CN104465279B - X-ray apparatus and the CT equipment with the X-ray apparatus - Google Patents

X-ray apparatus and the CT equipment with the X-ray apparatus Download PDF

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Publication number
CN104465279B
CN104465279B CN201310426917.3A CN201310426917A CN104465279B CN 104465279 B CN104465279 B CN 104465279B CN 201310426917 A CN201310426917 A CN 201310426917A CN 104465279 B CN104465279 B CN 104465279B
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CN
China
Prior art keywords
electron emission
emission unit
anode
ray apparatus
vacuum
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CN201310426917.3A
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Chinese (zh)
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CN104465279A (en
Inventor
唐传祥
唐华平
陈怀璧
黄文会
张化
张化一
郑曙昕
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Tsinghua University
Nuctech Co Ltd
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Tsinghua University
Nuctech Co Ltd
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Priority to CN201310600370.4A priority Critical patent/CN104470173B/en
Application filed by Tsinghua University, Nuctech Co Ltd filed Critical Tsinghua University
Priority to CN201310600023.1A priority patent/CN104470172B/en
Priority to CN201310426917.3A priority patent/CN104465279B/en
Priority to JP2016543304A priority patent/JP6526014B2/en
Priority to RU2016114671A priority patent/RU2655916C2/en
Priority to PCT/CN2014/086743 priority patent/WO2015039603A1/en
Priority to KR1020167008295A priority patent/KR101855931B1/en
Priority to ES14185376T priority patent/ES2749725T3/en
Priority to EP14185376.2A priority patent/EP2858087B1/en
Priority to PL14185376T priority patent/PL2858087T3/en
Priority to US14/490,526 priority patent/US9653251B2/en
Publication of CN104465279A publication Critical patent/CN104465279A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06Cathodes
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
    • A61B6/02Devices for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
    • A61B6/03Computerised tomographs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08Anodes; Anti cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/14Arrangements for concentrating, focusing, or directing the cathode ray
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00X-ray tubes
    • H01J2235/02Electrical arrangements

Abstract

The distributed X-ray apparatus of the external hot cathode of the present invention possess:Vacuum box, surrounding is sealed and internal for high vacuum;Multiple electron emission units, each mutual independence of electron emission unit and line up linear array installed in vacuum box side wall on;Anode, the middle part in vacuum box, and in the direction of the width angle with the mounting plane of electron emission unit formation predetermined angular parallel in the longitudinal direction with the arranging line of electron emission unit;Power supply and control system, with high voltage power supply, focusing power supply, launch control unit and control system, electron emission unit has:Heat filament;The negative electrode being connected with heat filament;Surround the insulated support of negative electrode and filament;Focusing electrode, is configured in the way of the top positioned at negative electrode on the top of insulated support;Connection fixture, configures in the top of the focusing electrode, is tightly connected with the box wall of the vacuum box, heater lead is connected through insulated support with launch control unit.

Description

X-ray apparatus and the CT equipment with the X-ray apparatus
Technical field
The present invention relates to a kind of device for producing distributed X-ray, more particularly to pass through in an X-ray source equipment External mode arrange multiple independent hot-cathode electric transmitter units and produced using grid control or cathodic control by The distributed X-ray apparatus of external hot cathode according to the X-ray of predefined procedure shift the focus position and the CT with the device are set It is standby.
Background technology
Usually, X-ray source refers to the equipment for producing X-ray, generally by X-ray tube, power supply and control system, cooling And the servicing unit etc. such as shielding is constituted, its core is X-ray tube.X-ray tube is generally by negative electrode, anode, glass or ceramic package Constitute.Negative electrode is directly-heated type helical tungsten filament, operationally, by electric current, is heated to a kind of condition of high temperature, produces the electricity of heat emission Beamlet stream, the metal cap that negative electrode is slotted by a front end is surrounded, and metal cap makes electron focusing.Anode is inlayed in copper billet end face Tungsten target, operationally, is applied with high pressure, the electronics that negative electrode is produced is accelerated under electric field action to fly between the anode and cathode To anode, and target surface is hit, so as to produce X-ray.
X-ray has a wide range of applications in fields such as industrial nondestructive testing, safety inspection, medical diagnosis and treatments.Especially It is that the radioscopy imaging device being made using the high-penetration ability of X-ray is played in the every aspect of people's daily life Important function.This kind equipment early stage be film type plane perspective imaging device, current advanced technology be digitlization, regard more Angle and high-resolution stereoscopic imaging apparatus, such as CT(computed tomography), the three of fine definition can be obtained Solid figure or sectioning image are tieed up, is advanced high-end applications.
In existing CT equipment, x-ray source and detector need to move on slip ring, in order to improve inspection speed, lead to The movement velocity of normal x-ray source and detector is very high, causes the reliability and stability reduction that equipment is overall, in addition, being transported The limitation of dynamic speed, CT inspection speed is also restricted.Therefore, need one kind can be not shift position in CT equipment The x-ray source at multiple visual angles can be produced.
In order to solve the reliability, stability problem and check speed issue and anode that slip ring is brought in existing CT equipment The resistance to heat problem of target spot, provides certain methods in existing patent document.Such as rotary target x-ray source, can be to a certain degree The problem of upper solution plate target is overheated, still, its is complicated and produces the target spot of X-ray relative to x-ray source entirety still It is so the target position of a determination.For example, some technologies in order to realize multiple visual angles of fixed x-ray source and at one The multiple independent conventional X-ray sources of close-packed arrays replace the motion of x-ray source on circumference, although so can also realize regard more Angle, but cost is high, also, the target spot spacing of different visual angles is big, image quality(Three-dimensional resolution ratio)It is very poor.In addition, in patent Document 1(US4926452)In propose a kind of light source and method for producing distributed X-ray, plate target has very big face Product, alleviates the problem of target is overheated, also, target position circumferentially changes, and can produce multiple visual angles.Although patent document 1 It is to be scanned deflection to obtaining the high energy electron beam accelerated, there is that control difficulty is big, target position is not discrete and repetition Property difference the problem of, but still be that a kind of can produce the effective ways of distributed light source.In addition, for example in patent document 2 (US20110075802)With patent document 3(WO2011/119629)In propose a kind of light source for producing distributed X-ray with And method, plate target has very big area, alleviates the problem of target is overheated, also, target position disperses fixation and array Arrangement, can produce multiple visual angles.In addition, using CNT as cold cathode, and array arrangement, profit are carried out to cold cathode Flied emission is controlled with the voltage of cathode grid interpolar, so that each negative electrode launching electronics in order are controlled, by corresponding on anode Ordinal position bombards target spot, as distributed X-ray source.But, exist complex manufacturing, the emissivities of CNT with Life-span not high weak point.
The content of the invention
The present invention proposes that its object is to provide one kind can just produce without mobile light source in order to solve above-mentioned problem Raw multiple visual angles and be conducive to simplifying structure, improve the stability of a system, reliability, improve the external hot cathode point for checking efficiency Cloth X-ray apparatus and the CT equipment with the distributed X-ray apparatus of the external hot cathode.
To achieve these goals, the present invention provides a kind of external hot cathode distributed X-ray apparatus, it is characterised in that Possess:Vacuum box, surrounding is sealed and internal for high vacuum;Multiple electron emission units, each electron emission unit is only mutually Stand and line up linear array on the side wall of the vacuum box;Anode, the centre position inside the vacuum box, Also, it is parallel in the longitudinal direction with the orientation of the electron emission unit and in the direction of the width with the electron emission The angle of the mounting plane formation predetermined angular of unit;Power supply and control system, with the high voltage power supply being connected with the anode, Each launch control unit being connected with the multiple electron emission unit, the control system for being controlled to each power supply System, the electron emission unit has:Heat filament;The negative electrode being connected with the heat filament;From the two of the heat filament Hold the heater lead drawn;Insulated support, surrounds the heat filament and the negative electrode;Focusing electrode, with positioned at described the moon The mode of the top of pole is configured on the top of the insulated support;Connection fixture, is configured in the top of the focusing electrode, with The box wall of the vacuum box is tightly connected, and the heater lead connects through the insulated support with the launch control unit Connect.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, also having:High voltage power supply attachment means, By the anode and the cable connection of the high voltage power supply, the side installed in one end of the close anode of the vacuum box Wall;Launch control unit attachment means, for connecting the heat filament and the launch control unit;Vacuum power, including In the power supply and control system;Vacuum plant, on the side wall of the vacuum box, is carried out using the vacuum power Work, maintains the high vacuum in the vacuum box.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, the electron emission unit also has: Grid, between the negative electrode and the focusing electrode and close to negative electrode;Grid lead, is connected with the grid, passes through The insulated support, is connected with the launch control unit.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, the electron emission unit also has: Section is focused on, between the focusing electrode and the connection fixture;Focusing arrangement, is matched somebody with somebody in the way of surrounding the focusing section Put.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, also having:Focusing power supply, is included in institute State in power supply and control system;Focusing arrangement attachment means, for connecting the focusing arrangement and the focusing power supply.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, the electron emission unit be divided to two rows peace On two relative side walls of the vacuum box.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, the vacuum box is made by glass or ceramics Into.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, the vacuum box is by metal material system Into.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, the multiple electron emission unit arrangement The shape that is in line either segmented linear shape.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, the multiple electron emission unit arrangement In the arc-shaped or sectional circular arc.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, the row of the multiple electron emission unit It is uniform to arrange interval.
In addition, in the distributed X-ray apparatus of external hot cathode in the present invention, the row of the multiple electron emission unit It is heterogeneous to arrange interval.
In addition, the present invention provides a kind of CT equipment, it is characterised in that used x-ray source is as described above external Hot cathode distribution X-ray apparatus.
According to the present invention, mainly it is to provide a kind of distributed X-ray apparatus of external hot cathode, is produced in a light source The X-ray of raw periodic transformation focal position in some sequence.The electron emission unit of the present invention uses hot cathode, relative to other Design have the advantages that emission current greatly, long lifespan;Multiple electron emission units are each independently fixed on vacuum box, and can be straight Connect using two small-sized poles or triode gun, technology maturation, cost is low, using flexible;Using the design of the big anode of long strip type, The problem of anode is overheated effectively is alleviated, is conducive to improving the power of light source;Electron emission unit can with arranged in a straight line, it is overall into For the distributed X-ray apparatus of linear pattern, electron emission unit can also annular array, it is overall to turn into ring-like distributed X-ray dress Put, using flexible;By the design of the design of focusing electrode, and outside focusing arrangement, electron beam, which can be, realizes very small focus. Relatively other distributed X-ray source equipment, electric current of the present invention is big, and target spot is small, and target position is evenly distributed and reproducible, defeated Go out power high, simple in construction, easy to control, cost is low.
The distributed X-ray source of the present invention is applied to CT equipment, just multiple visual angles can be produced without mobile light source, because This can omit link motion, be conducive to simplifying structure, improve the stability of a system, reliability, improve and check efficiency.
Brief description of the drawings
Fig. 1 is the schematic diagram of the structure of the distributed X-ray apparatus of external hot cathode of the present invention.
Fig. 2 is the schematic diagram of anode in the present invention and the position relationship of electron emission unit.
Fig. 3 is a kind of schematic diagram of the structure of electron emission unit in the present invention.
Fig. 4 is a kind of schematic diagram of the structure of emission controlling unit in the present invention.
Fig. 5 is a kind of schematic diagram of the structure of electron emission unit with grid and focusing arrangement in the present invention.
Fig. 6 is a kind of schematic diagram of structure with grid-controlled emission controlling unit in the present invention.
Fig. 7 is the structural representation of another electron emission unit in the present invention.
Fig. 8 is the top view of the structure of the cylindrical electron emission unit in the present invention,(A)It is the situation of circular gate hole, (B)It is the situation of rectangle gate hole.
Fig. 9 is the structure top view of the cuboid electron emission unit in the present invention,(A)It is the situation of circular gate hole, (B)It is the situation of rectangle gate hole.
Figure 10 is the structural representation of the negative electrode in the present invention,(A)It is the negative electrode of planar rondure,(B)It is flat rectangular Negative electrode,(C)It is the negative electrode of spherical arc shape,(D)It is the negative electrode of cylinder cambered surface shape.
Figure 11 is the structural representation of the aperture plate in the present invention,(A)It is plane aperture plate,(B)It is spherical aperture plate,(C) It is U groove profile aperture plates.
Figure 12 is the schematic diagram of the automatic focusing carried out using the control of grid of the present invention.
Figure 13 is a kind of knot of the distributed X-ray apparatus of external hot cathode of the double opposed arrangement of linear pattern in the present invention The schematic diagram of structure,(A)It is the figure of the position relationship of electron emission unit, anode and vacuum box,(B)It is electron emission unit and sun The figure of the position relationship of pole.
Figure 14 is a kind of knot of the distributed X-ray apparatus of external hot cathode of the double opposed arrangement of circular arc type in the present invention The schematic diagram of structure.
Figure 15 is the schematic diagram of the primary structure of the Two dimensional Distribution Formula X x-ray apparatus of the present invention.
Figure 16 is the upward view of the anode construction of the Two dimensional Distribution Formula X x-ray apparatus in the present invention.
Figure 17 is the schematic diagram for the electron emission unit array that the grid in the present invention is separated with negative electrode,(A)It is side view, (B)It is the top view of each grid independent control pattern,(C)It is the top view of each gate interconnection and cathodic control pattern.
Figure 18 is the distributed X-ray apparatus of the filament series connection in the present invention.
Figure 19 is the schematic diagram of the structure of the distributed X-ray apparatus of curved array of the present invention.
Figure 20 is the end view of the structure of the distributed X-ray apparatus of curved array of the present invention.
Figure 21 is the schematic diagram of the different structure of the anode in the present invention.
Figure 22 is the electron emission unit and the arrangement relation of anode of ring-like distributed X-ray apparatus in the present invention Schematic diagram.
Description of reference numerals:
1 electron emission unit
2 anodes
3 vacuum boxs
4 high voltage power supply attachment means
5 launch control unit attachment means
6 focusing arrangement attachment means
7 power supplys and control system
8 vacuum plants
E electronic beam currents
X X-rays
The center of circle of O circular arcs
101 heat filaments
102 negative electrodes
103 insulated supports
104 focusing electrodes
105 connection fixtures
106 heater leads
107 grids
108 grid leads
109 focus on section
110 focusing arrangements
701 control systems
702 high voltage power supplies
703 launch control units
704 focusing power supplies
70301 negative high voltage modules
70302 DC Modules
70303 high voltage isolating transformers
70304 negative electricity die blocks
70305 positive electricity die blocks
70306 switch modules
801 vavuum pumps
802 vacuum valves.
Embodiment
Hereinafter, the present invention will be described in detail referring to the drawings.
Fig. 1 is the schematic diagram of the structure of the distributed X-ray apparatus of external hot cathode of the present invention.As shown in figure 1, of the invention The distributed X-ray apparatus of external hot cathode include multiple electron emission units 1(At least two, it is later also particularly referred to as electric Sub- transmitter unit 11,12,13,14 ...), anode 2, vacuum box 3, high voltage power supply attachment means 4, launch control unit connection Device 5 and power supply and control system 7.In addition, electron emission unit 1 is by heat filament 101, negative electrode 102, insulated support 103rd, focusing electrode 104, connection fixture 105, heater lead 106 etc. are constituted.Anode 2 is arranged on the centre inside vacuum box 3, electricity Sub- transmitter unit 1 is arranged in the box wall of vacuum box 3 with high voltage power supply attachment means 4 and constitutes integral sealing with vacuum box 3 Structure.
Fig. 2 is anode 2 and the relative position of electron emission unit 1 of the distributed X-ray apparatus of external hot cathode of the present invention Put the schematic diagram of relation.As shown in Fig. 2 multiple electron emission units 1 are arranged point-blank, anode 2 is and electron emission The corresponding elongate in shape of arrangement of unit 1, also, anode 2 in the longitudinal direction with arranged by multiple electron emission units 1 and Into straight line parallel, in the direction of the width, the surface towards electron emission unit 1 of anode 2 and electron emission unit 1 towards The angle of predetermined angular is formed between the surface of anode 2.
Electron emission unit 1 is used to produce electronic beam current on request, on the side wall of vacuum box 3, solid by connection The side wall for determining part 105 and vacuum box 3 constitutes sealing structure, and electron emission unit 1 is outside vacuum box 3, electronic beam current It can be entered by the perforate in the middle of connection fixture 105 inside vacuum box 3.In addition, figure 3 illustrates electron emission unit 1 A kind of structure, electron emission unit 1 include heat filament 101, negative electrode 102, insulated support 103, focusing electrode 104, connection Fixture 105, heater lead 106.Negative electrode 102 links together with heat filament 101, and heat filament 101 generally uses tungsten filament, Negative electrode 102 is generally using the strong material of thermal electron ability, for example, barium monoxide, scandate, lanthanum hexaboride etc..Insulating supporting Part 103 surrounds heat filament 101 and negative electrode 102, equivalent to the partial shell of electron emission unit 1, using insulating materials, generally For ceramics.Heater lead 106 is drawn out to the outside of electron emission unit 1 through insulated support 103, heater lead 106 It is sealing structure between insulated support 103.Focusing electrode 104 is arranged on the upper end of insulated support 103, and focusing electrode 104 is There are perforate, and center and the center consistency from top to bottom of negative electrode 102 of the perforate in nose conical design, centre.Connection fixture 105 is used It is tightly connected in by electron emission unit 1 with vacuum box 3, usually edge of a knife flange, there is perforate centre, for making electronic beam current E Entered from electron emission unit 1 in vacuum box 3.Insulated support 103, focusing electrode 104, connection fixture 105 are closely connected Together, one vacuum sealing of formation of the other parts in addition to the center drilling of connection fixture 105 of electron emission unit 1 is made Structure.
