CN113188430A - 0.01 mu m high-precision displacement sensor and precision adjusting method thereof - Google Patents
0.01 mu m high-precision displacement sensor and precision adjusting method thereof Download PDFInfo
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- CN113188430A CN113188430A CN202110594018.9A CN202110594018A CN113188430A CN 113188430 A CN113188430 A CN 113188430A CN 202110594018 A CN202110594018 A CN 202110594018A CN 113188430 A CN113188430 A CN 113188430A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Abstract
The invention provides a 0.01 mu m high-precision displacement sensor, which comprises a capacitance fixed polar plate, a capacitance movable polar plate, a capacitance polar plate seat, a measuring rod, a spring and a rubber ring, wherein the capacitance polar plate seat comprises a large-diameter capacitance polar plate cylinder seat and a small-diameter capacitance polar plate cylinder seat; the movable capacitor plate is sleeved on the inner side of the fixed capacitor plate in a sliding manner, the right end of the movable capacitor plate is connected with a measuring rod in an insulating manner, and the outer side of a section of measuring rod in the small-diameter capacitor plate cylinder seat is sleeved with a spring; the inner side of the large-diameter capacitor plate cylinder seat is provided with a printed circuit board, and the capacitor fixed plate, the capacitor movable plate and the measuring rod are all electrically connected with the printed circuit board. The invention does not adopt the grating moire fringe technology used at present, properly designs the radius of the capacitance fixed polar plate and the capacitance movable polar plate and the length of the cylindrical capacitance polar plate, and can further improve the precision to 0.001 mu m.
Description
Technical Field
The invention belongs to the field of relative displacement sensors for measuring displacement, depth and the like at high precision, and particularly relates to a 0.01 mu m high-precision displacement sensor and a precision adjusting method thereof.
Background
The length sensor with the precision higher than 0.1 μm at the present stage is mainly realized by adopting a grating moire fringe technology, and the realization method mainly comprises the following three steps:
the first step is as follows: the glass is scribed with equal pitch to form a fixed grating, which is the core component of the sensor. The smaller the fixed grating pitch is, the higher the precision is.
The second step is that: on the other part, there are mounted an optical transmitter and an optical receiver, commonly known as a moving grating.
The third step: when the fixed grating and the movable grating keep a certain distance and move relatively, the light receiver of the movable grating receives the moving interference moire fringes, then the moire fringes are converted into sine waves through the photoelectric element, then the sine waves are shaped and converted, and finally pulse square waves are output. Thus, the relative displacement of the moving and stationary gratings = the number of pulses per pitch of the moire pattern.
The pitch precision is closely related to the precision of the sensor, and in order to ensure the precision, the prior grating ruling mainly adopts laser ruling and is finished in a dust-free and vibration-free environment. The grating length sensor with the foreign precision higher than 0.1 mu m is used for completing laser scribing of a fixed grating in a special basement, the problems of high cost, low efficiency and the like are obvious, and the laser scribing work is time-consuming. It follows that the main drawbacks of the state of the art are: high manufacturing cost, harsh manufacturing environment and complex circuit.
Disclosure of Invention
The invention aims to provide a 0.01 mu m high-precision displacement sensor and a precision adjusting method thereof, which greatly reduce the production and processing cost and simplify the back-end processing circuit.
In order to solve the technical problems, an embodiment of the invention provides a 0.01 μm high-precision displacement sensor, which comprises a capacitance fixed polar plate, a capacitance movable polar plate, a capacitance polar plate seat, a measuring rod, a spring and a rubber ring, wherein the capacitance polar plate seat comprises a large-diameter capacitance polar plate cylinder seat and a small-diameter capacitance polar plate cylinder seat, the inner diameter of the small-diameter capacitance polar plate cylinder seat is smaller than that of the large-diameter capacitance polar plate cylinder seat, the small-diameter capacitance polar plate cylinder seat is fixedly connected to the right side of the large-diameter capacitance polar plate cylinder seat, two capacitance fixed polar plates which are arranged in front and back are arranged on the inner side of the large-diameter capacitance polar plate cylinder seat, and the adjacent ends of the two capacitance fixed polar plates are separated by;
the capacitance fixed polar plate and the capacitance movable polar plate are both cylindrical tubes, the capacitance movable polar plate is sleeved on the inner side of the capacitance fixed polar plate in a sliding mode, the right end of the capacitance movable polar plate is connected with a measuring rod in an insulating mode, the right end of the measuring rod sequentially penetrates through a large-diameter capacitance polar plate tube seat and a small-diameter capacitance polar plate tube seat forwards, and a spring is sleeved on the outer side of a section of the measuring rod in the small-diameter capacitance polar plate tube seat;
the outside of major diameter capacitance polar plate cylinder seat is equipped with printed circuit board, electric capacity is decided polar plate, electric capacity and is moved polar plate and measuring stick and all with printed circuit board electric connection.
