CN202189022U - Optical detecting device of full-automatic tertiary photodetector - Google Patents

Optical detecting device of full-automatic tertiary photodetector Download PDF

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Publication number
CN202189022U
CN202189022U CN2011202637410U CN201120263741U CN202189022U CN 202189022 U CN202189022 U CN 202189022U CN 2011202637410 U CN2011202637410 U CN 2011202637410U CN 201120263741 U CN201120263741 U CN 201120263741U CN 202189022 U CN202189022 U CN 202189022U
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CN
China
Prior art keywords
installing plate
illumination system
lead screw
roller bearing
directions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2011202637410U
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Chinese (zh)
Inventor
林宜龙
陈薇
戚长政
唐召来
黄水清
林清岚
王能翔
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Shenzhen Geland Intelligent Equipment Ltd By Share Ltd
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Grand Technology Shenzhen Co Ltd
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Priority to CN2011202637410U priority Critical patent/CN202189022U/en
Application granted granted Critical
Publication of CN202189022U publication Critical patent/CN202189022U/en
Anticipated expiration legal-status Critical
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Abstract

An optical detecting device of a full-automatic tertiary photodetector consists of a high-power industrial camera, an illuminating system and a tracking and moving mechanism, wherein the high-power industrial camera and the illuminating system are mounted on a vertical mounting plate connected with the tracking and moving mechanism and can move to a position requiring chip snapshot according to a command from the tracking and moving mechanism; and the tracking and moving mechanism consists of a roller-lead screw transmission mechanism capable of enabling the vertical mounting plate to move in two perpendicular directions, that is, the vertical mounting plate drives the camera and a coaxial photosystem part to move in the length and the width directions of a material bar, so that all chips on the material bar can be snapshot. The utility model has the benefit that the illuminating system is mounted on the vertical mounting plate connected with the tracking and moving mechanism and can move to the position requiring chip snapshot according to the command from the tracking and moving mechanism.

