CN202208756U - Driving end device for rotating target - Google Patents
Driving end device for rotating target Download PDFInfo
- Publication number
- CN202208756U CN202208756U CN2011202225938U CN201120222593U CN202208756U CN 202208756 U CN202208756 U CN 202208756U CN 2011202225938 U CN2011202225938 U CN 2011202225938U CN 201120222593 U CN201120222593 U CN 201120222593U CN 202208756 U CN202208756 U CN 202208756U
- Authority
- CN
- China
- Prior art keywords
- head unit
- rotary target
- target according
- reducing sleeve
- joint spider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a driving end device for a rotating target. The driving end device comprises a base, and is characterized in that a cross axle is mounted on the base, wherein a small gear is arranged at the top end of the cross axle; an adapter sleeve is connected to the driving end of the small gear; a hexagonal axle sleeve is arranged at the periphery of the adapter sleeve; a large gear is mounted on the hexagonal axle sleeve; and a driving component is arranged in the adapter sleeve. Accordingly, when the target materials are shifted, the assembly and disassembly steps can be effectively reduced; more importantly, owing to the mutual fit between the cross axle and the adapter sleeve, the driving rotary force can be effectively transmitted, and the smooth work of the target materials is facilitated.
Description
Technical field
The utility model relates to a kind of DE head unit, relates in particular to a kind of rotary target and uses the DE head unit.
Background technology
Adopt plane sputter cathode target mostly in the equipment of production coated glass at present; Its principle of work is: it is indoor to need the glass of plated film to send into vacuum plating; A certain amount of high-purity process gas of the indoor feeding of vacuum plating is just like oxygen, nitrogen or argon gas; Process gas forms the plasma body of positively charged under the effect of EM field and free electron; Plasma body under the control in magnetic field, is used material according to the plated film that certain track and dynamics bombardment are fixedly mounted on the indoor planar cathode target of vacuum plating under the attraction of the negative electrode that is loaded with high negative voltage; Coating Materials is come out by gas molecule collision, is deposited on the certain thickness rete of formation on glass according to certain orientation.
But existing device drives termination complex structure tends to cause linking the slit to occur in needs replacement target, influences follow-up use.And non-rotatable adjusting is fixed in existing device drives termination, can not adapt to the target of different model, has improved production cost.
The utility model content
The purpose of the utility model is to overcome the above problem that prior art exists, and provides a kind of rotary target to use the DE head unit.
For the purpose rotary target of realizing the utility model is used the DE head unit; Include pedestal; Wherein: on the described pedestal joint spider is installed, described joint spider top is provided with pinion(gear), and the DE of said pinion(gear) is connected with reducing sleeve; Described reducing sleeve outer periphery is equipped with the hexagonal axle sleeve, and described hexagonal axis puts master wheel is installed; Be provided with driven unit in the described reducing sleeve.
Further, above-mentioned rotary target is used the DE head unit, and wherein, described driven unit includes closure nut, and the top of said closure nut is provided with transition axis, and described transition axis top is provided with spindle nose, and described spindle nose periphery is distributed with the hexagonal main shaft.
Further, above-mentioned rotary target is used the DE head unit, and wherein, described transition axis outer periphery is equipped with copper sheathing.
Further, above-mentioned rotary target is used the DE head unit, and wherein, described joint spider bottom is provided with the adjustment pad with the contact part of pedestal.
Further, above-mentioned rotary target is used the DE head unit, and wherein, described joint spider outer periphery is equipped with O type circle.
Further, above-mentioned rotary target is used the DE head unit, and wherein, described O type circle top is provided with skeleton Oil sealing assembly.
Again further, above-mentioned rotary target is used the DE head unit, and wherein, described reducing sleeve periphery is folded with bearing.
Adopt the utility model technical scheme, in the target replacement, can effectively reduce the dismounting step.What is more important through cooperatively interacting of joint spider and reducing sleeve, can effectively be transmitted the revolving force of driving, helps the work of target.
The purpose of the utility model, advantage and characteristics will illustrate through the non-limitative illustration of following preferential embodiment and explain that these embodiment only provide with reference to accompanying drawing as an example.
Description of drawings
Fig. 1 is the organigram of rotary target with the DE head unit.