And the deviating ends of the two capacitor fixed polar plates are fixedly connected with the inner wall of the large-diameter capacitor polar plate cylinder seat through rubber rings respectively.
The printed circuit board is welded with elastic probes, and the two capacitor fixed polar plates are in contact with the elastic probes. And the capacitance movable polar plate and the measuring rod are respectively provided with a lead wire which is welded with the printed circuit board.
Preferably, the inner radius of the capacitor fixed plate is R, and the length of the capacitor fixed plate is L; the outer radius of the capacitor movable polar plate is r, and the length of the capacitor movable polar plate is L.
Preferably, the thickness of the rubber ring is 0.5 mm.
The measuring device comprises a measuring rod, a disc, a nylon screw and an insulating layer, wherein the disc is arranged at the left end of the measuring rod and fixedly connected with the right end of a capacitor movable polar plate through the nylon screw, and the insulating layer is arranged between the disc and the capacitor movable polar plate.
The invention also provides a precision adjusting method of the 0.01 mu m high-precision displacement sensor, which comprises the following steps:
(1) when the measuring rod is not stressed, the measuring rod enables the capacitance movable polar plate to lean against the rightmost side under the action of the spring, and at the moment, the capacitance difference of two capacitors formed by one shared capacitance movable polar plate and two capacitance fixed polar plates is called as initial capacitance C0；
(2) Under the action of external thrust, the measuring rod moves to the right, and if the measuring rod moves to the right for a certain x value, at the moment, the capacitance difference of two capacitors formed by a shared capacitance movable polar plate and two capacitance fixed polar plates is called as a measured capacitance C1Then, it can be inferred that:
C0-C1=4πεx/ln(R/r)；
it can be seen that the variation C of the capacitance difference0-C1Proportional to the amount of displacement x. Because of C0、C1Are all differential capacitance values, which further increases the immunity of the sensor to interference,and meanwhile, the influence of temperature and humidity on the accuracy of the sensor is further eliminated.
The technical scheme of the invention has the following beneficial effects:
1. the invention does not adopt the prior grating moire fringe technology, does not need laser reticle and moire fringe processing and shaping, thereby greatly reducing the production and processing cost and having relatively simple back-end processing circuit.
2. The invention properly designs the radius of the fixed polar plate and the movable polar plate of the cylindrical capacitor and the length of the polar plate of the cylindrical capacitor, and can further improve the precision to 0.001 mu m.
3. In the invention, because the cylindrical capacitor plate is made of metal material and the lining between the plates is made of inorganic material (air), the cylindrical capacitor plate can work for a long time under high temperature, low temperature, strong magnetic field and strong radiation, the measurement stability is greatly improved, and the detection problem under high temperature and high pressure environment is especially solved.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Description of reference numerals:
1. a capacitor fixed pole plate; 2. a capacitor movable plate; 3. a capacitor plate base; 31. a large-diameter capacitor plate cylinder seat; 32. a small-diameter capacitor plate cylinder seat; 4. a measuring rod; 5. a spring; 6. a rubber ring; 7. a printed circuit board.