Description

A kind of light checking device of full-automatic three Optical Inspection Machines
Technical field
The utility model relates to the light checking device of full-automatic three Optical Inspection Machines; More precisely; Relate to and use the device of forming by high-resolution industrial camera, illumination system and tracking travel mechanism; Gold thread state to being parked in each chip of expecting the material bar on the bar conveying is captured one by one, and the light checking device of a kind of full-automatic three Optical Inspection Machines of real scene shooting information is provided for detection system.
Background technology
Detection to gold thread on the chip is the detection for the third time in the chip production process, and detects relevant machinery and equipment for the third time and is called Optical Inspection Machine three times.Gold thread to chip on the material bar detects to the effect that: the gold thread curved detection; The gold thread thread cast-off detects; Impurity detects; Unnecessary gold thread detects; Short-circuit detecting; The six kinds of contents such as detection that open circuit at present, are accomplished the detection of these contents of gold thread, mainly lean on eye-observation to detect and the artificial detection that combines with microscope.This detection method, not only labour intensity is big, inefficiency, the quality of detection also varies with each individual, and is difficult to guarantee the detection quality of product.
Also there is the people once to attempt to obtain the automatic detection of the method realization gold thread that the live information of chip gold thread and computer-controlled standard gold line template compare with camera; But suffer from do not find a kind of can let camera clear, accurately obtain the illumination system and the tracking of the various defectives of gold thread, the efficient of detection and quality and manual detection do not have remarkable advantages.
The utility model content
The purpose of the utility model is to solve the difficult problem that above-mentioned gold thread detects, provide a kind of can make camera clear, accurately obtain the illumination system of the various defectives of gold thread and follow the tracks of and capture mechanism, and obtain a kind of light checking device of full-automatic three Optical Inspection Machines thus.
For realizing above-mentioned purpose, the utility model provides a kind of light checking device of full-automatic three Optical Inspection Machines, and this device comprises: performance is installed in respectively on the vertical installing plate separately with essentially identical two cameras of effect and two axis light generators from top to bottom; Vertically installing plate connects firmly through horizontal installing plate and web joint and illumination system installing plate;
The illumination system installing plate with connect firmly by the directions X roller bearing lead screw transmission nut that is slidingly matched with the directions X guide rail; Location sensitive sheet and illumination system installing plate connect firmly; Two inductors corresponding with the location sensitive sheet are installed in respectively on the directions X guide rail, and are positioned at the and arranged on left and right sides of location sensitive sheet;
Illumination system installing plate and Y direction roller bearing lead screw transmission part connect firmly, and Y direction roller bearing lead screw transmission part couples through synchronous band conveyer and Y direction transmission servomotor; Y direction driving member erecting frame is packed in the bearing seat top, and Y direction roller bearing lead screw transmission part is installed in the erecting frame.
Preferably, the light checking device of described full-automatic three Optical Inspection Machines is characterized in that: the slotted hole groove that vertically has the height distance that is used for adjusting camera and axis light generator on the installing plate; Distance between two cameras and two the axis light generators is according to chip specification requirement on the material bar, by adjusting with the camera spacing adjustment linear electric motors of one of them vertical installing plate coupling.
The beneficial effect of the utility model is, high power industrial camera, illumination system are installed in and follow the tracks of on the vertical installing plate that there is annexation in travel mechanism, can move to the position that needs to capture chip with following the tracks of travel mechanism's instruction.
Follow the tracks of travel mechanism by vertical installing plate is formed along the roller bearing lead-screw drive mechanism that two vertical direction move; The length and the width both direction that can make vertical installing plate drive camera and coaxial optical system part edge material bar move, so that each chip block on the material bar is captured.
Description of drawings
Fig. 1 is that the three-dimensional total of light checking device of full-automatic three Optical Inspection Machines of the utility model schemes
Fig. 2 is the partial exploded view of light checking device of full-automatic three Optical Inspection Machines of the utility model
Fig. 3 is the scheme of installation of camera and two axis light generators.
Wherein
601 - coaxial optical generator 602 - high-powered industrial cameras 603 - vertical mounting plate 604 - horizontal mounting plate 605 - plate 606 - lighting system mounting plate 607-X direction of the rail 608 - Position Sensor 609 - Position sensor chip 610-X direction of the roller screw drive member 611 - strengthening support plate 612-X direction drive servo motor 613-Y direction of the roller screw drive parts 614-Y direction drive servo motor 615 - bearing seat 616-Y direction transmission parts mounting bracket 617 - camera spacing adjustment linear motor 618 - belt conveyor
Embodiment
, mainly comprise illumination system and follow the tracks of travel mechanism, wherein like Fig. 1, shown in 2 according to the light checking device of full-automatic three Optical Inspection Machines of a kind of embodiment of the utility model; Illumination system is by axis light generator 601; High power industrial camera 602, vertically installing plate 603, laterally installing plate 604; Web joint 605, illumination system installing plate 606 and camera spacing adjustment linear electric motors 617; Follow the tracks of travel mechanism by directions X guide rail 607, position sensor 608, location sensitive sheet 609; Directions X roller bearing lead screw transmission part 610 is strengthened back up pad 611, directions X transmission servomotor 612; Y direction roller bearing lead screw transmission part 613, Y direction transmission servomotor 614, supporting base 615; Y direction driving member erecting frame 616 is with conveyer 618 to form synchronously.
