CN202030857U - Combined crucible for monocrystal pulling furnace - Google Patents
Combined crucible for monocrystal pulling furnace Download PDFInfo
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- CN202030857U CN202030857U CN2010206912060U CN201020691206U CN202030857U CN 202030857 U CN202030857 U CN 202030857U CN 2010206912060 U CN2010206912060 U CN 2010206912060U CN 201020691206 U CN201020691206 U CN 201020691206U CN 202030857 U CN202030857 U CN 202030857U
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- crucible
- cylindrical shell
- base
- crystal growing
- czochralski crystal
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Abstract
The utility model discloses a combined crucible for a monocrystal pulling furnace, and relates to a combined crucible for supporting a quartz crucible. The combined crucible comprises a crucible supporter (1) and a crucible body arranged at the upper part of the crucible supporter (1) and matched with the crucible supporter (1). The combined crucible is characterized in that the crucible body comprises an upper cylindrical barrel body (3) made of carbon or a carbon composite material, and a bowl-shaped graphite lower base (2) matched with the lower end of the barrel body (3); and the base (2) is circumferentially divided into at least two sections. The crucible body adopts the split structure, and the barrel body and the base are made of different materials, so that the crucible has the advantages of high strength and long service life; moreover, the processing is simple, and materials and the cost are saved.
Description
Technical field
The utility model relates to the crucible that a kind of czochralski crystal growing furnace is used, particularly a kind of combination crucible that is used for the support quartz crucible.
Background technology
At present, in the production process of semi-conductor and sun power industry silicon single crystal, more employing be the vertical pulling method production technique, the equipment that it adopted is czochralski crystal growing furnace.When utilizing single crystal growing furnace pulling monocrystal silicon rod, need be heated to the silicon material and make its fusing, crystal pulling moulding then more than 1420 ℃.During drawing, the silicon material is to be contained in the fusing of high-purity silica pot internal heating, because quartzy in deliquescing more than 1100 ℃, so generally adopt plumbago crucible to come support in the outside of quartz crucible, simultaneously also because the silicon material contacts with graphite and can react, so can not directly use plumbago crucible carrying silicon material.For the thermal expansion that prevents the silicon material makes its cracking, the plumbago crucible multi-processing becomes the form of two lobes or three lobes, so claim many lobes crucible; Many lobes crucible below uses the crucible holder to hold.For proof strength, many lobes crucible and crucible holder adopt isotropic graphite to make usually.The subject matter that the crucible of this kind structure in use exists: the one,, many lobes crucible top is subjected to structural limitations, thickness can not do very big, adopts graphite material, intensity difference, ftracture easily, influence the work-ing life of crucible, simultaneously, the multi-clove type crucible adopts column material all in one piece (also having part to adopt the bowl-type material) to process usually, the processing consumptive material is many, has increased production cost; The 2nd,, owing to adopted the multi-petal shape formula, between every lobe seam is arranged, seam crossing is subjected to erosion, the loss of SiO2 and Si steam easily, though low-purity graphite paper (98%～99%) is laid at seam crossing by the producer that has, but because basic metal is more in the low-purity graphite paper, accelerated erosive speed on the contrary, pot life is short.
In recent years, the carbon/carbon composite crucible occurred and replaced plumbago crucible, applied in the production of single crystal growing furnace pulling monocrystal silicon rod.The strength ratio isotropic graphite intensity of carbon/carbon composite is high more than 2.5 times, therefore the work-ing life that can improve crucible greatly.But the carbon/carbon composite crucible is imitative plumbago crucible profile to be produced, and complex-shaped manufacture difficulty is big, and because of the cost of carbon/carbon composite own is just high, crucible manufacturing cost height is difficult to obtain a large amount of application that can realize industrialization.
Therefore, how to improve work-ing life of crucible and reduce production costs and become the direction that the technician makes great efforts to study.
The utility model content
At the above-mentioned defective that exists in the prior art, the utility model provides a kind of new czochralski crystal growing furnace combination crucible, its long service life, and production cost is low.
The utility model is achieved by the following technical solution: a kind of czochralski crystal growing furnace is with making up crucible, the crucible body that comprises the crucible holder and be located at crucible holder top and be mated, its special character is: described crucible body comprises the cylindrical shell that superposed carbon/carbon composite cylindraceous is made and is positioned at the base of the bowl-shape graphite material that matches with described cylindrical shell lower end the bottom that described base is along circumferentially being divided at least two lobes.