Detailed Description
In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, the present invention provides a 0.01 μm high-precision displacement sensor, which includes a capacitance fixed polar plate 1, a capacitance movable polar plate 2, a capacitance polar plate seat 3, a measuring rod 4, a spring 5 and a rubber ring 6, wherein the capacitance polar plate seat 3 is a cuboid with a middle cylindrical cavity, and includes a large-diameter capacitance polar plate cylinder seat 31 and a small-diameter capacitance polar plate cylinder seat 32, the inner diameter of the small-diameter capacitance polar plate cylinder seat 32 is smaller than the inner diameter of the large-diameter capacitance polar plate cylinder seat 31, the small-diameter capacitance polar plate cylinder seat 32 is fixedly connected to the right side of the large-diameter capacitance polar plate cylinder seat 31, two capacitance fixed polar plates 1 arranged in front and back are arranged on the inner side of the large-diameter capacitance polar plate cylinder seat 31, adjacent ends of the two capacitance fixed polar plates 1 are separated by the rubber ring 6, and deviating ends of the two capacitance fixed polar plates 1 are respectively fixedly connected with the inner wall of the large-diameter capacitance polar plate cylinder seat 31 by the other two rubber rings 6.
The capacitance fixed pole plate 1 and the capacitance movable pole plate 2 are both of cylindrical structures, preferably, the inner radius of the capacitance fixed pole plate is R, and the length of the capacitance fixed pole plate is L; the outer radius of the capacitor movable polar plate is r, and the length of the capacitor movable polar plate is L. The capacitance movable polar plate 2 is sleeved on the inner side of the capacitance fixed polar plate 1 in a sliding mode, the right end of the capacitance movable polar plate 2 is connected with a measuring rod 4 in an insulating mode, the right end of the measuring rod 4 penetrates through the large-diameter capacitance polar plate cylinder seat 31 and the small-diameter capacitance polar plate cylinder seat 32 forwards in sequence, and a spring 5 is sleeved on the outer side of a section of the measuring rod 4 located in the small-diameter capacitance polar plate cylinder seat 32.
The outer side of the large-diameter capacitor plate cylinder seat 31 is provided with a printed circuit board 7, and the capacitor fixed plate 1, the capacitor movable plate 2 and the measuring rod 4 are all electrically connected with the printed circuit board 7.
In this embodiment, the printed circuit board 7 is welded with the elastic probes, and the two capacitance fixed pole plates 1 are in contact with the elastic probes, so that the influence of the parasitic capacitance of the lead on the accuracy of the sensor is further reduced. And leads are welded on the capacitance movable polar plate 2 and the measuring rod 4 and are welded with a printed circuit board 7.
The rubber ring 6 used in this example had a thickness of 0.5 mm.
The invention also provides a precision adjusting method of the 0.01 mu m high-precision displacement sensor, which comprises the following steps:
(1) when the measuring rod is not stressed, the measuring rod enables the capacitance movable polar plate to lean against the rightmost side under the action of the spring, and at the moment, the capacitance difference of two capacitors formed by one shared capacitance movable polar plate and two capacitance fixed polar plates is called as initial capacitance C0；
(2) Under the action of external thrust, the measuring rod moves to the right, and if the measuring rod moves to the right for a certain x value, at the moment, the capacitance difference of two capacitors formed by a shared capacitance movable polar plate and two capacitance fixed polar plates is called as a measured capacitance C1Then, it can be inferred that:
C0-C1=4πεx/ln(R/r)；
it can be seen that the variation C of the capacitance difference0-C1Proportional to the amount of displacement x. And due to C0、C1The capacitance values are differential capacitance values, so that the anti-interference capability of the sensor is further improved, and the influence of temperature and humidity on the accuracy of the sensor is further eliminated.
The invention does not adopt the prior grating moire fringe technology, does not need laser reticle and moire fringe processing and shaping, thereby greatly reducing the production and processing cost and having relatively simple back-end processing circuit.
The radius of the fixed polar plate and the movable polar plate of the cylindrical capacitor and the length of the polar plate of the cylindrical capacitor are properly designed, so that the precision can be further improved to 0.001 mu m.
