the technical progress of the corresponding industry.

SUMMERY OF THE UTILITY MODEL

Can only adopt single-dimensional vibration calibration system to calibrate three measuring shafts in proper order when overcoming prior art to three-dimensional vibration measurement sensor calibration, it is long to exist, and data processing is complicated, and is difficult to obtain the shortcoming of the sensitivity matrix that reflects coupling relation between the dimension, the utility model provides a can be to three measuring shafts simultaneous excitation of three-dimensional vibration measurement sensor, and then acquire the three-component vibration calibrating device who reflects the sensitivity matrix of its coupling relation between the dimension.

The three-component vibration calibration device comprises a three-component standard vibration table, wherein the three-component standard vibration table comprises a base, an X-direction electromagnetic vibration table vibrating along the X axial direction, a Y-direction electromagnetic vibration table vibrating along the Y axial direction, a Z-direction electromagnetic vibration table vibrating along the Z axial direction and a three-dimensional vibration platform connected with the three electromagnetic vibration tables are arranged on the base, and a calibrated three-dimensional vibration measurement sensor is arranged on the three-dimensional vibration platform;

the method is characterized in that: each axial electromagnetic vibration table is provided with a laser vibration meter for detecting the axial vibration, vibration signals acquired by the laser vibration meter are input into a data acquisition unit, and the data acquisition unit is connected with a processor;

each axial electromagnetic vibration table is provided with a standard sensor capable of acquiring the actual vibration waveform representing the axial vibration table, and the output end of the standard sensor is connected with the input end of a feedback controller;

the other input end of the feedback controller is connected with a multi-channel signal generator, the multi-channel signal generator sends out multi-channel standard vibration signals, the multi-channel standard vibration signals are subtracted from the output of each axial standard sensor in the feedback controller, and the feedback controller obtains a deviation signal; the deviation signal output by the feedback controller is calculated according to a control algorithm, then is output to a power amplifier group for power amplification, and is input into the vibrating table in the corresponding axial direction so as to drive the vibrating table in the corresponding axial direction to generate deviation rectifying motion; the multi-channel signal generator is controlled by the processor;

the output voltage of the three-dimensional vibration measurement sensor to be corrected is input into the data acquisition unit;

and the processor reads in output signals of the laser vibration meter and the corrected sensor collected by the data collector and calculates a sensitivity matrix of the corrected three-dimensional vibration measuring sensor.

Furthermore, a laser reflector is arranged on the back of a moving part of the X, Y axial electromagnetic vibration table, measuring light of the laser vibrometer enters from the bottom of the X, Y axial electromagnetic vibration table, and each axial electromagnetic vibration table is provided with a light path channel allowing the measuring light to penetrate through and reach the laser reflector so as to detect the movement of the moving part of each axial electromagnetic vibration table;

the Z-axis laser reflector is arranged on the surface of a moving part of the Z-axis electromagnetic vibration table, the Z-axis laser reflector is over against an auxiliary reflector which is obliquely arranged, measuring light emitted by the Z-axis laser vibration meter reaches the Z-axis laser reflector through the auxiliary reflector, and the movement of the moving part of the Z-axis electromagnetic vibration table is detected; the auxiliary reflector is fixed on the base through a support.

Further, the actual vibration waveform output by the standard sensor is amplified by an amplifier group and then input into the feedback controller; the amplified actual vibration waveform is input into a processor through a multi-channel data acquisition device, and the processor stores the amplified actual vibration waveform.

