CN202145449U - Quartz boat for diffusion in process of manufacturing solar cells - Google Patents
Quartz boat for diffusion in process of manufacturing solar cells Download PDFInfo
- Publication number
- CN202145449U CN202145449U CN201120237010U CN201120237010U CN202145449U CN 202145449 U CN202145449 U CN 202145449U CN 201120237010 U CN201120237010 U CN 201120237010U CN 201120237010 U CN201120237010 U CN 201120237010U CN 202145449 U CN202145449 U CN 202145449U
- Authority
- CN
- China
- Prior art keywords
- lower carriage
- boat
- brackets
- bracing frame
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a quartz boat for diffusion in the process of manufacturing solar cells. The quartz boat comprises a boat body and a supporting seat below the boat body. The boat body comprises a pair of U-shaped brackets, a pair of cylindrical upper brackets, a pair of square lower brackets and a cylindrical lower bracket, wherein the cylindrical upper brackets are symmetrically fixed at the inside walls of the upper ends at the two sides of each of the U-shaped brackets; the square lower brackets are symmetrically fixed at the inside walls of the bottoms of the U-shaped brackets; the cylindrical lower bracket is fixed between the two square lower brackets at the bottoms of the U-shaped brackets; and the square lower brackets lead the depth that silicon wafers enter the cylindrical lower bracket to be less than that of a groove on the cylindrical lower bracket, so as to solve the problem of fragmenting, such as side collapsing, corner falling, hidden cracking and the like in the processes of loading the silicon wafers on the boat and unloading the silicon wafers from the boat and improve the quality and the percent of pass of products.
Description
Technical field
The utility model relates to a kind of solar cell and makes workshop section clamp technology field, and quartz boat is used in the diffusion that is specifically related in a kind of solar cell manufacturing process.
Background technology
Step such as the crystal silicon solar energy battery manufacture craft comprises making herbs into wool, diffusion, etching, deposition antireflective coating, print electrode, diffusing step generally adopts quartz boat as carrying tool.
In the making engineering of present quartz boat; The lower carriage of shelving silicon chip often only adopts one or more to have the column type support of groove; Because the smoothness of the groove of machining can not get enough assurances; Add the fragility of silicon chip, therefore in loading and unloading process and high-temperature diffusion process, be difficult to keep silicon chip complete, be not damaged.
Summary of the invention
The purpose of the utility model is exactly to provide the diffusion in a kind of solar cell manufacturing process to use quartz boat to the defective of above-mentioned existence.The square lower carriage of this quartz boat makes the degree of depth of the cylindrical lower carriage that silicon chip gets into less than its groove depth, thus reduced that silicon chip occurs in loading, unloading boat process collapse limit, arrisdefect, latent fragment problems such as split, improved product quality and qualification rate.
Diffusion in a kind of solar cell manufacturing process of the utility model uses the quartz boat technical scheme to do; Comprise the bracing frame of boat body and boat body below, described boat body comprises a pair of U type bracing frame, a pair of cylindric upper bracket, a square shaped lower carriage and a cylindrical lower carriage; Wherein, cylindric upper bracket is symmetrically fixed on upper end, U type bracing frame both sides madial wall, and square lower carriage is symmetrically fixed on U type bracing frame bottom inside wall, and cylindrical lower carriage is fixed in two square lower carriage centre positions, U type bracing frame bottom.
Described a pair of cylindric upper bracket is provided with a plurality of along its ellipticity projection that axially evenly is provided with; Have the groove that axially evenly is provided with along it on the described cylindrical lower carriage.
The plane, groove bottom land place of described cylindrical lower carriage is lower than the plane of square lower carriage upper surface.
The beneficial effect of the utility model is: quartz boat is used in the diffusion in a kind of solar cell manufacturing process of the utility model; Comprise the bracing frame of boat body and boat body below, described boat body comprises a pair of U type bracing frame, a pair of cylindric upper bracket, a square shaped lower carriage and a cylindrical lower carriage; Wherein, cylindric upper bracket is symmetrically fixed on upper end, U type bracing frame both sides madial wall, and square lower carriage is symmetrically fixed on U type bracing frame bottom inside wall, and cylindrical lower carriage is fixed in two square lower carriage centre positions, U type bracing frame bottom.Described a pair of cylindric upper bracket is provided with a plurality of along its ellipticity projection that axially evenly is provided with; Have the groove that axially evenly is provided with along it on the described cylindrical lower carriage.During use; The square lower carriage that is positioned at U type bracing frame bottom makes the degree of depth of the cylindrical lower carriage that silicon chip gets into less than its groove depth; Thereby reduced original quartz boat because the smoothness of cylindrical lower carriage upper groove and colliding with cause collapse limit, arrisdefect, latently bad problem such as split, improved product quality and qualification rate.
Description of drawings:
Shown in Figure 1 is the structure side view of the utility model;
Shown in Figure 2 is the structure vertical view of the utility model;
Shown in Figure 3 is the partial enlarged drawing of A part among Fig. 2;
Shown in Figure 4 is the partial enlarged drawing of B part among Fig. 2.
Among the figure, 1.U type bracing frame, 2. cylindric upper bracket, 3. square lower carriage, 4. cylindrical lower carriage, the 5. bracing frame of boat body below, 6. projection, 7. groove.
Embodiment:
In order to understand the utility model better, specify the technical scheme of the utility model below in conjunction with instantiation, but the utility model is not limited thereto.
Diffusion in a kind of solar cell manufacturing process of the utility model uses the quartz boat technical scheme to do; The bracing frame 5 that comprises boat body and boat body below, described boat body comprise a pair of U type bracing frame 1, a pair of cylindric upper bracket 2, a square shaped lower carriage 3 and a cylindrical lower carriage 4; Wherein, cylindric upper bracket 2 is symmetrically fixed on upper end, U type bracing frame 1 both sides madial wall, and square lower carriage 3 is symmetrically fixed on U type bracing frame 1 bottom inside wall, and cylindrical lower carriage 4 is fixed in two square lower carriages, 3 centre positions, U type bracing frame 1 bottom.
Described a pair of cylindric upper bracket 2 is provided with a plurality of along its ellipticity projection 6 that axially evenly is provided with; Have the groove 7 that axially evenly is provided with along it on the described cylindrical lower carriage 4.
The plane, groove 7 bottom lands place of described cylindrical lower carriage 4 is lower than the plane of square lower carriage 3 upper surfaces.
The utility model will have now quartz boat two bottom brackets change three into; Wherein two is square lower carriage 3; One is cylindrical lower carriage 4, has groove 7 on the cylindrical lower carriage 4, and the degree of depth of groove 7 will be deeper than the level of the upper surface of square lower carriage 3.Like this; The lower limb of silicon chip just can not contact with groove 7 bottoms of cylindrical lower carriage 4 in diffusion process; Thereby reduced because of the smoothness of the cylindrical lower carriage upper groove of quartz boat and collide with and cause collapse limit, arrisdefect, latently bad problem such as split, improved product quality and qualification rate.
Claims (3)
1. quartz boat is used in the diffusion in the solar cell manufacturing process; The bracing frame that comprises boat body and boat body below; It is characterized in that described boat body comprises a pair of U type bracing frame, a pair of cylindric upper bracket, a square shaped lower carriage and a cylindrical lower carriage; Wherein, cylindric upper bracket is symmetrically fixed on upper end, U type bracing frame both sides madial wall, and square lower carriage is symmetrically fixed on U type bracing frame bottom inside wall, and cylindrical lower carriage is fixed in two square lower carriage centre positions, U type bracing frame bottom.
2. quartz boat is used in the diffusion in a kind of solar cell manufacturing process according to claim 1, it is characterized in that, described a pair of cylindric upper bracket is provided with a plurality of along its ellipticity projection that axially evenly is provided with; Have the groove that axially evenly is provided with along it on the described cylindrical lower carriage.
3. quartz boat is used in the diffusion in a kind of solar cell manufacturing process according to claim 1, it is characterized in that, the plane, groove bottom land place of described cylindrical lower carriage is lower than the plane of square lower carriage upper surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120237010U CN202145449U (en) | 2011-07-07 | 2011-07-07 | Quartz boat for diffusion in process of manufacturing solar cells |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120237010U CN202145449U (en) | 2011-07-07 | 2011-07-07 | Quartz boat for diffusion in process of manufacturing solar cells |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202145449U true CN202145449U (en) | 2012-02-15 |
Family
ID=45581378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120237010U Expired - Fee Related CN202145449U (en) | 2011-07-07 | 2011-07-07 | Quartz boat for diffusion in process of manufacturing solar cells |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202145449U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103390572A (en) * | 2012-05-11 | 2013-11-13 | 苏州贝斯特石英有限公司 | Quartz boat |
| CN103489954A (en) * | 2012-06-11 | 2014-01-01 | 苏州安融石英有限公司 | Quartz boat |
-
2011
- 2011-07-07 CN CN201120237010U patent/CN202145449U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103390572A (en) * | 2012-05-11 | 2013-11-13 | 苏州贝斯特石英有限公司 | Quartz boat |
| CN103489954A (en) * | 2012-06-11 | 2014-01-01 | 苏州安融石英有限公司 | Quartz boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Ren Xiankun Inventor after: Liu Peng Inventor after: Li Yuhua Inventor after: Zhang Liming Inventor after: Zhang Lili Inventor after: Jia Heshun Inventor after: Jiang Yansen Inventor after: Wang Guangli Inventor after: Zhang Chunyan Inventor after: Xu Zhenhua Inventor after: Cheng Liang Inventor after: Wang Zhaoguang Inventor after: Cui Yujie Inventor before: Ren Xiankun Inventor before: Cui Yujie Inventor before: Liu Peng Inventor before: Li Yuhua Inventor before: Zhang Liming Inventor before: Zhang Lili Inventor before: Ma Yuying Inventor before: Jia Heshun Inventor before: Jiang Yansen Inventor before: Wang Guangli Inventor before: Zhang Chunyan Inventor before: Xu Zhenhua Inventor before: Cheng Liang Inventor before: Wang Zhaoguang |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120215 Termination date: 20170707 |