CN107422147A - Three axle high-range acceleration transducer sensitivity test systems - Google Patents
Three axle high-range acceleration transducer sensitivity test systems Download PDFInfo
- Publication number
- CN107422147A CN107422147A CN201710578761.9A CN201710578761A CN107422147A CN 107422147 A CN107422147 A CN 107422147A CN 201710578761 A CN201710578761 A CN 201710578761A CN 107422147 A CN107422147 A CN 107422147A
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- China
- Prior art keywords
- acceleration
- processing system
- test fixture
- computer processing
- acceleration transducer
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
Abstract
The present invention discloses three axle high-range acceleration transducer sensitivity test systems, including acceleration shock table, shock wave collection plate and computer processing system, test system also includes test fixture, test fixture is in triangular pyramid, and the one side of test fixture is vertically arranged to the sidepiece of acceleration shock table；Acceleration transducer to be tested is located at any one of its excess-three face of test fixture；Acceleration transducer to be tested connection corresponding with shock wave collection plate；Three lasers are additionally provided with the outside of test fixture, three lasers are accordingly distributed according to the axle sensitive direction of X, Y, Z tri- of sensor respectively；Three lasers are respectively connecting to laser velocimeter, and laser velocimeter is connected with computer processing system；Apply one-shot, computer processing system is the Sensitirity va1ue that can obtain the sensitive axial directions of X, Y, Z tri-, and cost is low, efficiency high, is adapted to the test of batch high-range acceleration transducer.
Description
Technical field
The present invention relates to microelectronic testing technical field, is specifically that a kind of three axle high-range acceleration transducer sensitivity are surveyed
Test system.
Background technology
Sensitivity is an important indicator in sensor performance index, for 3-axis acceleration sensor, traditional survey
Trial work section is needed to apply the X, Y, Z axis of acceleration transducer respectively acceleration, that is, an acceleration transducer is needed
Three times, efficiency is low for measurement.
The content of the invention
It is an object of the invention to provide three axle high-range acceleration transducer sensitivity test systems, the system single adds
Velocity shock can testing acceleration sensor is in the sensitivity of tri- axial directions of X, Y, Z, efficiency high.
The technical solution adopted for the present invention to solve the technical problems is：
Three axle high-range acceleration transducer sensitivity test systems, including acceleration shock table, shock wave collection plate with
Computer processing system, it is characterised in that the test system also includes test fixture, and test fixture is in triangular pyramid, test
The one side of frock is vertically arranged to the sidepiece of acceleration shock table；Acceleration transducer to be tested located at test fixture remaining
Any one of three faces；Acceleration transducer to be tested connection corresponding with shock wave collection plate；In the outside of test fixture also
Provided with three lasers, three lasers are accordingly distributed according to the axle sensitive direction of X, Y, Z tri- of sensor respectively；Three lasers
Laser velocimeter is respectively connecting to, laser velocimeter is connected with computer processing system；Computer processing system is according to Laser Measuring
The pulse voltage and pulse of the acceleration magnitude of three axial directions of fast instrument feedback and three axial directions of shock wave collection plate feedback are wide
Degree, the Sensitirity va1ue of three sensitive axial directions is calculated.
The present invention can also have another scheme：
Three axle high-range acceleration transducer sensitivity test systems, including acceleration shock table, shock wave collection plate with
Computer processing system, it is characterised in that the test system also includes test fixture, and test fixture is in triangular pyramid, test
The one side of frock is vertically arranged to the sidepiece of acceleration shock table；Acceleration transducer to be tested located at test fixture remaining
Any one of three faces；Acceleration transducer to be tested connection corresponding with shock wave collection plate；Acceleration shock table is set
There is strain unit, strain unit is connected with computer processing system；The acceleration magnitude of impact direction is fed back to meter by strain unit
Calculation machine processing system, computer processing system calculate the acceleration that the acceleration magnitude decomposes the axle sensitive direction of X, Y, Z tri-, and
The pulse voltage and pulse width for three axial directions fed back according to shock wave collection plate, the sensitive of three sensitive axial directions is calculated
Angle value.
Once rushed the invention has the advantages that acceleration shock table need to only treat the application of testing acceleration sensor
Hit, you can obtain the Sensitirity va1ue of the sensitive axial directions of X, Y, Z tri-, cost is low, efficiency high, is adapted to batch high-range acceleration sensing
The test of device.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples：
Fig. 1 is the schematic diagram of the embodiment of the present invention one；
Fig. 2 is the schematic diagram of test fixture in the present invention；
Fig. 3 is Fig. 2 upward view；
Fig. 4 is the assembling side elevation of test fixture of the present invention and acceleration transducer to be tested；
Fig. 5 is the schematic diagram of the embodiment of the present invention two.
Embodiment
Embodiment one
As shown in figure 1, the present invention provides three axle high-range acceleration transducer sensitivity test systems, including acceleration impact examination
Platform 1, shock wave collection plate 2 and computer processing system 3 are tested, with reference to shown in Fig. 2~4, the test system also includes test work
4 are filled, test fixture 4 is in triangular pyramid, and the bottom surface of test fixture 4 is provided with mounting hole 4a, by mounting hole 4a by the bottom surface of test fixture 4
It is vertically arranged to the sidepiece of acceleration shock table 1；Acceleration transducer 8 to be tested is located at its excess-three face of test fixture 4
Any one；The connection corresponding with shock wave collection plate 2 of acceleration transducer 8 to be tested；It is additionally provided with the outside of test fixture 4
Three lasers 5, three lasers are accordingly distributed according to the axle sensitive direction of X, Y, Z tri- of sensor respectively；Three lasers point
Laser velocimeter 6 is not connected to, and laser velocimeter 6 is connected with computer processing system 3；Computer processing system 3 is according to laser
The pulse voltage and arteries and veins for three axial directions that the acceleration magnitude and shock wave collection plate 2 for three axial directions that tachymeter 6 feeds back feed back
Width is rushed, the Sensitirity va1ue of three sensitive axial directions is calculated.
Embodiment two
The present invention can also have another scheme：
With reference to shown in Fig. 5, three axle high-range acceleration transducer sensitivity test systems, including acceleration shock table 1, punching
Ripple collection plate 2 and computer processing system 3 are hit, the test system also includes test fixture 4, the structure and peace of test fixture 4
Dress mode is identical with embodiment one, the connection corresponding with shock wave collection plate 2 of acceleration transducer 8 to be tested；Acceleration impact examination
Test platform 1 and be provided with strain unit 7, strain unit 7 is connected with computer processing system 1；Unit 7 is strained by the acceleration of impact direction
Value feeds back to computer processing system 1, and computer processing system calculates the acceleration magnitude and decomposes the axle sensitive direction of X, Y, Z tri-
Acceleration, and according to shock wave collection plate 2 feed back three axial directions pulse voltage and pulse width, be calculated three it is quick
Feel the Sensitirity va1ue of axial direction.
The above described is only a preferred embodiment of the present invention, any formal limitation not is made to the present invention；Appoint
What those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the side of the disclosure above
Method and technology contents make many possible changes and modifications to technical solution of the present invention, or are revised as the equivalent reality of equivalent variations
Apply example.Therefore, every content without departing from technical solution of the present invention, the technical spirit according to the present invention are done to above example
Any simple modification, equivalent substitution, equivalence changes and modification, still fall within the range of technical solution of the present invention protects.
Claims (2)
1. three axle high-range acceleration transducer sensitivity test systems, including acceleration shock table, shock wave collection plate
With computer processing system, it is characterised in that the test system also includes test fixture, and test fixture is in triangular pyramid, surveys
The one side of trial work dress is vertically arranged to the sidepiece of acceleration shock table；Acceleration transducer to be tested located at test fixture its
Any one of excess-three face；Acceleration transducer to be tested connection corresponding with shock wave collection plate；In the outside of test fixture
Three lasers are additionally provided with, three lasers are accordingly distributed according to the axle sensitive direction of X, Y, Z tri- of sensor respectively；Three laser
Device is respectively connecting to laser velocimeter, and laser velocimeter is connected with computer processing system；Computer processing system is according to laser
The pulse voltage and pulse of the acceleration magnitude of three axial directions of tachymeter feedback and three axial directions of shock wave collection plate feedback
Width, the Sensitirity va1ue of three sensitive axial directions is calculated.
2. three axle high-range acceleration transducer sensitivity test systems, including acceleration shock table, shock wave collection plate
With computer processing system, it is characterised in that the test system also includes test fixture, and test fixture is in triangular pyramid, surveys
The one side of trial work dress is vertically arranged to the sidepiece of acceleration shock table；Acceleration transducer to be tested located at test fixture its
Any one of excess-three face；Acceleration transducer to be tested connection corresponding with shock wave collection plate；Acceleration shock table
Provided with strain unit, strain unit is connected with computer processing system；Strain unit feeds back to the acceleration magnitude of impact direction
Computer processing system, computer processing system calculate the acceleration that the acceleration magnitude decomposes the axle sensitive direction of X, Y, Z tri-,
And the pulse voltage and pulse width for three axial directions fed back according to shock wave collection plate, the spirit of three sensitive axial directions is calculated
Sensitivity value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710578761.9A CN107422147A (en) | 2017-07-17 | 2017-07-17 | Three axle high-range acceleration transducer sensitivity test systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710578761.9A CN107422147A (en) | 2017-07-17 | 2017-07-17 | Three axle high-range acceleration transducer sensitivity test systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107422147A true CN107422147A (en) | 2017-12-01 |
Family
ID=60427167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710578761.9A Pending CN107422147A (en) | 2017-07-17 | 2017-07-17 | Three axle high-range acceleration transducer sensitivity test systems |
Country Status (1)
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| CN (1) | CN107422147A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108427015A (en) * | 2018-01-31 | 2018-08-21 | 中国科学院上海微系统与信息技术研究所 | A kind of test device and test method of impingement accelerometer thermal sensitivity drift |
| CN110568222A (en) * | 2019-08-16 | 2019-12-13 | 中国科学院上海微系统与信息技术研究所 | Testing device and testing method for sensitivity of impact type accelerometer |
| CN110672878A (en) * | 2019-10-10 | 2020-01-10 | 华东光电集成器件研究所 | Triaxial high-range acceleration sensor lateral sensitivity ratio testing device |
| CN113075424A (en) * | 2021-05-13 | 2021-07-06 | 珠海市精实测控技术有限公司 | Method for testing performance consistency of product built-in triaxial acceleration sensor |
| CN114966114A (en) * | 2022-04-19 | 2022-08-30 | 北京理工大学 | Multi-component impact calibration device and continuous multi-loading synchronous calibration method |
Citations (5)
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| CN101034092A (en) * | 2007-03-09 | 2007-09-12 | 中国科学院上海微系统与信息技术研究所 | Testing method for impacting acceleration transducer transversely response using wave comparison |
| CN102253244A (en) * | 2011-06-12 | 2011-11-23 | 中北大学 | Traceability calibration device and method for shock sensitivity of high-g-value accelerometer |
| CN102353813A (en) * | 2011-06-12 | 2012-02-15 | 中北大学 | Broadband high range accelerometer frequency response characteristic calibrating device and method thereof |
| CN104597289A (en) * | 2014-12-18 | 2015-05-06 | 歌尔声学股份有限公司 | Acceleration sensor tri-axis simultaneous testing correction and testing method |
| WO2016153642A1 (en) * | 2015-03-20 | 2016-09-29 | Analog Devices, Inc. | Gyroscope that compensates for fluctuations in sensitivity |
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2017
- 2017-07-17 CN CN201710578761.9A patent/CN107422147A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101034092A (en) * | 2007-03-09 | 2007-09-12 | 中国科学院上海微系统与信息技术研究所 | Testing method for impacting acceleration transducer transversely response using wave comparison |
| CN102253244A (en) * | 2011-06-12 | 2011-11-23 | 中北大学 | Traceability calibration device and method for shock sensitivity of high-g-value accelerometer |
| CN102353813A (en) * | 2011-06-12 | 2012-02-15 | 中北大学 | Broadband high range accelerometer frequency response characteristic calibrating device and method thereof |
| CN104597289A (en) * | 2014-12-18 | 2015-05-06 | 歌尔声学股份有限公司 | Acceleration sensor tri-axis simultaneous testing correction and testing method |
| WO2016153642A1 (en) * | 2015-03-20 | 2016-09-29 | Analog Devices, Inc. | Gyroscope that compensates for fluctuations in sensitivity |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108427015A (en) * | 2018-01-31 | 2018-08-21 | 中国科学院上海微系统与信息技术研究所 | A kind of test device and test method of impingement accelerometer thermal sensitivity drift |
| CN110568222A (en) * | 2019-08-16 | 2019-12-13 | 中国科学院上海微系统与信息技术研究所 | Testing device and testing method for sensitivity of impact type accelerometer |
| CN110568222B (en) * | 2019-08-16 | 2021-09-03 | 中国科学院上海微系统与信息技术研究所 | Testing device and testing method for sensitivity of impact type accelerometer |
| CN110672878A (en) * | 2019-10-10 | 2020-01-10 | 华东光电集成器件研究所 | Triaxial high-range acceleration sensor lateral sensitivity ratio testing device |
| CN113075424A (en) * | 2021-05-13 | 2021-07-06 | 珠海市精实测控技术有限公司 | Method for testing performance consistency of product built-in triaxial acceleration sensor |
| CN113075424B (en) * | 2021-05-13 | 2023-12-26 | 珠海精实测控技术股份有限公司 | Method for testing performance consistency of built-in triaxial acceleration sensor of product |
| CN114966114A (en) * | 2022-04-19 | 2022-08-30 | 北京理工大学 | Multi-component impact calibration device and continuous multi-loading synchronous calibration method |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171201 |
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| RJ01 | Rejection of invention patent application after publication |