CN201732981U - Protective cover and ion generator - Google Patents
Protective cover and ion generator Download PDFInfo
- Publication number
- CN201732981U CN201732981U CN2010202464510U CN201020246451U CN201732981U CN 201732981 U CN201732981 U CN 201732981U CN 2010202464510 U CN2010202464510 U CN 2010202464510U CN 201020246451 U CN201020246451 U CN 201020246451U CN 201732981 U CN201732981 U CN 201732981U
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- China
- Prior art keywords
- ion generator
- insulating body
- electrode needle
- protective jacket
- electrode
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Abstract
The utility model discloses a protective cover and an ion generator. The protective cover comprises an insulating main body and a plurality of through holes which are arranged on the insulating main body. The ion generator comprises a high-voltage generator and a plurality of electrode needles, wherein the electrode needles are connected with the high-voltage generator. The ion generator also comprises a protective cover which comprises an insulating main body and a plurality of through holes arranged on the insulating main body, and one electrode needle is contained in each through hole. The protective cover can prevent the mutual electromagnetic interference among the electrode needles, and can prevent the particles in the air from being attached to the electrode needles.
Description
Technical field
The utility model relates to integrated circuit and makes the field, particularly relates to a kind of protective jacket and ion generator.
Background technology
In the treatment process of various workpiece such as semiconductor wafer and liquid-crystalline glasses, must use ion generator remove on the workpiece with electrostatic charge.General, described ion generator comprises high-voltage generator and a plurality of electrode needle (sparking electrode).Described high-voltage generator rises to high voltage with input voltage (for example 24V voltage), and to make described electrode needle be positive voltage and negative voltage alternately with certain frequency, makes air molecule be ionized, thereby alternately produces negative ions at the tip of described electrode needle.When charged surface of the work is positive potential, utilize the positive charge neutralization of anion with described surface of the work; When if surface of the work is negative potential, utilize the negative electrical charge neutralization of cation with surface of the work.
Specifically please refer to Fig. 1, it is the schematic diagram of existing ion generator.As shown in Figure 1, existing ion generator 100 comprises high-voltage generator 110, a plurality of electrode needle 120 and electrode installation portion 140.The quantity of described electrode needle 120 for example is four, and four electrode needle 120 are evenly distributed on the described electrode installation portion 140, and described high-voltage generator 110 electrically connects with described a plurality of electrode needle 120.
Yet, find that in actual production existing ion generator 100 has following problem:
At first, very easily produce electromagnetic interference owing to static discharge between described a plurality of electrode needle 120, and the peak, electromagnetic front and back of this electromagnetic interference is point, signal is stronger, its frequency reaches several megahertzes even hundreds of hertz, very likely causes electrode needle 120 damages, and causes ion generator 100 to damage, even more serious is that this electromagnetic interference also might defective work piece.
Secondly, because described electrode needle 120 is all to be exposed in the air, be suspended in airborne particle very likely attached to the surface of electrode needle 120, when described electrode needle 120 is contaminated, it is difficult to take place ionization, and the quantity of the feasible ion that produces reduces, and finally may no longer produce ion.Therefore, maintenance works such as cleaning of carrying out electrode needle 120 that operating personnel are necessary frequent and replacing during this electrode needle 120 is cleared up maintenance, must stop the operation of ion generator 100 and associate device, this is labor intensive and time not only, also makes the production capacity of associate device descend.
The utility model content
The purpose of this utility model is, a kind of protective jacket is provided, and disturbs to prevent between a plurality of electrode needle mutual electromagnetic, and prevents that airborne particle is attached to the electrode needle surface.
Another purpose of the present utility model is, a kind of ion generator is provided, and with the easy problem that electromagnetic interference takes place between a plurality of electrode needle that solve existing ion generator, and reduces the contaminated probability of electrode needle.
For solving the problems of the technologies described above, the utility model provides a kind of protective jacket, and described protective jacket comprises insulating body and is arranged at a plurality of through holes on the described insulating body.
Optionally, in described protective jacket, described through hole is a cone-shaped hole, and described cone-shaped hole comprises big end and small end, and the aperture of described big end is bigger than the aperture of described small end.
The utility model also provides a kind of ion generator, described ion generator comprises: high-voltage generator, a plurality of electrode needle and protective jacket, described a plurality of electrode needle is connected with described high-voltage generator, described protective jacket comprises insulating body and is arranged at a plurality of through holes on the described insulating body, a ccontaining electrode needle in each described through hole.
Optionally, in described ion generator, also comprise the electrode installation portion, described a plurality of electrode needle are connected with described high-voltage generator by described electrode installation portion.
Optionally, in described ion generator, described through hole is a cone-shaped hole, and described cone-shaped hole comprises big end and small end, and the aperture of described big end is bigger than the aperture of described small end, and the small end of described cone-shaped hole is near described electrode installation portion.
