CN207623257U - A kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal - Google Patents
A kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal Download PDFInfo
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- CN207623257U CN207623257U CN201721678991.4U CN201721678991U CN207623257U CN 207623257 U CN207623257 U CN 207623257U CN 201721678991 U CN201721678991 U CN 201721678991U CN 207623257 U CN207623257 U CN 207623257U
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- Prior art keywords
- microdot
- ray
- metal
- sheet metal
- laser beam
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Abstract
The utility model discloses the X-ray high-resolution imaging devices that a kind of laser irradiates microdot sheet metal, belong to x-ray imaging technology field, including：Microdot sheet metal, vacuum cavity, speculum, lens and laser beam emitting device；Laser beam emitting device is located at outside vacuum cavity；Microdot sheet metal, speculum and lens are installed in vacuum cavity, and the speculum is used to the laser beam that laser beam emitting device is sent out being reflected in the metal microdot of microdot sheet metal, and lens are located on the reflected ray of speculum；The laser beam that laser beam emitting device is sent out enters after passing through glass component in vacuum cavity, and it is reflected by speculum, laser beam after speculum reflects is after lens focus, irradiation is in the metal microdot of microdot sheet metal, emit X-ray, photosurface of the X-ray image in X-ray camera after so that metal microdot is irradiated；The device can realize the x-ray imaging of high spatial resolution.
Description
Technical field
The utility model belongs to x-ray imaging technology field, and in particular to a kind of X-ray of laser irradiation microdot sheet metal
High-resolution imaging device.
Background technology
An important technical indicator is spatial resolution in x-ray imaging field.Since X-ray focusing is extremely difficult,
And X-ray optical device optical efficiency is very low, the transmitting of the mode that x-ray imaging generally use directly projects, i.e. x-ray source
X-ray direct irradiation target object.In this case, the bulk of x-ray source determines the spatial resolution of imaging.For
The higher spatial resolution of acquisition, needs to make the smaller x-ray source of bulk.Traditional x-ray source is to utilize acceleration
Electron Beam Focusing after bombardment metal material generate X-ray radiation, people are by designing electron-optical system by Electron Beam Focusing
The X-ray emission source of Microfocus X-ray is realized to very small focus.This method wants Electron optics design, experiment and processing
Ask high, cost of manufacture is very high.
Utility model content
In view of this, the purpose of this utility model be to provide the X-ray high-resolution of laser irradiation microdot sheet metal a kind of at
As device, which can realize the x-ray imaging of high spatial resolution.
The utility model is achieved through the following technical solutions：
A kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal, including：Microdot sheet metal, X-ray phase
Machine, vacuum cavity, speculum, lens and laser beam emitting device；
The microdot sheet metal includes：Substrate, hydrocarbon coating and metal microdot；Hydrocarbon coating coats on substrate, metal
Microdot is fixed on the side that substrate is coated with hydrocarbon coating；
Two sides of the vacuum cavity are processed respectively there are two through-hole, and one of through-hole uses transparent glass portion
Part seals, and X-ray camera is fixed on another through-hole；X-ray camera is located at outside vacuum cavity, and vacuum cavity is close
Envelope；
Integrated connection relationship is as follows：Laser beam emitting device is located at outside vacuum cavity；Microdot sheet metal, speculum and lens
It is installed in vacuum cavity, the speculum is used to the laser beam that laser beam emitting device is sent out being reflected in microdot sheet metal
Metal microdot on, lens are located on the reflected ray of speculum；
The laser beam that laser beam emitting device is sent out enters after passing through glass component in vacuum cavity, and anti-by speculum
It penetrates, the laser beam after speculum reflects irradiates in the metal microdot of microdot sheet metal after lens focus, makes metal
Microdot emits X-ray, photosurface of the X-ray image in X-ray camera after being irradiated；
Object to be imaged is located in vacuum cavity, and between microdot sheet metal and X-ray camera, in metal microdot
The center of the heart, the center of object to be imaged and X-ray camera is located on same axis.