Embodiment
Rotary target as shown in Figure 1 is used the DE head unit, includes pedestal 1, and its unusual part is: on the pedestal 1 that the utility model adopted joint spider 2 is installed, is provided with pinion(gear) 3 on joint spider 2 tops.And, in order to promote the smooth and easy running of pinion(gear) 3, being connected with reducing sleeve 4 at the DE of pinion(gear) 3, these reducing sleeve 4 outer periphery are equipped with hexagonal axle sleeve 5, and master wheel 6 is installed on hexagonal axle sleeve 5.And, in reducing sleeve 4, be provided with driven unit.
In conjunction with the utility model one preferred implementation, for the ease of driving correctly passing to of running, the driven unit that the utility model adopts includes closure nut 7, and the top of this closure nut 7 is provided with transition axis 8.Simultaneously, be provided with spindle nose 9 on transition axis 8 tops, spindle nose 9 peripheries are distributed with hexagonal main shaft 10.
Further, in order to promote the smooth and easy degree of running, be equipped with copper sheathing 11 in transition axis 8 outer periphery.And, consider to adapt to the needs that different targets install additional that the contact part of joint spider 2 bottoms and pedestal 1 is provided with adjustment pad 12.
Again further, in order to promote whole sealing effectiveness, be equipped with O type circle 13 in joint spider 2 outer periphery.Simultaneously, be provided with skeleton Oil sealing assembly 14 on O type circle 13 tops.Certainly, consider the smooth and easy running between each component, be folded with bearing 15 in reducing sleeve 4 peripheries.
Through above-mentioned character express and combine accompanying drawing to find out, adopt the utility model after, in the target replacement, can effectively reduce the dismounting step.What is more important through cooperatively interacting of joint spider and reducing sleeve, can effectively be transmitted the revolving force of driving, helps the work of target.
Certainly, more than only be the concrete exemplary applications of the utility model, the protection domain of the utility model is not constituted any limitation.Except that the foregoing description, the utility model can also have other embodiment.All employings are equal to the technical scheme of replacement or equivalent transformation formation, all drop within the utility model scope required for protection.
Claims (7)
1. rotary target is used the DE head unit; Include pedestal; It is characterized in that: on the described pedestal joint spider is installed, described joint spider top is provided with pinion(gear), and the DE of said pinion(gear) is connected with reducing sleeve; Described reducing sleeve outer periphery is equipped with the hexagonal axle sleeve, and described hexagonal axis puts master wheel is installed; Be provided with driven unit in the described reducing sleeve.
2. rotary target according to claim 1 is used the DE head unit; It is characterized in that: described driven unit includes closure nut; The top of said closure nut is provided with transition axis, and described transition axis top is provided with spindle nose, and described spindle nose periphery is distributed with the hexagonal main shaft.
3. rotary target according to claim 2 is used the DE head unit, it is characterized in that: described transition axis outer periphery is equipped with copper sheathing.
4. rotary target according to claim 1 is used the DE head unit, it is characterized in that: described joint spider bottom is provided with the adjustment pad with the contact part of pedestal.
5. rotary target according to claim 1 is used the DE head unit, it is characterized in that: described joint spider outer periphery is equipped with O type circle.
6. rotary target according to claim 5 is used the DE head unit, it is characterized in that: described O type circle top is provided with skeleton Oil sealing assembly.
7. rotary target according to claim 1 is used the DE head unit, it is characterized in that: described reducing sleeve periphery is folded with bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202225938U CN202208756U (en) | 2011-06-28 | 2011-06-28 | Driving end device for rotating target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202225938U CN202208756U (en) | 2011-06-28 | 2011-06-28 | Driving end device for rotating target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202208756U true CN202208756U (en) | 2012-05-02 |
Family
ID=45988308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202225938U Expired - Fee Related CN202208756U (en) | 2011-06-28 | 2011-06-28 | Driving end device for rotating target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202208756U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102268647A (en) * | 2011-06-28 | 2011-12-07 | 黄峰 | Driving tip device for rotating target |
-
2011
- 2011-06-28 CN CN2011202225938U patent/CN202208756U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102268647A (en) * | 2011-06-28 | 2011-12-07 | 黄峰 | Driving tip device for rotating target |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120502 Termination date: 20140628 |
|
| EXPY | Termination of patent right or utility model |