CN202201958U - Rotating target device capable of changing target material components easily - Google Patents
Rotating target device capable of changing target material components easily Download PDFInfo
- Publication number
- CN202201958U CN202201958U CN2011202226184U CN201120222618U CN202201958U CN 202201958 U CN202201958 U CN 202201958U CN 2011202226184 U CN2011202226184 U CN 2011202226184U CN 201120222618 U CN201120222618 U CN 201120222618U CN 202201958 U CN202201958 U CN 202201958U
- Authority
- CN
- China
- Prior art keywords
- target material
- head assemblies
- material assembly
- material components
- base plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a rotating target device capable of changing target material components easily; the device comprises a processing box with a bottom plate at the bottom, and is characterized in that one side of the bottom plate is provided with a driving end component, and the other side of the bottom plate is provided with a hydroelectric end component; meanwhile, the target material components are arranged in work connecting ends of the driving end component and the hydroelectric end component; and a telescopic axial retainer ring can effectively control a spacing of the target material components between the driving end component and the hydroelectric end component. Therefore, the rotating target device can be applicable to installing different target material components with different specifications effectively; or the target material components can be installed by regulating the spacing, so that the service life is prolonged.
Description
Technical field
The utility model relates to a kind of rotary target device, relates in particular to a kind of target material assembly formula rotary target device that is prone to change.
Background technology
Adopt plane sputter cathode target mostly in the equipment of production coated glass at present; Its principle of work is: it is indoor to need the glass of plated film to send into vacuum plating; A certain amount of high-purity process gas of the indoor feeding of vacuum plating is just like oxygen, nitrogen or argon gas; Process gas forms the plasma body of positively charged under the effect of EM field and free electron; Plasma body under the control in magnetic field, is used material according to the plated film that certain track and dynamics bombardment are fixedly mounted on the indoor planar cathode target of vacuum plating under the attraction of the negative electrode that is loaded with high negative voltage; Coating Materials is come out by gas molecule collision, is deposited on the certain thickness rete of formation on glass according to certain orientation.
But the conventional device spacing is fixed, and the target material assembly replacement that can't adapt to different model length is used, and simultaneously, can cause the target installation site gap to occur, influences processing effect and work-ing life.
The utility model content
The purpose of the utility model is to overcome the above problem that prior art exists, and a kind of target material assembly formula rotary target device that is prone to change is provided.
For the purpose that realizes the utility model is prone to change target material assembly formula rotary target device; Include machining box; Described machining box bottom is provided with base plate, and it is characterized in that: a side of said base plate is equipped with the driving head assemblies, and the opposite side of said base plate is equipped with the water power head assemblies; In the work cohesive end of said driving head assemblies and water power head assemblies target material assembly is installed.
Further, target material assembly formula rotary target device is changed in above-mentioned being prone to, and wherein, the work cohesive end of described driving head assemblies and water power head assemblies is provided with telescopic shaft block ring.
Further, target material assembly formula rotary target device is changed in above-mentioned being prone to, and wherein, the output terminal of said water power head assemblies is provided with independently conducting rod and water transfer lime.
Again further, target material assembly formula rotary target device is changed in above-mentioned being prone to, and wherein, the cohesive end of described driving head assemblies and base plate is provided with the pedestal component; The cohesive end of said water power head assemblies and base plate also is provided with the pedestal component.
Adopt the utility model technical scheme,, can effectively control the target material assembly installing space that drives between head assemblies and the water power head assemblies through the existence of telescopic shaft block ring is arranged.Thus, can effectively adapt to the different target material assemblies of all size degree installs.Simultaneously, can also make target material assembly be in place, promote its work-ing life through the adjustment spacing.
The purpose of the utility model, advantage and characteristics will illustrate through the non-limitative illustration of following preferential embodiment and explain that these embodiment only provide with reference to accompanying drawing as an example.
Description of drawings
Fig. 1 is the organigram that is prone to change target material assembly formula rotary target device.
