CN202126987U

CN202126987U - Microfocus X ray source

Info

Publication number: CN202126987U
Application number: CN201120205703XU
Authority: CN
Inventors: 孙珂; 孙嘉德; 趙越堂
Original assignee: SHANGHAI MODERN TECHNOLOGY CO LTD
Current assignee: SHANGHAI MODERN TECHNOLOGY CO LTD
Priority date: 2011-06-17
Filing date: 2011-06-17
Publication date: 2012-01-25
Anticipated expiration: 2021-06-17

Abstract

The utility model relates to a microfocus X ray source. The utility model is characterized in that the microfocus X ray source consists of a microfocus X ray tube and a corresponding power supply, wherein the microfocus X ray tube is composed of a filament electrode, a focusing electrode and an anode; the focusing electrode is arranged between a cathode and the anode; the focusing electrode is arranged in an X vacuum tube and is in a round-barrel shape; the power supply of the microfocus X ray source comprises an anode high-voltage power supply, a focusing power supply and a filament power supply which are respectively loaded on the filament electrode, the focusing electrode and the anode of the X ray tube; the anode high-voltage power supply is connected in series by an oscillation modulation circuit, a booster circuit and a voltage-multiplying rectification circuit sequentially; and the focusing power supply is connected by an oscillation modulation circuit and a booster rectification circuit sequentially. With the adoption of the microfocus X ray source, the launching point (focus) of the X ray source is greatly reduced to 10 micron degree from the traditional millimetre degree to meet the requirement of sophisticated measurement. With the adoption of the high-frequency high-voltage power technology, the stability of the high-voltage power supply is improved, therefore, the stability of the X ray is improved, and the stability of a perspective image is good.

Description

Microfocus X-ray source

Technical field

The utility model relates to a kind of microfocus X-ray source, can be suitable for the accurate perspective imaging checkout equipment of microfocus X-ray in electronics and the microelectronics assembling field.

Background technology

The x-ray bombardment detected material is generally adopted in the application of not damaged detection technique in commercial production, makes it perspective imaging, thereby obtains the inner institutional framework of detected material, realizes Non-Destructive Testing.But the focus diameter that produces X ray in the prior art is bigger than normal, makes resolution capability poor, can only detect the millimeter level than big article and structure, is difficult to detect clear to small internal structure.In addition, prior art adopts power frequency transformation mode, and the steady foot property of high voltage source is poor, influences the fluoroscopy images quality.

In Aeronautics and Astronautics, military class and industry class; Need to carry out internal organizational structure, to connect the miniature solder joint of lead and detect to integrated circuit in electronics and the microelectronics assembling and various electronic device; Because measured object has high density, high meticulous characteristics, so traditional X-ray tube can't be applicable to the accurate perspective imaging checkout equipment of microfocus X-ray at present at all.

The utility model content

For overcoming the prior art deficiency; The utility model provides a kind of microfocus X-ray source; In the accurate perspective imaging checkout equipment of full automatic microfocus X-ray; Thereby make full-automatic checkout equipment can be used for the requirement of high fine detection, satisfy integrated circuit in electronics and the microelectronics assembling and various electronic device are carried out special high fine detection requirements such as internal organizational structure, the miniature solder joint of connection lead.

The utility model is to realize through following technical scheme; This microfocus X-ray source is made up of microfocus X-ray pipe and corresponding power; The cylindrical glass tube of said microfocus X-ray Guan Weiwei inner vacuum, it is made up of the filament utmost point (also claiming negative electrode), focusing electrode and anode, and said focusing electrode is between negative electrode and anode; Focusing electrode places in the X vacuum tube, the circular tubular of its structural design.Said focus X-ray source power supply comprises anode high voltage power supply, focusing power supply and filament supply (being cathode power), and they are loaded into respectively on the filament utmost point in the X-ray tube, focusing electrode, the anode.Said anode high voltage power supply is connected in series by oscillatory modulation circuit, booster circuit, three grades of circuit of voltage doubling rectifing circuit successively in order; The external input voltage of said oscillatory modulation circuit is 24V; Through the adjusting of its variable resistance, final voltage doubling rectifing circuit output 60～130KV high direct voltage.Said focusing power supply is connected with the boost rectifying circuit two-stage circuit by oscillatory modulation circuit; The external input voltage of said oscillatory modulation circuit is 24V; Through the adjusting of its variable resistance, final boost rectifying circuit output area is the controlled direct voltage at 400--1000V.

