CN204479013U - High precision differential type multi-layer annular capacitance gage - Google Patents
High precision differential type multi-layer annular capacitance gage Download PDFInfo
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- CN204479013U CN204479013U CN201520149939.4U CN201520149939U CN204479013U CN 204479013 U CN204479013 U CN 204479013U CN 201520149939 U CN201520149939 U CN 201520149939U CN 204479013 U CN204479013 U CN 204479013U
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Abstract
The utility model discloses a kind of high precision differential type multi-layer annular capacitance gage, includes metal shell, dynamic condenser body and two static capacity bodies, the two ends, left and right of dynamic condenser body are all formed with multiple concentric electric capacity movable plate electrode, and dynamic condenser body is connected with metal guided way, and metal guided way and metal shell directly coordinate and contact, and the end of metal guided way stretches out metal shell and is connected with a gauge head, the right-hand member of one static capacity body and the left end of another static capacity body are all formed with multiple concentric electric capacity static plate electrode, the electric capacity movable plate electrode that electric capacity static plate electrode on two static capacity bodies is corresponding with dynamic condenser body two ends is mutually nested, by this, electric capacity static plate electrode and corresponding electric capacity movable plate electrode are formed and organizes ring-type shunt capacitance more, the change shape of many groups ring-type shunt capacitance is identical, each group of differential change adds up, thus area change amount when increasing fine motion between electric capacity static plate electrode and electric capacity movable plate electrode, thus make system have more stability, anti-interference, effectively improve measuring accuracy and sensitivity.
Description
Technical field
The utility model relates to measuring equipment art, refers in particular to a kind of high precision differential type multi-layer annular capacitance gage.
Background technology
Capacitance displacement sensor is a kind of fine measuring instrument of non-contact capacitive formula principle, have outside the common nothing friction of general contactless instrument, harmless mill and inertialess feature, also there is signal to noise ratio (S/N ratio) large, highly sensitive, drift is little, and frequency response is wide, non-linear little, precision stability is good, and anti-electromagnetic interference capability is strong and use the advantages such as easy to operate.It is research institute at home, and institution of higher learning, factory and military project department are used widely, and becomes a kind of indispensable testing tool in scientific research, teaching and production.
Current existing capacitance displacement sensor mainly contains type polar distance variable capacitance sensor, the large class of capacitor sensor with changed area two, but the sensitivity of above two kinds of sensors and precision all lower, reach high measuring accuracy and must increase polar plate area, this is not only very high on cost, volume is also difficult to microminiaturization, and cannot the real motion state of surveying work platform.
Utility model content
In view of this, the utility model is for the disappearance of prior art existence, its fundamental purpose is to provide a kind of high precision differential type multi-layer annular capacitance gage, it can be used for high measurement accuracy, high sensitivity, is especially applied in the capacitance displacement sensor in micro displacement workbench, not only reduces costs, improve measuring accuracy, and microminiaturization can be realized.
For achieving the above object, the utility model adopts following technical scheme:
A kind of high precision differential type multi-layer annular capacitance gage, includes metal shell, dynamic condenser body and two static capacity bodies; This metal shell ground connection, this dynamic condenser body and two static capacity bodies are all arranged in metal shell; The two ends, left and right of this dynamic condenser body are all formed with multiple concentric electric capacity movable plate electrode, and dynamic condenser body is connected with metal guided way, and metal guided way and metal shell directly coordinate and contact, and the end of metal guided way stretches out metal shell and is connected with a gauge head; The left end of one static capacity body is provided with left insulation guiding static plate electrode cover, the right-hand member of another static capacity body is provided with right insulation guiding static plate electrode cover, the right-hand member of one static capacity body and the left end of another static capacity body are all formed with multiple concentric electric capacity static plate electrode, the electric capacity movable plate electrode that electric capacity static plate electrode on two static capacity bodies is corresponding with dynamic condenser body two ends is mutually nested, and, two static capacity bodies are connected with shielded cable, this shielded cable is connected with capacitance signal treatment circuit through metal shell, and capacitance signal treatment circuit connects differential amplifier circuit.
