CN202159651U - Device for moving semiconductor crystal grain on graphite boat - Google Patents
Device for moving semiconductor crystal grain on graphite boat Download PDFInfo
- Publication number
- CN202159651U CN202159651U CN 201120275246 CN201120275246U CN202159651U CN 202159651 U CN202159651 U CN 202159651U CN 201120275246 CN201120275246 CN 201120275246 CN 201120275246 U CN201120275246 U CN 201120275246U CN 202159651 U CN202159651 U CN 202159651U
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- Prior art keywords
- groove
- air vent
- screw
- crystal grain
- communicated
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Abstract
The utility model provides a device for moving semiconductor crystal grain on a graphite boat, comprising a handle provided with a hollow chamber, a large cover plate, at least one small cover plate, an upper fixing plate and a lower fixing plate. One end of the handle is provided with an air nozzle communicated with the hollow chamber. The lower surface of the handle is provided with at least one air vent which is communicated with the hollow chamber. A first groove is arranged on the small cover plate. A second air vent, which corresponds to the first air vent, is arranged between the bottom part of the first groove and the upper surface of the small cover plate. The second air vent is communicated with the first air vent through a gas connection pipe. A second groove is arranged on the large cover plate. A third groove and a limiting lug boss are arranged on the upper surface of the upper fixing plate. The upper surface of the upper fixing plate contacts with the lower surface of the large cover plate so that the second groove and the third groove form a second hollow chamber. The utility model improves the crystal grain damage, improves the product yield, improves production efficiency, improves product reliability, reduces loss of social resource and reaches environment-friendly production.
Description
Technical field
The utility model relates to a kind of instrument that is used for diode production, is specifically related to a kind of device that is used for moving graphite boat semiconductor-on-insulator crystal grain.
Background technology
Existing semiconductor grain often relates to multiple production technology, need carry out semiconductor grain and shift.Prior art crystal grain in the process of absorption or transfer is run into prewelding ship and assembly welding ship through regular meeting, damages crystal grain possibly, causes product finally bad; Secondly, owing to the reason of the reason of valve evenness or valve wearing and tearing makes indivedual valves and intercrystalline at a distance from causing the whole crystal grain that coils not suck up fully too greatly.
Summary of the invention
The utility model provides a kind of device that is used for moving graphite boat semiconductor-on-insulator crystal grain, and this device improves the crystal grain damage, improve the product yield, enhance productivity, improve product reliability, reduce the loss of social resources, reaches environmental protection production.
For achieving the above object, the technical scheme that the utility model adopts is: a kind of device that is used for moving graphite boat semiconductor-on-insulator crystal grain comprises: in be provided with handle, large cover, at least one minor flaps, upper mounted plate and the bottom plate of cavity; Said handle one end is provided with the valve that is communicated with said cavity, and this handle lower surface is provided with at least one first air vent hole that is communicated with said cavity; Said minor flaps is provided with first groove, is provided with between this first bottom portion of groove and the minor flaps upper surface and corresponding second air vent hole of said first air vent hole, and this second air vent hole is communicated with through gas connection pipe with said first air vent hole;
Large cover is provided with second groove, thereby the upper surface of this large cover contacts by said first groove with the lower surface of said minor flaps and forms first cavity, is provided with the 3rd air vent hole that is communicated with said first cavity between this second bottom portion of groove and the large cover upper surface;
Said upper mounted plate upper surface be provided with corresponding the 3rd groove of said second groove be positioned at this 3rd groove one side and be positioned at the positive stop lug boss of said upper mounted plate lower surface; Thereby this upper mounted plate upper surface contacts by said second groove and the 3rd groove with said large cover lower surface and forms second cavity; Be provided with the four-way pore that several are communicated with said second cavity between this 3rd bottom portion of groove and the upper mounted plate lower surface, be provided with fixedly valve this four-way pore internal fixation, said positive stop lug boss has screw hole;
Said bottom plate is provided with and corresponding through hole of said four-way pore and screw counter sink; One movable valve embeds this through hole; This movable valve one end is used for absorption and is positioned at said graphite boat semiconductor-on-insulator crystal grain, its other end and fixedly pass through soft pipe connection between the valve; One screw screws in the screw hole and screw counter sink of said positive stop lug boss, thereby fixes said upper mounted plate and bottom plate and form certain distance.