Optionally, in described ion generator, described insulating body be shaped as square, the thickness of described insulating body is more than or equal to the length of described electrode needle.
Optionally, in described ion generator, described insulating body is provided with screw, and the position of the corresponding described screw of described electrode installation portion is provided with connecting hole.
Optionally, in described ion generator, described protective jacket is bonded on the described electrode installation portion.
Optionally, in described ion generator, the material of described insulating body is a polyvinyl chloride.
Optionally, in described ion generator, the material of described insulating body is a pottery.
Compared with prior art, the protective jacket that the utility model provides comprises insulating body and is arranged at through hole on the described insulating body, a ccontaining described electrode needle in each described through hole, described protective jacket can prevent that mutual electromagnetic is disturbed between a plurality of electrode needle, help prolonging the useful life of electrode needle, and can guarantee that ion generator and workpiece can be owing to electromagnetic interference is damaged; And described protective jacket can prevent airborne particle attached on the electrode needle, has reduced the contaminated probability of electrode needle.
Description of drawings
Fig. 1 is the schematic diagram of existing ion generator;
The schematic diagram of the protective jacket that Fig. 2 provides for the utility model embodiment;
The schematic diagram of the ion generator that Fig. 3 provides for the utility model embodiment.
Embodiment
Be described in further detail the utility model proposes below in conjunction with the drawings and specific embodiments.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
Core concept of the present utility model is, a kind of protective jacket and ion generator are provided, and described protective jacket comprises insulating body and is arranged at through hole on the described insulating body, a ccontaining electrode needle in each described through hole.Described protective jacket can prevent between a plurality of electrode needle that mutual electromagnetic disturbs, the useful life of the electrode needle that has prolonged, and can guarantee that ion generator and workpiece can be owing to electromagnetic interference is damaged; And described protective jacket can prevent that airborne particle is attached to the electrode needle surface.
Please refer to Fig. 2, the schematic diagram of the protective jacket that it provides for the utility model embodiment.As shown in Figure 2, the protective jacket 230 that provides of the utility model embodiment comprises insulating body 231 and is arranged at a plurality of through holes 232 on the described insulating body 231.Described protective jacket 230 can prevent that mutual electromagnetic is disturbed between a plurality of electrode needle, helps prolonging the useful life of described electrode needle; In addition, described protective jacket 230 can prevent airborne particle attached on the electrode needle, the frequency that helps reducing cleaning and change electrode needle.
Preferably, the through hole 232 of described protective jacket 230 is a cone-shaped hole, and described cone-shaped hole comprises big end and small end, and the aperture of described big end is bigger than the aperture of described small end, and described through hole 232 is set to cone-shaped hole, helps ion and spreads to workpiece.Certainly, the shape of described through hole 232 is not limited thereto, and for example, described through hole 232 also can be cylindrical hole.
Please refer to Fig. 3, the schematic diagram of the ion generator that it provides for the utility model embodiment.As shown in Figure 3, and in conjunction with Fig. 2, the ion generator 200 that the utility model embodiment provides comprises: high-voltage generator 210, a plurality of electrode needle 220 and protective jacket 230, described a plurality of electrode needle 220 electrically connects with described high-voltage generator 210, described protective jacket 230 comprises insulating body 231 and is arranged at a plurality of through holes 232 on the described insulating body 231, ccontaining described electrode needle 220 in each described through hole 232.Because described ion generator 200 is provided with protective jacket 230, can prevent that mutual electromagnetic is disturbed between a plurality of electrode needle 220, help prolonging the useful life of electrode needle 220, and can guarantee that ion generator 200 and workpiece can not be damaged; And described protective jacket 230 can prevent airborne particle attached on the electrode needle 220, has reduced described electrode needle 220 contaminated probability.
Preferably, described ion generator 200 also comprises electrode installation portion 240, and described electrode needle 220 is connected with described high-voltage generator 210 by described electrode installation portion 240.As shown in Figure 3, an end of described electrode needle 220 is fixed on the described electrode installation portion 240, and described high-voltage generator 210 is connected with described electrode installation portion 240, and then electrically connects with described electrode needle 220.
Preferably, the small end of described through hole 232 (end that the aperture is less) spreads to workpiece to help ion near described electrode installation portion 240.
Preferably, the insulating body 231 of described protective jacket 230 be shaped as square, the shape of described insulating body 231 just and the form fit of electrode installation portion 240 can conveniently be fixed on described protective jacket 230 on the electrode installation portion 240.Certainly, office is not in this for the utility model, and described insulating body 231 also can be other shape, for example cuboid.