As a kind of preferred version, described metal shell is the hollow circular cylinder of left end opening, the right-hand member of this metal shell has the first through hole, this left insulation guiding static plate electrode cover covers the left end of metal shell, the right-hand member that this right insulation guiding static plate electrode cover is arranged at this metal shell is inner, this left insulation guiding static plate electrode cover and right insulation guiding static plate electrode cover have the second through hole and third through-hole respectively, this metal guided way is successively through the first through hole, third through-hole and the second through hole and the two ends, left and right of metal guided way are stretched out outside metal shell, this metal guided way can movably be arranged, this dynamic condenser body also movably can be arranged with metal guided way accordingly.
As a kind of preferred version, described metal guided way is provided with a hold-down nut, this hold-down nut is butted on left insulation guiding static plate electrode and puts, this metal guided way is connected by a connection piece with between gauge head, a back-moving spring be sheathed on metal guide outside rail and the two ends of this back-moving spring be butted on respectively between metal shell and web member.
As a kind of preferred version, described metal guided way includes left metal guided way and right metal guided way, the left end of this left metal guided way stretches out the outer also ground connection of metal shell, this right metal guided way directly coordinates with metal shell and contacts, the junction of this right metal guided way and dynamic condenser body is provided with insullac, and it is outer and be connected with gauge head that the right-hand member of this right metal guided way stretches out metal shell.
As a kind of preferred version, described gauge head is replaceable gauge head.
The utility model compared with prior art has obvious advantage and beneficial effect, specifically, as shown from the above technical solution:
By being provided with dynamic condenser body and two static capacity bodies in metal shell, the two ends, left and right of this dynamic condenser body are all formed with multiple concentric electric capacity movable plate electrode, the right-hand member of one static capacity body and the left end of another static capacity body are all formed with multiple concentric electric capacity static plate electrode, the electric capacity movable plate electrode that electric capacity static plate electrode on two static capacity bodies is corresponding with dynamic condenser body two ends is mutually nested, electric capacity static plate electrode and corresponding electric capacity movable plate electrode are formed and organizes ring-type shunt capacitance more, the change shape of this many groups ring-type shunt capacitance is identical, each group of differential change adds up, thus area change amount when increasing fine motion between electric capacity static plate electrode and electric capacity movable plate electrode, thus make system have more stability, anti-interference, effectively improve measuring accuracy and sensitivity.
For more clearly setting forth architectural feature of the present utility model and effect, below in conjunction with accompanying drawing and specific embodiment, the utility model is described in detail:
Accompanying drawing explanation
Fig. 1 is the general structure schematic diagram of the preferred embodiment of the utility model;
Fig. 2 is the front view of static capacity body in the preferred embodiment of the utility model;
Fig. 3 is the partial section of static capacity body in the preferred embodiment of the utility model;
Fig. 4 is the side view of static capacity body in the preferred embodiment of the utility model;
Fig. 5 is the front view of dynamic condenser body in the preferred embodiment of the utility model;
Fig. 6 is the partial section of dynamic condenser body in the preferred embodiment of the utility model;
Fig. 7 is the side view of dynamic condenser body in the preferred embodiment of the utility model;
Fig. 8 is the front view of left insulation guiding static plate electrode cover in the preferred embodiment of the utility model;
Fig. 9 is the sectional view of left insulation guiding static plate electrode cover in the preferred embodiment of the utility model;
Figure 10 is the side view of left insulation guiding static plate electrode cover in the preferred embodiment of the utility model;
Figure 11 is the front view of right insulation guiding static plate electrode cover in the preferred embodiment of the utility model;
Figure 12 is the sectional view of right insulation guiding static plate electrode cover in the preferred embodiment of the utility model;
Figure 13 is the side view of right insulation guiding static plate electrode cover in the preferred embodiment of the utility model;
Figure 14 is the circuit diagram be made up of cav444 integrated chip in the preferred embodiment of the utility model.
Figure 15 is high common mode differential amplifier circuit schematic diagram in the preferred embodiment of the utility model.
