CN202092776U - Pulse laser energy measuring device - Google Patents
Pulse laser energy measuring device Download PDFInfo
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- CN202092776U CN202092776U CN2011201829625U CN201120182962U CN202092776U CN 202092776 U CN202092776 U CN 202092776U CN 2011201829625 U CN2011201829625 U CN 2011201829625U CN 201120182962 U CN201120182962 U CN 201120182962U CN 202092776 U CN202092776 U CN 202092776U
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Abstract
The present utility model discloses a pulse laser energy measuring device. The device comprises a photo-detector, an integrating capacitor, a peak value maintaining resistor, an operational amplifier and a balance resistor. The integrating capacitor is connected with the photo-detector in series and used for accumulating charges of current signals outputted by the photo-detector and outputting pulse voltage signals. The peak value maintaining resistor is connected with the integrating capacitor in parallel, the first input end of the operational amplifier is connected with the output end of the integrating capacitor, and the balance resistor is connected with the second input end of the operational amplifier. In the measuring device, the integrating capacitor is adopted to accumulate the charges of the pulse laser current signals and realize direct integration of current, the conversion of the pulse laser signals into wide pulse voltage signals is realized, the integrating process is without complex circuits, the design is clever, the conversion links are few, thus the reliability is high, collected pulse voltage peak values are more precise, and more precise single pulse laser energy can be obtained through conversion.
Description
Technical field
The utility model relates to the measurement of laser energy technology, particularly a kind of pulsed laser energy measurement mechanism.
Background technology
Pulse laser comprises the laser energy pulse of series of discrete, is difficult to directly measure the laser energy of individual pulse for the pulse laser of KHz repetition frequency, nanosecond.
Existing pulsed laser energy measurement mechanism, adopt measurement mechanism Laser Measurement output average power and pulsed frequency respectively, then by formula E=P average * T (wherein, E is that pulse energy, P average out to average power, T are the recurrence interval) calculates single pulse energy measuring device and measuring method.Existing measurement mechanism needs many testing tool composition measuring apparatus, and measurement mechanism is numerous and diverse, and error component is many, when measuring the pulse laser of high repetition frequency, burst pulse, is difficult to guarantee measuring accuracy.
Also carry out the method that integration is measured pulsed laser energy in addition by the integrating circuit that adopts operational amplifier to form, this method requires high to operational amplifier, be difficult to the balance quiescent point when switching between maintenance of circuit peak value and the cleared condition, cause measuring error big, also be difficult to accurately measure the monopulse laser energy of high repetition frequency, narrow-pulse laser.
The utility model content
The utility model provides a kind of pulsed laser energy measurement mechanism, to improve the precision of measuring the monopulse laser energy.
The pulsed laser energy measurement mechanism that the utility model provides comprises:
Photo-detector is used for converting pulsed laser signal to current signal;
Integrating capacitor is connected with described photo-detector, is used for accumulating the electric charge and the voltage pulse output signal of the current signal of photo-detector output;
Peak value keeps resistance, and is in parallel with described integrating capacitor, is used for the peak value of described pulse voltage signal is kept setting-up time;
Operational amplifier, the first input end of described operational amplifier links to each other with the output terminal of described integrating capacitor, is used for peak value retention time and the enlargement factor output respective width of setting and the pulse voltage signal of amplitude according to described pulse voltage signal;
Balance resistance links to each other with second input end of described operational amplifier, is used to make the voltage of the first end input end of described operational amplifier and the voltage of second input end to keep static balancing.
Aforesaid pulsed laser energy measurement mechanism, wherein, described balance resistance keeps the resistance of resistance to equate with peak value.
Aforesaid pulsed laser energy measurement mechanism, wherein, described operational amplifier is an instrumentation amplifier.
Aforesaid pulsed laser energy measurement mechanism wherein, also comprises: the first zero clearing control module and the second zero clearing control module,
The described first zero clearing control module is in parallel with described integrating capacitor, is used under the state that receives the zero clearing control signal described integrating capacitor being discharged to remove whole electric charges of integrating capacitor;
The described second zero clearing control module is in parallel with described first balance resistance, is used for ground connection under the state that receives the zero clearing control signal.