Further limit, said voltage doubling rectifing circuit, this partial circuit places vacuum environment in the lump together with X-ray tube.Voltage doubling rectifing circuit and X-ray tube place in the radiographic source tube of filling insulating oil, after vacuumizing and encapsulation process, vacuumizing, can avoid spark occurring under the high pressure.

Compared with prior art; The utility model has adopted little focal spot techniques; The launch point (focus) of x-ray source is dwindled greatly, narrow down to 10 micron orders from traditional millimeter level, this makes accuracy of detection improve two one magnitude; Can carry out 10 micron order accuracy detection, satisfy the requirement of fine detection.Simultaneously, the utility model has adopted the high-frequency high-voltage source technology, has improved the stability of high voltage source, thereby has improved the stability of X ray, makes the fluoroscopy images good stability.

The utility model has improved major step at original detection level and function; This microfocus X-ray source makes the accurate perspective imaging checkout equipment of full automatic microfocus X-ray become the not damaged checkout equipment of a new generation; Especially the detection and the various meticulous commercial production that are applied to electronics and microelectronic product detect, thereby can be applied to the military and industrial circle of Aeronautics and Astronautics.

Description of drawings

Fig. 1 is x-ray tubular construction and fundamental diagram.

Fig. 2 is anode high voltage power supply, focusing power supply and the filament power supply circuit block diagram that is loaded on the X-ray pipe.

Description of symbols: 10-cylindrical interior glass tube with vacuum, 11-filament, the 12-filament utmost point, 13-electron beam, 14-focusing electrode, the electron beam after 15-focuses on, 16-focus, 17-anode (being plate target), 18-X ray.

Embodiment

Below in conjunction with accompanying drawing the utility model technical scheme is further described.

The utility model microfocus X-ray source is made up of microfocus X-ray pipe and corresponding power.X-ray tubular construction and fundamental diagram as shown in Figure 1, microfocus X-ray pipe are the cylindrical glass tube 10 of inner vacuum, and it is made up of the filament utmost point, focusing electrode, anode.

The said filament utmost point 12 is electron emitter (also claiming negative electrode), and promptly filament 11 is made up of electronic emission material, when it heats; Will produce vacuum electron beam at it and 17 on the anode electric field that adds high pressure, the current density size of electron beam 13 depends on the size of heater current, and electric current is big more; Hot electron is many more; Electron beam is strong more, and tube current is big more, regulates the tube current that filament supply can obtain different sizes.

Between negative electrode and anode, add a high voltage (generally between 60～130KV, and adjustable), make filament electronic bundle high speed impact anode; When voltage reach tens thousand of more than; High energy electron bombards anode and produces radiation, and wherein one of about percentage transfers X ray to, and voltage is high more; Electron energy is high more, and the X ray penetration power of generation is strong more.

Electron bombard and the zones that produce X ray on plate target 17 surface are focus 16 (or focal spot), and according to optical imaging concept, focus is more little; The actinoscopy X imaging resolution is high more; The resolution that detects is high more, and the focus diameter of general X pipe is at 1-5mm, and the perspective imaging resolution capabilities is the millimeter level.

Obtain high-resolution, must adopt little focus, promptly the diameter of X-ray pipe focus is micron order (between several microns to tens microns), and its resolution also is micron order like this.

In order to obtain little focus; The utility model adds between negative electrode and anode and has increased one-level focusing electrode 14, and its effect is that the electron beam that target sends focuses on, and beam diameter is attenuated through focusing on; Thereby the focus of its bombardment anode is attenuated, form little focus 16.

Said focusing electrode is that little focus X-ray pipe is distinctive, and focusing electrode places in the X vacuum tube, and the position is between negative electrode and the anode, the circular tubular of structural design.When adding a negative voltage at this on extremely, thereby produce an annular negative electric field, electron beam is focused at the electric field center under this effect; Thereby electron beam is attenuated; Obtain focusing on, the beam bombardment anode after being focused and form little focus, thus become micron order point-like x-ray source.The focusing electrode of said rounded cylindrical structure, the length of its tubular is big more, and focusing effect is obvious more.Simultaneously, focusing electrode voltage is high more, and electric field is strong more, focuses on obviously more, regulates focusing electrode voltage (the utility model control range is 400 1 1000V), can produce the electric field of varying strength, obtains the focus of different thicknesses.