Accompanying drawing identifier declaration:
10, metal shell 101, first through hole
20, dynamic condenser body 21, electric capacity movable plate electrode
30, static capacity body 31, electric capacity static plate electrode
40, left insulation guiding static plate electrode cover the 401, second through hole
50, right insulation guiding static plate electrode cover 501, third through-hole
60, metal guided way 61, hold-down nut
62, web member 63, back-moving spring
64, left metal guided way 65, right metal guided way
70, gauge head.
Embodiment
Please refer to shown in Fig. 1 to Figure 15, that show the concrete structure of the preferred embodiment of the utility model, include metal shell 10, dynamic condenser body 20 and two static capacity bodies 30.
Wherein, this metal shell 10 ground connection, this metal shell 10 is the hollow circular cylinder of left end opening, and the right-hand member of this metal shell 10 has the first through hole 101.
This dynamic condenser body 20 and two static capacity bodies 30 are all arranged in metal shell 10.As shown in Figures 5 to 7, the two ends, left and right of this dynamic condenser body 20 are all formed with multiple concentric electric capacity movable plate electrode 21, as shown in Figures 2 to 4, the right-hand member of one static capacity body 30 and the left end of another static capacity body 30 are all formed with multiple concentric electric capacity static plate electrode 31, the plurality of concentric electric capacity movable plate electrode 21 is all very thin with the thickness of electric capacity static plate electrode 31, spacing is minimum, the electric capacity movable plate electrode 21 corresponding with dynamic condenser body 20 two ends by the electric capacity static plate electrode 31 on two static capacity bodies 30 is mutually nested, electric capacity static plate electrode 31 and corresponding electric capacity movable plate electrode 21 are formed and organizes ring-type shunt capacitance more, the change shape of this many groups ring-type shunt capacitance is identical, each group of differential change adds up, be conducive to knots modification during initial capacitance value and the capacitance variations increasing sensor, thus improve measuring accuracy of the present utility model and sensitivity.The group number of this ring-type shunt capacitance is not restricted, and in the present embodiment, this ring-type shunt capacitance is 18 groups.
The left end of one static capacity body 30 is provided with left insulation guiding static plate electrode cover 40, and the right-hand member of another static capacity body 30 is provided with right insulation guiding static plate electrode cover 50.This left insulation guiding static plate electrode cover 40 covers the left end of metal shell 10, the right-hand member that this right insulation guiding static plate electrode cover 50 is arranged at this metal shell 10 is inner, specifically, as shown in Fig. 8 to Figure 13, this left insulation guiding static plate electrode cover 40 and right insulation guiding static plate electrode cover 50 have the second through hole 401 and third through-hole 501 respectively.
This dynamic condenser body 20 is connected with metal guided way 60, and this metal guided way 60 directly coordinates with metal shell 10 and contacts, and the end of metal guided way 60 stretches out metal shell 10 and is connected with a gauge head 70, and this gauge head 70 can be changed according to the difference of measurement environment.Aforementioned left insulation guiding static plate electrode cover 40 and right insulation guiding static plate electrode cover 50 not only play the effect of electric insulation and fixing static capacity body 30, and the effect that metal guide rail 60 is led can be played, thus ensure that the constant gap between dynamic condenser body 20 and two static capacity bodies 30 to a certain extent, thus improve the accuracy measured.Specifically, this metal guided way 60 passes the first through hole 101, third through-hole 501 and the second through hole 401 successively and the two ends, left and right of metal guided way 60 are stretched out outside metal shell 10, this metal guided way 60 can movably be arranged, and this dynamic condenser body 20 also movably can be arranged with metal guided way 60 accordingly.