Furthermore, each axial electromagnetic vibration table is connected with the three-dimensional vibration platform through a motion decoupling device corresponding to each vibration table;

the motion decoupling device comprises a first frame and a second frame which are made of rigid materials, wherein the first frame and the second frame are buckled with each other, the first frame and the second frame are respectively composed of an outer edge, an inner edge, a first connecting side edge and a second connecting side edge between the outer edge and the inner edge, the outer edge and the inner edge of the frame are opposite, and the inner edge of the frame is inserted into the other frame;

an airflow channel and a vent hole communicated with the airflow channel are arranged in the inner edge of the first frame, and the vent hole is communicated with the outside; micro gaps are formed between the inner edge of the first frame and the inner edge and the outer edge of the second frame, and the micro gaps form air floatation guide rails of the inner edge of the first frame; a space for preventing the inner edge of the second frame from contacting with the outer edge of the first frame is arranged between the inner edge of the second frame and the outer edge of the first frame; the air flow channel is communicated with an external compressed air source;

the outer edge of the first frame is connected with the electromagnetic vibration table, and the outer edge of the second frame is connected with the three-dimensional vibration table.

Further, the interior limit of first frame be equipped with many airflow channel, evenly distributed is a plurality of on every tributary air flue the air vent.

Furthermore, the airflow channel comprises a plurality of branch airflow channels arranged in parallel and a main airflow channel communicated with all the branch airflow channels, the main airflow channel is connected with the external compressed air source, one end of each branch airflow channel is communicated with the main airflow channel, and the other end of each branch airflow channel is sealed by a sealing device.

Or one end of the air flow channel is sealed, and the other end of the air flow channel is directly connected with the external compressed air source.

Further, the frame is a rectangular frame, a circular frame, an oval frame or a trapezoidal frame.

The technical conception of the utility model is that: the multi-channel data acquisition unit can acquire output signals of each axial laser vibration meter, the standard sensor group and the calibrated sensor and transmit the output signals to a PC (personal computer) used as a processor through a computer interface for data processing; the PC can control the operation parameters of the multi-channel data acquisition device, the multi-channel signal generator and the feedback controller through the computer interface.

The PC machine reads the output signals of all the axial laser vibration measuring instruments collected by the data collector, calculates the current actual vibration displacement of all the axial vibration tables, converts the current actual vibration displacement into actual vibration levels, compares the actual vibration levels of all the axial vibration tables with preset vibration levels, adjusts the amplitude of the output signals of the multi-channel signal generator, and realizes the automatic adjustment of the vibration levels of all the axial vibration tables; the feedback controller obtains a deviation by carrying out difference operation on a standard signal output by the multi-channel signal generator and a detection signal of each axial standard sensor, outputs the deviation to the power amplifier group after a control algorithm, and respectively drives the X-direction, Y-direction and Z-direction electromagnetic vibration tables to carry out deviation rectification movement, thereby realizing feedback control on the three-component standard vibration table and further improving the operation precision of the three-component standard vibration table; and the PC calculates the sensitivity matrix of the calibrated sensor according to the output signals of the calibrated three-dimensional vibration measurement sensor acquired by the multi-channel data acquisition unit, and completes calibration and calibration of the calibrated sensor.

Under the action of a PC (personal computer), the three-component standard vibration table outputs three-dimensional standard vibration, wherein a is [ a ]_x a_y a_z]The vibration acceleration vector output by the three-component standard vibration table, namely the vibration acceleration vector applied to the three-dimensional vibration measurement sensor to be corrected, wherein a_jIs the j-axis axial acceleration component, (j ═ x, y, z); and V is [ V ]_x Y_y V_z]^TFor the calibrated three-dimensional vibration-measuring sensor to output a voltage, where V_jThe relationship between the input and output quantities of the three-dimensional vibration measurement sensor to be corrected is as follows: and a is S.V, wherein S is a sensitivity matrix of the three-dimensional vibration measurement sensor to be corrected, and can be expressed as:

$S=\left[\begin{array}{ccc}{S}_{\mathrm{xx}}& S_{\mathrm{xy}}& S_{\mathrm{xz}}\\ S_{\mathrm{yx}}& S_{\mathrm{yy}}& S_{\mathrm{yz}}\\ S_{\mathrm{zx}}& S_{\mathrm{zy}}& S_{\mathrm{zz}}\end{array}\right]$

wherein the diagonal elements of the matrix (e.g. S)_jjJ ═ x, y, z) is a relationship between the acceleration component actually applied to each axial direction of the three-dimensional vibration measuring sensor to be corrected and the output quantity corresponding to each axial direction of the three-dimensional vibration measuring sensor to be corrected,while the non-diagonal elements are the coupling relationship (e.g. S) between the different output shafts of the three-dimensional vibration sensor to be calibrated_jlFor the coupling size of l-axis to j-axis, j ═ x, y, z, l ═ x, y, z, j ≠ l). The calibration of the three-dimensional vibration sensor to be calibrated is to calculate the values of the elements of the sensitivity matrix S, and the off-diagonal elements of the matrix S are generally not 0 because of the coupling between the dimensions of the three-dimensional vibration sensor to be calibrated. For this purpose, three mutually orthogonal acceleration vectors can be applied to the three-dimensional vibration measurement sensor to be calibrated three times, the corresponding sensor outputs can be respectively obtained, and a sensitivity matrix can be obtained through calculation, and the process can be expressed as follows:

a_i＝S·V_o

then:

S＝a_i·V_o ^-1

wherein, $a_i=\left[\begin{array}{c}{a}_{1i}\\ a_{2i}\\ a_{3i}\end{array}\right]=\left[\begin{array}{ccc}{a}_{1\mathrm{<figure-callout\; id="1"\; label="xi\; a"\; filenames="HDA0000083077040000011.png,HDA0000083077040000031.png"\; state="\{\{state\}\}">xi</figure-callout>}}& a_{}{}_{1\mathrm{yi}}& a_{1\mathrm{zi}}\\ a_{2\mathrm{<figure-callout\; id="2"\; label="xi\; a"\; filenames="HDA0000083077040000011.png"\; state="\{\{state\}\}">xi</figure-callout>}}& a_{}{}_{2\mathrm{yi}}& a_{2\mathrm{zi}}\\ a_{3\mathrm{<figure-callout\; id="3"\; label="xi\; a"\; filenames="HDA0000083077040000011.png,HDA0000083077040000032.png"\; state="\{\{state\}\}">xi</figure-callout>}}& a_{}{}_{3\mathrm{yi}}& a_{3\mathrm{zi}}\end{array}\right]$ for application to acceleration matrices of three-dimensional vibration-measuring sensors to be calibrated, a_jiAcceleration vector (j is 1, 2, 3) applied to the three-dimensional vibration measurement sensor to be corrected at the j-th time, a_jliIs a_jiA component in the l-axis direction (j ═ 1, 2, 3, l ═ x, y, z); $V_o=\left[\begin{array}{ccc}{V}_{o1}& V_{o2}& {\mathrm{<figure-callout\; id="3"\; label="V\; o"\; filenames="HDA0000083077040000011.png,HDA0000083077040000032.png"\; state="\{\{state\}\}">V</figure-callout>}}_o\end{array}\right]=\left[\begin{array}{ccc}{V}_{o1x}& V_{o2x}& V_{o3x}\\ V_{o1y}& V_{o2y}& V_{o3y}\\ V_{o1z}& V_{o2z}& V_{o3z}\end{array}\right],$ V_ois an output matrix of the calibrated three-dimensional vibration measuring sensor, V_ojJ-th sensor output (j is 1, 2, 3), V_ojlIs a V_ojThe component in the l-axis direction ( j 1, 2, 3, l x, y, z).

The utility model discloses under laser vibrometer, standard sensor, PC and feedback controller effect, accomplish the three-dimensional vibration of cubic acceleration vector quadrature each other, gather three-dimensional vibration measurement sensor output at every turn by multichannel data collection station, calculate in the PC and obtain the sensitivity matrix by the three-dimensional vibration measurement sensor of school, accomplish to the calibration and the demarcation by the school sensor.

The utility model has the advantages of convenient realization, high detection precision and wide applicability.

Drawings

Fig. 1 is a structural diagram of the present invention.

Fig. 2 is an overall structure diagram of the motion decoupling device.

Fig. 3 is an axial cross-sectional view of the motion decoupling assembly.