Preferably, the thickness of described insulating body 231 equals the length of electrode needle 220, the height that is described through hole 232 is identical with the length of electrode needle 220, so that described electrode needle 220 is contained in the described through hole 232 just, prevent between a plurality of electrode needle 220 that mutual electromagnetic disturbs, and the ions diffusion that helps ionization is to surface of the work.Yet will be appreciated that the thickness of described insulating body 231 also can be slightly larger than the length of electrode needle 220, to guarantee can not produce electromagnetic interference between a plurality of electrode needle 220.
In a specific embodiment of the present utility model, also can be provided with screw 231a on the described insulating body 231, the position of described electrode installation portion 240 corresponding screw 231a is provided with connecting hole (not shown), can make plastic screw pass described screw 231a and be connected, so that protective jacket 230 and 240 dismountable connections of electrode installation portion with described connecting hole.Utilize described plastic screw fixed protection cover 230, be convenient to operating personnel's dismounting or change described protective jacket 230, help increasing work efficiency.
In other specific embodiment of the present utility model, also can utilize binding agent that described protective jacket 230 is bonded on the described electrode installation portion 240, so that described protective jacket 230 is fixed.
In a specific embodiment of the present utility model, the material of described insulating body 231 is polyvinyl chloride (PVC), and described polyvinyl chloride has the good anti-static effect.Certainly, described insulating body 231 also can be made by other insulating material (for example pottery).
As shown in Figure 3, in a specific embodiment of the present utility model, the quantity of electrode needle 220 and through hole 232 is four, and four through holes 232 are quadrangle and are evenly distributed on the described insulating body 231.Certainly, the quantity of described electrode needle 220 and through hole 232 also can be two, more than three or four.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (10)
1. a protective jacket is characterized in that, comprising: insulating body and be arranged at a plurality of through holes on the described insulating body.
2. protective jacket as claimed in claim 1 is characterized in that, described through hole is a cone-shaped hole, and described cone-shaped hole comprises big end and small end, and the aperture of described big end is bigger than the aperture of described small end.
3. ion generator, comprise high-voltage generator and a plurality of electrode needle, described a plurality of electrode needle is connected with described high-voltage generator, it is characterized in that, described ion generator also comprises protective jacket, described protective jacket comprises insulating body and is arranged at a plurality of through holes on the described insulating body, a ccontaining electrode needle in each described through hole.
4. ion generator as claimed in claim 3 is characterized in that, also comprises the electrode installation portion, and described a plurality of electrode needle are connected with described high-voltage generator by described electrode installation portion.
5. ion generator as claimed in claim 4, it is characterized in that described through hole is a cone-shaped hole, described cone-shaped hole comprises big end and small end, the aperture of described big end is bigger than the aperture of described small end, and the small end of described cone-shaped hole is near described electrode installation portion.
6. ion generator as claimed in claim 4 is characterized in that, described insulating body be shaped as square, the thickness of described insulating body is more than or equal to the length of described electrode needle.
7. ion generator as claimed in claim 4 is characterized in that described insulating body is provided with screw, and the position of the corresponding described screw of described electrode installation portion is provided with connecting hole.
8. ion generator as claimed in claim 4 is characterized in that, described protective jacket is bonded on the described electrode installation portion.
9. as any described ion generator in the claim 3 to 8, it is characterized in that the material of described insulating body is a polyvinyl chloride.
10. as any described ion generator in the claim 3 to 8, it is characterized in that the material of described insulating body is a pottery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202464510U CN201732981U (en) | 2010-06-30 | 2010-06-30 | Protective cover and ion generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202464510U CN201732981U (en) | 2010-06-30 | 2010-06-30 | Protective cover and ion generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201732981U true CN201732981U (en) | 2011-02-02 |
Family
ID=43524136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202464510U Expired - Fee Related CN201732981U (en) | 2010-06-30 | 2010-06-30 | Protective cover and ion generator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201732981U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103441429A (en) * | 2013-09-10 | 2013-12-11 | 苏州新区枫桥净化设备厂 | Air anion generator |
| WO2023106174A1 (en) * | 2021-12-10 | 2023-06-15 | 株式会社村田製作所 | Ion generator, discharge unit for ion generator, and method for manufacturing ion generator |
-
2010
- 2010-06-30 CN CN2010202464510U patent/CN201732981U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103441429A (en) * | 2013-09-10 | 2013-12-11 | 苏州新区枫桥净化设备厂 | Air anion generator |
| WO2023106174A1 (en) * | 2021-12-10 | 2023-06-15 | 株式会社村田製作所 | Ion generator, discharge unit for ion generator, and method for manufacturing ion generator |
| JP7548456B2 (en) | 2021-12-10 | 2024-09-10 | 株式会社村田製作所 | Ion generator, discharge unit for ion generator, and method for manufacturing ion generator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130306 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130306 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110202 Termination date: 20180630 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |