CN202142495U - Array X-ray source based on cold cathode of field emission - Google Patents
Array X-ray source based on cold cathode of field emission Download PDFInfo
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- CN202142495U CN202142495U CN201120253622U CN201120253622U CN202142495U CN 202142495 U CN202142495 U CN 202142495U CN 201120253622 U CN201120253622 U CN 201120253622U CN 201120253622 U CN201120253622 U CN 201120253622U CN 202142495 U CN202142495 U CN 202142495U
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Abstract
The utility model discloses an array X-ray source based on a cold cathode of field emission. The X-ray source includes a cathode base plate (1), a cathode electrode (11), a field emitter (12) used for emitting electron beams, and a reflecting anode target (13). The cathode electrode (11) is arranged on the cathode base plate (1). The field emitter (12) is arranged on the cathode electrode (11). The reflecting anode target (13) is disposed above the cathode base plate (1) and is opposite to the cathode base plate (1). The reflecting anode target (13) is parallel to the cathode base plate (1). The electron beams emitted from the field emitter (12) hit the reflecting anode target (13) and then a generated X-ray (8) goes through the cathode base plate (1) and emits. The array X-ray source based on the cold cathode of field emission provided in the utility model can be applied to mini-sized and portable X-ray diagnostic devices as well as scanning and imaging of the array X-ray source.
Description
Technical field
The utility model is a kind of novel array X radiographic source, relates to the generation of design, preparation and the X ray of planar array x-ray source.
Background technology
X-ray source has important use in medical image and industry are surveyed, and X-ray tube is the core component of X ray image system.Present employed X-ray tube mostly adopts hot cathode, and electronics is heated and obtains the energy effusion, and is focused and quickens, and bombards anode with very high energy at last.Anode is made up of the metal with high atomic number, after anode receives the high energy electron bombardment, produces X ray.X ray is different to the transmission performance of different biological tissues or material, so the radioscopy image can reflect the internal structure of object to be detected.
Because the X-ray tube that uses at present adopts hot cathode, its cathode power loss is bigger, can not adapt to the requirement of miniaturization; In the X ray image system, the bundle spot size the when resolution of image depends on beam bombardment to metal anode.Because the electronics that hot cathode is launched has more scattered initial velocity, need to adopt complicated focusing system to reduce beam diameter.Existing X-ray tube adopts perspective formula anode or two kinds of forms of reflective anode; Adopt transmission anode shown in Figure 1; The metal level 4 ' of anode is thinner; Electronics 7 ' bombards anode 4 ' from the side's high energy near negative electrode, and the X ray that is produced sees through anode metal layer 4 ' and substrate 5 ' outgoing, and therefore anode substrate is held concurrently as the outgoing window in this mode of operation.Because anode metal layer is thinner, so its electric current that bears is less.The metal level of perspective formula anode is the absorption portion X ray in addition, so its X ray produces efficient and reduces.
Adopt reflective anode shown in Figure 2, electron beam 7 ' bombards anode target surface 9 ', and X ray 8 ' is to the cathode direction outgoing.But owing to blocking of hot cathode filament and focusing system, most of X ray can not directly pass the cathode assembly outgoing.In order to obtain the output of effective X ray, the anode target surface is certain inclination angle with cathode base usually, between anode and negative electrode, forms an output window 10 ' like this, and X ray passes through the output window outgoing.Because output window need be set, requiring has certain distance between cathode base and the anode substrate, and this has limited the miniaturization of X-ray tube.Simultaneously, the anode target surface of inclination has also limited the position of cathodic electricity component, uses single electron source or bielectron source usually.
Summary of the invention
Technical problem:The purpose of the utility model provides a kind of array X radiographic source based on field emission cold-cathode, and it can be used for miniaturization and Portable X-ray diagnostic equipment, also can be applied to the scanning imagery of array X radiographic source.