Fig. 4 is a sectional view taken along line C-C of fig. 3.

FIG. 5 is a schematic diagram of the X-direction vibration detection of the X-direction laser vibrometer.

FIG. 6 is a schematic view of a Z-direction vibration detection by a Z-direction laser vibrometer.

FIG. 7 is a block diagram of a three component vibration calibration system.

Detailed Description

Example one

Reference is made to FIGS. 1, 5, 6 and 7

The three-component vibration calibration device comprises a three-component standard vibration table, wherein the three-component standard vibration table comprises a base 8, an X-direction electromagnetic vibration table 1 vibrating along the X axial direction, a Y-direction electromagnetic vibration table 5 vibrating along the Y axial direction, a Z-direction electromagnetic vibration table 7 vibrating along the Z axial direction and a three-dimensional vibration platform 3 connected with the three electromagnetic vibration tables 1, 5 and 7 are arranged on the base, and a calibrated three-dimensional vibration measurement sensor 30 is arranged on the three-dimensional vibration platform 3;

each axial electromagnetic vibration table 1, 5, 7 is provided with a laser vibration meter 9, 10, 11 for detecting the axial vibration, vibration signals obtained by the laser vibration meter 9, 10, 11 are input into a data acquisition unit, and the data acquisition unit is connected with a Processor (PC);

each axial electromagnetic vibration table 1, 5 and 7 is provided with a standard sensor 17, 18 and 19 which can obtain the actual vibration waveform representing the axial vibration table, and the output ends of the standard sensors 17, 18 and 19 are connected with the input end of a feedback controller;

the other input end of the feedback controller is connected with a multi-channel signal generator, the multi-channel signal generator sends out multi-channel standard vibration signals, the multi-channel standard vibration signals are subtracted from the output of each axial standard sensor in the feedback controller, and the feedback controller obtains a deviation signal; the deviation signal output by the feedback controller is calculated according to a control algorithm, then is output to a power amplifier group for power amplification, and is input into the vibrating table in the corresponding axial direction so as to drive the vibrating table in the corresponding axial direction to generate deviation rectifying motion; the multi-channel signal generator is controlled by the processor;

the output voltage of the three-dimensional vibration measurement sensor 30 to be corrected is input into the data acquisition unit;

the processor reads in output signals of the laser vibration meter, the calibrated sensor and the like acquired by the data acquisition unit and calculates a sensitivity matrix of the calibrated three-dimensional vibration measuring sensor 12;

a＝[a_x a_y a_z]a is a three-component vibration acceleration vector formed by vibration accelerations in the X axis direction, the Y axis direction and the Z axis direction, namely a vibration acceleration vector applied to the three-dimensional vibration measurement sensor to be corrected; the output voltage of the three-dimensional vibration measuring sensor to be calibrated is V ═ V_x V_y V_z]^T，V_jRepresents the j-axis axial voltage output component; the relationship between the input and output quantities of the three-dimensional vibration measurement sensor to be corrected is as follows: a is S.V, S is a sensitivity matrix of the three-dimensional vibration measurement sensor to be corrected, $S=\left[\begin{array}{ccc}{S}_{\mathrm{xx}}& S_{\mathrm{xy}}& S_{\mathrm{xz}}\\ S_{\mathrm{yx}}& S_{\mathrm{yy}}& S_{\mathrm{yz}}\\ S_{\mathrm{zx}}& S_{\mathrm{zy}}& S_{\mathrm{zz}}\end{array}\right],$ S_jjrepresenting the relation between the acceleration component applied to the three-dimensional vibration platform in each axial direction and the axial output quantity corresponding to the three-dimensional vibration measurement sensor to be corrected; s_jlFor coupling relationship between the l axis and the j axis, l ≠ x, y, z, and j ≠ l.