Further, the diameter of the metal microdot is less than 1 micron.
Further, the vacuum degree in the vacuum cavity is 1 × 10-2~1 × 10-3Pa。
Further, the spatial resolution of x-ray imaging is adjusted by changing the diameter of metal microdot.
Further, change X by adjusting position relationship of the object to be imaged between metal microdot and X-ray camera
The enlargement ratio of radial imaging.
Advantageous effect：The metal microdot that the utility model irradiates microdot sheet metal by laser beam forms X-ray emission
Behind source, metal microdot emits X-ray radiation source radiation target object after being irradiated, and is obtained on the photosurface of X-ray camera empty
Between the higher radioscopic image of resolution ratio, and the spatial resolution is identical as the diameter of metal microdot, when needing to improve space point
When resolution, the diameter that need to only reduce metal microdot can be realized, and its implementation is simple, mature technology, can realize and receive
The high-resolution x-ray imaging of meter level.
Description of the drawings
Fig. 1 is the structure composition schematic diagram of the utility model.
Fig. 2 is the fundamental diagram of the utility model.
Wherein, 1- substrates, the hydrocarbon coatings of 2-, 3- metal microdots, 4- laser beams, 5- objects to be imaged, 6-X ray phases
Machine, 7- vacuum cavities, 8- speculums, 9- lens, 10- first flanges, 11- second flanges, 12- laser beam emitting devices.
Specific implementation mode
With reference to the accompanying drawings and examples, the utility model is described in detail.
The X-ray high-resolution imaging device for present embodiments providing a kind of laser irradiation microdot sheet metal, referring to attached drawing 1,
Including：Microdot sheet metal, X-ray camera 6, vacuum cavity 7, speculum 8, lens 9 and laser beam emitting device 12；
The microdot sheet metal includes：Substrate 1, hydrocarbon coating 2 and metal microdot 3；Hydrocarbon coating 2 is coated on substrate 1,
Metal microdot 3 is fixed on the side that substrate 1 is coated with hydrocarbon coating 2；The diameter of the metal microdot 3 is less than 1 micron；Metal microdot
3 irradiated by laser after emit X-ray, hydrocarbon coating 2 is for preventing substrate 1 from being irradiated by laser；
Vacuum degree in the vacuum cavity 7 is 1 × 10-2~1 × 10-3Pa, two sides point of the vacuum cavity 7
Jia Gong not be there are two through-hole, one of through-hole is sealed using transparent first flange 10, another through-hole passes through hollow the
Two flanges 11 are fixed with X-ray camera 6；X-ray camera 6 is located at outside vacuum cavity 7, and vacuum cavity 7 is sealed；
Integrated connection relationship is as follows：Laser beam emitting device 12 is located at outside vacuum cavity 7；Microdot sheet metal, 8 and of speculum
Lens 9 are installed in vacuum cavity 7, and microdot sheet metal is placed vertically, what speculum 8 can send out laser beam emitting device 12
Laser beam 4 is reflected in the metal microdot 3 of microdot sheet metal, and lens 9 are located on the reflected ray of speculum 8；Laser emission fills
It sets after the laser beam 4 that 12 send out passes through first flange 10 and enters in vacuum cavity 7, and reflected by speculum 8, through speculum 8
Laser beam 4 after reflection irradiates after the focusing of lens 9 in the metal microdot 3 of microdot sheet metal, make metal microdot 3 by
Emit X-ray after to irradiation, microdot sheet metal forms the X-ray emission source for x-ray imaging, wherein the sky of x-ray imaging
Between resolution ratio it is identical as the diameter of metal microdot 3, by change metal microdot 3 diameter, it is different x-ray imaging can be reached
The requirement of spatial resolution；
After the X-ray that metal microdot 3 on microdot sheet metal is launched passes through second flange 11, image is in X-ray camera 6
Photosurface；Wherein, object 5 to be imaged is between microdot sheet metal and X-ray camera 6, and the center of metal microdot 3, waits for
The center of imaging object 5 and the center of X-ray camera 6 are located on same axis；It is micro- in metal by adjusting object 5 to be imaged
Position relationship between point 3 and X-ray camera 6 can change the enlargement ratio of x-ray imaging.