2 said focus X-ray source power supplys comprise anode high voltage power supply, focusing power supply and filament supply (being cathode power), and they are loaded into respectively on the filament utmost point in the X-ray tube, focusing electrode, the anode power supply is provided.As shown in Figure 2, wherein:

1) said anode high voltage power supply is connected in series by oscillatory modulation circuit, booster circuit, three grades of circuit of voltage doubling rectifing circuit successively in order; The external input voltage of said oscillatory modulation circuit is direct current 24V; Through the adjusting of its variable resistance, final voltage doubling rectifing circuit output 60～130KV high direct voltage.

Said voltage doubling rectifing circuit, this partial circuit places vacuum environment in the lump together with X-ray tube.Be that voltage doubling rectifing circuit and X-ray tube place in the radiographic source tube of filling insulating oil,, can avoid spark occurring under the high pressure through vacuumizing and encapsulation process.

Operation principle is: the first order is an oscillatory modulation circuit, adopts the higher-order of oscillation and PWM pwm switch working method, realizes that higher-order of oscillation frequency is the 40KHz square wave; The second level is booster circuit, obtains the voltage of 0.3～0.6KV through boosting; The third level is a voltage doubling rectifing circuit, can rise to 60-130KV through multiplication of voltage.

Said anode high voltage power supply adopts above-mentioned circuit design, owing to adopt the higher-order of oscillation and PWM pwm switch working method, and through boosting and voltage multiplying rectifier; This HF switch high voltage source is higher than traditional power frequency high voltage efficient; Ripple coefficient is low, and stability is better, has strengthened the stability of X ray; Make the fluoroscopy images good stability, can adapt to electronics and the high detection requirement of microelectronics high accurancy and precision.

2) said focusing power supply is connected with the boost rectifying circuit two-stage circuit by oscillatory modulation circuit; The external input voltage of said oscillatory modulation circuit is direct current 24V; Through the adjusting of its variable resistance, final boost rectifying circuit output area is at the direct voltage of 400--1000V.Because little electric current, adopt vibrate, boost, voltage stabilizing technique, can get high-quality power supply.

3) said filament supply (being cathode power) is general reduction voltage circuit, and external input voltage is 24V, regulates variable resistance wherein, output area 2--2.5V voltage.

Above-mentioned oscillatory modulation circuit, booster circuit, voltage doubling rectifing circuit, boost rectifying circuit, reduction voltage circuit, their particular circuit configurations all adopt custom circuit design of the prior art, and the utility model is not given unnecessary details.

X-ray source forms and wears thoroughly through behind the detected material, arrives image amplifier, and the effect of this image amplifier is that the X-ray after the transmission is reduced into visible light, is obtained by the CCD shooting again, forms fluoroscopy images on computers through image capturing system.

Claims

1. microfocus X-ray source; It is characterized in that, form that said microfocus X-ray pipe is the cylindrical glass tube of inner vacuum by microfocus X-ray pipe and corresponding power; Constitute by the filament utmost point, focusing electrode and anode; Said focusing electrode is between negative electrode and anode, and focusing electrode places in the X vacuum tube, the circular tubular of its structural design; Said focus X-ray source power supply comprises anode high voltage power supply, focusing power supply and filament supply; They are loaded into respectively on the filament utmost point in the X-ray tube, focusing electrode, the anode; Said anode high voltage power supply is connected in series by oscillatory modulation circuit, booster circuit, three grades of circuit of voltage doubling rectifing circuit successively in order; The external input voltage of said oscillatory modulation circuit is direct current 24V, through the adjusting of its variable resistance, and final voltage doubling rectifing circuit output 60～130KV high direct voltage; Said focusing power supply is connected with the boost rectifying circuit two-stage circuit by oscillatory modulation circuit; The external input voltage of said oscillatory modulation circuit is direct current 24V, and through the adjusting of its variable resistance, final boost rectifying circuit output area is at the direct voltage of 400--1000V.

2. microfocus X-ray source as claimed in claim 1 is characterized in that, said voltage doubling rectifing circuit, and this partial circuit places vacuum environment in the lump together with X-ray tube, and voltage doubling rectifing circuit and X-ray tube oil sealing are handled.