X, Y the layout and measurement scheme of the axial laser vibration meter are the same, taking the X direction as an example, the back of the moving part 16 of the electromagnetic vibration table 1 is provided with a laser reflector 15, the laser vibration meter 9 measures the light incident from the X direction to the bottom of the electromagnetic vibration table 1, penetrates through the vibration table magnetic steel 14 and the magnet yoke 13, is incident on the laser reflector 15, and detects the movement of the moving part 16 of the electromagnetic vibration table;

the Z-axis laser reflector is arranged on the surface of a moving part 17 of the Z-axis electromagnetic vibration table 7, the Z-axis laser reflector 18 is over against an auxiliary reflector 19 which is obliquely arranged, the measuring light emitted by the Z-axis laser vibration meter 11 reaches the Z-axis laser reflector 18 through the auxiliary reflector 19, and the movement of the moving part 17 of the Z-axis electromagnetic vibration table is detected; the auxiliary reflector 19 is fixed to the base 8 through a bracket 12.

The actual vibration waveform output by the standard sensor is amplified by the amplifier group and then input into the feedback controller; the amplified actual vibration waveform is input into a processor through a multi-channel data acquisition device, and the processor stores the amplified actual vibration waveform.

The technical conception of the utility model is that: the multi-channel data acquisition unit can acquire output signals of each axial laser vibration meter, the standard sensor group and the calibrated sensor and transmit the output signals to a PC (personal computer) used as a processor through a computer interface for data processing; the PC can control the operation parameters of the multi-channel data acquisition device, the multi-channel signal generator and the feedback controller through the computer interface.

The PC machine reads the output signals of all the axial laser vibration measuring instruments collected by the data collector, calculates the current actual vibration displacement of all the axial vibration tables, converts the current actual vibration displacement into actual vibration levels, compares the actual vibration levels of all the axial vibration tables with preset vibration levels, adjusts the amplitude of the output signals of the multi-channel signal generator, and realizes the automatic adjustment of the vibration levels of all the axial vibration tables; the feedback controller obtains a deviation by carrying out difference operation on a standard signal output by the multi-channel signal generator and a detection signal of each axial standard sensor, outputs the deviation to the power amplifier group after a control algorithm, and respectively drives the X-direction, Y-direction and Z-direction electromagnetic vibration tables to carry out deviation rectification movement, thereby realizing feedback control on the three-component standard vibration table and further improving the operation precision of the three-component standard vibration table; and the PC calculates the sensitivity matrix of the calibrated sensor according to the output signals of the calibrated three-dimensional vibration measurement sensor acquired by the multi-channel data acquisition unit, and completes calibration and calibration of the calibrated sensor.

Under the action of a PC (personal computer), the three-component standard vibration table outputs three-dimensional standard vibration, wherein a is [ a ]_x a_y a_z]The vibration acceleration vector output by the three-component standard vibration table, namely the vibration acceleration vector applied to the three-dimensional vibration measurement sensor to be measured, wherein, a_jIs the j-axis axial acceleration component, (j ═ x, y, z); and V is [ V ]_x V_y V_z]^TFor the calibrated three-dimensional vibration-measuring sensor to output a voltage, where V_jThe relationship between the input and output quantities of the three-dimensional vibration measurement sensor to be corrected is as follows: and a is S.V, wherein S is a sensitivity matrix of the three-dimensional vibration measurement sensor to be corrected, and can be expressed as:

$S=\left[\begin{array}{ccc}{S}_{\mathrm{xx}}& S_{\mathrm{xy}}& S_{\mathrm{xz}}\\ S_{\mathrm{yx}}& S_{\mathrm{yy}}& S_{\mathrm{yz}}\\ S_{\mathrm{zx}}& S_{\mathrm{zy}}& S_{\mathrm{zz}}\end{array}\right]$