The crucible body adopts split-type structural in the utility model, wherein shell portion adopts carbon/carbon composite to make, global formation, carbon/carbon composite intensity height, can improve the work-ing life of crucible greatly, because do not open lobe, circumferential direction does not have the corrosion joint face, thereby has improved greatly its work-ing life simultaneously; Base adopts graphite material to make, and the processability of graphite is good, only need get final product machine-shaping than the thin plate material, can save material and cost greatly.
For the seam crossing that prevents crucible is subjected to erosion, the loss of SiO2 and Si steam, shorten pot life, is equipped with high purity graphite paper along crucible body inner side-wall in the described crucible body.Because graphite paper purity height can not corrode cylindrical shell and base, has also played provide protection.
The thickness of described graphite paper is generally 0.3mm～3mm, preferred 1mm.
In the utility model, being connected between cylindrical shell and the base can be adopted multiple structure formation, consider the simple and reliability of structure design, can adopt following structure formation: the inboard, upper edge of described base has step-like mating surface, and the lower end of described cylindrical shell cooperates with this step-like mating surface.
Because carbon/carbon composite and isotropic graphite thermal expansivity are inconsistent, so leave suitable gap between the step mating surface of the external diameter of cylindrical shell and base, this gap is 0.05mm～3mm.
Also can adopt following structure formation between cylindrical shell and the base: the outside, upper edge of described base has step-like mating surface, and the lower end of described cylindrical shell cooperates with the upper edge of base, is provided with the strengthening ring that cooperates with base stage scalariform mating surface in the outside of cylindrical shell.
Equally, under the situation that adopts said structure, also should leave suitable gap between the external diameter of cylindrical shell and the internal diameter of strengthening ring, this gap is 0.05mm～3mm.
In order further to unload swelling heat stress, offer a groove that connects its axial length on the sidewall of cylindrical shell.For same purpose, offer at least one groove that does not connect its axial length on the sidewall of cylindrical shell, guarantee that the swelling heat stress energy in time unloads, and guarantees the bulk strength of cylindrical shell simultaneously on the one hand.
The utility model is by being designed to split-type structural with the crucible body, and adopts carbon/carbon composite to make global formation, the intensity height of crucible, long service life at its shell portion; Simultaneously, carbon/carbon composite is higher more than 2.5 times than isotropic graphite intensity, compare former graphite material can attenuate thickness about half, saved material greatly; Secondly, do not open at cylindrical shell under the situation of lobe, circumferential direction does not have the corrosion joint face, can improve greatly its work-ing life; And base only need get final product machine-shaping than the thin plate material owing to use the good isotropic graphite material of processability to make, and processing is simple, and compares primary structure and saved material and cost greatly.
Description of drawings
Fig. 1 is the structural representation of the utility model embodiment 1;
Fig. 2 is the schematic top plan view of base among the embodiment 1;
Fig. 3 is the structural representation of embodiment 2;
Fig. 4 is the front view that sidewall has the cylindrical shell of the groove that connects axial length;
Fig. 5 is the vertical view of Fig. 4;
Fig. 6 is the front view that sidewall has the cylindrical shell of the groove that does not connect axial length;
Fig. 7 is the vertical view of Fig. 6;
Fig. 8 is the structural representation of the plumbago crucible of prior art;
Fig. 9 is a czochralski crystal growing furnace charging synoptic diagram;
Among the figure, the 1st, crucible holder, the 2nd, base, the 3rd, cylindrical shell, the 4th, strengthening ring, the 5th, graphite paper, the 6th, silicon material, the 7th, plumbago crucible, the 8th, quartz crucible, the 9, the 10th, groove.
Embodiment
Embodiment below by indefiniteness also is further described the utility model in conjunction with the accompanying drawings:
As Fig. 1, Fig. 2, Fig. 4, shown in Figure 5, a kind of czochralski crystal growing furnace comprises crucible holder 1 and the crucible body that is located at crucible holder 1 top and is mated with the combination crucible, described crucible body comprises superposed cylindrical shell cylindraceous 3 and is positioned at the bowl-shape base 2 of bottom, wherein, cylindrical shell 3 is made global formation by carbon/carbon composite.Base 2 adopts isotropic graphite to make.The inboard, upper edge of base 2 has step-like mating surface, and the lower end of cylindrical shell 3 cooperates with this step-like mating surface, and cylindrical shell 3 is installed the location.For preventing that the thermal expansion of silicon material from making base 2 spallings, base 2 can be processed into the multi-petal shape formula, and two lobes are above to get final product preferred three lobes.Figure 2 shows that three valve structures in the present embodiment, evenly be divided into three lobes along circumference.The whole high purity graphite paper 5 of laying in the crucible body, the foreign matter content of graphite paper is less than 300ppm, thickness 0.3～3mm, and preferred 1mm because graphite paper purity height can not corrode cylindrical shell and base, has also played provide protection, can be repeatedly used.
In addition, because carbon/carbon composite and isotropic graphite thermal expansivity are inconsistent, so should leave suitable gap between the step mating surface of the external diameter of cylindrical shell 3 and base 2, this gap is generally 0.05～3mm, preferably 0.8mm.
In order effectively to unload swelling heat stress, cylindrical shell 3 also can be offered the groove 9 of its axial length of perforation at cylinder lateral wall after moulding, as shown in Figure 4 and Figure 5, and in order to the unloading thermal expansion stress; Or offer at least one groove 10 that does not connect its axial length at cylinder lateral wall, as Fig. 6, shown in Figure 7 be on cylinder lateral wall, to offer two grooves 10 that opening is opposite.
Other parts of present embodiment adopt prior art, do not repeat them here.
As shown in Figure 3, present embodiment is substantially the same manner as Example 1, and difference is: present embodiment middle cylinder body 3 is different with syndeton between the base 2.In the present embodiment, the outside, the upper edge of base 2 has step-like mating surface, and the lower end of described cylindrical shell 3 cooperates with the upper edge of base 2, is provided with the strengthening ring 4 that cooperates with base 2 step-like mating surfaces in the outside of cylindrical shell 3, positions by 4 pairs of cylindrical shells 3 of strengthening ring.The material of strengthening ring 4 is a carbon/carbon composite.
Other parts of present embodiment are substantially the same manner as Example 1, do not repeat them here.
In the present embodiment, because carbon/carbon composite and isotropic graphite thermal expansivity are inconsistent, so should leave suitable gap between the internal diameter of the external diameter of cylindrical shell 3 and strengthening ring 4, this gap is generally 0.05～3mm, preferably 0.8mm.
The foregoing description only is used for explanation of the present invention, is not limitation ot it, and those skilled in the art can also carry out various equivalences to above-mentioned embodiment according to conception of the present invention and change and modification.
Claims (10)
1. a czochralski crystal growing furnace is with making up crucible, comprise crucible holder (1) and the crucible body that is located at crucible holder (1) top and is mated, it is characterized in that: described crucible body comprises the cylindrical shell (3) that superposed carbon/carbon composite cylindraceous is made and is positioned at the base (2) of the bowl-shape graphite material that matches with described cylindrical shell (3) lower end the bottom that described base (2) is along circumferentially being divided at least two lobes.
2. czochralski crystal growing furnace according to claim 1 is characterized in that: be equipped with high purity graphite paper (5) along crucible body inner side-wall in the described crucible body with the combination crucible.
3. czochralski crystal growing furnace according to claim 2 is with making up crucible, and it is characterized in that: the thickness of described graphite paper (5) is 0.3mm～3mm.
4. czochralski crystal growing furnace according to claim 3 is with making up crucible, and it is characterized in that: the thickness of described graphite paper (5) is 1mm.
5. according to claim 1 or 2 or 3 or 4 described czochralski crystal growing furnaces combination crucible, it is characterized in that: the inboard, upper edge of described base (2) has step-like mating surface, and the lower end of described cylindrical shell (3) cooperates with this step-like mating surface.
6. czochralski crystal growing furnace according to claim 5 is characterized in that with the combination crucible: the gap of leaving 0.05mm～3mm between the step mating surface of the external diameter of cylindrical shell (3) and base (2).
7. according to claim 1 or 2 or 3 or 4 described czochralski crystal growing furnaces combination crucible, it is characterized in that: the outside, upper edge of described base (2) has step-like mating surface, the lower end of described cylindrical shell (3) cooperates with the upper edge of base (2), is provided with the strengthening ring (4) that cooperates with the step-like mating surface of base (2) in the outside of cylindrical shell (3).
8. czochralski crystal growing furnace according to claim 7 is characterized in that with the combination crucible: the gap of leaving 0.05mm-3mm between the internal diameter of the external diameter of cylindrical shell (3) and strengthening ring (4).
9. czochralski crystal growing furnace according to claim 1 is characterized in that: offer a groove that connects its axial length on the sidewall of cylindrical shell (3) with the combination crucible.
According to claim 1 or 9 described czochralski crystal growing furnaces with the combination crucibles, it is characterized in that: offer at least one groove that does not connect its axial length on the sidewall of cylindrical shell (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206912060U CN202030857U (en) | 2010-12-30 | 2010-12-30 | Combined crucible for monocrystal pulling furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206912060U CN202030857U (en) | 2010-12-30 | 2010-12-30 | Combined crucible for monocrystal pulling furnace |
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| Publication Number | Publication Date |
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| CN202030857U true CN202030857U (en) | 2011-11-09 |
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| CN2010206912060U Expired - Fee Related CN202030857U (en) | 2010-12-30 | 2010-12-30 | Combined crucible for monocrystal pulling furnace |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102296358A (en) * | 2011-06-01 | 2011-12-28 | 湖南金博复合材料科技有限公司 | Combination method for carbon material combined crucible, and combined crucible thereof |
| CN103614767A (en) * | 2013-11-07 | 2014-03-05 | 镇江大成新能源有限公司 | Three-part crucible |
| CN103668437A (en) * | 2012-08-30 | 2014-03-26 | 上海杰姆斯电子材料有限公司 | Crucible used for preparing monocrystalline silicon by czochralski method |
| CN107227493A (en) * | 2017-07-11 | 2017-10-03 | 江苏星特亮科技有限公司 | Assembled crucible |
| CN109898134A (en) * | 2017-12-07 | 2019-06-18 | 有研半导体材料有限公司 | A kind of direct-pulling single crystal furnace thermal field graphite crucible |
| CN111373080A (en) * | 2017-09-29 | 2020-07-03 | 胜高股份有限公司 | Crucible supporting base, quartz crucible supporting device, and method for producing single crystal silicon |
-
2010
- 2010-12-30 CN CN2010206912060U patent/CN202030857U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102296358A (en) * | 2011-06-01 | 2011-12-28 | 湖南金博复合材料科技有限公司 | Combination method for carbon material combined crucible, and combined crucible thereof |
| CN102296358B (en) * | 2011-06-01 | 2014-03-26 | 湖南金博复合材料科技有限公司 | Combination method for carbon material combined crucible, and combined crucible thereof |
| CN103668437A (en) * | 2012-08-30 | 2014-03-26 | 上海杰姆斯电子材料有限公司 | Crucible used for preparing monocrystalline silicon by czochralski method |
| CN103614767A (en) * | 2013-11-07 | 2014-03-05 | 镇江大成新能源有限公司 | Three-part crucible |
| CN107227493A (en) * | 2017-07-11 | 2017-10-03 | 江苏星特亮科技有限公司 | Assembled crucible |
| CN107227493B (en) * | 2017-07-11 | 2023-11-24 | 江苏星特亮科技有限公司 | Assembled crucible |
| CN111373080A (en) * | 2017-09-29 | 2020-07-03 | 胜高股份有限公司 | Crucible supporting base, quartz crucible supporting device, and method for producing single crystal silicon |
| CN111373080B (en) * | 2017-09-29 | 2022-02-22 | 胜高股份有限公司 | Crucible supporting base, quartz crucible supporting device, and method for producing single crystal silicon |
| US11598019B2 (en) | 2017-09-29 | 2023-03-07 | Sumco Corporation | Crucible-supporting pedestal, quartz crucible-supporting device, and method for producing silicon single crystal |
| CN109898134A (en) * | 2017-12-07 | 2019-06-18 | 有研半导体材料有限公司 | A kind of direct-pulling single crystal furnace thermal field graphite crucible |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111109 Termination date: 20171230 |