In addition, power supply includes control system 701, high voltage power supply 702, launch control unit 703 etc. with control system 7.It is high Voltage source 702 is connected by the high voltage power supply attachment means 4 in the box wall of vacuum box 3 with anode 2.Emission control is filled Put 703 to be connected with the heater lead 106 of each electron emission unit 1 respectively by launch control unit attachment means 5, generally tool There is the emission controlling unit with the number of electron emission unit 1.Figure 4 illustrates a kind of emission controlling unit Structure, launch control unit 703 includes multiple emission controlling units, and each emission controlling unit includes negative high voltage module 70301st, low-voltage direct module 70302, high voltage isolating transformer 70303.Wherein, negative high voltage module 70301 is used in control system Negative high-voltage pulse is produced under the control of system 701, it exports the primary side for being connected to high voltage isolating transformer 70303;Low-voltage direct Module 70302 is used to produce supplies electrically heated electric current to heat filament 106, and its output is connected to high voltage isolating transformer 70303 Two groups of secondary in parallel low-pressure end, and pass through Transformer Winding, heater lead be output to from the high-pressure side of two groups of secondary in parallel 106.Launch control unit attachment means 5 are usually the cable with connector, and quantity is identical with the quantity of electron emission unit 1. In addition, control system 701 is controlled to the working condition of high voltage power supply 702, launch control unit 703.
In addition, vacuum box 3 is the sealed cavity housing of surrounding, it is high vacuum that it is internal, and housing can be by glass or ceramics Constituted Deng insulating materials.On the side wall of vacuum box 3(Referring to Fig. 1)Multiple electron emission units 1, these electron emissions are installed Unit 1 is arranged in a straight line, internally(Referring to Fig. 1)The anode 2 of strip is installed, anode 2 is sent out with electronics in the longitudinal direction The orientation for penetrating unit 1 is parallel.The motion of the enough electronic beam currents in space in the electric field inside vacuum box 3 is appointed without producing What stops.High vacuum in vacuum box 3 is obtained by toasting exhaust in high-temperature exhaust air stove, and its vacuum is typically superior to 10-3Pa, the vacuum of recommendation is better than 10-5Pa 。
Also, it is recommended to the housing of vacuum box 3 be metal material, in the case of using metal material, electron emission list Member 1 is connected through the connection of fixture 105 and the wall progress edge of a knife flange sealing means of vacuum box 3, and anode 2 utilizes insulation branch Timbering material, which is fixed in vacuum box 3 between installation, also, the housing of anode 2 and vacuum box 3, keeps enough distances, no High voltage arc can be produced.
In addition, high voltage power supply attachment means 4 are used for the cable connection of anode 2 and high voltage power supply 702, installed in vacuum box 3 side wall.High voltage power supply attachment means 4 are usually the internal conic ceramic structure with metal column, and one end is connected with anode 2, The other end is closely connected with the box wall of vacuum box 3, forms vacuum seal structure together.Gold inside high voltage power supply attachment means 4 Category post is used to make anode 2 and the formation circuit connection of the cable connector of high voltage power supply 702.Usual high voltage power supply attachment means 4 and electricity Plug type structure is designed as between cable joint.
In addition, in the distributed X-ray apparatus of external hot cathode of the present invention, electron emission unit 1 can also include grid Pole 107 and grid lead 108.Figure 5 illustrates a kind of structure of the electron emission unit 1 with grid and focusing arrangement. As shown in figure 5, grid 107 is arranged between negative electrode 102 and focusing electrode 104, close to negative electrode 102, grid 107 is usually netted knot Structure, profile is identical generally with the shape of negative electrode 102, and grid lead 108 is connected to grid 107 and passes through insulated support 103 The outside of electron emission unit 1 is drawn out to, is tightly connected between grid lead 108 and insulated support 103, grid lead 108 are connected to launch control unit 703 by launch control unit attachment means 5.
In addition, in the distributed X-ray apparatus of external hot cathode of the present invention, the emission control of launch control unit 703 Unit can also include negative bias die block 70304, positively biased die block 70305, selecting switch 70306.Figure 6 illustrates one kind Structure with grid-controlled emission controlling unit.As shown in fig. 6, negative high voltage module 70301 is used to produce negative high voltage, its is defeated Go out to be connected to the primary side of high voltage isolating transformer 70303;City is electrically connected to two groups of secondary in parallel of high voltage isolating transformer 70303 Low-pressure end, and pass through Transformer Winding, the power supply in high pressure be suspended in from the high-pressure side output of two groups of secondary in parallel, is supplied respectively It is given to DC Module 70302, negative bias die block 70304 and positively biased die block 70305.DC Module 70302 is produced to heating lamp Silk 101 supplies electrically heated electric current;Negative bias die block 70304 and positively biased die block 70305 produce a negative voltage and one respectively Individual positive voltage and two inputs for being output to selecting switch 70306, effect of the selecting switch 70306 in control device 701 One voltage output of lower selection is eventually applied on grid 107 to grid lead 108.
In addition, in the distributed X-ray apparatus of external hot cathode of the present invention, electron emission unit 1 can also include poly- Burnt section 109 and focusing arrangement 110.It is connected between focusing electrode 104 and connection fixture 105, gathers as shown in figure 5, focusing on section 109 Burnt pole 104, focusing section 109 and connection fixture 105 can be the entirety that a metalwork is processed, can also three metals Part is by being welded together, and focusing arrangement 110, which is arranged on, to be focused on outside section 109, and focusing arrangement 110 is typically focal line Bag.Focusing arrangement 110 is connected to focusing power supply 704 by focusing arrangement attachment means 6, and focusing arrangement 110 is in focusing power supply 704 Driving under work, the control of the working condition of focusing power supply 704 by power supply and control system 7.Correspondingly, external hot cathode point Cloth X-ray apparatus also include focusing arrangement attachment means 6, and power supply also includes focusing power supply 704 with control system 7.
In addition, the distributed X-ray apparatus of the external hot cathode of the present invention can also include vacuum plant 8 and vacuum power 705, vacuum plant 8 includes vavuum pump 801 and vacuum valve 802, and vacuum plant 8 is arranged on the side wall of vacuum box 3.Vavuum pump 801 are operated in the presence of vacuum power 705, for maintaining the high vacuum in vacuum box 3.Generally, external hot cathode point Operationally, electron beam bombardment anode 2, anode 2 can generate heat and discharge a small amount of gas cloth X-ray apparatus, by using true Empty pump 801, can quickly extract this portion gas out, so as to maintain the condition of high vacuum degree inside vacuum box 3.Vavuum pump 801 is preferred Use vacuum ion pump.The usual selection of vacuum valve 802 can bear the all-metal vacuum valve of high-temperature baking, and such as all-metal is manual Push-pull valve.Vacuum valve 802 is generally in closed mode.Correspondingly, the power supply of the distributed X-ray apparatus of external hot cathode and control System 7 also includes the vacuum power of vacuum plant 8(Vacc PS)705.
In addition, can also use the electron emission unit of other structures in the present invention.Fig. 7 is to make in the present invention Another structural representation of electron emission unit.As shown in fig. 7, electron emission unit 1 is by heat filament 101A, negative electrode 102A, grid 103A, insulated support 104A, connection fixture 109A etc. are constituted.