wherein the diagonal elements of the matrix (e.g. S)_jjJ ═ x, y, and z) is a relationship between the acceleration component actually applied to each axial direction of the three-dimensional vibration sensor to be corrected and the output quantity corresponding to each axial direction of the three-dimensional vibration sensor to be corrected, and the non-diagonal element is an inter-axial coupling relationship between different output shafts of the three-dimensional vibration sensor to be corrected (for example, S_jlFor the coupling size of l-axis to j-axis, j ═ x, y, z, l ═ x, y, z, j ≠ l). The calibration of the three-dimensional vibration sensor to be calibrated is to calculate the values of the elements of the sensitivity matrix S, and the off-diagonal elements of the matrix S are generally not 0 because of the coupling between the dimensions of the three-dimensional vibration sensor to be calibrated. For this purpose, three mutually orthogonal accelerations can be applied to the three-dimensional vibration-measuring sensor to be calibrated in three timesThe vectors, each of which finds its corresponding sensor output, are calculated to obtain a sensitivity matrix, which can be expressed as follows:

a_i＝S·V_o

then:

S＝a_i·V_o ^-1

wherein, $a_i=\left[\begin{array}{c}{a}_{1i}\\ a_{2i}\\ a_{3i}\end{array}\right]=\left[\begin{array}{ccc}{a}_{1\mathrm{xi}}& a_{1\mathrm{yi}}& a_{1\mathrm{zi}}\\ a_{2\mathrm{xi}}& a_{2\mathrm{yi}}& a_{2\mathrm{zi}}\\ a_{3\mathrm{xi}}& a_{3\mathrm{yi}}& a_{3\mathrm{zi}}\end{array}\right]$ for application to acceleration matrices of three-dimensional vibration-measuring sensors to be calibrated, a_jiAcceleration vector (j is 1, 2, 3) applied to the three-dimensional vibration measurement sensor to be corrected at the j-th time, a_jliIs a_jiA component in the l-axis direction (j ═ 1, 2, 3, l ═ x, y, z); $V_o=\left[\begin{array}{ccc}{V}_{o1}& V_{o2}& {\mathrm{<figure-callout\; id="3"\; label="V\; o"\; filenames="HDA0000083077040000011.png,HDA0000083077040000032.png"\; state="\{\{state\}\}">V</figure-callout>}}_o\end{array}\right]=\left[\begin{array}{ccc}{V}_{o1x}& V_{o2x}& V_{o3x}\\ V_{o1y}& V_{o2y}& V_{o3y}\\ V_{o1z}& V_{o2z}& V_{o3z}\end{array}\right],$ V_ois an output matrix of the calibrated three-dimensional vibration measuring sensor, V_ojJ-th sensor output (j is 1, 2, 3), V_ojlIs a V_ojThe component in the l-axis direction ( j 1, 2, 3, l x, y, z).

The utility model discloses under laser vibrometer, standard sensor, PC and feedback controller effect, accomplish the three-dimensional vibration of cubic acceleration vector quadrature each other, gather three-dimensional vibration measurement sensor output at every turn by multichannel data collection station, calculate in the PC and obtain the sensitivity matrix by the three-dimensional vibration measurement sensor of school, accomplish to the calibration and the demarcation by the school sensor.

The utility model has the advantages of convenient realization, high detection precision and wide applicability.

Example two

With reference to FIGS. 1-4

The present embodiment is different from the first embodiment in that: each axial electromagnetic vibration table is connected with the three-dimensional vibration platform 3 through a motion decoupling device 2, 4 and 6 corresponding to the vibration table;

the motion decoupling device comprises a first frame A and a second frame B which are made of rigid materials, wherein the first frame A and the second frame B are buckled with each other, the first frame and the second frame are respectively composed of an outer edge, an inner edge, a first connecting side edge and a second connecting side edge between the outer edge and the inner edge, the outer edges 21 and 25 of the frames are respectively opposite to the inner edges 24 and 28 of the frames, the inner edges 24 and 28 of the frames are inserted into the other frame, and first connecting side edges 22 and 26 and second connecting side edges 23 and 27 are arranged between the outer edges 21 and 25 and the inner edges 24 and 28;

an airflow channel and a vent hole 244 communicated with the airflow channel are arranged in the first frame inner edge 24, and the vent hole 244 is communicated with the outside; micro gaps are arranged between the inner edge 24 of the first frame A and the inner edge 28 and the outer edge 25 of the second frame B, and the micro gaps form air floatation guide rails; the inner edge 28 of the second frame B and the outer edge 21 of the first frame A are provided with a gap for preventing the inner edge of the second frame from contacting with the outer edge of the first frame; the air flow channel 243 is communicated with an external compressed air source;

the outer edge 21 of the first frame A is connected with the electromagnetic vibration table, and the outer edge 25 of the second frame B is connected with the three-dimensional vibration platform 3.