Aforesaid pulsed laser energy measurement mechanism, wherein, the described first zero clearing control module comprises first resistance and first switch, described first resistance and first switch series connect ground; The second zero clearing control module comprises second resistance and second switch, described second resistance and second switch series connection ground connection.
Aforesaid pulsed laser energy measurement mechanism, wherein, the resistance of described first resistance and second resistance equates, and described first switch and second switch are electronic switch.
Aforesaid pulsed laser energy measurement mechanism wherein, also comprises:
Analog-to-digital conversion module is used for converting the described respective width of operational amplifier output and the pulse voltage signal of amplitude to digital signal;
The s operation control module is used for obtaining the pulsed laser energy value according to described digital signal acquiring crest value of impulse voltage and according to the setting scheme, and gathers and to finish back transmission zero clearing control signal;
Display module is used to show described pulsed laser energy value.
The pulsed laser energy measurement mechanism that the utility model provides, accumulate the direct integral of realization by the electric charge in the integrating capacitor paired pulses laser current signal to electric current, realize the conversion of pulsed laser signal to the broad pulse voltage signal, this integral process does not need to be provided with complicated circuit, design ingeniously, conversion links is few, so the reliability height, make the crest value of impulse voltage that collects more accurate, by obtaining accurate more monopulse laser energy after converting.
Description of drawings
The pulsed laser energy measuring device part circuit theory diagrams that Fig. 1 is provided for the utility model embodiment;
The pulsed laser energy measuring device part circuit theory diagrams that Fig. 2 is provided for another embodiment of the utility model;
The block scheme of the pulsed laser energy measurement mechanism that Fig. 3 is provided for the another embodiment of the utility model;
The process flow diagram of the pulsed laser energy measuring method that Fig. 4 is provided for the utility model embodiment.
Reference numeral:
The G-photo-detector; Electric capacity in the C1-photo-detector; The C2-integrating capacitor;
The R1-peak value keeps resistance; The R2-balance resistance; The A-operational amplifier;
R3-first resistance; R4-second resistance; Q1-first switch;
The Q2-second switch; The 11-analog-to-digital conversion module; 12-s operation control module;
The 13-display module.
Embodiment
For the purpose, technical scheme and the advantage that make the utility model embodiment clearer, below in conjunction with the accompanying drawing among the utility model embodiment, technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
The utility model embodiment provides a kind of pulsed laser energy measurement mechanism, is used for converting pulsed laser signal to pulse voltage signal, obtains pulsed laser energy to utilize this pulse voltage signal.
The partial circuit schematic diagram of the pulsed laser energy measurement mechanism that Fig. 1 is provided for the utility model embodiment, as shown in Figure 1, this pulsed laser energy measurement mechanism comprises that photo-detector G, integrating capacitor C2, peak value keep resistance R 1, operational amplifier A and balance resistance R 2.
Convert pulsed laser signal to current signal by photo-detector, photodetector is used to receive the pulsed laser signal that the measured laser light source sends, and converts current signal to.
Integrating capacitor is connected with photo-detector, carries out integration and voltage pulse output signal with the current signal with the pulse laser of photo-detector output.
Size for the capacitance of integrating capacitor is selected according to the peak value retention time with the time comprehensive consideration that integrating capacitor is discharged required, because long more required capacitance of peak value retention time is big more, and capacitance is long more big more discharge time, therefore should two comprehensively above-mentioned factors select, promptly guarantee to make under the peak value flat-top to fall within allowed band, and the discharge time that makes integrating capacitor within zone of reasonableness, do not influence the collection of next pulse.
Peak value keeps resistance R 1 in parallel with integrating capacitor C2, is used for the peak value of pulse voltage signal is kept setting-up time.