Performance is identical with effect; Or the saying of science; Essentially identical two cameras 602 and two axis light generators 601 are installed in respectively on the vertical installing plate 603 separately; Vertically have slotted hole groove (see figure 3) on the installing plate 603, be used for adjusting the height distance of camera 602 and axis light generator 601.Vertically installing plate 603 connects firmly through horizontal installing plate 604 and web joint 605 and illumination system installing plate 606.Distance between two cameras 602 and two the axis light generators 601 can be adjusted by camera spacing adjustment linear electric motors 617 based on chip specification requirement on the material bar.
Illumination system installing plate 606 with have the directions X roller bearing lead screw transmission nut 610 that is slidingly matched to connect firmly with directions X guide rail 607; When directions X transmission servomotor 612 drive directions X roller bearing lead screw transmission parts 610 moved, illumination system installing plate 606 just moved around along directions X with camera mounted thereto 602 and axis light generator 601 together.Location sensitive sheet 609 connects firmly with illumination system installing plate 606, when it moves around with it, is moving to left side or right positions, and with the inductor 608 of this side position near the time, will stop automatically moving.Mounting distance between two inductors 608 in the left and right sides, the length of visual material bar is adjusted.Illumination system installing plate 606 moves along the Y direction, is realized through being with conveyer 618 to drive with Y direction roller bearing lead screw transmission part 613 synchronously by Y direction transmission servomotor 614.
Y direction driving member erecting frame 616 is packed in top on the bearing seat 615, and Y direction roller bearing lead screw transmission part 613 is installed in the erecting frame 616.
The course of work of the light checking device of the utility model is following:
Under first material bar delivered to the light checking device of the utility model and when being parked in material bar support rails (not shown) precalculated position; Obtain expecting that put in place the vision system of information of bar starts immediately; Be that illumination system (contains the backlight of material bar below; Not shown) the normal bright state of unlatching; Following the tracks of travel mechanism starts vision camera etc. is moved to the predetermined top, the first core assembly sheet detection position of material bar (can once capture and detect four chip blocks, first group four chip block operated by rotary motion last two chip blocks that first row and second is gone on the right side of material bar working direction).At this moment, illumination system gets into the triggering state, and beginning is carried out intermittently moving candid photograph fast to chip on the material bar automatically synchronously with tracking travel mechanism and detected.After promptly candid photograph has detected first group of four chip block; The directions X transmission servomotor 612 of following the tracks of travel mechanism drives directions X roller bearing lead screw transmission part 610 makes the length direction of edge material bar input forwards such as vision camera move two chip block distances; Reach the top of second group of four chip block; The glittering candid photograph once more of illumination system triggering at this moment detected, and then removes to capture four chip blocks of the 3rd group of detection as stated, up to expecting that first on the bar gone and this two row chip candid photograph detection of second row finishes.Y direction transmission servomotor 614 is through be with conveyer 618 and Y direction roller bearing lead screw transmission part 613 synchronously; Make edge such as vision camera material bar Width move two chip block distances; Promptly move to the top of foremost two chip blocks of right side third and fourth row of expecting the bar working direction; After capturing detection; The directions X transmission servomotor 612 of following the tracks of travel mechanism drives directions X roller bearing lead screw transmission parts 610 makes edge the reverse length direction of material bar input such as vision camera move two chip block distances, and then goes to capture detection as stated.When the third and fourth row chip captured detect finish after; Y direction transmission servomotor 614 is through be with conveyer 618 and Y direction roller bearing lead screw transmission part 613 synchronously; Make edge such as vision camera material bar Width move two chip block distances; The top of right side the 5th that promptly moves to material bar working direction and the 6th capable last two chip blocks; After capturing detection, the directions X transmission servomotor 612 of following the tracks of travel mechanism drives directions X roller bearing lead screw transmission part 610 makes the length direction of edge material bar input forwards such as vision camera move two chip block distances, and then goes as stated to capture and detect.So like this capture detection repeatedly, the whole chips on the material bar are captured and are detected when accomplishing, and illumination system gets into closed condition.Then, the drawing mechanism (not shown) will be captured and detected the material bar finish and deliver to the discharging station, follow the tracks of travel mechanism and then vision camera etc. moved to initial position, wait for the detection of second material bar of sending here.
Above-mentioned camera is assisted the chip gold thread information of capturing down at illumination system at every turn, all can pass immediately toward computing machine and with the template comparative analysis of demarcation, whether qualified with the gold thread of judging this chip.
The characteristics of the light checking device of the utility model are:
This device is made up of high power industrial camera, illumination system (coaxial optical system part) and tracking travel mechanism;
High power industrial camera, illumination system are installed in and follow the tracks of on the vertical installing plate that there is annexation in travel mechanism, can move to the position that needs to capture chip with travel mechanism's instruction.
Follow the tracks of travel mechanism by vertical installing plate is formed along the roller bearing lead-screw drive mechanism that two vertical direction move; The length and the width both direction that can make vertical installing plate drive camera and coaxial optical system part edge material bar move, so that each chip block on the material bar is captured.
High power industrial camera and axis light device can be adjusted with the height and position of material bar.

Claims (2)

1. the light checking device of full-automatic three Optical Inspection Machines is characterized in that: comprising:
Performance is installed in respectively on the vertical installing plate (603) separately with effect essentially identical two cameras (602) and two axis light generators (601) from top to bottom; Vertically installing plate (603) connects firmly with illumination system installing plate (606) through horizontal installing plate (604) and web joint (605);
Illumination system installing plate (606) with connect firmly by the directions X roller bearing lead screw transmission nut (610) that is slidingly matched with directions X guide rail (607); Location sensitive sheet (609) connects firmly with illumination system installing plate (606); Two inductors (608) corresponding with location sensitive sheet (609) are installed in respectively on the directions X guide rail (607), and are positioned at the and arranged on left and right sides of location sensitive sheet (609);
Illumination system installing plate (606) connects firmly with Y direction roller bearing lead screw transmission part (613), and Y direction roller bearing lead screw transmission part (613) is through band conveyer (618) and Y direction transmission servomotor (614) couple synchronously; Y direction driving member erecting frame (616) is packed in bearing seat (615) top, and Y direction roller bearing lead screw transmission part (613) is installed in the erecting frame (616).
2. the light checking device of full-automatic three Optical Inspection Machines according to claim 1 is characterized in that: the slotted hole groove that vertically has the height distance that is used for adjusting camera (602) and axis light generator (601) on the installing plate (603); Distance between two cameras (602) and two the axis light generators (601) is according to chip specification requirement on the material bar, by adjusting with the camera spacing adjustment linear electric motors (617) of one of them vertical installing plate (603) coupling.
CN2011202637410U 2011-07-22 2011-07-22 Optical detecting device of full-automatic tertiary photodetector Expired - Lifetime CN202189022U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011202637410U CN202189022U (en) 2011-07-22 2011-07-22 Optical detecting device of full-automatic tertiary photodetector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011202637410U CN202189022U (en) 2011-07-22 2011-07-22 Optical detecting device of full-automatic tertiary photodetector

Publications (1)

Publication Number Publication Date
CN202189022U true CN202189022U (en) 2012-04-11

Family

ID=45920464

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011202637410U Expired - Lifetime CN202189022U (en) 2011-07-22 2011-07-22 Optical detecting device of full-automatic tertiary photodetector

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103018251A (en) * 2012-07-24 2013-04-03 深圳市金霆科技有限公司 Tile detection device and method
CN104458763A (en) * 2014-12-12 2015-03-25 元亮科技有限公司 Wide-view surface defect detector
CN112213321A (en) * 2020-09-15 2021-01-12 格力电器(武汉)有限公司 Visual inspection apparatus and system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103018251A (en) * 2012-07-24 2013-04-03 深圳市金霆科技有限公司 Tile detection device and method
CN103018251B (en) * 2012-07-24 2015-09-16 深圳市金霆科技有限公司 tile detection device and method
CN104458763A (en) * 2014-12-12 2015-03-25 元亮科技有限公司 Wide-view surface defect detector
CN112213321A (en) * 2020-09-15 2021-01-12 格力电器(武汉)有限公司 Visual inspection apparatus and system

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C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee
CP01 Change in the name or title of a patent holder

Address after: 518000 Guangdong city of Shenzhen province Baoan District Longhua sea with rich industrial park third area Huarong Road Long Fu Industrial Zone 3 and 4, 7, 8, 1-4

Patentee after: Shenzhen geland intelligent equipment Limited by Share Ltd

Address before: 518000 Guangdong city of Shenzhen province Baoan District Longhua sea with rich industrial park third area Huarong Road Long Fu Industrial Zone 3 and 4, 7, 8, 1-4

Patentee before: Grand Technology (Shenzhen) Co.,Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20120411