Embodiment
As shown in Figure 1 being prone to changed target material assembly 5 formula rotary target devices, includes machining box 1, and this machining box 1 bottom is provided with base plate 2, and its special feature is: base plate 2 one sides that the utility model adopted are equipped with and drive head assemblies 3.Corresponding with it is, at the opposite side of base plate 2 water power head assemblies 4 is installed.In the work cohesive end of said driving head assemblies 3 and water power head assemblies 4 target material assembly 5 is installed.
In conjunction with the utility model one preferred implementation; Firmly be installed in the work cohesive end that drives head assemblies 3 and water power head assemblies 4 for the target material assembly 5 that adapts to different lengths and model can make it, be provided with telescopic shaft block ring 6 at the work cohesive end that drives head assemblies 3 and water power head assemblies 4.Like this, when reality is used, can adjust the flexible length of telescopic shaft block ring 6, cooperate the installation of target material assembly 5.
Further, consider that the assembling that can realize the assembly crewman is convenient, the output terminal of water power head assemblies 4 is provided with independently conducting rod 7 and water transfer lime 8.Thus, it is too complicated to remove in the past the water power mixed structure from, occurs easily leaking or the defective of leaking electricity.
Again further, in order to promote the degree of stability that is connected of the base plate 2 that drives on head assemblies 3 and water power head assemblies 4 and the machining box 1, pedestal component 9 is set at the cohesive end of driving head assemblies 3 and base plate 2.Same, also be provided with pedestal component 9 at the cohesive end of water power head assemblies 4 and base plate 2.
Through above-mentioned character express and combine accompanying drawing to find out, adopt the utility model after, through the existence of telescopic shaft block ring is arranged, can effectively control the target material assembly installing space that drives between head assemblies and the water power head assemblies.Thus, can effectively adapt to the different target material assemblies of all size degree installs.Simultaneously, can also make target material assembly be in place, promote its work-ing life through the adjustment spacing.
Certainly, more than only be the concrete exemplary applications of the utility model, the protection domain of the utility model is not constituted any limitation.Except that the foregoing description, the utility model can also have other embodiment.All employings are equal to the technical scheme of replacement or equivalent transformation formation, all drop within the utility model scope required for protection.
Claims (4)
1. be prone to change target material assembly formula rotary target device, include machining box, described machining box bottom is provided with base plate, and it is characterized in that: a side of said base plate is equipped with the driving head assemblies, and the opposite side of said base plate is equipped with the water power head assemblies; In the work cohesive end of said driving head assemblies and water power head assemblies target material assembly is installed.
2. according to claim 1ly be prone to change target material assembly formula rotary target device, it is characterized in that: the work cohesive end of described driving head assemblies and water power head assemblies is provided with telescopic shaft block ring.
3. according to claim 1ly be prone to change target material assembly formula rotary target device, it is characterized in that: the output terminal of said water power head assemblies is provided with independently conducting rod and water transfer lime.
4. according to claim 1ly be prone to change target material assembly formula rotary target device, it is characterized in that: the cohesive end of described driving head assemblies and base plate is provided with the pedestal component; The cohesive end of said water power head assemblies and base plate also is provided with the pedestal component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202226184U CN202201958U (en) | 2011-06-28 | 2011-06-28 | Rotating target device capable of changing target material components easily |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202226184U CN202201958U (en) | 2011-06-28 | 2011-06-28 | Rotating target device capable of changing target material components easily |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202201958U true CN202201958U (en) | 2012-04-25 |
Family
ID=45966090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202226184U Expired - Fee Related CN202201958U (en) | 2011-06-28 | 2011-06-28 | Rotating target device capable of changing target material components easily |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202201958U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102268648A (en) * | 2011-06-28 | 2011-12-07 | 黄峰 | Assembly type rotating target apparatus facilitating changing of target materials |
-
2011
- 2011-06-28 CN CN2011202226184U patent/CN202201958U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102268648A (en) * | 2011-06-28 | 2011-12-07 | 黄峰 | Assembly type rotating target apparatus facilitating changing of target materials |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120425 Termination date: 20140628 |
|
| EXPY | Termination of patent right or utility model |