Operation principle：Referring to attached drawing 2, object 5 to be imaged is located in vacuum cavity 7, and metal microdot 3 is by laser beam 4
Irradiation after emit X-ray, after x-ray irradiation object 5 to be imaged, image is on the photosurface of X-ray camera 6.
In conclusion the above is only the preferred embodiments of the present utility model only, it is not intended to limit the utility model
Protection domain.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should all wrap
Containing being within the protection scope of the utility model.
Claims (5)
1. a kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal, which is characterized in that including：Microdot sheet metal,
X-ray camera (6), vacuum cavity (7), speculum (8), lens (9) and laser beam emitting device (12)；
The microdot sheet metal includes：Substrate (1), hydrocarbon coating (2) and metal microdot (3)；Hydrocarbon coating (2) is coated in substrate
(1) on, metal microdot (3) is fixed on the side that substrate (1) is coated with hydrocarbon coating (2)；
Two sides of the vacuum cavity (7) are processed respectively there are two through-hole, and one of through-hole uses transparent glass portion
Part seals, and X-ray camera (6) is fixed on another through-hole；X-ray camera (6) is located at vacuum cavity (7) outside, and will be true
Cavity body (7) seals；
Integrated connection relationship is as follows：It is external that laser beam emitting device (12) is located at vacuum cavity (7)；Microdot sheet metal, speculum (8)
It is installed in vacuum cavity (7) with lens (9), the laser that the speculum (8) is used to send out laser beam emitting device (12)
Light beam (4) is reflected in the metal microdot (3) of microdot sheet metal, and lens (9) are located on the reflected ray of speculum (8)；
The laser beam (4) that laser beam emitting device (12) is sent out enters after passing through glass component in vacuum cavity (7), and by reflecting
Mirror (8) reflects, and the laser beam (4) after speculum (8) reflection irradiates after lens (9) focusing in microdot sheet metal
In metal microdot (3), X-ray is emitted after so that metal microdot (3) is irradiated, the X-ray image is in X-ray camera (6)
Photosurface；
Object (5) to be imaged is located in vacuum cavity (7), and between microdot sheet metal and X-ray camera (6), metal is micro-
The center at the center of point (3), the center of object to be imaged (5) and X-ray camera (6) is located on same axis.
2. a kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal as described in claim 1, feature exist
In the diameter of the metal microdot (3) is less than 1 micron.
3. a kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal as described in claim 1, feature exist
In the vacuum degree in the vacuum cavity (7) is 1 × 10-2~1 × 10-3Pa。
4. a kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal as described in claim 1, feature exist
In the diameter by changing metal microdot (3) adjusts the spatial resolution of x-ray imaging.
5. a kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal as described in claim 1, feature exist
In changing X-ray by adjusting the position relationship of object (5) to be imaged between metal microdot (3) and X-ray camera (6)
The enlargement ratio of imaging.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721678991.4U CN207623257U (en) | 2017-12-06 | 2017-12-06 | A kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721678991.4U CN207623257U (en) | 2017-12-06 | 2017-12-06 | A kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207623257U true CN207623257U (en) | 2018-07-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721678991.4U Expired - Fee Related CN207623257U (en) | 2017-12-06 | 2017-12-06 | A kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107917922A (en) * | 2017-12-06 | 2018-04-17 | 中国工程物理研究院激光聚变研究中心 | A kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal |
-
2017
- 2017-12-06 CN CN201721678991.4U patent/CN207623257U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107917922A (en) * | 2017-12-06 | 2018-04-17 | 中国工程物理研究院激光聚变研究中心 | A kind of X-ray high-resolution imaging device of laser irradiation microdot sheet metal |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180717 Termination date: 20201206 |
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| CF01 | Termination of patent right due to non-payment of annual fee |