Technical scheme:For solving the problems of the technologies described above, the utility model proposes a kind of array X radiographic source based on field emission cold-cathode, it is characterized in that: this x-ray source comprises cathode base, cathode electrode, is used for the field emitter of divergent bundle, reflective plate target; Wherein
On cathode base, be provided with cathode electrode, on cathode electrode, be provided with field emitter, reflective plate target is positioned at the cathode base top and is oppositely arranged with cathode base, and reflective plate target is parallel with cathode base; The beam bombardment that field emitter is launched is to reflective plate target, and the X ray of generation passes the cathode base outgoing.
Preferably, reflective plate target is processed by the metal thick plate of high atomic number, and reflective plate target is a fixed anode.
Preferably, field emission body constitutes by X ray is absorbed less nano material.
Preferably, X ray being absorbed less nano material is CNT, nano zine oxide.
Preferably, cathode electrode constitutes by X ray is absorbed less metal or conducting film.
Preferably, less metal or the conducting film of said X ray absorption is tin indium oxide, aluminium.
Preferably, cathode base is to be made up of the little glass of lead tolerance.
Beneficial effect:The array X radiographic source based on field emission cold-cathode that the utility model proposes adopts the less glass of lead tolerance as cathode base, has avoided the absorption of cathode base to X ray.Common Coolidge tube is compared, and the array X radiographic source based on field emission cold-cathode that the utility model proposes does not need the filament heating, has improved the reliability of device work; Owing to do not need the filament heating, avoided of the absorption of parts such as cathode filament to X ray, therefore can adopt reflective anode, X ray is through the cathode base outgoing.This mode of operation does not require special outgoing window is set between negative electrode and anode, so can realize the miniaturization of X-ray tube.In addition, anode is parallel with cathode base under this mode of operation, has avoided oblique anode to the electron source limited in number, can realize the array electronic source, and then realizes array X radiographic source scanning output.
Description of drawings
Fig. 1 is the hot cathode x-ray source structure that adopts transmission anode
Fig. 2 is the hot cathode x-ray source structure that adopts reflective anode
Fig. 3 is the array X radiographic source based on field emission cold-cathode that the utility model proposes.
Fig. 4 is a plurality of field emission electron source structures in the array X radiographic source based on field emission cold-cathode that proposes of the utility model
Wherein have: cathode base 1, hot cathode filament 2, electron focusing groove 3, transmission anode metal level 4, anode substrate 5, shell 6, electron beam 7, X-ray beam 8, inclined reflection-type anode 9, X ray output window 10, cathode electrode 11, field emission body 12, flat reflective anode 13.
Embodiment
Below with reference to accompanying drawings the utility model is described.
To the technological difficulties of common X-ray tube, the utility model proposes a kind of array X radiographic source based on field emission cold-cathode.The array X radiographic source based on field emission cold-cathode that the utility model proposes does not need the filament heating, has improved the reliability of device work; Owing to do not need the filament heating, avoided of the absorption of parts such as cathode filament to X ray, therefore can adopt reflective anode, X ray is through the cathode base outgoing.This mode of operation does not require special outgoing window is set between negative electrode and anode, so can realize the miniaturization of X-ray tube.In addition, anode is parallel with cathode base under this mode of operation, has avoided oblique anode to the electron source limited in number, can realize the array electronic source, and then realizes array X radiographic source scanning output.
The array X radiographic source based on field emission cold-cathode that the utility model proposes is on cathode base, to prepare cathode electrode; On cathode electrode, prepare field emitter; Anode substrate is positioned at the scan electrode top, and with it at a distance of certain distance.
The array X radiographic source based on field emission cold-cathode that the utility model proposes adopts reflective anode, and it is processed by the metal thick plate of high atomic number, and parallel with cathode base.It is bigger to cause emission current then and there, and the operating time, reflective anode can be rotarting anode when longer.It is less to cause emission current then and there, and the operating time, more reflective anode can be fixed anode.
The array X radiographic source based on field emission cold-cathode that the utility model proposes adopts X ray is absorbed less nano material, like CNT, nano zine oxide etc., as field emission body, has avoided the absorption of field emission body to X ray.