Because the pulse width of pulse voltage is very narrow usually, therefore, the peak value of pulse voltage is difficult to gather, need keep resistance that the peak value of pulse voltage is kept setting-up time by peak value, the pulse width broadening that makes pulse voltage is to certain width, voltage signal with the output pulse width broad, after this can be by the peak value of harvester acquisition pulse voltage, therefore this setting-up time is for exporting this pulse voltage signal certainly to finishing the interval time that crest value of impulse voltage is gathered, relevant with the processing speed of harvester, be generally several milliseconds.
Can keep the size of resistance to keep setting-up time with the peak value with pulse voltage by repetition test and the suitable peak value of calculating and setting, the pulse width broadening that makes pulse voltage be to certain width.
The first input end 1 of operational amplifier A links to each other with the output terminal of integrating capacitor C2, is used for peak value retention time and the enlargement factor output respective width of setting and the pulse voltage signal of amplitude according to pulse voltage signal.Can be by the output terminal 3 voltage pulse output signals of operational amplifier A.
Behind the peak value maintenance certain hour of peak value maintenance resistance with pulse voltage signal, the time that operational amplifier keeps according to peak value is exported the pulse voltage signal of respective width, and the peak value retention time is long more, and the pulse width of pulse voltage signal is wide more.And suitable enlargement factor is set, amplifies, be convenient to follow-up voltage peak be gathered with the amplitude of pulse voltage signal.
Can select the operational amplifier of suitable types as required, and setting enlargement factor, the enlargement factor of this setting can be ten times, 100 times etc., is generally integral multiple, and the setting of this enlargement factor obtains through repetition test, relevant with the intensity of pulse laser, usually the intensity of pulse laser is big more, and the peak value of pulse voltage signal is big more, and can set less enlargement factor this moment, be not limited to the qualification of this enforcement, can set according to actual needs.
This operational amplifier preferably adopts instrumentation amplifier, instrumentation amplifier has high input impedance, the back constitutes the parallel resistance that keeps resistance with peak value because instrumentation amplifier links to each other with peak value maintenance resistance, therefore for preventing releasing of electric charge on the integrating capacitor, adopt the instrumentation amplifier of high input impedance, simultaneously, because instrumentation amplifier has high input impedance, can realize the isolation of input side and outgoing side circuit, avoid input side and outgoing side circuit to interfere with each other.
Balance resistance R2 links to each other with second input end 2 of operational amplifier A, be used to make the voltage of first input end 1 of operational amplifier A and the voltage of second input end 2 to keep static balancing, just guaranteeing does not have under the situation of input at operational amplification circuit, and quiescent output voltage remains on zero point.
Can adopt mode as shown in Figure 1, ground connection after peak value kept resistance R 1 and integrating capacitor C2 is in parallel, the end of balance resistance R2 links to each other with second input end 2 of operational amplifier, other end ground connection, therefore, the voltage of the first input end 1 of operational amplifier A is peak value and keeps the voltage of resistance R 1 with respect to ground, the voltage of second input end 2 of operational amplifier A is the voltage of balance resistance R2 with respect to ground, the resistance of balance resistance R2 can be arranged to keep the approaching resistance value of resistance value of resistance R 1, can make the voltage of operational amplifier two input ends keep static balancing with peak value.
Also a voltage reference points can be set, keep an end of resistance and an end of balance resistance to link to each other with this voltage reference points respectively peak value, and make peak value keep the resistance of the resistance of resistance and balance resistance approaching, also can make the operational amplifier first input end voltage and second input terminal voltage keep static balancing, be not limited to the connected mode that the present embodiment diagram provides.
Introduce the course of work of this pulsed laser energy measurement mechanism below.
Photodetector is positioned at and is used to receive the pulsed laser signal that the measured laser light source sends foremost, and convert current signal to, the current signal of output is transmitted in integrating capacitor, owing to comprise a large amount of electric charges in this current signal, by integrating capacitor this electric charge is accumulated, just electric current is carried out integration, with electric charge accumulation back voltage pulse output signal, keep resistance that the peak value in the pulse voltage signal of integrating capacitor output is kept setting-up time by peak value, the peak value broadening that makes pulse voltage is to certain width, and then the pulse voltage signal by operational amplifier output broad pulse.