The inner side 24 of the first frame a is provided with a plurality of airflow channels, and each branch airflow channel is uniformly distributed with a plurality of the vent holes 244.

The air flow channel comprises a plurality of branch air passages 243 arranged in parallel and a main flow air passage 221 communicated with all the branch air passages 243, the main flow air passage 221 is connected with the external compressed air source, one end of each branch air passage 243 is communicated with the main flow air passage 221, and the other end of each branch air passage 243 is sealed by a sealing device.

Bezel A, B is a rectangular frame, a circular frame, an oval frame, or a trapezoidal frame.

The utility model discloses a working process does: when a certain axial electromagnetic vibration table generates motion, the vibration is transmitted to the outer edge of the first frame connected with the vibration table, because the frame is made of rigid materials, the vibration of the vibration table is transmitted to the inner edge of the frame through two connecting sides between the outer edge and the inner edge of the first frame, the vibration is transmitted to the second frame through the inner edge of the first frame and the air film, and the second frame transmits the axial vibration signal to the three-dimensional vibration platform. The motion of the three-dimensional vibration platform is the resultant of X, Y, Z motion towards the electromagnetic vibration platform.

Set up airflow channel at the interior limit of first frame, compressed air outwards overflows through the vent hole, can form static pressure air supporting between the interior limit of first frame and the interior limit and the outside of second frame, and is good to corresponding axial motion power transmission performance to the resistance that produces two other axial motion is little, has accorded with the requirement of motion decoupling well.

The utility model adopts three electromagnetic vibration tables and three lock catch type motion decoupling devices to form a three-component standard vibration table; the designed lock catch type motion decoupling device adopts a lock catch type structure and static pressure air floatation support, avoids interference in a non-transmission direction while well realizing force transmission, and well solves the problem of three-component motion decoupling.

The utility model has the advantages of simple structure, simple to operate, decoupling zero are effectual, be suitable for vibration calibration system.

EXAMPLE III

The difference between this embodiment and the second embodiment is: one end of the air flow channel is sealed, and the other end of the air flow channel is directly connected with the external compressed air source. The rest of the structure is the same.

The embodiments described in this specification are merely illustrative of implementations of the inventive concepts, and the scope of the invention should not be considered limited to the specific forms set forth in the embodiments, but rather the scope of the invention is intended to include equivalent technical means as would be understood by those skilled in the art from the inventive concepts.

Claims (9)

1. The three-component vibration calibration device comprises a three-component standard vibration table, wherein the three-component standard vibration table comprises a base, an X-direction electromagnetic vibration table vibrating along the X axial direction, a Y-direction electromagnetic vibration table vibrating along the Y axial direction, a Z-direction electromagnetic vibration table vibrating along the Z axial direction and a three-dimensional vibration platform connected with the three electromagnetic vibration tables are arranged on the base, and a calibrated three-dimensional vibration measurement sensor is arranged on the three-dimensional vibration platform;

the method is characterized in that: each axial electromagnetic vibration table is provided with a laser vibration meter for detecting the axial vibration, vibration signals acquired by the laser vibration meter are input into a data acquisition unit, and the data acquisition unit is connected with a processor;

each axial electromagnetic vibration table is provided with a standard sensor capable of acquiring the actual vibration waveform representing the axial vibration table, and the output end of the standard sensor is connected with the input end of a feedback controller;

