CN202171440U - Difference capacitance type length sensor - Google Patents
Difference capacitance type length sensor Download PDFInfo
- Publication number
- CN202171440U CN202171440U CN2011202879388U CN201120287938U CN202171440U CN 202171440 U CN202171440 U CN 202171440U CN 2011202879388 U CN2011202879388 U CN 2011202879388U CN 201120287938 U CN201120287938 U CN 201120287938U CN 202171440 U CN202171440 U CN 202171440U
- Authority
- CN
- China
- Prior art keywords
- capacitor
- pole plates
- capacitor fixed
- electric capacity
- fixed plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The utility model discloses a length sensor employing a difference capacitance technology and of which the precision is greater than 0.1 micrometer. The difference capacitance type length sensor comprises capacitor fixed pole plates, capacitor movable pole plates, capacitor pole plate seats, measuring rods and spring devices. The capacitor fixed pole plates are two cylindrical cylinders spaced by rubber rings, and the two ends of the capacitor fixed pole plates are connected with the capacitor pole plate seats respectively via the rubber rings; the capacitor movable pole plates are arranged in the cylindrical cylinders of the capacitor fixed pole plates, and the capacitor movable pole plates are cylindrical cylinders capable of horizontally moving in the cylindrical cylinders of the capacitor fixed pole plates and of which the outer radiuses are slightly less than the inner radiuses of the capacitor fixed pole plates; the capacitor movable pole plates are connected with the measuring rods respectively, and the spring devices used for controlling the measuring rods to move horizontally are arranged on the outsides of the capacitor pole plate seats. Because the utility model does not employ the grating moire fringe technology used at present any more, and does not need to process and shape laser engraved lines and moire fringes any more, the production processing cost is reduced substantially, and a rear end processing circuit is relatively simple.
Description
Technical field:
The utility model relates to the linear transducer field that Displacement Measurement, the degree of depth etc. are used, particularly a kind of linear transducer that adopts the technological precision of differential capacitance to be higher than 0.1 μ m.
Background technology:
At present, the precision linear transducer that is higher than 0.1 μ m mainly adopts the grating Moire fringe technology to realize present stage.Its implementation method is mainly divided following three steps:
The first step: at a pitch groove such as on glass, make and decide grating, this is the core component of sensor.It is more little to decide raster pitch, and precision is high more.The pitch accuracy close relation the precision of sensor, for guaranteeing precision, decides grating line at present and mainly adopts laser scoring, and under dustless, vibrationless environment, accomplish.The grating length sensor that external precision is higher than 0.1 μ m all is to accomplish the laser scoring of deciding grating at special-purpose basement.Problems such as its cost is high, efficient is low are obvious, and laser scoring work is also very consuming time.
Second step: optical transmitting set and optical receiver are housed on another parts, are referred to as moving grating usually.
The 3rd step: when decide grating and moving grating and keeping a certain distance and generation to relatively move, move the optical receiver of grating and will receive mobile interference Moire fringe.Be converted into sine wave to Moire fringe through photovalve then, again sine wave shaped transformed, export pulse square wave at last.Like this, move grating and the pitch of deciding the relative displacement=pulse number * Moire fringe of grating.
This shows that present stage, technological major defect was: cost of manufacture is high, harsh, the complicated circuit of production environment.
The utility model content:
In view of above-mentioned technical matters; The utility model is through having adopted the differential capacitance technology and having combined elastic probe directly to carry out the method that electrical equipment is connected with capacitor fixed plate; And PCB is directly installed on the method on the capacitance pole panel seat, realized that a kind of precision that adopts the differential capacitance technology is higher than the linear transducer of 0.1 μ m.Thereby can obtain higher precision property with lower production cost.
The concrete technical scheme of the utility model is following:
The differential capacitance type linear transducer comprises capacitor fixed plate, electric capacity movable plate electrode, capacitance pole panel seat, sounding rod, spring assembly.
Said capacitor fixed plate is two cylindrical drum that separated by rubber band; Said capacitor fixed plate two ends connect a capacitance pole panel seat through rubber band respectively; Be provided with an electric capacity movable plate electrode in the cylindrical drum of said capacitor fixed plate, this electric capacity movable plate electrode is that an external radius is slightly less than the capacitor fixed plate inside radius, and the cylindrical drum that can in the cylindrical drum of capacitor fixed plate, move horizontally; Said electric capacity movable plate electrode links to each other with a sounding rod; Said capacitance pole panel seat peripheral hardware has one to be used for the spring assembly that the control survey bar moves horizontally.
In the such scheme, the rubber band thickness between said two capacitor fixed plates is that 0.5mm is to 2.0mm.
In the such scheme, said electric capacity movable plate electrode links to each other through insulator with sounding rod.
