CN106289619A - A kind of high precision high rigidity six-dimensional force measuring table - Google Patents

A kind of high precision high rigidity six-dimensional force measuring table Download PDF

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Publication number
CN106289619A
CN106289619A CN201610818988.1A CN201610818988A CN106289619A CN 106289619 A CN106289619 A CN 106289619A CN 201610818988 A CN201610818988 A CN 201610818988A CN 106289619 A CN106289619 A CN 106289619A
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China
Prior art keywords
rigidity
along
piezoelectric
force transducer
precision
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CN201610818988.1A
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Chinese (zh)
Inventor
夏明�
夏明一
徐振邦
李昂
霍琦
顾营迎
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN201610818988.1A priority Critical patent/CN106289619A/en
Publication of CN106289619A publication Critical patent/CN106289619A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezo-electric means

Abstract

The present invention relates to a kind of high precision high rigidity six-dimensional force measuring table, solve existing measurement system and can not meet the technical problem that rigidity and the measurement use of sensor independent assortment are required by microvibration measurement.A kind of high precision high rigidity six-dimensional force measuring table that the present invention provides, reasonable Arrangement by the Common piezoelectricity force transducer of multiple diverse locations, realize space by software to decouple in real time, so that the micro-disturbance signal of six-freedom degree can utilize existing one-way piezoelectric force transducer to measure in real time, overcome and lack high accuracy three-dimensional sensor and measure the problem postponed so that real-time accuracy is greatly improved.This measuring table is internal compact, does not has movable part, and rigidity is relatively big, measures frequency range wider.The measuring table of the present invention, by platform structure optimization, devises up to 20 sensor mounting interfaces, can determine most suitable testing scheme by different measurement environment, improve adaptability and the certainty of measurement of measuring table.