Referring to Fig. 3-4, the array X radiographic source based on field emission cold-cathode that the utility model provides, this x-ray source comprise cathode base 1, cathode electrode 11, are used for the field emitter 12 of divergent bundle 7, reflective plate target 13.
On cathode base 1, be provided with cathode electrode 11, on cathode electrode 11, be provided with field emitter 12, reflective plate target 13 is positioned at cathode base 1 top and is oppositely arranged with cathode base 1, and reflective plate target 13 is parallel with cathode base 1; The electron beam 7 that field emitter 12 is launched bombards on the reflective plate target 13, and the X ray 8 of generation passes cathode base 1 outgoing.
Reflective plate target 13 is processed by the metal thick plate of high atomic number, and it is bigger to cause emission current then and there, and the operating time, reflective plate target 13 was a rotarting anode when longer; It is less to cause emission current then and there, and the operating time, more reflective plate target 13 was a fixed anode.
It is CNT, nano zine oxide that X ray is absorbed less nano material.
It is tin indium oxide ITO, aluminium Al that said X ray absorbs less metal or conducting film.
The array X radiographic source structure based on field emission cold-cathode of the utility model is a preparation cathode electrode 11 on cathode base 1; Preparation field emitter 12 on cathode electrode 11; Reflective anode target surface 13 is positioned at the cathode base top, and with it at a distance of certain distance.The electron beam 7 that field emitter 12 is launched bombards on the reflective plate target 13, and the X ray 8 of generation passes cathode base 1 outgoing.
The array X radiographic source based on field emission cold-cathode of the utility model adopts CNT, and nano zine oxide etc. absorb materials with smaller as field emitter to X ray.Cathode electrode (by X ray is absorbed less metal or conducting film, like formations such as ITO, Al, has been avoided the absorption to X ray of field emission body and cathode electrode.Cathode base is to be made up of the less glass of lead tolerance, has avoided the absorption of cathode base to X ray.Reflective plate target is processed by the metal thick plate of high atomic number, like the alloy of tungsten, molybdenum or different metal, and parallel with cathode base.It is bigger to cause emission current then and there, and the operating time, reflective anode can be rotarting anode when longer.It is less to cause emission current then and there, and the operating time, more reflective anode can be fixed anode.The utility model can adopt a plurality of field emitting electronic sources, and each field emitting electronic source can work alone.Therefore can form the X ray outgoing of array scanning.
The method of preparation is: on cathode base, adopt the method for printing, sintering or plated film, photoetching to prepare cathode electrode; On the cathode electrode through printing, spraying, plated film, be coated with attach or independently method such as growth on cathode electrode, prepare field emission body; Adopt the preparation of machine cuts method than the metal thick plate of high atomic number as anode substrate, the parallel assembling of this anode substrate with cathode base.With cathode base and anode substrate sealing-in exhaust, form the vacuum working environment in the device.
In the array X radiographic source structure of the utility model proposition based on field-transmitting cathode, on the negative electrode data electrode, apply varying voltage signal, can control the operating state of electron source.Selected electron source goes into operation and does and emission current, thereby on the corresponding anode position, produces the x ray, realizes the radiogenic array scanning process of x.
The array X radiographic source based on field emission cold-cathode that the utility model proposes adopts X ray is absorbed less metal or conducting film, like ITO, Al etc., as cathode electrode, has avoided the absorption of cathode electrode to X ray.The above is merely the preferred embodiments of the utility model; The protection range of the utility model does not exceed with above-mentioned execution mode; As long as the equivalence that those of ordinary skills do according to the utility model institute disclosure is modified or changed, all should include in the protection range of putting down in writing in claims.
Claims (7)
1. array X radiographic source based on field emission cold-cathode is characterized in that: this x-ray source comprises cathode base (1), cathode electrode (11), is used for the field emitter (12) of divergent bundle (7), reflective plate target (13); Wherein
On cathode base (1), be provided with cathode electrode (11); On cathode electrode (11), be provided with field emitter (12); Reflective plate target (13) is positioned at cathode base (1) top and is oppositely arranged with cathode base (1), and reflective plate target (13) is parallel with cathode base (1); The electron beam (7) that field emitter (12) is launched bombards on the reflective plate target (13), and the X ray of generation (8) passes cathode base (1) outgoing.
2. the array X radiographic source based on field emission cold-cathode according to claim 1 is characterized in that: reflective plate target (13) is processed by the metal thick plate of high atomic number, and reflective plate target (13) is rotarting anode or fixed anode.
3. the array X radiographic source based on field emission cold-cathode according to claim 1 is characterized in that: field emission body (12) constitutes by X ray is absorbed less nano material.
4. the array X radiographic source based on field emission cold-cathode according to claim 3 is characterized in that: it is CNT, nano zine oxide that X ray is absorbed less nano material.
5. the array X radiographic source based on field emission cold-cathode according to claim 1 is characterized in that: cathode electrode (11) constitutes by X ray is absorbed less metal or conducting film.
6. the array X radiographic source based on field emission cold-cathode according to claim 5 is characterized in that: it is tin indium oxide, aluminium that said X ray absorbs less metal or conducting film.
7. the array X radiographic source based on field emission cold-cathode according to claim 1 is characterized in that: cathode base (1) is to be made up of the little glass of lead tolerance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120253622U CN202142495U (en) | 2011-07-18 | 2011-07-18 | Array X-ray source based on cold cathode of field emission |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120253622U CN202142495U (en) | 2011-07-18 | 2011-07-18 | Array X-ray source based on cold cathode of field emission |
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| CN202142495U true CN202142495U (en) | 2012-02-08 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102299036A (en) * | 2011-07-18 | 2011-12-28 | 东南大学 | Array X-ray source based on field emission cold cathode |
| CN103760180A (en) * | 2014-01-27 | 2014-04-30 | 东南大学 | X-ray source array based real-time online industrial CT (computed tomography) detecting system |
| WO2015039594A1 (en) * | 2013-09-18 | 2015-03-26 | 同方威视技术股份有限公司 | X-ray device and ct device having said x-ray device |
| CN106663579A (en) * | 2014-07-23 | 2017-05-10 | 莫克斯泰克公司 | Spark gap x-ray source |
| WO2018113069A1 (en) * | 2016-12-19 | 2018-06-28 | 中国科学院深圳先进技术研究院 | Transmission-type x-ray source structure for cathode of patterned carbon nanotube |
| CN114188198A (en) * | 2021-10-21 | 2022-03-15 | 中山大学 | Annular addressable cold cathode X-ray source device and preparation method and application thereof |
-
2011
- 2011-07-18 CN CN201120253622U patent/CN202142495U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102299036A (en) * | 2011-07-18 | 2011-12-28 | 东南大学 | Array X-ray source based on field emission cold cathode |
| WO2015039594A1 (en) * | 2013-09-18 | 2015-03-26 | 同方威视技术股份有限公司 | X-ray device and ct device having said x-ray device |
| US9653247B2 (en) | 2013-09-18 | 2017-05-16 | Nuctech Company Limited | X-ray apparatus and a CT device having the same |
| CN103760180A (en) * | 2014-01-27 | 2014-04-30 | 东南大学 | X-ray source array based real-time online industrial CT (computed tomography) detecting system |
| CN103760180B (en) * | 2014-01-27 | 2016-09-07 | 东南大学 | Real-time online industry CT detecting system based on x-ray source array |
| CN106663579A (en) * | 2014-07-23 | 2017-05-10 | 莫克斯泰克公司 | Spark gap x-ray source |
| CN106663579B (en) * | 2014-07-23 | 2018-08-31 | 莫克斯泰克公司 | Gap x-ray source |
| WO2018113069A1 (en) * | 2016-12-19 | 2018-06-28 | 中国科学院深圳先进技术研究院 | Transmission-type x-ray source structure for cathode of patterned carbon nanotube |
| CN114188198A (en) * | 2021-10-21 | 2022-03-15 | 中山大学 | Annular addressable cold cathode X-ray source device and preparation method and application thereof |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120208 Termination date: 20190718 |
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| CF01 | Termination of patent right due to non-payment of annual fee |