Because the cylindrical capacitor plate is made of metal material and the lining between the plates is air, the device can work for a long time under high temperature, low temperature, strong magnetic field and strong radiation, the measurement stability is greatly improved, and the device especially solves the detection problem under high temperature and high pressure environment.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (8)
1. A0.01 μm high-precision displacement sensor is characterized by comprising a capacitance fixed polar plate, a capacitance movable polar plate, a capacitance polar plate seat, a measuring rod, a spring and a rubber ring, wherein the capacitance polar plate seat comprises a large-diameter capacitance polar plate cylinder seat and a small-diameter capacitance polar plate cylinder seat, the inner diameter of the small-diameter capacitance polar plate cylinder seat is smaller than that of the large-diameter capacitance polar plate cylinder seat, the small-diameter capacitance polar plate cylinder seat is fixedly connected to the right side of the large-diameter capacitance polar plate cylinder seat, two capacitance fixed polar plates which are arranged in front and back are arranged on the inner side of the large-diameter capacitance polar plate cylinder seat, and the adjacent ends of the two capacitance fixed polar plates are separated by the rubber ring;
the capacitance fixed polar plate and the capacitance movable polar plate are both cylindrical tubes, the capacitance movable polar plate is sleeved on the inner side of the capacitance fixed polar plate in a sliding mode, the right end of the capacitance movable polar plate is connected with a measuring rod in an insulating mode, the right end of the measuring rod sequentially penetrates through a large-diameter capacitance polar plate tube seat and a small-diameter capacitance polar plate tube seat forwards, and a spring is sleeved on the outer side of a section of the measuring rod in the small-diameter capacitance polar plate tube seat;
the outside of major diameter capacitance polar plate cylinder seat is equipped with printed circuit board, electric capacity is decided polar plate, electric capacity and is moved polar plate and measuring stick and all with printed circuit board electric connection.
2. The 0.01 μm high-precision displacement sensor according to claim 1, wherein the deviating ends of the two capacitance fixed plates are fixedly connected with the inner wall of the large-diameter capacitance plate cylinder seat through rubber rings respectively.
3. The 0.01 μm high precision displacement sensor of claim 1, wherein the printed circuit board is soldered with elastic probes, and two of the capacitance fixed plates are in contact with the elastic probes.
4. The 0.01 μm high accuracy displacement sensor of claim 1, wherein the capacitive movable plate and the measuring rod are provided with leads soldered to a printed circuit board.
5. The 0.01 μm high accuracy displacement sensor of claim 1, wherein the capacitance fixed plate has an inner radius of R and a length of L; the outer radius of the capacitor movable polar plate is r, and the length of the capacitor movable polar plate is L.
6. The 0.01 μm high accuracy displacement sensor of claim 1 or 2, wherein the rubber ring has a thickness of 0.5 mm.
7. The 0.01 μm high precision displacement sensor according to claim 1, wherein the left end of the measuring rod is provided with a disk, the disk is fixedly connected with the right end of the capacitance movable polar plate through a nylon screw, and an insulating layer is arranged between the disk and the capacitance movable polar plate.
8. A method of adjusting the accuracy of a 0.01 μm high accuracy displacement sensor according to any one of claims 1-7, comprising the steps of:
(1) when the measuring rod is not stressed, the measuring rod enables the capacitance movable polar plate to lean against the rightmost side under the action of the spring, and at the moment, the capacitance difference of two capacitors formed by one shared capacitance movable polar plate and two capacitance fixed polar plates is called as initial capacitance C0；
(2) Under the action of external thrust, the measuring rod moves to the right, and if the measuring rod moves to the right for a certain x value, at the moment, the capacitance difference of two capacitors formed by a shared capacitance movable polar plate and two capacitance fixed polar plates is called as a measured capacitance C1Then, it can be inferred that:
C0-C1=4πεx/ln(R/r)；
it can be seen that the variation C of the capacitance difference0-C1Proportional to the amount of displacement x.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202110594018.9A CN113188430A (en) | 2021-05-28 | 2021-05-28 | 0.01 mu m high-precision displacement sensor and precision adjusting method thereof |
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| CN202110594018.9A CN113188430A (en) | 2021-05-28 | 2021-05-28 | 0.01 mu m high-precision displacement sensor and precision adjusting method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117870526A (en) * | 2024-03-11 | 2024-04-12 | 深圳市中图仪器股份有限公司 | Micro displacement sensor |
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- 2021-05-28 CN CN202110594018.9A patent/CN113188430A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117870526A (en) * | 2024-03-11 | 2024-04-12 | 深圳市中图仪器股份有限公司 | Micro displacement sensor |
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