Description

A kind of high precision high rigidity six-dimensional force measuring table
Technical field
The present invention relates to a kind of measuring table, be specifically related to a kind of high precision high rigidity six-dimensional force measuring table, can be used for Tiny perturbation load vibration signal on six-freedom degree in spacecraft inside is carried out kinetic measurement.
Background technology
Current spacecraft is all with substantial amounts of optical element, and pointing accuracy and degree of stability are all proposed the highest by they Requirement.It addition, in modern spacecraft attitude control system, reaction wheel, single frame moment gyro and solar wing drive mechanism Etc. being the critical elements in its control system, they are while providing necessary control power, and some also can be caused harmful to shake Dynamic (for the sake of simplicity, below above-mentioned three germlines being completely referred to as disturbing source).These disturbances mainly, bearing uneven by flywheel is disturbed Dynamic, motor disturbance, motor drive error etc. to cause, and wherein flywheel imbalance is the main reason causing flywheel to vibrate, this A little perturbed forces and disturbing moment can reduce the performance indications of elaboration instrument in space, therefore measure and analyze spacecraft and effectively carry The dynamic characteristic of lotus disturbance, improves the attitude control accuracy of spacecraft for analyzing and eliminating disturbance and strengthens spacecraft Safe design has very important engineering significance.
Owing to the disturbance of spacecraft disturbing source is the least, indivedual payload such as momenttum wheel can only produce in direction, three, space The faint disturbance of more than tens milli-newton of milli-newton, wants in the ground experiment room with relatively strong jamming pattern noise Measure this type of disturbance the most difficult, and the required precision of its respective sensor is the highest.Yet there are no both at home and abroad at present and may be used for Measuring the measurement system of microvibration, existing measurement system can not meet high rigidity and the use of sensor independent assortment measurement Requirement.
Summary of the invention
The invention solves the problems that existing measurement system can not meet microvibration and measure rigidity and the survey of sensor independent assortment The technical problem using requirement of amount, it is provided that a kind of high precision high rigidity six-dimensional force measuring table.
In order to solve above-mentioned technical problem, technical scheme is specific as follows:
A kind of high precision high rigidity six-dimensional force measuring table, including: base plate, base, loading disk, housing, installs along Z-direction Piezoelectric force transducer, the piezoelectric force transducer installed along X and Y-direction, data acquisition and processing system;
The described piezoelectric force transducer along Z-direction installation, between base upper surface and loading disk lower surface, passes through bolt Compress and pretightning force is provided, measure vibration force and X, the oscillatory torque of Y-direction of Z-direction;The described piezoelectric forces sensing installed along Z-direction Device is arranged on the convex position that loading disk lower surface is reserved in the way of line is symmetrical, and its number is at least 4, is at most 8;
The described piezoelectric force transducer installed along X and Y-direction is bolted on housing and loading disk side, and it is installed Direction and Z axis are spatial vertical relation, and bolt is tightened in the side of loading disk simultaneously, to measure X, the vibration force of Y-direction and Z side To oscillatory torque;The described piezoelectric force transducer installed along X and Y-direction is arranged on loading disk lateral grooves in the way of angle is symmetrical Position, its number is at least 4, is at most 12;
Described housing is fixed by screws in the lower surface of base plate;Described base is bolted on base plate;
When microvibration source produces vibration, the piezoelectric force transducer along Z-direction installation, the piezoelectric forces along X and Y-direction installation pass Sensor produces voltage signal output, is connected with data acquisition and processing system by signal transmssion line, by high impedance input signal It is transformed to Low ESR output, and the ultra-weak electronic signal of amplifying piezo-electric element, eventually through the analyzing and processing to the signal of telecommunication, is converted into Three microvibration force signals and three microvibration torque signals, and then analyze the vibration characteristics in microvibration source.
In technique scheme, the described piezoelectric force transducer installed along Z-direction, the piezoelectric forces installed along X and Y-direction pass Sensor is made up of, with data acquisition and processing system piezoelectric force transducer insulation crust and two panels piezoelectric force transducer piezoelectric ceramics Constitute differential circuitry, improve Signal-to-Noise.
In technique scheme, described base plate and base are steel plate structure.
In technique scheme, the shape of cross section of described loading disk is square.
In technique scheme, the described number along the piezoelectric force transducer of Z-direction installation is 4, is separately mounted to bear On the convex position that four angles of load plate lower surface are reserved.
In technique scheme, the material of described loading disk is steel alloy.
In technique scheme, data acquisition and processing system is made up of data acquisition device and computer, data acquisition The voltage signal that piezoelectric force transducer is obtained by case is converted into digital signal, and is input in computer by data wire, calculates Digital signal is analyzed and computing by machine, finally gives the signal of microvibration power.
The present invention compared with prior art has the advantage that
(1) a kind of high precision high rigidity six-dimensional force measuring table that the present invention provides, common by multiple diverse locations The reasonable Arrangement of piezoelectric force transducer, realizes space by software and decouples in real time, so that the micro-disturbance letter of six-freedom degree Number existing one-way piezoelectric force transducer can be utilized to measure in real time, overcome and lack high accuracy three-dimensional sensor and measurement is prolonged Slow problem so that real-time accuracy is greatly improved.This measuring table is internal compact, does not has movable part, and rigidity is relatively big, surveys Amount frequency range is wider.
(2) measuring table of the present invention is by platform structure optimization, devises up to 20 sensor mounting interfaces, can To determine most suitable testing scheme by different measurement environment, improve adaptability and the certainty of measurement of measuring table.
(3) measuring table of the present invention is by the pretightning force of reasonable adjusting bolt, it is achieved that the amplification of signal also can be entered Row has the accurate measurement under the conditions of the actual motion in bigger quality disturbance source, improves the reliability of measurement.
(4) fundamental frequency of the measuring table of the present invention can reach more than 800Hz, improves the effective of this measuring table measurement Scope, can meet the high stiffness measurement requirement of some disturbing source.
(5) measuring table of the present invention is by designing the optimization of structure, loading disk, sensor and base, base plate and outer Frame Planar Mechanisms the most each other connects, and is effectively improved structure fundamental frequency.
Accompanying drawing explanation
With detailed description of the invention, the present invention is described in further detail below in conjunction with the accompanying drawings.
The structural representation of the high precision high rigidity six-dimensional force measuring table that Fig. 1 provides for the present invention;
The internal structure schematic diagram of the high precision high rigidity six-dimensional force measuring table that Fig. 2 provides for the present invention;
The profile of the high precision high rigidity six-dimensional force measuring table that Fig. 3 provides for the present invention;
The partial schematic diagram of the high precision high rigidity six-dimensional force measuring table that Fig. 4 provides for the present invention;
The single order fundamental frequency displacement cloud atlas of the high precision high rigidity six-dimensional force measuring table that Fig. 5 provides for the present invention;
Measure, under the single pulse excitation of the high precision high rigidity six-dimensional force measuring table that Fig. 6 provides for the present invention, the letter obtained Number with the comparison diagram of actual value.
Reference in figure is expressed as:
Piezoelectric force transducer, 6-that 1-base plate, 2-base, 3-loading disk, 4-housing, 5-install along Z-direction pacify along X and Y-direction The piezoelectric force transducer of dress, 7-data acquisition and processing system.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in detail.
Seeing Fig. 1-4, the high precision high rigidity six-dimensional force measuring table that the present invention provides, including: base plate 1, base 2, negative Load plate 3, housing 4, the piezoelectric force transducer 5 installed along Z-direction, piezoelectric force transducer 6, data acquisition and the place installed along X and Y-direction Reason system 7;The described piezoelectric force transducer 5 along Z-direction installation, between base 2 upper surface and loading disk 3 lower surface, passes through spiral shell Bolt compresses provides pretightning force, measures vibration force and X, the oscillatory torque of Y-direction of Z-direction;The described piezoelectric forces installed along Z-direction passes Sensor 5 is arranged on the convex position that loading disk 3 lower surface is reserved in the way of line is symmetrical, and its number is at least 4, is at most 8;The described piezoelectric force transducer 6 installed along X and Y-direction is bolted on housing 4 and loading disk 3 side, and it is installed Direction and Z axis are spatial vertical relation, and to ensure that it can measure oscillatory torque about the z axis, bolt is tightened in loading disk 3 simultaneously Side, to measure X, the vibration force of Y-direction and the oscillatory torque of Z-direction;The described piezoelectric force transducer 6 installed along X and Y-direction with The mode of angle symmetry is arranged on loading disk 3 lateral grooves position, and its number is at least 4, is at most 12;Described housing 4 leads to Cross screw and be fixed on the lower surface of base plate 1;Described base 2 is bolted on base plate 1;
When microvibration source produces vibration, along the piezoelectric force transducer 5 of Z-direction installation, along X and the piezoelectric forces of Y-direction installation Sensor 6 produces voltage signal output, is connected with data acquisition and processing system 7 by signal transmssion line, is inputted by high impedance Signal is transformed to Low ESR output, and the ultra-weak electronic signal of amplifying piezo-electric element, eventually through the analyzing and processing to the signal of telecommunication, turns Turn to three microvibration force signals and three microvibration torque signals, can accurately analyze microvibration based on this The vibration characteristics in source.