Electron emission unit 1 constitutes integral seal structure using connection fixture 109A and vacuum box 3 wall, but not Be limited to this, if can by electron emission unit 1 be arranged on vacuum box 3 box wall on and make its generally in vacuum box 3 it Outside(That is, the cathode terminal of electron emission unit 1(Including heat filament 101A, negative electrode 102A, grid 103A)And electron emission list The lead end of member 1(Including heater lead 105A, grid lead 108A, connection fixture 109A)All in the outer of vacuum box 3 Portion), can also be installed using other manner.Electron emission unit 1 include heat filament 101A, negative electrode 102A, grid 103A, absolutely Edge support member 104A, heater lead 105A, connection fixture 109A, also, grid 103A by grid frame 106A, aperture plate 107A, Grid lead 108A is constituted.Negative electrode 102A links together with heat filament 101A, and heat filament 101A generally uses tungsten filament, cloudy Pole 102A is generally using the strong material of thermal electron ability, for example, barium monoxide, scandate, lanthanum hexaboride etc..Insulated support 104A surrounds heat filament 101A and negative electrode 102A, equivalent to the housing of electron emission unit 1, using insulating materials, is usually Ceramics.Heater lead 105A is drawn out to the lower end of electron emission unit 1 through insulated support 104A(But not limited to this, As long as being drawn out to the outside of electron emission unit 1), it is sealing knot between heater lead 105A and insulated support 104A Structure.Grid 103A is arranged on insulated support 104A upper end(That is, configuration is in insulated support 104A opening)And with Negative electrode 102A is opposed, preferably grid 103A and negative electrode 102A center consistency from top to bottom.In addition, grid 103A includes grid frame 106A, aperture plate 107A, grid lead 108A, grid frame 106A, aperture plate 107A, grid lead 108A are that metal is made, generally Grid frame 106A is stainless steel material, and aperture plate 107A is Mo, and grid lead 108A is to cut down(Alloy)Material.Grid lead 108A is drawn out to the lower end of electron emission unit 1 through insulated support 104A(But not limited to this, as long as being drawn out to electronics The outside of transmitter unit 1), it is sealing structure between grid lead 108A and insulated support 104A.Heater lead 105A Launch control unit 703 is connected to grid lead 108A.
In addition, specifically, on grid 103A structure, its main body is one piece of metallic plate(For example, stainless steel material)I.e. Grid frame 106A, perforate is formed with grid frame 106A centre, and the shape of the perforate can be square or circular etc., be opened at this The position in hole is fixed with woven wire(For example, Mo)That is aperture plate 107A, also, draw one from some position of metallic plate Lead(For example, kovar alloy material)That is grid lead 108A, so as to which grid 103A is connected into a current potential.In addition, Grid 103A is located at negative electrode 102A surface, and the center of grid 103A above-mentioned perforate is aligned with negative electrode 102A center(That is, Up and down on a vertical line), the shape of perforate is corresponding with negative electrode 102A shape, and the size of usual perforate is than negative electrode 102A's Area is small.But, as long as electronic beam current can be not limited to said structure by grid 103A, grid 103A structure.This Outside, relative position is carried out by insulated support 104A between grid 103A and negative electrode 102A to fix.
In addition, specifically, on connection fixture 109A structure, recommendation, its main body is a circular knife edge flange, Centre is formed with perforate, and the shape of the perforate can be square or circular etc., in the position of perforate with insulated support 104A's Upper end outer is tightly connected, and is such as welded to connect, and the outer of edge of a knife flange is formed with screw hole, can be bolted electronics Transmitter unit 1 is fixed on the wall of vacuum box 3, and vacuum sealing connection is formed between the wall of its edge of a knife and vacuum box 3.This is a kind of The flexible structure of convenient dismounting, when some in multiple electron emission units 1 breaks down, can flexibly be changed.Need , can be with, it is noted that connection fixture 109A function is to realize being tightly connected between insulated support 104A and vacuum box 3 There are a variety of flexible modes, such as by the welding of metal flange transition, either glass high-temperature fusion is tightly connected or ceramic metal With the mode such as the welding of metal after categoryization.
In addition, electron emission unit 1 can be the structure of cylinder, i.e. insulated support 104A is cylinder, and negative electrode 102A, grid frame 106A, aperture plate 107A can be circular simultaneously or while be rectangle.Figure 8 illustrates a kind of cylinder The top view of the electron emission unit 1 of shape, wherein,(A)Negative electrode 102A, grid frame 106A, aperture plate 107A are shown while being circle The structure of shape,(B)Negative electrode 102A, grid frame 106A, aperture plate 107A are shown while being rectangular structure.In addition, for circle Shape negative electrode, in order that the electrically realized more preferable convergence effect that negative electrode 102A surface is produced, it is usually preferred to by negative electrode 102A's Surface Machining is into sphere circular arc(Such as Figure 10(C)It is shown).The diameter on negative electrode 102A surface is usually a few mm, such as diameter 2mm, the diameter of the aperture plate 107A installed on grid frame 106A perforate is usually a few mm, such as diameter 1mm.In addition, from Grid 103A to the distance on negative electrode 102A surface be usually several mm of zero point to several mm, such as 2mm.In addition, cloudy for rectangle Pole, in order that the electrically realized more preferable convergence effect that negative electrode 102A surface is produced, it is generally preferred that cylinder cambered surface shape, this Sample is conducive to the electronic beam current of narrow edge direction further to assemble.Usual arc length is several mm to tens mm, and width is several mm, example Such as long 10mm, width 2mm.Correspondingly, aperture plate 107A is rectangle, and preferably its width is that 1mm, length are 10mm.In Figure 5 It is respectively planar rondure, flat rectangular, spherical arc shape, the feelings of cylinder cambered surface shape these four structures to show negative electrode 102A Condition.
In addition, electron emission unit 1 can also be cuboid-type structure, i.e. insulated support 104A is cuboid, and cloudy Pole 102A, grid frame 106A, aperture plate 107A can be simultaneously circle, or be rectangle simultaneously.It is long figure 9 illustrates one kind The top view of the electron emission unit 1 of cube shape, wherein(A)Show negative electrode 102A, grid frame 106A, aperture plate 107A while being Circular structure,(B)Negative electrode 102A, grid frame 106A, aperture plate 107A are shown while being rectangular structure.It may be noted that It is that the twill line in Fig. 8 and Fig. 9 is for the ease of distinguishing the part that each is different, be not representing section.
In addition, can be plane or sphere as shown in figure 11 on aperture plate 107A structure specifically Type, can also be U groove profiles, it is recommended that spherical, because the aperture plate of spherical can cause electron beam has preferably poly- Burnt effect.
If in addition, the electron emission unit that launch control unit 703 changes in adjacent electron emission unit Grid state, in synchronization, adjacent electron emission unit only one of which carries out electron emission and forms electronic beam current When, then the electric field of the grid both sides of the electron emission unit has the effect focused on automatically to the electronic beam current.As shown in figure 12, The direction that electron motion is represented with the arrow between electron emission unit 1 and anode 2 in figure(Inverse power line direction).In Figure 12 In, anode 2 is high voltage+160kV, and the arrow between electron emission unit 1 and anode 2 of big electric field is all from electron emission Unit 1 points to anode 2, that is to say, that as long as electron emission unit 1 launches electronic beam current, then electronic beam current all can be to anode 2 Motion.Internal field's state on the surface of electron emission unit 1 is investigated, in adjacent electron emission unit 12,13,14, electricity The grid 103A of sub- transmitter unit 13 voltage is changed into+2000V from -500V, then electron emission unit 13 enters electron emission shape State, adjacent electron emission unit 12 and the grid 103A of electron emission unit 14 voltage remain as -500V, if electronics There is electron emission in transmitter unit 12,14, then electronics from the grid 103A of electron emission unit 12 and electron emission unit 14 to The grid 103A motions of electron emission unit 13, still, due to electron emission is not present in electron emission unit 12,14, so, The electron beam emitted from electron emission unit 13 receives the electron emission unit being directed towards from electron emission unit 13 12 and electron emission unit 14 electric field effect and be squeezed, therefore, with automatic focusing effect.
It is pointed out that the distributed X-ray apparatus of the external hot cathode of the present invention work in high vacuum state, high vacuum Acquisition and maintenance method can be:Anode 2 is completed into installation in vacuum box 3, by high voltage power supply attachment means 4 and vacuum holding Put 8 to complete to be tightly connected on the wall of vacuum box 3, blank flange is first used in the electron emission unit junction of the side wall of vacuum box 3 Sealing, makes vacuum box 3 that a sealing structure is integrally formed;Then the structure is placed in vacuum drying oven and toasts degassing, vacuum valve 802 Connect external vacuum extract system, it is therefore intended that remove the gas that the material of each part is adsorbed;Then, in normal temperature clean environment In, nitrogen is injected into vacuum box 3 from vacuum valve 802, environmental protection is formed, then open the blind plate of electron emission unit junction Flange simultaneously installs electron emission unit, carries out one by one;After all electron emission units are installed, outside is connected from vacuum valve 802 Vacuum-pumping system is evacuated, and carries out baking exhaust again, and the inside for making vacuum box 3 is high vacuum;In the process of baking exhaust In can carry out each electron emission unit negative electrode activation;After the completion of baking exhaust, vacuum valve 802 is closed, is made in vacuum box 3 Portion keeps high vacuum;In the distributed X-ray apparatus course of work of external hot cathode, a small amount of gas of anode release is by vavuum pump 801 extract, and maintain the high vacuum inside vacuum box 3.When some electron emission unit is damaged or needs to change to the life-span, Nitrogen formation protection is injected inside from vacuum valve 802 toward vacuum box 3;Within the shortest time, the electron emission for needing to change is pulled down Unit, installs new electron emission unit;Vacuum valve 802 connects external vacuum air-extractor, and vacuum box 3 is vacuumized;Surely When reaching high vacuum again inside sylphon 3, vacuum valve 802 is closed, the inside of vacuum box 3 is kept high vacuum.