Related content in the technique scheme is explained as follows:
1, in the such scheme, said bottom plate two ends also are positioned at and are respectively equipped with the shop bolt that is used to locate on its lower surface.
2, in the such scheme, the lower surface of said bottom plate is positioned at said through hole one side and is provided with waist type groove.
3, in the such scheme, be provided with the screw hole boss with screw hole in said the 3rd groove, a screw is fixedly connected the screw hole boss of said large cover and upper mounted plate.
4, in the such scheme, said large cover and upper mounted plate through be positioned at its separately the screw at two ends be fixedly connected with screw.
Because the technique scheme utilization, the utility model compared with prior art has advantage:
The valve of the utility model device is received after the gas that other equipment provide; Successively through handle, gas connection pipe, minor flaps, large cover, upper mounted plate, fixedly valve, flexible pipe, movable valve; Form an aerating system; So just can crystal grain be adsorbed onto (to call the assembly welding ship in the following text) on the clamping apparatus that will assemble welding from the clamping apparatus (to call the prewelding ship in the following text) that has welded crystal grain in advance, accomplish transfer action.But this crystal grain shifts the characteristics of sucker and is that the movable valve that contacts with crystal grain can be up and down, even crystal grain is met other things, crystal grain also can follow movable valve movable, thereby crystal grain has a cushion effect, and like this crystal grain just can not damage easily.Secondly, the utility model device is because movable suction nozzle can singlely stretch, so need only pressed downward gently; All suction nozzles will be in one plane, and each suction nozzle is consistent with the gap of crystal grain, even each suction nozzle can both be attached on the crystal grain; So just can guarantee that whole dish crystal grain can both suck up; Thereby enhance productivity, the production time of saves valuable, make resource to make full use of.
Description of drawings
Accompanying drawing 1 is the utility model bottom plate structural representation;
Accompanying drawing 2 is the utility model upper mounted plate structural representation;
Accompanying drawing 3 is the vertical view of accompanying drawing 2;
Accompanying drawing 4 is the utility model large cover structural representation;
Accompanying drawing 5 is the utility model minor flaps structural representation;
Accompanying drawing 6 is the utility model package assembly sketch map;
Accompanying drawing 7 is the vertical view of this accompanying drawing 6.
In the above accompanying drawing: 1, handle; 2, large cover; 3, minor flaps; 4, upper mounted plate; 5, bottom plate; 6, valve; 7, first air vent hole; 8, first groove; 9, second air vent hole; 10, gas connection pipe; 11, second groove; 12, the 3rd air vent hole; 13, the 3rd groove; 14, positive stop lug boss; 15, four-way pore; 16, fixing valve; 17, through hole; 18, screw counter sink; 19, movable valve; 20, flexible pipe; 21, shop bolt; 22, waist type groove; 23, screw hole boss.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is further described:
Embodiment: a kind of device that is used for moving graphite boat semiconductor-on-insulator crystal grain comprises: in be provided with handle 1, large cover 2, at least one minor flaps 3, upper mounted plate 4 and the bottom plate 5 of cavity; Said handle 1 one ends are provided with the valve 6 that is communicated with said cavity, and this handle 1 lower surface is provided with at least one first air vent hole 7 that is communicated with said cavity; Said minor flaps 3 is provided with first groove 8, is provided with between these first groove, 8 bottoms and minor flaps 3 upper surfaces and said first air vent hole, 7 corresponding second air vent holes 9, and this second air vent hole 9 is communicated with through gas connection pipe 10 with said first air vent hole 7;