Can gather the peak value of this pulse voltage by harvester after exporting this pulse voltage signal, and then obtain the pulsed laser energy value by conversion.
Pulsed laser energy value and crest value of impulse voltage are proportional, and the process of its derivation is as follows:
Laser radiation produces pulsed laser signal to photo-detector, by photodetector pulsed laser signal is converted to current signal.
The pass of electric current and laser power is I=K1*P, and wherein P is a laser power, and K1 is for being converted to pulsed laser signal the conversion coefficient of current signal, the conversion coefficient of photoelectric tube in the photodetection just, and I is an electric current.
Integration to electric current is: ∫ Idt=K1 ∫ Pdt,
Be Q:Q=∫ Idt owing to electric charge again,
Laser energy is E:E=∫ Pdt,
Thus, draw Q=K1E.
Because integrating capacitor is connected with photodetector, the electric capacity in integrating capacitor and the photo-detector constitutes series relationship,
Therefore total capacitance is C:
Total voltage is U:
Voltage U2 is on the integrating capacitor:
Can draw by above formula:
Wherein, C10 is the capacitance of electric capacity in the photodetector, and C20 is the capacitance of integrating capacitor, and U1 is the voltage on the electric capacity in the photodetector, and U2 is the voltage on the integrating capacitor.
The enlargement factor of operational amplifier is K2, so last output voltage U
0For:
The energy of pulse laser is E:
For pulse laser,, be generally microsecond level even nanosecond, so the crest voltage of pulse can be considered as output voltage U because the pulsewidth of pulse signal is very narrow
0, and pulse energy value is directly proportional with crest value of impulse voltage.
In sum, can obtain pulsed laser energy value E as long as obtain the peak value of voltage pulse output through simple conversion, because this crest value of impulse voltage is the voltage peak of monopulse laser, this energy value that obtains is the monopulse laser energy.
As shown from the above technical solution, the pulsed laser energy measurement mechanism that the utility model provides, accumulate the direct integral of realization by the electric charge in the integrating capacitor paired pulses laser current signal to electric current, realize the conversion of pulsed laser signal to the broad pulse voltage signal, this integral process does not need to be provided with complicated circuit, design ingenious, conversion links is few, so reliability height, make the crest value of impulse voltage that collects more accurate, by obtaining accurate more monopulse laser energy after converting.
And the photoelectric sensor that this measurement mechanism adopted is not subjected to the restriction of response speed, be specially adapted to convert the pulse signal of nanosecond burst pulse, kHz high repeat frequency pulsed laser to the broad pulse voltage signal, and and then acquisition monopulse laser energy.
On the basis of the foregoing description, further, this pulsed laser energy measurement mechanism also comprises the first zero clearing control module and the second zero clearing control module.
The first zero clearing control module is in parallel with integrating capacitor, is used under the state that receives the zero clearing control signal integrating capacitor being discharged to remove whole electric charges of integrating capacitor.
The second zero clearing control module is in parallel with balance resistance, is used for ground connection under the state that receives the zero clearing control signal.
By integrating capacitor the electric charge in the pulse current is accumulated the back and accumulated a large amount of electric charges in the integrating capacitor, electric charge for accumulation next pulse laser signal, need integrating capacitor is discharged, with with the electric charge full scale clearance in the integrating capacitor, can realize by the first zero clearing control module this moment, the zero clearing control module is arranged to cleared condition, the electric charge of integrating capacitor is all released, to enter the standby condition of next pulse laser measurement.
After the first zero clearing control module receives the zero clearing control signal, integrating capacitor is discharged, after discharge is finished, it is zero that peak value keeps the voltage at resistance two ends, this moment, the first input end voltage of operational amplifier was zero, for voltage and the first input end voltage that makes operational amplifier second input end keeps balance, second dump block ground connection after receiving the zero clearing control signal is set, the voltage of operational amplifier second input end also is zero, makes the voltage of operational amplifier two input ends keep static balancing.
On the basis of technique scheme, will describe in detail to the technical scheme that the utility model embodiment provides by preferred version below.