Furthermore, it is necessary to it is emphasized that in the distributed X-ray apparatus of external hot cathode of the present invention, electron emission Unit 1 can be arranged on a side wall of vacuum box 3, can also be prolonged in two opposing sidewalls of vacuum box 3 by identical Exhibition direction is arranged simultaneously.Figure 13 illustrates a kind of distributed X-ray dress of the external hot cathode of the double opposed arrangement of linear The structure put,(A)It is the figure of the position relationship of electron emission unit 1, anode 2 and vacuum box 3,(B)Electron emission unit 1 with The figure of the position relationship of anode 2.Such as Figure 13(A)Shown, multiple 1 point of two row of electron emission unit are arranged in vacuum box 3 In two opposing sidewalls, anode 2 is arranged in the middle part in vacuum box 3.Such as Figure 13(B)It is shown, the row's electron emission list of anode 2 and two First 1 relative face is inclined-plane, the electronic beam current E that electron emission unit 1 is produced by electron emission unit 1 and anode 2 it Between electric field acceleration, bombard the inclined-plane of anode 2, produce X-ray, the exit direction of useful X-ray is the inclination on the inclined-plane of anode 2 Direction.Because two row's electron emission units 1 are positioned opposite, anode 2 has two inclined-planes, the X-ray that two inclined-planes are produced to The outgoing of identical direction.
Furthermore, it is necessary to which it is emphasized that the distributed X-ray apparatus of the external hot cathode of the present invention can be linear pattern row Row or circular arc type arrangement, so as to meet different application demands.Figure 14 illustrates the circular arc type of the present invention is external The schematic diagram of the electron emission unit 1 of hot cathode distribution X-ray apparatus and the position relationship of anode 2.Two row's electron emission lists Member 1 is circumferentially arranged, is arranged on two opposite flanks of vacuum box 3, the two parallel to each other, electron emission lists in side The extension direction of the arrangement of member 1 is camber line, and the radian size of arrangement can be determined as needed.Anode 2 is arranged in vacuum box 3 The centre of the relative electron emission unit 1 in middle part, i.e. two rows, anode 2 is oblique in face of the surface of two row's electron emission units 1 Face, the incline direction on two inclined-planes is directed to the center O of circular arc.Electronic beam current E launches from the upper surface of electron emission unit 1 Come, accelerated by the high voltage electric field between anode 2 and electron emission unit 1, final bombardment anode 2, on two inclined-planes of anode 2 The upper Series X-ray target spot for forming the arrangement of two row's circular arcs, the exit direction of useful X-ray points to the center of circular arc.On The vacuum box 3 of the distributed X-ray apparatus of the external hot cathode of circular arc type, arrangement and the shape pair of anode 2 with electron emission unit 1 It is also circular arc type to answer ground, or is referred to as annular.The exit Xray of circular arc type distribution X-ray apparatus all points to the center of circle of circular arc, The situation of radiographic source circular arrangement can be applied to.
Furthermore, it is necessary to it is emphasized that in the distributed X-ray apparatus of external hot cathode, each electron emission unit Arrangement can be linear or such as L-shaped or U-shaped equal segments linear, in addition, the arrangement of each electron emission unit It can be arc, can also be segmentation arc line shaped, for example, the curve or straightway that are formed by connecting by the segmental arc of different-diameter With the combination of arc etc..
Furthermore, it is necessary to which it is emphasized that in the distributed X-ray apparatus of external hot cathode of the present invention, each electronics is sent out The arrangement spacing for penetrating unit can be uniform or heterogeneous.
In addition, in the present invention also electron emission unit, thus, energy can be configured by the way of two-dimensional array distribution Access the distributed X-ray apparatus of two-dimensional array.As shown in Figure 15,16, the distributed X-ray apparatus of two-dimensional array have multiple electricity Sub- transmitter unit 1(At least four, later also be particularly referred to as electron emission unit 11a, 12a, 13a, 14a ..., electronics hair Penetrate unit 11b, 12b, 13b, 14b ...), electron emission unit can be any one of foregoing electron emission unit Kind, anode 2 by positive plate 201 and on positive plate 201 and arrangement corresponding with electron emission unit 1 multiple targets 202 compositions, still, anode 2 is not limited to the structure, uses common anode in the art.In addition, multiple electron emissions Unit 1 is configured in the way of two-dimensional arrangements on a side wall of vacuum box 3, and mutual with the plane at the place of positive plate 201 It is parallel.In addition, as described above, electron emission unit 1 is generally in the outside of vacuum box 3, and anode 2 is arranged on vacuum box 3 inside.
Figure 15 illustrates the structural representation that the space of electron emission unit 1 and anode 2 is arranged(Herein, eliminate The diagram of vacuum box 3).Electron emission unit 1 is divided into two rows and is arranged in a plane(That is, a side wall of vacuum box 3)On, and And, the electron emission unit 1 of front and rear row is staggered(Referring to Figure 15), but be not restricted to that this, even if the electronics hair of front and rear row Penetrating that unit is not interlaced with each other can also.Target 202 on anode 2 is corresponded with electron emission unit 1, the top surface of target 202 Point to electron emission unit 1, line the putting down perpendicular to positive plate 201 at the center of electron emission unit 1 and the center of target 202 Face, this line is also the motion path for the electronic beam current E that electron emission unit 1 is launched.Electron bombardment target produces X-ray, The exit direction of useful X-ray is parallel to the plane of positive plate 201, also, each useful X-ray is parallel to each other.
Figure 16 illustrates a kind of structure of anode 2.Anode 2 includes:Positive plate 201;It is multiple that two-dimensional array is distributed Target 202.Positive plate 201 is flat board, is made up of metal material, and preferably resistant to elevated temperatures metal material, with electron emission The plane that the upper surface of unit 1 is constituted is substantially parallel, and when being applied with positive high pressure on anode 2, usually tens kV are arrived Hundreds of kV, typically such as 180kV, so as to form parallel high voltage electric field between positive plate 201 and electron emission unit 1. Target 202 is arranged on positive plate 201, and its position is arranged in mode corresponding with the position of electron emission unit 1 respectively, target 202 surface is usually using resistant to elevated temperatures heavy metal material, such as tungsten or tungsten alloy.Target 202 is circular frustum structure, high Degree is usually several mm, and such as 3mm, the bottom surface being relatively large in diameter is connected with positive plate 201, and the diameter of top surface is smaller, usually several mm, Such as 2mm, top surface is not parallel with positive plate 201, the small angle for generally having a several years to ten several years, is easy to electronic target institute The useful X-ray emission produced comes out.All targets 202 are arranged in the consistent mode in top surface inclination direction, Ye Jisuo The exit direction for the useful X-ray having is consistent.This structure design of target, it is small prominent equivalent to what is grown on positive plate 201 Rise, change internal field's distribution on the surface of positive plate 201 so that electron beam has the effect focused on automatically before bombardment target Really so that target spot diminishes, be conducive to improving picture quality.In the design of anode, positive plate 201 uses common metal, only The surface of target 202 is tungsten or tungsten alloy, therefore reduces cost.
In addition, in the present invention, electron emission unit can be the structure of grid and negative electrode separation.Figure 17 illustrates A kind of electron emission unit array of grid and negative electrode separation.In fig. 17, flat board grid 9 is by insulation framework plate 901, screen 902nd, aperture plate 903, grid lead 904 are constituted.As illustrated, screen 902 is arranged at insulation framework plate 901, also, aperture plate 903 The position of the perforate formed on screen 902 is arranged at, grid lead 904 is drawn from screen 902.Cathode array 10 is by multiple the moon Pole close structure is rearranged, and each cathode construction is made up of filament 1001, negative electrode 1002, insulated support 1004.Flat board grid Pole 9 be in the top of cathode array 10 and both apart from very little, usually several mm, such as 3mm.By screen 902, aperture plate 903rd, the grid structure and cathode construction that grid lead 904 is constituted are corresponded, also, from vertical direction, each aperture plate 903 circle center is overlapped two-by-two with the circle center of each negative electrode 1002.
In addition, such as Figure 17(B)It is shown, in the present invention, grid structure can be each grid lead independently draw and The structure of state control is independently carried out by grid control device.Each negative electrode 1002 of cathode array 10 may be at same potential For example it is grounded, each grid switches in negative several hectovolts with just several kilovolts two states, such as between -500V and+2000V Switching, so as to control the working condition of each electron emission unit, for example, some grid is -500V at certain moment, then the grid Electric field between pole and corresponding negative electrode is negative electric field, is limited in the surface of negative electrode from the electronics of emission of cathode, in lower a period of time Grid voltage is carved when being changed into+2000V, the electric field between the grid and corresponding negative electrode is changed into positive electric field, from the electronics of emission of cathode Moved to grid and through aperture plate, be transmitted into the accelerating field between grid and anode, accelerated and finally bombarded Anode, X-ray is produced in corresponding target position.
In addition, such as Figure 17(C)Shown, grid can also be that each grid lead is in parallel, in same current potential, by filament electricity Source controls the working condition of each electron emission unit.Such as all grid is in -500V, and each cathode filament is independent Draw, the voltage difference between two end points of each cathode filament is constant, and the global voltage of each negative electrode is in 0V and -2500V two Switch between individual state.At certain moment, negative electrode is in 0V current potentials, is negative electric field between grid and negative electrode, from the electricity of emission of cathode Son is limited in the surface of negative electrode, and in subsequent time, the voltage of negative electrode is changed into -2500V, the electricity between grid and corresponding negative electrode Field is changed into positive electric field, is moved from the electronics of emission of cathode to grid and through aperture plate, is transmitted into adding between grid and anode In fast electric field, accelerated and finally bombard target, X-ray is produced in corresponding target position.
In addition, in the Two dimensional Distribution Formula X x-ray apparatus of the present invention, the heater lead of each electron emission unit can be each One of filament supply is integrally connected to from each output end for being independently connected to filament supply or after being connected in series Output end.Figure 18 illustrates the schematic diagram that a kind of heater lead of electron emission unit is connected in series to filament supply.In electricity In the system that the heater lead of sub- transmitter unit is connected in series, usual negative electrode is needed all in identical current potential, each grid lead Independently to draw, the working condition of electron emission unit is controlled by grid control device.
In addition, in the present invention, the array of electron emission unit can be that two rows can also be multiple rows of.
In addition, in the present invention, the target of anode can be circular frustum structure or cylindrical structure, can be with Fang platform structure, can also be many terrace with edge structures, either the structure such as other polygons projections or other irregular projections.
In addition, in the present invention, the top surface of the target of anode can be plane or inclined-plane, can also be sphere, Or other irregular surfaces.
In addition, in the present invention, the two-dimensional array arrangement of electron emission unit can be that both direction is that straight line stretches, Can also be a direction be straight line stretch and another direction be camber line stretch or a direction be straight line stretch and Another direction is stretched for segmented linear, can also be that a direction is straight line stretching, extension and another direction is segmentation arc stretching, extension Deng multiple combinations form.
In addition, in the present invention, the two-dimensional array arrangement of electron emission unit can be both direction interval uniformity , it can be that each direction interval is uniform and both direction interval is inconsistent or direction interval is uniform and another One direction interval is uneven, can also be that the interval of both direction is all uneven.
In addition, in the present invention, electron emission unit can also be set in the way of curved array is distributed, thereby, it is possible to Obtain the distributed X-ray apparatus of curved array.Figure 19 is the structural representation of the distributed X-ray apparatus of curved array of the present invention Figure.Figure 20 is the end view of the distributed X-ray apparatus internal structure of curved array of the present invention.Figure 21 is the sun of the present invention The schematic diagram of the different structure of pole.
As illustrated, multiple electron emission units 1(At least four, later also be particularly referred to as electron emission unit 11a, 11b、12a、12b、13a、13b、14a、14b 、……)Arrange multiple rows of along axis direction towards axes O on curved surface, in addition, Anode 2 is arranged in the axes O of curved surface.In addition, as described above, electron emission unit 1 is arranged on the box wall of vacuum box 3 On, and generally in the outside of vacuum box 3, and anode 2 is arranged in vacuum box.
In addition, above-mentioned curved surface includes the face of cylinder and anchor ring.A kind of curved array distribution X that Figure 20 is the present invention is penetrated The end view of the internal structure of line apparatus, specifically, figure 20 illustrates a kind of array distributed X-ray in face of cylinder The schematic diagram of the internal structure of device.Electron emission unit 1 arranges multiple rows of on the face of cylinder along axis direction, also, electronics The upper surface of transmitter unit 1(Electron emission face)Towards axes O.Anode 2 is arranged in the axes O of cylinder.Generally, electron emission Unit 1 is in identical low potential, and anode 2 is in high potential, positive electric field is constituted between anode 2 and electron emission unit 1, electricity Field is converged from the surface of each electron emission unit 1 to the axis of anode 2, and electronic beam current E is from electron emission unit 1 to anode 2 Axial-movement, bombards anode 2, finally produces X-ray.
In addition, above-mentioned electron emission unit 1 arranges multiple rows of, multiple rows of electronics on curved surface along axis direction towards axis Transmitter unit can be that front and rear row alignment or the front and rear row position recommended are staggered so that each electron emission unit The position of the beam bombardment anode of generation is misaligned.
In addition, anode 2 has the structure of hollow pipeline shape, cooling agent can be made in its internal flow.Figure 21 illustrates The structure of a kind of anode and its support member in the present invention.Anode 2 is by anode 201A, anode pipe 202A, anode Target surface 203A is constituted.Anode 201A be arranged on anode pipe 202A on and with the top of high voltage power supply attachment means 4 (Small end)Link together, for being supported and fixing to anode 2.Anode pipe 202A is the agent structure of anode 2, two The one end of end respectively with two cooling attachment means 9A is connected, and inside is connected with cooling attachment means 9A, as cooling agent The passage circulated.Anode pipe 202A generally selects resistant to elevated temperatures metal material, there is various structures mode, is recommended as circle The pipeline of shape.In addition, in some cases, such as in the case of anode thermal power is less, anode 2 can also be non-hollow pipeline Column construction.In addition, anode target surface 203A is beam bombardment anode pipe 202A position, have a variety of on fine structure Design, for example, such as Figure 21(1)Shown, anode pipe 202A periphery is exactly the bombardment position of electron beam, in such a situation Under, anode pipe 202A integrally uses high temperature resistant heavy metal material, for example, tungsten or tungsten alloy, such as Figure 21(2)It is shown, anode Pipeline 202A it is cylindrical it is removed a part and formed a small tapered plane, the tapered plane turn into electron beam bombardment position, The incline direction of the tapered plane is the exit direction of useful X-ray, and this structure design is conducive to the direction of useful X-ray It is consistent to draw, it is preferred that such as Figure 21(3)It is shown, anode target surface 203A is specially designed with anode pipe 202A outer surface, Anode target surface 203A uses high temperature resistant heavy metal material, and such as tungsten or tungsten alloy, thickness are not less than 20 μm(Micron), pass through electricity Plate, paste, weld or be otherwise secured on the small tapered plane that anode pipe 202A outer is processed, in such a feelings Under condition, anode pipe 202A can use ordinary metallic material, so as to reduce cost.
In addition, in the present invention, above-mentioned axis can be straight line or circular arc, entirety turns into wire distribution X X-ray apparatus or annular distribution Formula X x-ray apparatus, to meet different application demands.Figure 22 illustrates a kind of ring-type point The electron emission unit of cloth and the design sketch of anode arrangement.Anode 2 is arranged in a planar circumferential, the cloth of electron emission unit 1 Put in the lower section of anode 2, two row's electron emission units 1 press the direction of anode 2 into circumferential arrangement, while being arranged in anode 2 Center is on the arc surface of axis, i.e., the axis of anode 2 is pointed on the surface of each electron emission unit 1.Electronic beam current E is from electronics Transmitter unit 1 is emitted, and is accelerated by the high voltage electric field between anode 2 and electron emission unit 1, bombards the lower edge of anode 2 Target surface, forms the array X radiographic target spot of circular arrangement on anode 2, and the exit direction of useful X-ray all points to the institute of anode 2 In the center of circle of circumference.The arrangement and anode 2 of the vacuum box 3 of the annular distribution Formula X x-ray apparatus electron emission unit 1 internal with it Shape correspondence be also a kind of ring type structure.Annular distribution Formula X x-ray apparatus can be a complete ring or one section Ring is long, can apply to need the occasion of radiographic source circular arrangement.
In addition, in the present invention, the array of electron emission unit can be that two rows can also be multiple rows of.
In addition, in the present invention in the description of electron emission unit, " independence " refers to that each electron emission unit has The ability of independent transmission electronic beam current, can be discrete structure or the knot of certain associated connection on concrete structure Structure.
In addition, in the description of the distributed X-ray apparatus of the curved array of the present invention, " curved surface " refers to various forms of songs Face, including the curved surface that the face of cylinder, anchor ring, ellipsoid or segmented linear are constituted, such as regular polygon cylinder or segmentation arc Curved surface that line is constituted etc., it is recommended that the face of cylinder and anchor ring as elucidated before.
In addition, in the description of anode arrangement position, it is each that " axis " refers to that electron emission unit is arranged in the present invention The true axis or form axis of the curved surface of the form of kind, the axis on such as face of cylinder refer to the central axis of cylinder, anchor ring Axis refer to central axis inside annulus, the axis of oval calotte refers to close to this section of oval paraxial axis, just polygon The axis of shape cylinder refers to the axis that the center of regular polygon is constituted.
In addition, in the present invention, anode interior pipeline tangent plane can be circular port, square opening, polygonal hole, band fin The internal tooth colyliform hole of structure or the other shapes of area of dissipation can be increased.
In addition, in the present invention, the curved array of electron emission unit is arranged in an orientation for curve another One orientation is the combination of straight line, segmented linear, camber line, segmentation camber line or straightway and arc.
In addition, in the present invention, the curved array arrangement of electron emission unit can be both direction interval uniformity , can be that each direction interval is uniform, both direction interval is inconsistent or direction interval is uniform, another Individual direction interval is uneven, can also be that the interval of both direction is all uneven.
In addition, in the present invention, the profile of vacuum box can be cuboid or cylindrical on the whole, It can be the annulus bodily form, can also be the other structures of other relative arrangements for not influenceing electron emission unit and anode.
Embodiment
(System is constituted)
As shown in Fig. 1~Fig. 6, the distributed X-ray apparatus of external hot cathode of the invention by multiple electron emission units 1, Anode 2, vacuum box 3, high voltage power supply attachment means 4, launch control unit attachment means 5, focusing arrangement attachment means 6, vacuum Device 8 and power supply are constituted with control system 7.Multiple electron emission units 1 line up one that linear array is arranged on vacuum box 3 On the wall of side, each electron emission unit 1 is independent mutually, and the anode 2 of strip is arranged on the middle part in vacuum box 3, in linear row On column direction, anode 2 and the arranging line of electron emission unit 1 are parallel to each other, in the plumb cut of linear array, anode 2 and electricity The upper surface of sub- transmitter unit 1 forms a small angle.Electron emission unit 1 includes heat filament 101, negative electrode 102, grid 107th, insulated support 103, focusing electrode 104, focus on section 109, connection fixture 105, heater lead 106, grid lead 108, Focusing arrangement 110.High voltage power supply attachment means 4 are arranged on the side wall of vacuum box 3, and inside is connected with anode 2, and outside is can insert The form connection high-tension cable pulled out.Launch control unit attachment means 5 are by the heater lead 106 of each electron emission unit 1 Each emission controlling unit of launch control unit 703 is connected to grid lead 108.Vacuum plant 8 is arranged on vacuum box 3 Side wall on, vacuum plant 8 include vavuum pump 801 and vacuum valve 802.Power supply includes control system 701, height with control system 7 Multiple modules such as voltage source 702, launch control unit 703, focusing power supply 704, vacuum power 705, pass through power cable and control The part such as heat filament 101, grid 107 and the anode 2 of multiple electron emission units 1 of cable processed and system, vacuum plant 8 It is connected.Wherein launch control unit 703 is by multiple(It is identical with the quantity of electron emission unit 1)Identical emission controlling unit Constitute, each emission controlling unit is by negative high voltage module 70301, DC Module 70302, high voltage isolating transformer 70303, negative Biasing module 70304, positively biased die block 70305, selecting switch 70306 are constituted.
(Operation principle)
In the distributed X-ray apparatus of external hot cathode of the present invention, power supply is with control system 7 to focusing power supply 704, hair Control device 703 is penetrated to be controlled with high voltage power supply 702.The unit of launch control unit 703 is started working, negative high voltage mould Block 70301 produces the primary side that negative high voltage is output to high voltage isolating transformer 70303 so that the secondary of high voltage isolating transformer 70303 One group of parallel connected end be suspended in high pressure, i.e., DC Module 70302, negative bias die block 70304, positively biased die block 70305, selection Switch 70306 is on an identical negative high voltage, and DC Module 70302 produces a direct current being suspended on this negative high voltage Electric current is supplied to heat filament 101, and negative electrode 102 is heated to high temperature by heat filament 101(For example, 500 ~ 2000 DEG C)Emitting shape State, negative electrode 102 produces a large amount of electronics on its surface.Negative bias die block 70304 and positively biased die block 70305 produce one and hanged respectively Negative voltage gating is generally connected to grid 107 by the negative voltage and positive voltage floated on negative high voltage, selecting switch 70306.In electricity In sub- transmitter unit 1, filament 101, negative electrode 102 are in negative high voltage with grid 107, usually negative several kilovolts to negative tens Thousand is negative, and the connection of focusing electrode 104 focuses on section 109 and the side wall of vacuum box 3 is connected to by connection fixture 105, in ground connection Current potential, so, a small accelerating field is formed between grid 107 and focusing electrode 104.But, the opposing cathode of grid 107 102 also have a lower negative voltage, therefore, and the electronics that negative electrode 102 is produced can not be limited by grid 107 by grid 107 On the surface of negative electrode 102.High voltage power supply 702 makes anode 2 be in very high positive high voltage, usually positive tens kilovolts to hundreds of Kilovolt, in electron emission unit 1(Namely the side wall of vacuum box 3, normally grounded current potential)Positive big acceleration is formed between anode 2 Electric field.
In the case where needing to produce X-ray, power supply makes transmitting with control system 7 according to instruction or pre-set program The output of the selecting switch 70306 of some emission controlling unit of control device 703 switches to positive voltage by negative voltage, and Converted according to sequential each emission controlling unit being connected respectively with each electron emission unit 1 selecting switch 70306 it is defeated Go out signal.For example, at the moment 1, the output of the selecting switch 70306 of the first emission controlling unit of launch control unit 703 by Negative voltage switches to positive voltage, and in corresponding electron emission unit 11, the electric field between grid 107 and negative electrode 102 is changed into just Electric field, electronics is moved from the surface of negative electrode 102 to grid 107, is entered through aperture plate between grid 107 and focusing electrode 104 Accelerating field is obtained to be accelerated for the first time, and the nose cone shape of focusing electrode 104 makes electron beam assemble automatically in first time accelerator, The diameter of electron beam diminishes, and electron beam, which enters, to be focused on behind the inside of section 109, the focusing magnetic field applied by outside focusing arrangement 110 Effect, the diameter of electron beam further diminishes.The electron beam of minor diameter enters vacuum box by the hole at the center of connection fixture 105 Inside 3, by the big acceleration electric field acceleration between electron emission unit 11 and anode 2, energy is obtained, anode 2 is bombarded, in anode A target spot 21 is produced on 2, also, the transmitting of X-ray is produced in the position of target spot 21.At moment 2, launch control unit 703 The output of selecting switch 70306 of the second emission controlling unit positive voltage, corresponding electron emission list are switched to by negative voltage First 12 launching electronics, produce target spot 22, and produce the transmitting of X-ray in the position of target spot 22 on anode 2.At moment 3, transmitting The output of the selecting switch 70306 of 3rd emission controlling unit of control device 703 switches to positive voltage by negative voltage, corresponding The launching electronics of electron emission unit 13, produce target spot 23 on anode 2, and produce the transmitting of X-ray in the position of target spot 23, according to Secondary to analogize, then the position of target spot 24 produces the transmitting of X-ray, and then the position of target spot 25 produces the transmitting ... of X-ray, and follows Ring is reciprocal.Therefore, power supply makes each electron emission unit 1 according to scheduled timing with control system 7 using launch control unit 703 It is alternately carried out work and launching electronics beam, also, X-ray is alternately produced in the diverse location of anode 2, so that as distribution Formula X radiographic source.
In addition, the gas discharged when anode 2 is by electron beam bombardment is taken away in real time by vavuum pump 801, tieed up in vacuum box 3 High vacuum is held, is so conducive to long-time steady operation.Power supply and control system 7 except each power supply is controlled such that according to Setting program drives all parts co-ordination, while external command can be received by communication interface and man-machine interface, to being The key parameter of system is modified and set, and more new procedures and progress automatically control adjustment.
In addition, by the way that the distributed X-ray apparatus of the external hot cathode of the present invention are applied into CT equipment, so as to obtain The stability of a system and good reliability and the CT equipment for checking efficiency high.
(Effect)
The present invention is mainly to provide a kind of distributed X-ray apparatus of external hot cathode, produces and presses in a light source According to the X-ray of predefined procedure periodically shift the focus position.The electron emission unit of the present invention uses hot cathode, relative to it It design have the advantages that emission current greatly, long lifespan;Multiple electron emission units are each independently fixed on vacuum box, and can Two small-sized poles or triode gun are directly used, technology maturation, cost is low, using flexible;Using setting for the big anode of long strip type Meter, effectively alleviates the problem of anode is overheated, and is conducive to improving the power of light source;Electron emission unit can be whole with arranged in a straight line Body turns into the distributed X-ray apparatus of linear pattern, electron emission unit can also annular array, it is overall to be penetrated as ring-like distributed X Line apparatus, using flexible;By the design of the design of focusing electrode, and outside focusing arrangement, it is very small that electron beam can be realization Focus.Relatively other distributed X-ray source equipment, electric current of the present invention is big, and target spot is small, and target position is evenly distributed and repeatability Good, power output is high, and simple in construction, easy to control, cost is low.
In addition, the distributed X-ray source of the external hot cathode of the present invention is applied into CT equipment, without mobile light source with regard to energy Multiple visual angles are produced, therefore link motion can be omitted, is conducive to simplifying structure, improves the stability of a system, reliability, improve inspection Look into efficiency.
As described above, the present application is illustrated, but be not restricted to that this, it is understood that can be in the present invention Various combinations and various changes are carried out to above-mentioned embodiment in the range of objective.

Claims (13)

1. a kind of X-ray apparatus, it is characterised in that possess:
Vacuum box, surrounding is sealed and internal for high vacuum;
Multiple electron emission units, each mutual independence of electron emission unit and line up linear array installed in the vacuum box On the wall of side;
Anode, the centre position inside the vacuum box, also, in the longitudinal direction with the electron emission unit Orientation is parallel and the mounting plane with the electron emission unit forms the angle of predetermined angular in the direction of the width;And
Power supply and control system, with the high voltage power supply being connected with the anode, each with the multiple electron emission unit The launch control unit of individual connection, the control system for being controlled to each power supply,
The electron emission unit has:Heat filament;The negative electrode being connected with the heat filament;From the two of the heat filament Hold the heater lead drawn;Insulated support, surrounds the heat filament and the negative electrode;Focusing electrode, with positioned at described the moon The mode of the top of pole is configured on the top of the insulated support;Connection fixture, is configured in the top of the focusing electrode, with The box wall of the vacuum box is tightly connected,
The heater lead is connected through the insulated support with the launch control unit.
2. X-ray apparatus as claimed in claim 1, it is characterised in that
Also have:High voltage power supply attachment means, by the anode and the cable connection of the high voltage power supply, installed in the vacuum The side wall of one end of the close anode of box;Launch control unit attachment means, for connecting the heat filament and described Launch control unit;Vacuum power, is included in the power supply and control system;Vacuum plant, installed in the vacuum box On the wall of side, it is operated using the vacuum power, maintains the high vacuum in the vacuum box.
3. X-ray apparatus as claimed in claim 1, it is characterised in that
The electron emission unit also has:Grid, between the negative electrode and the focusing electrode and close to negative electrode;Grid Pole lead, is connected with the grid, through the insulated support, is connected with the launch control unit.
4. X-ray apparatus as claimed in claim 1, it is characterised in that
The electron emission unit also has:Section is focused on, between the focusing electrode and the connection fixture;Focus on dress Put, configured in the way of surrounding the focusing section.
5. X-ray apparatus as claimed in claim 4, it is characterised in that
Also have:Focusing power supply, is included in the power supply and control system;Focusing arrangement attachment means, it is described for connecting Focusing arrangement and the focusing power supply.
6. X-ray apparatus as claimed in claim 1, it is characterised in that
The electron emission unit is divided to two rows to be arranged on two relative side walls of the vacuum box.
7. X-ray apparatus as claimed in claim 1, it is characterised in that
The vacuum box is made up of glass or ceramics.
8. X-ray apparatus as claimed in claim 1, it is characterised in that
The vacuum box is made up of metal material.
9. the X-ray apparatus as described in any one of claim 1~8, it is characterised in that
The multiple electron emission unit is arranged in a straight line shape or segmented linear shape.
10. the X-ray apparatus as described in any one of claim 1~8, it is characterised in that
The multiple electron emission unit arrangement is in the arc-shaped or is segmented arc line shaped.
11. the X-ray apparatus as described in any one of claim 1~8, it is characterised in that
The arrangement pitch of the multiple electron emission unit is uniform.
12. the X-ray apparatus as described in any one of claim 1~8, it is characterised in that
The arrangement pitch of the multiple electron emission unit is heterogeneous.
13. a kind of CT equipment, it is characterised in that
Used x-ray source is the X-ray apparatus described in any one of claim 1~12.
CN201310426917.3A 2013-09-18 2013-09-18 X-ray apparatus and the CT equipment with the X-ray apparatus Active CN104465279B (en)

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CN201310600023.1A CN104470172B (en) 2013-09-18 2013-09-18 X-ray apparatus and the CT equipment with the X-ray apparatus
CN201310426917.3A CN104465279B (en) 2013-09-18 2013-09-18 X-ray apparatus and the CT equipment with the X-ray apparatus
CN201310600370.4A CN104470173B (en) 2013-09-18 2013-09-18 X-ray apparatus and the CT equipment with the X-ray apparatus
RU2016114671A RU2655916C2 (en) 2013-09-18 2014-09-17 X-ray device and ct equipment having same
PCT/CN2014/086743 WO2015039603A1 (en) 2013-09-18 2014-09-17 X-ray device and ct equipment having same
KR1020167008295A KR101855931B1 (en) 2013-09-18 2014-09-17 X-ray device and ct equipment having same
JP2016543304A JP6526014B2 (en) 2013-09-18 2014-09-17 X-ray apparatus and CT device having the X-ray apparatus
ES14185376T ES2749725T3 (en) 2013-09-18 2014-09-18 An X-ray machine and a CT device that has the same
EP14185376.2A EP2858087B1 (en) 2013-09-18 2014-09-18 A X-Ray apparatus and a CT device having the same
PL14185376T PL2858087T3 (en) 2013-09-18 2014-09-18 A X-Ray apparatus and a CT device having the same
US14/490,526 US9653251B2 (en) 2013-09-18 2014-09-18 X-ray apparatus and a CT device having the same

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016215375B4 (en) * 2016-08-17 2023-01-26 Siemens Healthcare Gmbh Thermionic emission device
CN109589127B (en) * 2018-10-29 2021-02-26 深圳先进技术研究院 Electronic computer tomography front-end equipment, system, method and storage medium
CN109860011B (en) * 2018-12-06 2020-11-06 姚智伟 X-ray tube integrated with ion pump
CN109473337A (en) * 2018-12-28 2019-03-15 同方威视技术股份有限公司 A kind of external grid-control formula hot cathode array electronic rifle
CN109819573A (en) * 2019-03-08 2019-05-28 北京中百源国际科技创新研究有限公司 Lasing ion accelerator and the medical laser ion treatment device for applying it
CN110793981B (en) * 2019-10-30 2022-03-22 新鸿电子有限公司 Time-sharing multiplexing control device and system
CN111338284B (en) * 2020-04-17 2021-03-19 中国海洋石油集团有限公司 On-site control box
CN114068267B (en) 2020-08-04 2023-03-28 清华大学 Deflection electrode assembly, X-ray source and X-ray imaging system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203590580U (en) * 2013-09-18 2014-05-07 清华大学 X-ray device and CT equipment having same

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5294653B2 (en) * 2008-02-28 2013-09-18 キヤノン株式会社 Multi X-ray generator and X-ray imaging apparatus
DE102009017649B4 (en) * 2009-04-16 2015-04-09 Siemens Aktiengesellschaft Emission current control for X-ray tubes
WO2011119629A1 (en) * 2010-03-22 2011-09-29 Xinray Systems Llc Multibeam x-ray source with intelligent electronic control systems and related methods
DE102010027871B4 (en) * 2010-04-16 2013-11-21 Siemens Aktiengesellschaft Ring cathode segment with nanostructure as electron emitter
DE102011076912B4 (en) * 2011-06-03 2015-08-20 Siemens Aktiengesellschaft X-ray device comprising a multi-focus x-ray tube
CN102938359B (en) * 2012-10-31 2015-04-08 丹东奥龙射线仪器集团有限公司 Electron beam focusing device for X-ray tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203590580U (en) * 2013-09-18 2014-05-07 清华大学 X-ray device and CT equipment having same

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