The described piezoelectric force transducer 5 installed along Z-direction, the piezoelectric force transducer 6 installed along X and Y-direction are passed by piezoelectric forces Sensor insulation crust and two panels piezoelectric force transducer piezoelectric ceramics composition, constitute difference channel with data acquisition and processing system 7 System, improves Signal-to-Noise.
The described piezoelectric force transducer 5 along Z-direction installation can be installed at multiple diverse locations, at most can install 8, and Can independent assortment installation site and quantity;The piezoelectric force transducer 6 installed along X and Y-direction can be installed at multiple diverse locations, at most 12 can be installed, and can independent assortment installation site and quantity, with the use demand arranging in pairs or groups different.Described installs along Z-direction Piezoelectric force transducer 5, the fixing bolt of piezoelectric force transducer 6 installed along X and Y-direction must be logical in the range of intensity allows Cross the torque spanner moment such as in a symmetrical manner to tighten, to improve the certainty of measurement of piezoelectric force transducer.
Described piezoelectric force transducer 5, the piezoelectric force transducer 6 installed along X and Y-direction and the data acquisition installed along Z-direction And processing system 7, by the design of negative feedback amplifier circuit, it is Low ESR output the high impedance Input transformation of piezoelectric, It is exaggerated the ultra-weak electronic signal of piezoelectric element, overcomes the shortcomings such as piezoelectric force transducer LF-response characteristic difference and drift.
Embodiment 1
Base plate 1 and base 2 are steel plate mechanism, and the shape of cross section of loading disk 3 is square, and material is steel alloy, vibration Source is arranged on the upper surface of loading disk 3, and loading disk 3 upper surface is uniformly distributed 16 screwed holes.The piezoelectric forces sensing installed along Z-direction Device 5 is distributed on the convex position that four angles of loading disk 3 lower surface are reserved, and position can be measured environment according to reality and freely select Selecting and determine, can measure vibration force and X, the oscillatory torque of Y-direction of Z-direction, its number is 4.The pressure installed along X and Y-direction Power sensor 6 is distributed in the surrounding groove location of loading disk 3 side, and environment unrestricted choice can be measured according to reality in position Determining, can measure X, the vibration force of Y-direction and the oscillatory torque of Z-direction, its number is 4.
Base plate 1 and base 2 are bolted, and base 2 top is square steel design, in order to pass through spiral shell with loading disk 3 Tether and connect;Base plate 1 is in order to be connected with ground, and piezoelectric force transducer 5 installation site installed along Z-direction is distributed in base 2 and load The reserved convex position of dish 3, piezoelectric force transducer 6 installation site installed along X and Y-direction is distributed in loading disk 3 lateral grooves position Put.Total to ensure that its rigidity meets dynamic test requirement.
Described high precision high rigidity six-dimensional force measuring table is arranged on ground, microvibration source test specimen is arranged on negative On load plate 3, the inspection piezoelectric force transducer 5 along Z-direction installation, the signal along X and the piezoelectric force transducer 6 of Y-direction installation are the most just Often, microvibration source is run afterwards so that it is produce vibration, so that along the piezoelectric force transducer 5 of Z-direction installation, along X and Y-direction peace Dress piezoelectric force transducer 6 produce voltage signal, this voltage signal by data acquisition and processing system 7 be converted into three small Vibration force signal and three microvibration torque signals, the vibration that can accurately analyze microvibration source based on this is special Property.
Data acquisition and processing system 7 is made up of data acquisition device and computer, and data acquisition device is by piezoelectric force transducer The voltage signal obtained is converted into digital signal, and is input in computer by data wire, and digital signal is carried out by computer Analyze and computing, finally give the signal of microvibration power.
The single order fundamental frequency displacement cloud atlas of the high precision high rigidity six-dimensional force measuring table that Fig. 5 provides for the present invention, this figure is Under single pulse excitation, system acquisition arrives and to obtain transmission function, by Fig. 5 it will be seen that under single pulse excitation, each piezoelectric force transducer Response signal be typical broadband signal, illustrate that the measurement of measuring table of the present invention is effective.Fig. 6 provides for the present invention The comparison diagram of signal and the actual value obtained is measured, it will be seen that be under the single pulse excitation of high precision high rigidity six-dimensional force measuring table The voltage signal of in Fig. 5 eight piezoelectric force transducers is converted to three force signals and three torque signals essences compared with actual value Spend higher.
Obviously, above-described embodiment is only for clearly demonstrating example, and not restriction to embodiment.Right For those of ordinary skill in the field, can also make on the basis of the above description other multi-form change or Variation.Here without also cannot all of embodiment be given exhaustive.And the obvious change thus extended out or Change among still in the protection domain of the invention.