The pulsed laser energy measuring device part circuit theory diagrams that Fig. 2 is provided for another embodiment of the utility model, as shown in Figure 2, integrating capacitor C2 connects with capacitor C 1 in the photo-detector in this measurement mechanism, and operational amplifier comprises first input end 1, second input end 2 and output terminal 3 at least.
Peak value keeps after resistance R 1 and the integrating capacitor C2 parallel connection wherein, and an end links to each other other end ground connection with the first input end 1 of operational amplifier A; The end of balance resistance R2 links to each other other end ground connection with second input end 2 of operational amplifier A; Output terminal 3 voltage pulse output signals by operational amplifier A.
The first zero clearing control module comprises first resistance R 3 and the first switch Q1, first resistance R 3 and first switch Q1 series connection ground connection; The second zero clearing control module comprises second resistance and second switch Q2, second resistance R 4 and second switch series connection ground connection.
Balance resistance R2 and peak value keep the resistance of resistance R 1 to equate, and the resistance of first resistance R 3 and second resistance R 4 is equal, and first switch and second switch are electronic switch.
First electronic switch and second electronic switch move simultaneously according to the zero clearing control signal that receives, these two electronics move after opening the light and receiving the zero clearing control signal simultaneously, realize turn-offing fast, it is closed simultaneously to receive after the zero clearing control signal first electronic switch and second electronic switch, conducting is connected with ground, and being connected through automatic cutout behind the certain hour and ground.
In actual applications, the resistance of first resistance R 3 and second resistance R 4 is far smaller than the resistance that peak value keeps resistance R 1 and balance resistance R 2, therefore, after the first switch Q1 closure in first resistance R 3, first resistance R, 3 ground connection, also by first resistance R, 3 ground connection, C2's electric charge among the integrating capacitor C2 discharges to integrating capacitor, and electric charge is all released.Because the second switch Q2 and the first switch Q1 are closed simultaneously, second resistance R, 4 ground connection, at this moment, the first input end 1 of operational amplifier A and second input end 2 be ground connection simultaneously, and the both end voltage difference is zero, and two input terminal voltages of operational amplifier keep static balancing.
In the present embodiment, keep resistance and balance resistance by being symmetrical arranged peak value, and be symmetrical arranged first resistance and second resistance, make the input terminal voltage of operational amplifier keep static balancing.
The block scheme of the pulsed laser energy measurement mechanism that Fig. 3 is provided for the another embodiment of the utility model, as shown in Figure 3, on the basis of the foregoing description, further, this measurement mechanism also comprises analog-to-digital conversion module 11, s operation control module 12 and display module 13.
Analog-to-digital conversion module 11 is used for converting the pulse voltage signal of the setting width of operational amplifier output to digital signal.
S operation control module 12 is used for obtaining the pulsed laser energy value according to the digital signal acquiring crest value of impulse voltage and according to the setting scheme, and gathers and to finish the back and send the zero clearing control signal with the whole electric charges in the control dump block removing integrating capacitor.
The s operation control module is according to the peak value of digital signal acquiring pulse voltage, by setting the computing formula of scheme
Carry out computing, thereby obtain the pulsed laser energy value.After having gathered the peak value of this subpulse voltage, send the zero clearing control signal, by the whole electric charges in the zero clearing control signal control dump block removing integrating capacitor, this zero clearing control signal is generally pulse signal, dump block is removed the whole electric charges in the integrating capacitor under the control of pulse signal, can certainly be other forms of control signal, be not limited to the mode of present embodiment.
Analog-to-digital conversion module in the foregoing description can adopt various analog to digital conversion circuits to realize, the s operation control module can be passed through chip microcontroller, perhaps realize by the processor that comprises the dependent instruction program, display module can be realized by various display terminals, for example, show by liquid crystal or charactron etc.
The course of work of the pulsed laser energy measurement mechanism that present embodiment provides is:
Receive the pulsed laser signal that the measured laser light source sends by photodetector, and convert current signal to, the current signal of output is transmitted in integrating capacitor, by integrating capacitor the electric charge in this electric current is accumulated back voltage pulse output signal, keep resistance that the peak value in the pulse voltage signal of integrating capacitor output is kept setting-up time by peak value, the peak value broadening that makes pulse voltage is to certain width, and make two input terminal voltage balances of operational amplifier, and then the pulse voltage signal by operational amplifier output broad pulse by balance resistance.Pulse voltage signal by operational amplifier output is a simulating signal, need this analog signal conversion to be become digital signal by analog-to-digital conversion module, this pulse voltage signal of output is sampled by the s operation control module, the acquisition pulse voltage peak, and obtaining monopulse laser energy value by the s operation control module, the s operation control module sends the monopulse laser energy value that obtains to display module and shows.After the s operation control module was finished the collection of pulse voltage signal, output zero clearing control signal control zero clearing control module was discharged to integrating capacitor, removes the whole electric charges in the integrating capacitor, the measurement that has entered next pulse laser.
The pulsed laser energy measurement mechanism that present embodiment provides, convert digital signal to by pulse voltage signal with output, and the peak value of acquisition pulse voltage, after computing, obtain monopulse laser energy value and show, can clearly observe the monopulse laser energy.
The utility model embodiment also provides a kind of pulsed laser energy measuring method, this measuring method is the manner of execution of the pulsed laser energy measurement mechanism that provides of the utility model embodiment, matches with this pulsed laser energy measurement mechanism course of work with output broad pulse voltage signal.
This pulsed laser energy measuring method comprises:
Step 1, employing photo-detector convert pulsed laser signal to current signal.
Electric charge in the current signal of the pulse laser of step 2, employing integrating capacitor accumulation output, and voltage pulse output signal, and by the peak value maintenance setting-up time of peak value maintenance resistance with pulse voltage signal.
The process flow diagram of the pulsed laser energy measuring method that Fig. 4 is provided for the utility model embodiment, as shown in Figure 4, on the basis of the foregoing description, further, the pulsed laser energy measurement mechanism also comprises the first zero clearing control module and the second zero clearing control module, also comprises after step 3:
Step 4, employing analog-to-digital conversion module convert the pulse voltage signal of respective width and amplitude to digital signal.
This setting scheme is:
Wherein, E is the pulsed laser energy value, and C20 is the capacitance of integrating capacitor, U
0Be the crest value of impulse voltage of gathering, K1 is for converting pulsed laser signal to the conversion coefficient of current signal, and K2 is that the enlargement factor of operational amplifier is.
Step 6, show the pulsed laser energy value by display module.
The pulsed laser energy measuring method that the utility model provides, accumulate the direct integral of realization by the electric charge in the paired pulses laser current signal to electric current, realize of the conversion of pulse laser current signal to voltage signal, this integral process does not need to be provided with complicated circuit, conversion links is few, therefore the reliability height makes the crest value of impulse voltage that collects more accurate, by obtaining accurate more monopulse laser energy after converting.
It should be noted that at last: above embodiment only in order to the explanation the technical solution of the utility model, is not intended to limit; Although the utility model is had been described in detail with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of each embodiment technical scheme of the utility model.
Claims (7)
1. a pulsed laser energy measurement mechanism is characterized in that, comprising:
Photo-detector is used for converting pulsed laser signal to current signal;
Integrating capacitor is connected with described photo-detector, is used for accumulating the electric charge and the voltage pulse output signal of the current signal of photo-detector output;
Peak value keeps resistance, and is in parallel with described integrating capacitor, is used for the peak value of described pulse voltage signal is kept setting-up time;
Operational amplifier, the first input end of described operational amplifier links to each other with the output terminal of described integrating capacitor, is used for peak value retention time and the enlargement factor output respective width of setting and the pulse voltage signal of amplitude according to described pulse voltage signal;
Balance resistance links to each other with second input end of described operational amplifier, is used to make the voltage of the first end input end of described operational amplifier and the voltage of second input end to keep static balancing.
2. pulsed laser energy measurement mechanism according to claim 1 is characterized in that:
Described balance resistance keeps the resistance of resistance to equate with peak value.
3. pulsed laser energy measurement mechanism according to claim 1 and 2 is characterized in that:
Described operational amplifier is an instrumentation amplifier.
4. pulsed laser energy measurement mechanism according to claim 1 and 2 is characterized in that, also comprises: the first zero clearing control module and the second zero clearing control module,
The described first zero clearing control module is in parallel with described integrating capacitor, is used under the state that receives the zero clearing control signal described integrating capacitor being discharged to remove whole electric charges of integrating capacitor;
The described second zero clearing control module is in parallel with described first balance resistance, is used for ground connection under the state that receives the zero clearing control signal.
5. pulsed laser energy measurement mechanism according to claim 4 is characterized in that, the described first zero clearing control module comprises first resistance and first switch, and described first resistance and first switch series connect ground; The second zero clearing control module comprises second resistance and second switch, described second resistance and second switch series connection ground connection.
6. pulsed laser energy measurement mechanism according to claim 5 is characterized in that,
The resistance of described first resistance and second resistance equates, and described first switch and second switch are electronic switch.
7. pulsed laser energy measurement mechanism according to claim 1 and 2 is characterized in that, also comprises:
Analog-to-digital conversion module is used for converting the described respective width of operational amplifier output and the pulse voltage signal of amplitude to digital signal;
The s operation control module is used for obtaining the pulsed laser energy value according to described digital signal acquiring crest value of impulse voltage and according to the setting scheme, and gathers and to finish back transmission zero clearing control signal;
Display module is used to show described pulsed laser energy value.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809425A (en) * | 2011-06-01 | 2012-12-05 | 北京光电技术研究所 | Pulse laser energy measuring device and pulse laser energy measuring method |
| CN104458017A (en) * | 2014-12-09 | 2015-03-25 | 中国科学技术大学 | Measurement device and method of high-frequency narrow-pulse energy |
| RU170268U1 (en) * | 2016-08-04 | 2017-04-19 | федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский национальный исследовательский университет информационных технологий, механики и оптики" (Университет ИТМО) | Device for measuring the pulse energy of the ultraviolet laser radiation |
| CN108513618A (en) * | 2017-03-29 | 2018-09-07 | 深圳市大疆创新科技有限公司 | Pulse information measurement method and relevant apparatus, mobile platform |
| CN110262195A (en) * | 2019-07-11 | 2019-09-20 | 北京科益虹源光电技术有限公司 | A kind of energy detection circuit for excimer laser in 193nm litho machine |
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2011
- 2011-06-01 CN CN2011201829625U patent/CN202092776U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809425A (en) * | 2011-06-01 | 2012-12-05 | 北京光电技术研究所 | Pulse laser energy measuring device and pulse laser energy measuring method |
| CN102809425B (en) * | 2011-06-01 | 2016-01-20 | 北京光电技术研究所 | Pulse laser energy measuring device and pulsed laser energy measuring method |
| CN104458017A (en) * | 2014-12-09 | 2015-03-25 | 中国科学技术大学 | Measurement device and method of high-frequency narrow-pulse energy |
| CN104458017B (en) * | 2014-12-09 | 2018-04-10 | 中国科学技术大学 | A kind of measurement apparatus and method of high-frequency narrow-pulse energy |
| RU170268U1 (en) * | 2016-08-04 | 2017-04-19 | федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский национальный исследовательский университет информационных технологий, механики и оптики" (Университет ИТМО) | Device for measuring the pulse energy of the ultraviolet laser radiation |
| CN108513618A (en) * | 2017-03-29 | 2018-09-07 | 深圳市大疆创新科技有限公司 | Pulse information measurement method and relevant apparatus, mobile platform |
| CN108513618B (en) * | 2017-03-29 | 2022-06-21 | 深圳市大疆创新科技有限公司 | Pulse information measuring method, related device and mobile platform |
| CN110262195A (en) * | 2019-07-11 | 2019-09-20 | 北京科益虹源光电技术有限公司 | A kind of energy detection circuit for excimer laser in 193nm litho machine |
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