the other input end of the feedback controller is connected with a multi-channel signal generator, the multi-channel signal generator sends out multi-channel standard vibration signals, the multi-channel standard vibration signals are subtracted from the output of each axial standard sensor in the feedback controller, and the feedback controller obtains a deviation signal; the deviation signal output by the feedback controller is calculated according to a control algorithm, then is output to a power amplifier group for power amplification, and is input into the vibrating table in the corresponding axial direction so as to drive the vibrating table in the corresponding axial direction to generate deviation rectifying motion; the multi-channel signal generator is controlled by the processor;

the output voltage of the three-dimensional vibration measurement sensor to be corrected is input into the data acquisition unit;

and the processor reads in output signals of the laser vibration meter and the corrected sensor collected by the data collector and calculates a sensitivity matrix of the corrected three-dimensional vibration measuring sensor.

2. The three-component vibration calibration device of claim 1, wherein: x, Y laser reflectors are arranged on the back of the moving parts of the axial electromagnetic vibration table, the laser vibration meter measuring light is incident from the bottom of the X, Y axial electromagnetic vibration table, each axial electromagnetic vibration table is provided with a light path channel allowing the measuring light to penetrate through and reach the laser reflectors so as to detect the movement of the moving parts of each axial electromagnetic vibration table;

the Z-axis laser reflector is arranged on the surface of a moving part of the Z-axis electromagnetic vibration table, the Z-axis laser reflector is over against an auxiliary reflector which is obliquely arranged, measuring light emitted by the Z-axis laser vibration meter reaches the Z-axis laser reflector through the auxiliary reflector, and the movement of the moving part of the Z-axis electromagnetic vibration table is detected; the auxiliary reflector is fixed on the base through a support.

3. The three-component vibration calibration device of claim 2, wherein: the actual vibration waveform output by the standard sensor is amplified by the amplifier group and then input into the feedback controller; the amplified actual vibration waveform is input into a processor through a multi-channel data acquisition device, and the processor stores the amplified actual vibration waveform.

4. A three-component vibration calibration device according to any one of claims 1 to 3 wherein: each axial electromagnetic vibration table is connected with the three-dimensional vibration platform through a motion decoupling device corresponding to each vibration table;

the motion decoupling device comprises a first frame and a second frame which are made of rigid materials, wherein the first frame and the second frame are buckled with each other, the first frame and the second frame are respectively composed of an outer edge, an inner edge, a first connecting side edge and a second connecting side edge between the outer edge and the inner edge, the outer edge and the inner edge of the frame are opposite, and the inner edge of the frame is inserted into the other frame;

an airflow channel and a vent hole communicated with the airflow channel are arranged in the inner edge of the first frame, and the vent hole is communicated with the outside; micro gaps are formed between the inner edge of the first frame and the inner edge and the outer edge of the second frame, and the micro gaps form air floatation guide rails of the inner edge of the first frame; a space for preventing the inner edge of the second frame from contacting with the outer edge of the first frame is arranged between the inner edge of the second frame and the outer edge of the first frame; the air flow channel is communicated with an external compressed air source;

the outer edge of the first frame is connected with the electromagnetic vibration table, and the outer edge of the second frame is connected with the three-dimensional vibration table.

5. The three-component vibration calibration device of claim 4, wherein: the interior limit of first frame be equipped with many airflow channel, evenly distributed is a plurality of on every tributary air flue the air vent.

6. The three-component vibration calibration device of claim 5, wherein: the air flow channel comprises a plurality of branch air passages arranged in parallel and a main flow air passage communicated with all the branch air passages, the main flow air passage is connected with the external compressed air source, one end of each branch air passage is communicated with the main flow air passage, and the other end of each branch air passage is sealed by a sealing device.

7. The three-component vibration calibration device of claim 6, wherein: one end of the air flow channel is sealed, and the other end of the air flow channel is directly connected with the external compressed air source.

8. The three-component vibration calibration device of claim 6, wherein: the frame is a rectangular frame, a circular frame, an oval frame or a trapezoidal frame.

9. The three-component vibration calibration device of claim 7, wherein: the frame is a rectangular frame, a circular frame, an oval frame or a trapezoidal frame.

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