Large cover 2 is provided with second groove 11; Thereby the upper surface of this large cover 2 contacts by said first groove 8 with the lower surface of said minor flaps 3 and forms first cavity, is provided with the 3rd air vent hole 12 that is communicated with said first cavity between these second groove, 11 bottoms and large cover 2 upper surfaces;
Said upper mounted plate 4 upper surfaces be provided with corresponding the 3rd grooves 13 of said second groove 11 be positioned at these the 3rd groove 13 1 sides and be positioned at the positive stop lug boss 14 of said upper mounted plate 4 lower surfaces; Thereby these upper mounted plate 4 upper surfaces contact by said second groove 11 and the 3rd groove 13 with said large cover 2 lower surfaces and form second cavity; Be provided with the four-way pore 15 that several are communicated with said second cavity between these the 3rd groove 13 bottoms and upper mounted plate 4 lower surfaces, 15 are provided with fixedly valve 16 regularly in this four-way pore, and said positive stop lug boss 14 has screw hole;
Said bottom plate is provided with and said four-way pore 15 corresponding through holes 17 and screw counter sink 18; One movable valve 19 embeds this through hole 17; These movable valve 19 1 ends are used for absorption and are positioned at said graphite boat semiconductor-on-insulator crystal grain, its other end with fixedly be communicated with through flexible pipe 20 between the valve 16; One screw screws in the screw hole and screw counter sink 18 of said positive stop lug boss 14, thereby fixes said upper mounted plate 4 and bottom plate 5 and form certain distance; Said movable valve 19 can be up and down through this through hole 17.
Above-mentioned bottom plate 5 two ends also are positioned at and are respectively equipped with the shop bolt 21 that is used to locate on its lower surface.
The lower surface of above-mentioned bottom plate 5 is positioned at said through hole 17 1 sides and is provided with waist type groove 22.
Be provided with the screw hole boss 23 that screw hole boss 23, one screws with screw hole are fixedly connected said large cover 2 and upper mounted plate 4 in above-mentioned the 3rd groove 13.
Above-mentioned large cover 2 and upper mounted plate 4 through be positioned at its separately the screw at two ends be fixedly connected with screw.
Adopt above-mentioned when being used for moving the device of graphite boat semiconductor-on-insulator crystal grain; Valve is received after the gas that other equipment provide; Successively through handle, gas connection pipe, minor flaps, large cover, upper mounted plate, fixedly valve, flexible pipe, movable valve; Forming an aerating system, can be the prewelding ship from the clamping apparatus that has welded crystal grain in advance with crystal grain so just) to be adsorbed onto the clamping apparatus that will assemble welding be the assembly welding ship, accomplishes transfer action.But this crystal grain shifts the characteristics of sucker and is that the movable valve that contacts with crystal grain can be up and down, even crystal grain is met other things, crystal grain also can follow movable valve movable, thereby crystal grain has a cushion effect, and like this crystal grain just can not damage easily.Secondly, the utility model device is because movable suction nozzle can singlely stretch, so need only pressed downward gently; All suction nozzles will be in one plane, and each suction nozzle is consistent with the gap of crystal grain, even each suction nozzle can both be attached on the crystal grain; So just can guarantee that whole dish crystal grain can both suck up; Thereby enhance productivity, the production time of saves valuable, make resource to make full use of.
The foregoing description only is the technical conceive and the characteristics of explanation the utility model, and its purpose is to let the personage who is familiar with this technology can understand content of the utility model and enforcement according to this, can not limit the protection range of the utility model with this.All equivalences of being done according to the utility model spirit change or modify, and all should be encompassed within the protection range of the utility model.