In the such scheme, said sounding rod passes spring assembly.
Because the utility model no longer adopts the grating Moire fringe technology of present use, no longer needs the processing shaping of laser scoring and Moire fringe, so the production and processing cost reduces greatly, and the back-end processing circuit is also simple relatively.
Suitably design cylindrical drum capacitor fixed plate and the radii size of electric capacity movable plate electrode and the length of cylindrical drum capacitor plate can further be brought up to 0.001 μ m with precision.
Because the cylindrical drum capacitor plate is a metal material, the lining thing is the inorganic material air between pole plate; Therefore can long-term work under high temperature, low temperature, high-intensity magnetic field, intense radiation, measurement stability is improved greatly, has especially solved the detection difficult problem under the high temperature and high pressure environment.
Description of drawings:
Further specify the utility model below in conjunction with accompanying drawing and embodiment.
Fig. 1 is the structural representation of the utility model.
Embodiment:
For technological means, creation characteristic that the utility model is realized, reach purpose and be easy to understand understanding with effect, below in conjunction with concrete diagram, further set forth the utility model.
As shown in Figure 1, the described differential capacitance type linear transducer of the utility model comprises capacitor fixed plate 1, electric capacity movable plate electrode 2, capacitance pole panel seat 3, sounding rod 4, spring assembly 5.
Wherein, capacitor fixed plate 1 be two by the thickness cylindrical drum that to be 0.5mm separate to the rubber band 6 of 2.0mm, these capacitor fixed plate 1 two ends connect a capacitance pole panel seat 3 through rubber band 7 respectively; Be provided with an electric capacity movable plate electrode 2 in the cylindrical drum of capacitor fixed plate 1, this electric capacity movable plate electrode 2 is that an external radius is slightly less than the capacitor fixed plate inside radius, and the cylindrical drum that can in the cylindrical drum of capacitor fixed plate 1, move horizontally; Electric capacity movable plate electrode 2 links to each other through insulator with a sounding rod 4; Capacitance pole panel seat 3 is outer to be provided with one and to be used for the spring assembly 5 that control survey bar 4 moves horizontally, and sounding rod 4 passes this spring assembly 5.
The principle of work of the described linear transducer of the utility model is following:
Suppose in this example that the cylindrical drum inside radius of capacitor fixed plate is R, length is 1, and the cylindrical outer tube radius of electric capacity movable plate electrode is r, and length is 1.
When sounding rod did not stress, sounding rod made the electric capacity movable plate electrode lean against the rightmost side under the spring system effect.The capacitance difference of two capacitors being made up of a shared electric capacity movable plate electrode, two capacitor fixed plates at this moment, is referred to as initial capacitance C
0
Under the thrust, sounding rod moves to right outside, some x values of supposing to move to right.The capacitance difference of two capacitors being made up of a shared electric capacity movable plate electrode, two capacitor fixed plates at this moment, is referred to as to measure capacitor C
1Then can infer:
C
0-C
1＝4πεx/ln(R/r)
This shows the variable quantity (C of capacitance difference
0-C
1) be directly proportional with displacement (x), they are linear relationships.Again because C
0, C
1All be the differential capacitance value, this has further increased the antijamming capability of sensor, has simultaneously also further eliminated the influence to sensor accuracy of temperature, humidity.
In addition, the electrical equipment of the utility model connects as follows:
Two capacitor fixed plates be contained in printed circuit board (PCB) (the Printed Circuit Board that is welded with elastic probe on the capacitance pole panel seat; Hereinafter to be referred as PCB) elastic probe directly carry out Elastic Contact electrical equipment and connect, so further minimizing lead-in wire stray capacitance is to the precision influence of sensor.
Be welded in the lead-in wire on the electric capacity movable plate electrode and be welded on the sounding rod lead-in wire also directly and PCB be welded to connect.
More than show and described ultimate principle of the utility model and the advantage of principal character and the utility model.The technician of the industry should understand; The utility model is not restricted to the described embodiments; The principle of describing in the foregoing description and the instructions that the utility model just is described; Under the prerequisite that does not break away from the utility model spirit and scope, the utility model also has various changes and modifications, and these variations and improvement all fall in the utility model scope that requires protection.The utility model requires protection domain to be defined by appending claims and equivalent thereof.
Claims (4)
1. the differential capacitance type linear transducer comprises capacitor fixed plate, electric capacity movable plate electrode, capacitance pole panel seat, sounding rod, spring assembly; It is characterized in that said capacitor fixed plate is two cylindrical drum that separated by rubber band; Said capacitor fixed plate two ends connect a capacitance pole panel seat through rubber band respectively; Be provided with an electric capacity movable plate electrode in the cylindrical drum of said capacitor fixed plate, this electric capacity movable plate electrode is that an external radius is slightly less than the capacitor fixed plate inside radius, and the cylindrical drum that can in the cylindrical drum of capacitor fixed plate, move horizontally; Said electric capacity movable plate electrode links to each other with a sounding rod; Said capacitance pole panel seat peripheral hardware has one to be used for the spring assembly that the control survey bar moves horizontally.