Claims (7)

1. a high precision high rigidity six-dimensional force measuring table, it is characterised in that including: base plate (1), base (2), loading disk (3), housing (4), the piezoelectric force transducer (5) installed along Z-direction, the piezoelectric force transducer (6) installed along X and Y-direction, data acquisition And processing system (7);
The described piezoelectric force transducer (5) installed along Z-direction is positioned between base (2) upper surface and loading disk (3) lower surface, passes through Bolt presses provides pretightning force, measures vibration force and X, the oscillatory torque of Y-direction of Z-direction;The described piezoelectric forces installed along Z-direction Sensor (5) is arranged on the convex position that loading disk (3) lower surface is reserved in the way of line is symmetrical, and its number is at least 4, It is at most 8;
The described piezoelectric force transducer (6) installed along X and Y-direction is bolted on housing (4) and loading disk (3) side, Its installation direction and Z axis are spatial vertical relation, and bolt is tightened in the side of loading disk (3) simultaneously, to measure X, the shaking of Y-direction Power and the oscillatory torque of Z-direction;The described piezoelectric force transducer (6) installed along X and Y-direction is arranged on negative in the way of angle is symmetrical Load plate (3) lateral grooves position, its number is at least 4, is at most 12;
Described housing (4) is fixed by screws in the lower surface of base plate (1);Described base (2) is bolted on base plate (1) On;
When microvibration source produces vibration, the piezoelectric force transducer (5) along Z-direction installation, the piezoelectric forces along X and Y-direction installation pass Sensor (6) produces voltage signal output, is connected with data acquisition and processing system (7) by signal transmssion line, and high impedance is defeated Enter signal and be transformed to Low ESR output, and the ultra-weak electronic signal of amplifying piezo-electric element, eventually through the analyzing and processing to the signal of telecommunication, It is converted into three microvibration force signals and three microvibration torque signals, and then the vibration analyzing microvibration source is special Property.
High precision high rigidity six-dimensional force measuring table the most according to claim 1, it is characterised in that described pacifies along Z-direction The piezoelectric force transducer (5) of dress, the piezoelectric force transducer (6) installed along X and Y-direction are by piezoelectric force transducer insulation crust and two panels Piezoelectric force transducer piezoelectric ceramics forms, and constitutes differential circuitry with data acquisition and processing system (7), improves signal noise Ratio.
High precision high rigidity six-dimensional force measuring table the most according to claim 1, it is characterised in that described base plate (1) and Base (2) is steel plate structure.
High precision high rigidity six-dimensional force measuring table the most according to claim 1, it is characterised in that described loading disk (3) Shape of cross section be square.
High precision high rigidity six-dimensional force measuring table the most according to claim 4, it is characterised in that described along Z-direction installation The number of piezoelectric force transducer (5) be 4, be separately mounted on the convex position that four angles of loading disk (3) lower surface are reserved.
6. according to the high precision high rigidity six-dimensional force measuring table described in claim Isosorbide-5-Nitrae or 5, it is characterised in that described load The material of dish (3) is steel alloy.
High precision high rigidity six-dimensional force measuring table the most according to claim 1, it is characterised in that data acquisition and process System (7) is made up of data acquisition device and computer, and the voltage signal that piezoelectric force transducer is obtained by data acquisition device is converted into Digital signal, and be input in computer by data wire, digital signal is analyzed and computing by computer, finally gives micro- The signal of small vibration power.
CN201610818988.1A 2016-09-13 2016-09-13 A kind of high precision high rigidity six-dimensional force measuring table Pending CN106289619A (en)

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Cited By (6)

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Publication number Priority date Publication date Assignee Title
CN109781330A (en) * 2019-02-25 2019-05-21 重庆大学 Suit beam pressure-volume based on circumferential array perceives six-dimension force sensor
CN109990888A (en) * 2019-03-25 2019-07-09 中国科学院长春光学精密机械与物理研究所 A kind of wide range power measuring mechanism
CN111928988A (en) * 2020-08-12 2020-11-13 中国科学院长春光学精密机械与物理研究所 Array type disturbance vibration measurement device and array type disturbance vibration measurement control method
CN112045494A (en) * 2020-08-19 2020-12-08 山东理工大学 Bidirectional machining force measuring and compensating device for cutting machining
CN113091981A (en) * 2021-03-16 2021-07-09 南京航空航天大学 Sensor with pretightening force and measuring method
CN113739976A (en) * 2021-08-27 2021-12-03 南京航空航天大学 Six-dimensional force sensor with integrated structure decoupling

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CN103487194A (en) * 2013-10-15 2014-01-01 河北联合大学 Orthogonal decoupling six-dimensional force sensor
CN104568279A (en) * 2014-12-30 2015-04-29 南宁宇立仪器有限公司 Multi-axis force sensor
CN105092134A (en) * 2015-07-23 2015-11-25 北京航空航天大学 Combined-type three-axis force sensor and calculating method

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109781330A (en) * 2019-02-25 2019-05-21 重庆大学 Suit beam pressure-volume based on circumferential array perceives six-dimension force sensor
CN109990888A (en) * 2019-03-25 2019-07-09 中国科学院长春光学精密机械与物理研究所 A kind of wide range power measuring mechanism
CN111928988A (en) * 2020-08-12 2020-11-13 中国科学院长春光学精密机械与物理研究所 Array type disturbance vibration measurement device and array type disturbance vibration measurement control method
CN112045494A (en) * 2020-08-19 2020-12-08 山东理工大学 Bidirectional machining force measuring and compensating device for cutting machining
CN113091981A (en) * 2021-03-16 2021-07-09 南京航空航天大学 Sensor with pretightening force and measuring method
CN113739976A (en) * 2021-08-27 2021-12-03 南京航空航天大学 Six-dimensional force sensor with integrated structure decoupling

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Application publication date: 20170104