Claims (5)
1. device that is used for moving graphite boat semiconductor-on-insulator crystal grain is characterized in that: comprising: in be provided with handle (1), large cover (2), at least one minor flaps (3), upper mounted plate (4) and the bottom plate (5) of cavity; Said handle (1) one end is provided with the valve (6) that is communicated with said cavity, and this handle (1) lower surface is provided with at least one first air vent hole (7) that is communicated with said cavity; Said minor flaps (3) is provided with first groove (8); Be provided with and corresponding second air vent hole of said first air vent hole (7) (9) between this first groove (8) bottom and minor flaps (3) upper surface, this second air vent hole (9) is communicated with through gas connection pipe (10) with said first air vent hole (7);
Large cover (2) is provided with second groove (11); The upper surface of this large cover (2) with said minor flaps (3) thus lower surface contact by said first groove (8) and form first cavity, be provided with the 3rd air vent hole (12) that is communicated with said first cavity between this second groove (11) bottom and large cover (2) upper surface;
Said upper mounted plate (4) upper surface is provided with corresponding the 3rd groove of said second groove (11) (13) and is positioned at these the 3rd groove (13) one sides and is positioned at the positive stop lug boss (14) of said upper mounted plate (4) lower surface; This upper mounted plate (4) upper surface with said large cover (2) thus lower surface contacts by said second groove (11) and the 3rd groove (13) and forms second cavity; Be provided with the four-way pore (15) that several are communicated with said second cavity bottom this 3rd groove (13) with between upper mounted plate (4) lower surface; (15) are provided with fixedly valve (16) regularly in this four-way pore, and said positive stop lug boss (14) has screw hole;
Said bottom plate is provided with and corresponding through hole (17) of said four-way pore (15) and screw counter sink (18); One movable valve (19) embeds this through hole (17); These movable valve (19) one ends are used for absorption and are positioned at said graphite boat semiconductor-on-insulator crystal grain, its other end with fixedly be communicated with through flexible pipe (20) between the valve (16); One screw screws in the screw hole and screw counter sink (18) of said positive stop lug boss (14), thereby fixes said upper mounted plate (4) and bottom plate (5) and form certain distance.
2. device according to claim 1 is characterized in that: said bottom plate (5) two ends also are positioned at and are respectively equipped with the shop bolt (21) that is used to locate on its lower surface.
3. device according to claim 1 is characterized in that: the lower surface of said bottom plate (5) is positioned at said through hole (17) one sides and is provided with waist type groove (22).
4. device according to claim 1 is characterized in that: be provided with the screw hole boss (23) with screw hole in said the 3rd groove (13), a screw is fixedly connected the screw hole boss (23) of said large cover (2) and upper mounted plate (4).
5. device according to claim 1 is characterized in that: said large cover (2) and upper mounted plate (4) through be positioned at its separately the screw at two ends be fixedly connected with screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120275246 CN202159651U (en) | 2011-08-01 | 2011-08-01 | Device for moving semiconductor crystal grain on graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120275246 CN202159651U (en) | 2011-08-01 | 2011-08-01 | Device for moving semiconductor crystal grain on graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202159651U true CN202159651U (en) | 2012-03-07 |
Family
ID=45767277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120275246 Expired - Lifetime CN202159651U (en) | 2011-08-01 | 2011-08-01 | Device for moving semiconductor crystal grain on graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202159651U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102263050A (en) * | 2011-08-01 | 2011-11-30 | 苏州固锝电子股份有限公司 | Device for moving semiconductor crystalline grains on graphite boat |
| CN104681476A (en) * | 2013-12-02 | 2015-06-03 | 无锡华润安盛科技有限公司 | Chip suction device and chip suction method |
-
2011
- 2011-08-01 CN CN 201120275246 patent/CN202159651U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102263050A (en) * | 2011-08-01 | 2011-11-30 | 苏州固锝电子股份有限公司 | Device for moving semiconductor crystalline grains on graphite boat |
| CN102263050B (en) * | 2011-08-01 | 2013-05-01 | 苏州固锝电子股份有限公司 | Device for moving semiconductor crystalline grains on graphite boat |
| CN104681476A (en) * | 2013-12-02 | 2015-06-03 | 无锡华润安盛科技有限公司 | Chip suction device and chip suction method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120307 Effective date of abandoning: 20130501 |
|
| RGAV | Abandon patent right to avoid regrant |