2. according to the differential capacitance type linear transducer of claim 1, it is characterized in that the rubber band thickness between said two capacitor fixed plates is that 0.5mm is to 2.0mm.
3. according to the differential capacitance type linear transducer of claim 1, it is characterized in that said electric capacity movable plate electrode links to each other through insulator with sounding rod.
4. according to the differential capacitance type linear transducer of claim 1, it is characterized in that said sounding rod passes spring assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202879388U CN202171440U (en) | 2011-08-09 | 2011-08-09 | Difference capacitance type length sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202879388U CN202171440U (en) | 2011-08-09 | 2011-08-09 | Difference capacitance type length sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202171440U true CN202171440U (en) | 2012-03-21 |
Family
ID=45829635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202879388U Expired - Fee Related CN202171440U (en) | 2011-08-09 | 2011-08-09 | Difference capacitance type length sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202171440U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102359754A (en) * | 2011-08-09 | 2012-02-22 | 张华建 | Differential-capacitive length sensor |
| CN106123763A (en) * | 2016-08-31 | 2016-11-16 | 南京长亚轨道交通科技有限公司 | A kind of electrical cnnector contact pin micrometric displacement detection device |
| CN115940570A (en) * | 2023-02-13 | 2023-04-07 | 基合半导体（宁波）有限公司 | Focusing motor, closed-loop control method of focusing motor and camera equipment |
-
2011
- 2011-08-09 CN CN2011202879388U patent/CN202171440U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102359754A (en) * | 2011-08-09 | 2012-02-22 | 张华建 | Differential-capacitive length sensor |
| CN106123763A (en) * | 2016-08-31 | 2016-11-16 | 南京长亚轨道交通科技有限公司 | A kind of electrical cnnector contact pin micrometric displacement detection device |
| CN106123763B (en) * | 2016-08-31 | 2018-12-14 | 南京长亚轨道交通科技有限公司 | A kind of electrical cnnector contact pin micro-displacement detection device |
| CN115940570A (en) * | 2023-02-13 | 2023-04-07 | 基合半导体（宁波）有限公司 | Focusing motor, closed-loop control method of focusing motor and camera equipment |
| CN115940570B (en) * | 2023-02-13 | 2024-06-04 | 基合半导体（宁波）有限公司 | Focusing motor, closed-loop control method of focusing motor and image pickup apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102359754A (en) | Differential-capacitive length sensor | |
| CN204421842U (en) | Laser light curtain measuring instrument | |
| US10151579B1 (en) | Array photoelectric sensor grating displacement detection system and method | |
| CN202171440U (en) | Difference capacitance type length sensor | |
| CN101556138A (en) | Time-grating straight-line displacement sensor | |
| CN104677258B (en) | Two-dimensional plane displacement sensor | |
| CN101344547B (en) | Capacitance imaging sensor with asymmetric combined electrode structure | |
| CN102840822B (en) | Multi-ring parallel connection type capacitance displacement sensor | |
| CN102252600A (en) | Capacitive transducer-based cylindricity deviation measuring method and device | |
| CN204188237U (en) | Hall liquid level pick-up unit | |
| CN203981104U (en) | A kind of eddy current displacement sensor static characteristics calibration equipment | |
| CN103234457B (en) | Based on the multi-beam displacement measurement method of digital imagery | |
| CN103149253B (en) | Electric capacity/image method same volume field imaging sensor | |
| CN202793305U (en) | Multi-ring parallel type capacitor displacement sensor | |
| CN104568073A (en) | Hall liquid level detection device | |
| CN113188430A (en) | 0.01 mu m high-precision displacement sensor and precision adjusting method thereof | |
| CN101957165B (en) | Measuring apparatus for internal diameter of small deep hole | |
| CN104713466B (en) | High-precision differential type multi-layer annular capacitance gage | |
| CN104792267A (en) | High-sensitivity fiber Bragg grating displacement sensor | |
| CN205619867U (en) | Vortex lattice displacement sensor with semi -circular reflection conductor in both sides | |
| CN105222713A (en) | A kind of utilize fiber grating to carry out accurate displacement method and device | |
| CN101865648A (en) | High-accuracy capacitor micrometer | |
| CN204479013U (en) | High precision differential type multi-layer annular capacitance gage | |
| CN205120106U (en) | Horizontal measuring device of electromagnetic type | |
| CN204694273U (en) | A kind of variable-area capacitive sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120321 Termination date: 20130809 |