In the present embodiment, this metal guided way 60 is provided with a hold-down nut 61, this hold-down nut 61 is butted on left insulation guiding static plate electrode cover 40, be connected by a connection piece 62 between this metal guided way 60 with gauge head 70, a back-moving spring 63 is sheathed on outside metal the guided way 60 and two ends of this back-moving spring 63 and is butted on respectively between metal shell 10 and web member 62.Reset by the retroactive effect of back-moving spring 63 and give the suitable pressure of measuring table thus detect in real time.Specifically, this metal guided way 60 includes left metal guided way 64 and right metal guided way 65, the left end of this left metal guided way 64 stretches out the outer also ground connection of metal shell 10, this right metal guided way 65 directly coordinates with metal shell 10 and contacts, play the effect of shielding interference, when this dynamic condenser body 20 moves, the capacitance between this dynamic condenser body 20 and metal shell 10 remains unchanged, thus eliminate consequent spurious signal, improve the accuracy measured.This right metal guided way 65 is provided with insullac with the junction of dynamic condenser body 20, thus makes right metal guided way 65 and dynamic condenser body 20 realize the object of electric insulation.It is outer and be connected with gauge head 70 that the right-hand member of this right metal guided way 65 stretches out metal shell 10.
Two static capacity bodies 30 are connected with shielded cable (not shown), this shielded cable is connected with capacitance signal treatment circuit through metal shell 10, as shown in figure 14, this capacitance signal treatment circuit is made up of cav444 integrated chip, the capacitance that this two static capacity body 30 forms with dynamic condenser body 20 is respectively C12 and C23, capacitance is that to be transformed into it corresponding magnitude of voltage be respectively the voltage signal of U12 and U23 to the capacitance signal of C12 and C23, to process further below by this capacitance signal treatment circuit.
This capacitance signal treatment circuit connects differential amplifier circuit, as shown in figure 15, voltage signal U12 and U23 after process is carried out high common mode differential amplify by this differential amplifier circuit, suppress common mode interference, effectively reduce because power-supply fluctuation and transistor vary with temperature the zero point drift caused more, amplify the capacitance signal changed because of capacitive displacement, the capacitance signal after amplification and voltage signal are changed, just can real time record display in screen.
The principle of work that the present embodiment is described in detail in detail is as follows:
Metal guided way 60 can move left and right, thus drive dynamic condenser body 20 to move left and right in metal shell 10, and reset by the retroactive effect of back-moving spring 63 and give the suitable pressure of measuring table thus detect in real time, when dynamic condenser body 20 moves right, resistance value C12 diminishes, and resistance value C23 becomes large; When dynamic condenser body 20 is moved to the left, then resistance value C12 becomes large, and resistance value C23 diminishes.It is the voltage signal of U12 and U23 that C12 and C23 changes into magnitude of voltage corresponding with it through capacitance signal treatment circuit; Voltage signal U12 and U23 carries out high common mode differential amplify through differential amplifier circuit, suppresses common mode interference, amplifies difference mode signal; Capacitance signal after amplification and voltage signal are carried out process conversion, just can real time record display in screen.
Design focal point of the present utility model is: by being provided with dynamic condenser body and two static capacity bodies in metal shell, the two ends, left and right of this dynamic condenser body are all formed with multiple concentric electric capacity movable plate electrode, the right-hand member of one static capacity body and the left end of another static capacity body are all formed with multiple concentric electric capacity static plate electrode, the electric capacity movable plate electrode that electric capacity static plate electrode on two static capacity bodies is corresponding with dynamic condenser body two ends is mutually nested, electric capacity static plate electrode and corresponding electric capacity movable plate electrode are formed and organizes ring-type shunt capacitance more, the change shape of this many groups ring-type shunt capacitance is identical, each group of differential change adds up, thus area change amount when increasing fine motion between electric capacity static plate electrode and electric capacity movable plate electrode, thus make system have more stability, anti-interference, effectively improve measuring accuracy and sensitivity.
The above, it is only preferred embodiment of the present utility model, not technical scope of the present utility model is imposed any restrictions, therefore every above embodiment is done according to technical spirit of the present utility model any trickle amendment, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
Claims (5)
1. a high precision differential type multi-layer annular capacitance gage, is characterized in that: include metal shell, dynamic condenser body and two static capacity bodies; This metal shell ground connection, this dynamic condenser body and two static capacity bodies are all arranged in metal shell; The two ends, left and right of this dynamic condenser body are all formed with multiple concentric electric capacity movable plate electrode, and dynamic condenser body is connected with metal guided way, and metal guided way and metal shell directly coordinate and contact, and the end of metal guided way stretches out metal shell and is connected with a gauge head; The left end of one static capacity body is provided with left insulation guiding static plate electrode cover, the right-hand member of another static capacity body is provided with right insulation guiding static plate electrode cover, the right-hand member of one static capacity body and the left end of another static capacity body are all formed with multiple concentric electric capacity static plate electrode, the electric capacity movable plate electrode that electric capacity static plate electrode on two static capacity bodies is corresponding with dynamic condenser body two ends is mutually nested, and, two static capacity bodies are connected with shielded cable, this shielded cable is connected with capacitance signal treatment circuit through metal shell, and capacitance signal treatment circuit connects differential amplifier circuit.
2. high precision differential type multi-layer annular capacitance gage according to claim 1, it is characterized in that: described metal shell is the hollow circular cylinder of left end opening, the right-hand member of this metal shell has the first through hole, this left insulation guiding static plate electrode cover covers the left end of metal shell, the right-hand member that this right insulation guiding static plate electrode cover is arranged at this metal shell is inner, this left insulation guiding static plate electrode cover and right insulation guiding static plate electrode cover have the second through hole and third through-hole respectively, this metal guided way is successively through the first through hole, third through-hole and the second through hole and the two ends, left and right of metal guided way are stretched out outside metal shell, this metal guided way can movably be arranged, this dynamic condenser body also movably can be arranged with metal guided way accordingly.
3. high precision differential type multi-layer annular capacitance gage according to claim 2, it is characterized in that: described metal guided way is provided with a hold-down nut, this hold-down nut is butted on left insulation guiding static plate electrode and puts, this metal guided way is connected by a connection piece with between gauge head, a back-moving spring be sheathed on metal guide outside rail and the two ends of this back-moving spring be butted on respectively between metal shell and web member.
4. the high precision differential type multi-layer annular capacitance gage according to claim 1,2 or 3, it is characterized in that: described metal guided way includes left metal guided way and right metal guided way, the left end of this left metal guided way stretches out the outer also ground connection of metal shell, this right metal guided way directly coordinates with metal shell and contacts, the junction of this right metal guided way and dynamic condenser body is provided with insullac, and it is outer and be connected with gauge head that the right-hand member of this right metal guided way stretches out metal shell.
5. high precision differential type multi-layer annular capacitance gage according to claim 1, is characterized in that: described gauge head is replaceable gauge head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201520149939.4U CN204479013U (en) | 2015-03-17 | 2015-03-17 | High precision differential type multi-layer annular capacitance gage |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520149939.4U CN204479013U (en) | 2015-03-17 | 2015-03-17 | High precision differential type multi-layer annular capacitance gage |
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| CN201520149939.4U Expired - Fee Related CN204479013U (en) | 2015-03-17 | 2015-03-17 | High precision differential type multi-layer annular capacitance gage |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104713466A (en) * | 2015-03-17 | 2015-06-17 | 华侨大学 | High-precision differential type multilayer annular capacitance micrometer |
| CN109838695A (en) * | 2019-01-23 | 2019-06-04 | 洛阳双瑞特种装备有限公司 | A kind of interior die mould expansion joint device for detecting axial displacement |
-
2015
- 2015-03-17 CN CN201520149939.4U patent/CN204479013U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104713466A (en) * | 2015-03-17 | 2015-06-17 | 华侨大学 | High-precision differential type multilayer annular capacitance micrometer |
| CN104713466B (en) * | 2015-03-17 | 2017-10-20 | 华侨大学 | High-precision differential type multi-layer annular capacitance gage |
| CN109838695A (en) * | 2019-01-23 | 2019-06-04 | 洛阳双瑞特种装备有限公司 | A kind of interior die mould expansion joint device for detecting axial displacement |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150715 Termination date: 20160317 |